Photomask plate transportation bottom plate beneficial to friction reduction

Abstract

The utility model discloses a photomask plate transportation bottom plate beneficial to friction reduction. The photomask plate transportation bottom plate comprises a plate body, photomask plate supporting units and limiting baffles. The photomask plate supporting unit comprises a plurality of supporting frames. Each supporting frame comprises a frame body, an outer supporting plate, an inner supporting plate, a limiting block and a wear-resisting supporting piece. The wear-resistant supporting piece comprises a supporting main body and a supporting point, the supporting main body is used for being connected with the inner supporting plate, the supporting point is arranged at the end of one end of the supporting main body, and the supporting point is arranged on the side, opposite to the plate body, of the inner supporting plate. And only the supporting points are in contact with the photomask plate so as to reduce the friction between the transportation plate body and the photomask plate. Therefore, according to the photomask plate transportation bottom plate beneficial to friction reduction, the friction force borne by the photomask plate in the transportation process can be greatly reduced, and therefore the adverse effects of static electricity, friction damage and other factors on the photomask plate are reduced.

Description

Technical Field

[0001] The utility model relates to the field of manufacturing a mask plate transport box, in particular to a mask plate transport bottom plate which is beneficial to reducing friction. Background Art

[0002] During the use of the mask plate transport box, the plate body is the port connected to the machine and always supports the existence of the mask plate. In the prior art, the plate body is generally made of one material throughout, and there is a large area of ​​contact between the plate body and the mask plate to ensure the transportation stability of the mask plate. The large area of ​​contact between the plate body and the mask plate results in a high friction coefficient between the plate body and the mask plate, making it difficult to meet the basic high cleanliness and anti-static requirements of the semiconductor industry. Summary of the invention

[0003] In view of this, the utility model provides a mask plate transport bottom plate which can reduce the contact area between the mask plate and the plate body and is beneficial to reducing friction.

[0004] A mask plate transport base plate that is conducive to reducing friction, comprising a plate body, a mask plate support unit fixedly arranged on one side of the plate body, and at least one limit baffle fixedly connected to the plate body. The mask plate support unit comprises a plurality of support frames fixedly connected to the plate body. The plurality of support frames are symmetrically arranged on both sides of the plate body, and each of the support frames comprises a frame body, an outer support plate fixedly arranged on the side of the frame body close to the edge of the plate body, an inner support plate corresponding to the outer support plate and arranged on the side of the frame body facing away from the edge of the plate body, a limit block fixedly arranged on the side of the outer support plate facing the inner support plate, and a wear-resistant support member fixedly connected to one end of the inner support plate. The wear-resistant support member includes a support body for connecting with the inner support plate, and a support point arranged at one end of the support body, and the support point is arranged on the side of the inner support plate opposite to the plate body, so that when the mask plate transport base plate which is conducive to reducing friction transports the mask plate, only the support point contacts the mask plate to reduce the friction between the plate body and the mask plate.

[0005] Furthermore, each of the support points is arranged at one end of the inner support plate close to the corner of the plate body.

[0006] Furthermore, the frame body is connected to the outer support plate and the inner support plate in a U-shape, and the height of the outer support plate is higher than that of the inner support plate.

[0007] Furthermore, the limit block is a square structure, and the limit block is fixedly arranged on a side of the outer support plate facing the inner support plate.

[0008] Furthermore, a height difference between the limiting block and the inner supporting plate is greater than a thickness of the transported mask plate.

[0009] Furthermore, the limit baffle is fixedly arranged on the plate body perpendicular to the arrangement direction of the support frame, and each of the limit baffles includes a mounting seat body and a baffle body.

[0010] Furthermore, the mounting seat body is in the shape of a triangular prism.

[0011] Furthermore, a reinforcing rib structure is provided on one side where the inner support plate is connected to the plate body, and on one side where the limit block is connected to the outer support plate.

