Cutting device with smoke dust filtering function

Abstract

The utility model discloses a cutting device with a smoke dust filtering function, belongs to the technical field of wafer cutting, and aims to solve the problems that smoke dust generated by cutting not only pollutes the environment, but also affects the health of workers, and cutting scraps are easily attached to a wafer to affect the quality of the wafer. The top face of the base is provided with an open groove and fixedly connected with a vertical plate. According to the wafer cutting device, wafer raw materials are fixed through movement of the L-shaped clamping plate, smoke dust is sucked through the exhaust fan and filtered through the activated carbon filter plate, the filtered smoke dust enters the water tank, is purified through purification water and is discharged through the exhaust hole, cutting chippings collected in the dust collection frame are shoveled through the collection groove and the shovel plate, and the cutting chippings are collected through the dust collection frame. And chippings fall into the collecting box through the collecting groove to be collected, so that the problems that smoke dust generated by cutting pollutes the environment and affects the health of workers, and the cutting chippings are easily attached to the wafer to affect the quality of the wafer are effectively solved.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer cutting, and in particular relates to a cutting device with a smoke and dust filtering function. Background Art

[0002] Semiconductor refers to materials whose electrical conductivity is between conductors and insulators at room temperature. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. With the development of society, more and more semiconductor chips are used in various occasions, the demand for chips is increasing, and the quality requirements for chips are getting higher and higher. In the front-end process of chip manufacturing, the chip embryo needs to be cut to form a disc-shaped wafer. The cutting process has a very large impact on chip efficiency and chip quality.

[0003] Semiconductor wafer cutting machines are often used when semiconductor wafers need to be cut. Currently, most semiconductor wafer cutting machines tend to generate a lot of smoke and dust during the cutting process. In addition, the air circulation inside the workshop is poor, which not only pollutes the environment but also greatly affects the health of the workers. The debris generated by the cutting is easy to adhere to the wafer, affecting the quality of the wafer cutting.

[0004] Therefore, a cutting device with a smoke filtering function is needed to solve the problems in the prior art that the smoke generated by cutting not only pollutes the environment but also affects the health of workers, and the cutting debris easily adheres to the wafer and affects the quality of the wafer. Utility Model Content

[0005] The purpose of the utility model is to provide a cutting device with a smoke filtering function to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a cutting device with a smoke and dust filtering function comprises a base, the top surface of the base is fixedly connected to a fixed baffle, the top surface of the base is provided with a slot, the top surface of the base is fixedly connected to a vertical plate, a cylinder is fixedly connected at the center of the outer wall of one end of the vertical plate, a servo motor is fixedly connected at the outer wall of one side of the base corresponding to the slot, a reciprocating threaded rod is coaxially fixedly connected to the output end of the servo motor, an end of the reciprocating threaded rod away from the servo motor rotates through the outer wall of one side of the base and is rotatably connected to the inner wall of the slotted side, a moving rod is threadedly connected to the outer surface of the reciprocating threaded rod, a fixing plate is fixedly connected to the top surface of one end of the moving rod, an electric push rod is fixedly connected to the bottom surface of the fixing plate, the output end of the electric push rod is coaxially fixedly connected to the mounting plate, the bottom surface of the mounting plate is fixedly connected to the driving motor, the output end of the driving motor is coaxially fixedly connected to the cutting blade, a dust suction mechanism is provided at the output end of the cylinder, and a collecting mechanism is provided inside the base.

[0007] It should be noted in the scheme that the dust suction mechanism includes a dust suction frame coaxially fixedly connected to the output end of the cylinder, an activated carbon filter plate is fixedly provided on the inner wall of the dust suction frame, two parallel connecting columns are fixedly connected to the bottom of the outer wall at one end of the activated carbon filter plate, the two connecting columns are fixedly connected to the same L-shaped card plate at one end away from the activated carbon filter plate, a plurality of evenly distributed air holes are provided on both sides of the end of the dust suction frame close to the cylinder, two parallel distributed exhaust fans are arranged at the outer wall of one end of the dust suction frame corresponding to the air holes, the outer walls of the two exhaust fans at one end away from the dust suction frame are fixedly connected with bellows, and a shovel plate is fixedly connected to the outer wall of the transverse section of the L-shaped card plate at one end close to the connecting column.

[0008] It is further worth explaining that the dust suction mechanism also includes two water tanks distributed in parallel, the outer walls of one end of the two water tanks are fixedly connected to the outer wall of one end of the base and correspond to two exhaust fans respectively, and the end of the bellows away from the exhaust fan passes through the top surface of the water tank and extends to the inner cavity of the water tank, and a plurality of exhaust holes distributed in a circular pattern are provided on one side of the top surface of the water tank.