[0012] Compared with the prior art, the utility model provides a mask plate transport base plate that is conducive to reducing friction, including a plate body, a mask plate support unit fixedly arranged on one side of the plate body, and at least one limit baffle fixedly connected to the plate body. The mask plate support unit includes a plurality of support frames fixedly connected to the plate body. The plurality of support frames are symmetrically arranged on both sides of the plate body, and each of the support frames includes a frame body, an outer support plate fixedly arranged on the side of the frame body close to the edge of the plate body, an inner support plate corresponding to the outer support plate and arranged on the side of the frame body facing away from the edge of the plate body, a limit block fixedly arranged on the side of the outer support plate facing the inner support plate, and a wear-resistant support member fixedly connected to one end of the inner support plate. The wear-resistant support member includes a support body for connecting with the inner support plate, and a support point arranged at one end of the support body, and the support point is arranged on the side of the inner support plate opposite to the plate body. When the mask plate transporting bottom plate that is conducive to reducing friction transports the mask plate, only the support point contacts the mask plate to reduce the friction between the transporting plate body and the mask plate. Therefore, the mask plate transporting bottom plate that is conducive to reducing friction can greatly reduce the friction force to which the mask plate is subjected during transportation, thereby reducing the adverse effects of factors such as static electricity and friction damage on the mask plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 A schematic structural diagram of a mask plate transport base plate provided by the utility model which is beneficial to reducing friction.

[0014] Figure 2 for Figure 1 A schematic structural diagram of a mask plate supporting unit of a mask plate transport base plate which is beneficial for reducing friction.

[0015] Figure 3 for Figure 1A partial enlarged schematic diagram of the mask plate transport base at position A, which is helpful in reducing friction. DETAILED DESCRIPTION

[0016] The following is a further detailed description of the specific embodiments of the present invention. It should be understood that the description of the present invention herein is not intended to limit the protection scope of the present invention.

[0017] like Figures 1 to 3 As shown, it is a schematic diagram of the structure of a light axis plate transport plate body that is conducive to reducing friction provided by the utility model. The light mask plate transport base plate that is conducive to reducing friction includes a plate body 10, a light mask plate support unit 20 arranged on one side of the plate body 10, and at least one limit baffle 30 fixedly connected to the plate body 10 and used to limit the light mask plate. It is conceivable that the light mask plate transport base plate that is conducive to reducing friction should also include some other functional components, such as connection components, fastening components, etc., which are all existing technologies known to those skilled in the art and will not be described one by one here.

[0018] The plate body 10 may be a square plate body structure, and its size may be specifically set according to the size of the mask plate to be transported. The plate body 10 is the main load-bearing component of the mask plate transport box, and is also the connection part between the mask plate transport box and the machine. Therefore, it is conceivable that the plate body should also be provided with a connection component for connecting with the machine, and a connection component for connecting with the mask plate cover, etc. The plate body 10 itself is a prior art, and will not be described in detail again.

[0019] The mask plate supporting unit 20 is fixedly disposed on a side of the plate body 10 facing the mask plate. The mask plate supporting unit 20 includes a plurality of supporting frames 21 fixedly connected to the plate body 10 .

[0020] A plurality of support frames 21 are symmetrically arranged on both side edges of the plate body 10. Each support frame 21 includes a frame body 211, an outer support plate 212 fixedly arranged on the frame body 211 near the edge of the plate body 10, an inner support plate 213 corresponding to the outer support plate 212 and arranged on the frame body 211 facing away from the edge of the plate body 10, a stop block 214 fixedly arranged on the outer support plate 212 facing the inner support plate 213, and a wear-resistant support member 215 fixedly connected to one end of the inner support plate 213.

[0021] The frame 211 is used to place the transported mask plate on the plate body 10 to avoid static electricity, friction and other factors that are not conducive to the production of the mask plate caused by direct contact between the mask plate and the plate body 10. The frame 211 forms a U-shaped connection with the outer support plate 212 and the inner support plate 213 to facilitate the placement of the mask plate.

[0022] The outer support plate 212 and the inner support plate 213 are both square plates. The lengths of the outer support plate 212 and the inner support plate 213 are consistent with the length of the frame 211, and the height of the outer support plate 212 is higher than the height of the inner support plate 213. When the support frame 21 sets up the photomask plate, the inner support plate 213 plays a supporting role, and the outer support plate 212 surrounds the photomask plate inside, thereby forming protection. Preferably, a plurality of reinforcing ribs can be added at the connection between the inner support plate 213 and the plate body 10 to ensure the reliability of the connection between the support frame 21 and the plate body 10.

[0023] The limit block 214 is fixedly arranged on the side of the outer support plate 212 facing the inner support plate 213. The limit block 214 can be a square body structure, which is used to limit the lateral displacement of the transported mask plate, that is, the displacement perpendicular to the arrangement direction of the frame 211 arranged on the same side of the plate body 10, so as to ensure the stability of the mask plate during transportation. Since the inner support plate 213 is used as a support plate when transporting the mask plate, and the outer support plate 212 is mainly used for limiting and protection, the height difference between the limit block 214 and the inner support plate 213 should be greater than the thickness of the mask plate, so as to limit the lateral displacement of the mask plate. Preferably, a plurality of reinforcing rib structures can be added on the side where the limit block 214 is connected to the outer support plate 212 to ensure the connection stability between the limit block 214 and the outer support plate 212.

[0024] The wear-resistant support member 215 is an element that the mask plate transport bottom plate directly contacts with the mask plate, and the number of the wear-resistant support members 215 is set to match the number of the inner support plates 213. Each of the wear-resistant support members 215 is fixedly connected to the inner support plate 213. Each of the wear-resistant support members 215 includes a support body 2151 for connecting to the inner support plate 213, and a support point 2152 arranged at one end of the support body 2151. The support body 2151 can be a square plate structure to increase the connection area between the support body 2151 and the inner support plate 213, so that the connection between the support body 2151 and the inner support plate 213 is more reliable. The support point 2152 is fixedly arranged at one end of the support body 2151 facing the mask plate. The wear-resistant support member 215 can be made of peek material, that is, polyetheretherketone material. Peek material is a high-performance engineering plastic with a series of excellent physical and chemical properties. Its excellent wear resistance and self-lubricating properties enable the support point 2152 to greatly improve the service life of the light transport plate body when it contacts the mask plate, while effectively reducing the friction coefficient between the support point 2152 and the mask plate. At the same time, the support point 2152 is designed with a small point area, and when the mask plate is mounted on the mask plate transport base plate, the mask plate is directly in contact with the support point 2152 only on the side facing the plate body 10, thereby greatly reducing the contact area between the mask plate and the mask plate transport base plate, thereby reducing the friction coefficient between the support position and the mask plate, and reducing the risk of contamination and damage to the mask plate. Preferably, each of the support points 2152 is arranged at one end of the inner support plate 213 close to the corner of the plate body 10 to ensure that the support force on the mask plate transport box is balanced.

[0025] The photomask plate transport base plate is made of two materials throughout and is made by two-color molding. The plate body 10, the frame 211, the outer support plate 212, the inner support plate 213, the limit block 214, the support body 2151, and the limit baffle 30 are all made of PC material, that is, polycarbonate material. PC material has excellent mechanical properties and excellent dimensional stability to ensure the size and structural stability of the photomask plate transport base plate. The support point 2152 is made of high-performance special engineering plastic peek material to reduce the friction between the support point 2152 and the photomask plate. Before the plate body 10, the support frame 211, and the limit block 214 are injection molded, the wear-resistant support part 215 is pre-buried in the mold before injection molding.

[0026] The arrangement direction of the limit baffle 30 is perpendicular to the arrangement direction of the support frame 21, and is fixedly arranged on the plate body 10. The limit baffle 30 includes a mounting seat body 31 and a baffle body 32. The mounting seat body 31 is an inverted triangular prism to increase the connection area between the seat body 31 and the plate body 10 to ensure the connection reliability. The baffle body 32 is fixedly arranged on the edge of the mounting seat body 31 facing the mask plate to limit the displacement of the mask plate along the arrangement direction of the support frame 21.