[0009] It should be further explained that the collection mechanism includes a collection groove and a through groove, the collection groove is opened on the top surface of the base, the through groove is opened on the outer wall of one side of the base corresponding to the collection groove, a collection box is movably arranged in the collection groove, and the outer wall of one end of the collection box passes through the through groove and is fixedly connected with a handle.

[0010] As a preferred embodiment, the fixed baffle is configured as an L-shaped structure and cooperates with the L-shaped clamping plate, and the outer surface of the collection box is slidably connected to the collection groove and the inner wall of the through groove.

[0011] As a preferred implementation, the bottom surface of the dust collection frame is slidably connected to the top surface of the base, and the bottom surface of the L-shaped card plate is in contact with the top surface of the base.

[0012] Compared with the prior art, the cutting device with smoke filtering function provided by the utility model has at least the following beneficial effects:

[0013] (1) Through the action of the dust suction mechanism, the dust suction frame moves to drive the L-shaped card plate to move to fix the wafer raw material, and the exhaust fan absorbs the smoke generated by cutting, and the activated carbon filter plate is used for adsorption and filtration. The filtered smoke enters the water tank through the bellows, and is purified by purified water. The filtered and purified smoke is discharged through the exhaust hole. It is easy to use and has a good absorption and filtration effect, which effectively avoids the problem that the smoke generated by cutting not only pollutes the environment but also affects the health of workers.

[0014] (2) By setting a collection groove, when the dust collection frame is reset, the shovel plate shovels the cutting debris collected in the dust collection frame, and the debris falls into the collection box through the collection groove for collection and concentration. After a period of collection, the collection box is taken out by pulling the handle, and the collected debris is cleaned. The operation is simple and effectively avoids the problem that the cutting debris is easy to adhere to the chip and affect the chip quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the top view of the base structure of the utility model;

[0017] Figure 3 It is a schematic diagram of the side cross-sectional structure of the dust collection frame of the utility model;

[0018] Figure 4 It is a schematic diagram of the side cross-sectional structure of the water tank of the utility model.

[0019] In the figure: 1. base; 2. fixed baffle; 3. slot; 4. vertical plate; 5. cylinder; 6. dust suction mechanism; 61. dust suction frame; 62. activated carbon filter plate; 63. connecting column; 64. L-shaped card plate; 65. vent; 66. exhaust fan; 67. bellows; 68. shovel plate; 69. water tank; 610. exhaust hole; 7. collection mechanism; 71. collection trough; 72. through groove; 73. collection box; 74. handle; 8. servo motor; 9. reciprocating threaded rod; 10. moving rod; 11. fixed plate; 12. electric push rod; 13. mounting plate; 14. drive motor; 15. cutting blade. DETAILED DESCRIPTION

[0020] The present invention will be further described below in conjunction with the embodiments.

[0021] See also Figure 1-Figure 4The utility model provides a cutting device with a smoke and dust filtering function, including a base 1, a fixed baffle 2 is fixedly connected to the top surface of the base 1, a slot 3 is opened on the top surface of the base 1, a vertical plate 4 is fixedly connected to the top surface of the base 1, a cylinder 5 is fixedly connected to the center of the outer wall of one end of the vertical plate 4, a servo motor 8 is fixedly connected to the outer wall of one side of the base 1 corresponding to the slot 3, a reciprocating threaded rod 9 is coaxially fixedly connected to the output end of the servo motor 8, the end of the reciprocating threaded rod 9 away from the servo motor 8 rotates through the outer wall of one side of the base 1 and is rotatably connected to the inner wall of one side of the slot 3, a moving rod 10 is threadedly connected to the outer surface of the reciprocating threaded rod 9, a fixed plate 11 is fixedly connected to the top surface of one end of the moving rod 10, an electric push rod 12 is fixedly connected to the bottom surface of the fixed plate 11, an output end of the electric push rod 12 is coaxially fixedly connected to a mounting plate 13, a driving motor 14 is fixedly connected to the bottom surface of the mounting plate 13, a cutting blade 15 is coaxially fixedly connected to the output end of the driving motor 14, a dust suction mechanism 6 is arranged at the output end of the cylinder 5, and a collecting mechanism 7 is arranged inside the base 1.

[0022] Further Figure 1 , Figure 3 and Figure 4 As shown, it is worth specifically explaining that the dust suction mechanism 6 includes a dust suction frame 61 coaxially fixedly connected to the output end of the cylinder 5, an activated carbon filter plate 62 is fixedly provided on the inner wall of the dust suction frame 61, two parallel connecting columns 63 are fixedly connected to the bottom of the outer wall at one end of the activated carbon filter plate 62, and the ends of the two connecting columns 63 away from the activated carbon filter plate 62 are fixedly connected to the same L-shaped card plate 64, a plurality of evenly distributed air holes 65 are provided on both sides of the end of the dust suction frame 61 close to the cylinder 5, two parallel distributed exhaust fans 66 are arranged at the outer wall of one end of the dust suction frame 61 corresponding to the air holes 65, the outer walls of the ends of the two exhaust fans 66 away from the dust suction frame 61 are fixedly connected to bellows 67, and a shovel plate 68 is fixedly connected to the outer wall of the transverse section of the L-shaped card plate 64 close to the connecting column 63, the wafer raw material is fixed by moving the L-shaped card plate 64, and the smoke generated by cutting is sucked by the exhaust fan 66.

[0023] Further Figure 3 and Figure 4 As shown, it is worth specifying that the dust collection mechanism 6 also includes two water tanks 69 distributed in parallel, the outer walls of one end of the two water tanks 69 are fixedly connected to the outer wall of one end of the base 1 and respectively correspond to the two exhaust fans 66, and the end of the bellows 67 away from the exhaust fan 66 penetrates the top surface of the water tank 69 and extends to the inner cavity of the water tank 69. A plurality of circumferentially distributed exhaust holes 610 are provided on one side of the top surface of the water tank 69, and the filtered smoke enters the water tank 69 and is purified by purified water, and the purified smoke is discharged through the exhaust holes 610.

[0024] Further Figure 1 and Figure 2As shown, it is worth explaining in detail that the collecting mechanism 7 includes a collecting groove 71 and a through groove 72. The collecting groove 71 is opened on the top surface of the base 1, and the through groove 72 is opened on the outer wall of the base 1 on one side corresponding to the collecting groove 71. A collecting box 73 is movably arranged in the collecting groove 71. The outer wall of one end of the collecting box 73 passes through the through groove 72 and is fixedly connected with a handle 74. The cutting debris falls into the interior of the collecting box 73 through the collecting groove 71, and the collecting box 73 is taken out for cleaning by the handle 74.

[0025] Further Figure 1 and Figure 2 As shown, it is worth explaining in detail that the fixed baffle 2 is set to an L-shaped structure and cooperates with the L-shaped clamping plate 64, which is convenient for fixing the chip raw material, and the outer surface of the collection box 73 is slidingly connected to the inner wall of the collection groove 71 and the through groove 72, which is convenient for the staff to take out the collection box 73 and clean it.

[0026] Further Figure 1 As shown, it is worth explaining in detail that the bottom surface of the dust collection frame 61 is slidably connected to the top surface of the base 1 to improve the mobility of the dust collection frame 61 on the base 1, and the bottom surface of the L-shaped clamping plate 64 is in contact with the top surface of the base 1 to improve the fixation of the wafer raw material.

[0027] In summary: when the cutting device is in use, the staff first places the wafer raw material on the top surface of the base 1 between the fixed baffle 2 and the L-shaped card plate 64, turns on the cylinder 5 to push the dust frame 61 to move, and the movement of the dust frame 61 drives the L-shaped card plate 64 to move to fix the wafer raw material, and then turns on the exhaust fan 66, the servo motor 8, the electric push rod 12 and the drive motor 14. With the cooperation of the servo motor 8, the electric push rod 12 and the drive motor 14, the wafer raw material is cut. At this time, the smoke generated by the cutting is absorbed by the dust frame 61 under the action of the exhaust fan 66, and the absorbed smoke is filtered by the activated carbon filter plate 62 to adsorb and filter tiny particles. The filtered smoke is discharged into the water tank 69 through the bellows 67, and the smoke is further purified by the purified water in the water tank 69. The filtered and purified smoke is discharged through the exhaust hole 610, so as to filter the smoke, effectively avoiding the problem that the smoke generated by the cutting not only pollutes the environment but also affects the health of the workers.

[0028] The exhaust fan 66 absorbs the smoke and dust while adsorbing the debris generated by cutting. The activated carbon filter plate 62 blocks the debris. After the cutting work is completed, the exhaust fan 66 is turned off. At this time, the adsorbed debris falls between the activated carbon filter plate 62 and the L-shaped card plate 64. The cylinder 5 is turned on to drive the dust suction frame 61 to reset. While the dust suction frame 61 moves, the debris is shoveled by the shovel plate 68 and falls into the collection box 73 through the collection groove 71. After a period of collection, the staff pulls the handle 74 to take the collection box 73 out of the base 1 to clean the collected debris, effectively avoiding the problem of cutting debris easily adhering to the wafer and affecting the wafer quality.