[0027] Compared with the prior art, the utility model provides a mask plate transport base plate that is conducive to reducing friction, including a plate body 10, a mask plate support unit 20 fixedly arranged on one side of the plate body 10, and at least one limit baffle 30 fixedly connected to the plate body 10. The mask plate support unit 20 includes a plurality of support frames 21 fixedly connected to the plate body 10. The plurality of support frames 21 are symmetrically arranged on both sides of the plate body 10, and each of the support frames 21 includes a frame body 211, an outer support plate 212 fixedly arranged on the frame body 211 near the edge of the plate body 10, an inner support plate 213 corresponding to the outer support plate 212 and arranged on the frame body 211 facing away from the edge of the plate body 10, a limit block 214 fixedly arranged on the outer support plate 212 facing the inner support plate 213, and a wear-resistant support member 215 fixedly connected to one end of the inner support plate 213. The wear-resistant support member 215 includes a support body 2151 for connecting with the inner support plate 213, and a support point 2152 arranged at one end of the support body 2151, and the support point 2152 is arranged on the side of the inner support plate 213 opposite to the plate body 10. When the mask plate transporting bottom plate that is conducive to reducing friction transports the mask plate, only the support point 2151 contacts the mask plate to reduce the friction between the transporting plate body 10 and the mask plate. Therefore, the mask plate transporting bottom plate that is conducive to reducing friction can greatly reduce the friction force on the mask plate during transportation, thereby reducing the adverse effects of factors such as static electricity and friction damage on the mask plate.

[0028] The above are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modification, equivalent replacement or improvement within the spirit of the present invention are included in the scope of the claims of the present invention.

Claims

1. A mask plate transport base plate that is conducive to reducing friction, characterized in that: The mask plate transport base plate that is conducive to reducing friction includes a plate body, a mask plate support unit fixedly arranged on one side of the plate body, and at least one limit baffle fixedly connected to the plate body, the mask plate support unit includes a plurality of support frames fixedly connected to the plate body, the plurality of support frames are symmetrically arranged on both sides of the plate body, and each of the support frames includes a frame body, an outer support plate fixedly arranged on the frame body near the edge of the plate body, an inner support plate corresponding to the outer support plate and arranged on the frame body on the side away from the edge of the plate body. A support plate, a limit block fixedly arranged on the side of the outer support plate facing the inner support plate, and a wear-resistant support member fixedly connected to one end of the inner support plate, the wear-resistant support member includes a support body for connecting with the inner support plate, and a support point arranged at one end of the support body, the support point is arranged on the side of the inner support plate opposite to the plate body, so that when the mask plate transport base plate which is conducive to reducing friction transports the mask plate, only the support point contacts the mask plate to reduce the friction between the plate body and the mask plate.

2. A mask plate transporting base plate that is beneficial to reducing friction as claimed in claim 1, characterized in that: Each of the supporting points is arranged at one end of the inner supporting plate close to the corner of the plate body.

3. The mask plate transporting bottom plate that is beneficial to reducing friction as claimed in claim 1, characterized in that: The frame body is connected to the outer support plate and the inner support plate in a U shape, and the height of the outer support plate is higher than that of the inner support plate.

4. The mask plate transporting bottom plate that is beneficial to reducing friction as claimed in claim 1, characterized in that: The limiting block is a square structure, and the limiting block is fixedly arranged on a side of the outer supporting plate facing the inner supporting plate.

5. The mask plate transporting bottom plate that is beneficial to reducing friction as claimed in claim 1, characterized in that: A height difference between the limiting block and the inner supporting plate is greater than a thickness of the transported mask plate.

6. The mask plate transporting bottom plate that is beneficial to reducing friction as claimed in claim 1, characterized in that: The limit baffle is fixedly arranged on the plate body perpendicular to the arrangement direction of the support frame, and each of the limit baffles includes a mounting seat body and a baffle body.

7. A mask plate transporting bottom plate that is beneficial to reducing friction as claimed in claim 6, characterized in that: The mounting seat body is in the shape of a triangular prism.

8. The mask plate transporting bottom plate that is beneficial to reducing friction as claimed in claim 1, characterized in that: A reinforcing rib structure is provided on one side where the inner support plate is connected to the plate body, and on one side where the limit block is connected to the outer support plate.

Images