[0029] The cylinder 5, the exhaust fan 66, the servo motor 8, the electric push rod 12 and the drive motor 14 can be purchased on the market. The cylinder 5, the exhaust fan 66, the servo motor 8, the electric push rod 12 and the drive motor 14 are equipped with a power supply, which is a mature technology in this field and has been fully disclosed, so they are not repeated in the specification.

[0030] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A cutting device with a smoke filtering function, comprising a base (1), a fixed baffle (2) being fixedly connected to the top surface of the base (1), a groove (3) being provided on the top surface of the base (1), and a vertical plate (4) being fixedly connected to the top surface of the base (1), characterized in that: A cylinder (5) is fixedly connected at the center of the outer wall at one end of the vertical plate (4); a servo motor (8) is fixedly connected at the outer wall corresponding to the slot (3) on one side of the base (1); a reciprocating threaded rod (9) is coaxially fixedly connected to the output end of the servo motor (8); an end of the reciprocating threaded rod (9) away from the servo motor (8) rotates through the outer wall of one side of the base (1) and is rotatably connected to the inner wall of one side of the slot (3); a moving rod (10) is threadedly connected to the outer surface of the reciprocating threaded rod (9); and the moving rod (10) 10) A fixing plate (11) is fixedly connected to the top surface of one end, an electric push rod (12) is fixedly connected to the bottom surface of the fixing plate (11), an output end of the electric push rod (12) is coaxially fixedly connected to a mounting plate (13), a driving motor (14) is fixedly connected to the bottom surface of the mounting plate (13), a cutting blade (15) is coaxially fixedly connected to the output end of the driving motor (14), a dust suction mechanism (6) is provided at the output end of the cylinder (5), and a collecting mechanism (7) is provided inside the base (1).

2. The cutting device with smoke filtering function according to claim 1, characterized in that: The dust suction mechanism (6) comprises a dust suction frame (61) coaxially fixedly connected to the output end of the cylinder (5); an activated carbon filter plate (62) is fixedly clamped on the inner wall of the dust suction frame (61); two parallel connecting columns (63) are fixedly connected to the bottom of the outer wall of one end of the activated carbon filter plate (62); the ends of the two connecting columns (63) away from the activated carbon filter plate (62) are fixedly connected to the same L-shaped clamping plate (64); a plurality of evenly distributed ventilation holes (65) are provided on both sides of the end of the dust suction frame (61) close to the cylinder (5); two parallelly distributed exhaust fans (66) are arranged at the outer wall of one end of the dust suction frame (61) corresponding to the ventilation holes (65); the outer walls of the ends of the two exhaust fans (66) away from the dust suction frame (61) are fixedly connected to a bellows (67); and a shovel plate (68) is fixedly connected to the outer wall of the transverse section of the L-shaped clamping plate (64) at one end close to the connecting column (63).

3. The cutting device with smoke filtering function according to claim 2, characterized in that: The dust collecting mechanism (6) further comprises two water tanks (69) arranged in parallel, the outer walls of one end of the two water tanks (69) being fixedly connected to the outer wall of one end of the base (1) and respectively corresponding to the two exhaust fans (66), the end of the bellows (67) away from the exhaust fan (66) passing through the top surface of the water tank (69) and extending to the inner cavity of the water tank (69), and a plurality of circumferentially distributed exhaust holes (610) are provided on one side of the top surface of the water tank (69).

4. The cutting device with smoke filtering function according to claim 3, characterized in that: The collecting mechanism (7) comprises a collecting groove (71) and a through groove (72); the collecting groove (71) is provided on the top surface of the base (1); the through groove (72) is provided on the outer wall of one side of the base (1) corresponding to the collecting groove (71); a collecting box (73) is movably arranged in the collecting groove (71); the outer wall of one end of the collecting box (73) passes through the through groove (72) and is fixedly connected to a handle (74).

5. The cutting device with smoke filtering function according to claim 4, characterized in that: The fixed baffle (2) is configured as an L-shaped structure and cooperates with the L-shaped clamping plate (64); the outer surface of the collection box (73) is slidably connected to the inner wall of the collection groove (71) and the through groove (72).

6. The cutting device with smoke filtering function according to claim 5, characterized in that: The bottom surface of the dust collection frame (61) is slidably connected to the top surface of the base (1), and the bottom surface of the L-shaped clamping plate (64) is in contact with the top surface of the base (1).

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