Molecular film supporting device

Abstract

The utility model provides a molecular film supporting device which comprises a plurality of micro-supporting structure units arranged on a substrate in an array mode, and each micro-supporting structure unit comprises a supporting cavity structure arranged on an upper material layer and a micro-well structure arranged on a lower material layer and corresponding to the supporting cavity structure; the supporting cavity structure comprises a pore channel structure and a plurality of fluid buffering structures which are arranged on the peripheral edge of the pore channel structure and communicated with the pore channel structure, the pore channel structure penetrates through the upper material layer, and the fluid buffering structures are arranged on the upper surface of the upper material layer but do not penetrate through the upper material layer; the molecular film support device has the technical effects of uniform film formation, higher stability and small film formation difference among the micro support structures, and solves the technical problems of poor uniformity and stability of molecular film formation caused by unreasonable structure of the support device in the prior art.

Description

Technical Field

[0001] The present application relates to the field of gene sequencing technology, and in particular to a molecular membrane support device. Background Art

[0002] Gene sequencing technology uses nanopores as biosensors and embeds them into insulating amphiphilic molecular membranes. When preparing the molecular membrane of a gene sequencing chip, a polar solvent, a non-polar solvent of an amphiphilic material, and a polar solvent are usually introduced into the film-forming area of ​​the gene sequencing chip in sequence, so that the non-polar solvent of the amphiphilic material is sandwiched between two layers of polar solvent to form a molecular membrane.

[0003] The amphiphilic molecular film formed by the existing molecular film support device due to unreasonable structural setting still has technical problems such as uneven film formation, low film formation stability and large film formation differences between various micro-support structures.

[0004] Therefore, it is urgent for researchers in this field to develop a molecular membrane support device that has uniform film formation, higher stability, and smaller film formation differences between various micro-support structures. Utility Model Content

[0005] In view of this, in order to solve the above-mentioned technical problems, the embodiment of the present application provides a molecular film support device with uniform film formation, higher stability and smaller film formation differences between each micro-support structure, which solves the technical problem of poor uniformity and stability of molecular film formation caused by unreasonable support device structure in the prior art.

[0006] To achieve the above-mentioned purpose, the embodiment of the present application provides a molecular film support device on one hand, comprising a plurality of micro-support structure units arranged in an array on a substrate, each of the micro-support structure units comprising a support cavity structure arranged on an upper material layer and a micro-well structure corresponding to the support cavity structure arranged on a lower material layer;

[0007] The supporting cavity structure includes a channel structure and a plurality of fluid buffer structures arranged at the peripheral edge of the channel structure and connected to the channel structure, the channel structure passes through the upper material layer, and the fluid buffer structure is arranged on the upper surface of the upper material layer but does not pass through the upper material layer.

[0008] The micro-well structure penetrates the lower material layer and is in conduction with the electrodes of the substrate.

[0009] Furthermore, the fluid buffer structure includes a buffer tank and a communication channel for connecting the buffer tank and the pore structure.

[0010] Furthermore, the projection shape of the buffer pool includes one or more of a circle, an ellipse or a polygon.

[0011] Furthermore, the buffer pools in the multiple fluid buffer structures are independently arranged, and at least one communication channel is led out from the buffer pool to connect with the channel structure; or, the buffer pools in the multiple fluid buffer structures are interconnected to form an annular buffer pool, and multiple communication channels are led out from the annular buffer pool to connect with the channel structure.

[0012] Furthermore, the channel structure includes a central hole and an edge hole, and a plurality of limiting protrusions extending toward the central hole are arranged on the hole wall of the edge hole, and a groove structure is formed between each two adjacent limiting protrusions, and the groove structure is connected with the buffer tank through the communication channel.

[0013] Furthermore, a constricted portion is provided on one side of the groove structure close to the central hole.

[0014] Further, the communication channel is a channel with a uniform depth relative to a horizontal plane; or, the depth of the communication channel is a depth that gradually increases toward the groove structure.

[0015] Furthermore, the ratio of the inner diameter l of the pore structure to the inner diameter w of the micro-well structure is in the range of 0.4≤l / w≤0.8; and the inner diameter w of the micro-well structure is 10 μm-1000 μm.

[0016] Furthermore, the aspect ratio d / w of the micro-well structure is in the range of 1≤d / w≤20, and the depth d of the micro-well structure is 50 μm≤d≤1000 μm.

[0017] Furthermore, the aspect ratio of the pore structure is H / l≥3, and the ratio of the depth h of the fluid buffer structure to the depth H of the pore structure is h / H≤0.5.

[0018] Furthermore, the cross-sectional shape of the micro-well structure is one or more of a circle, a star or a regular irregular shape.

[0019] Another aspect of the present application provides a method for preparing the molecular membrane support device described in any of the above embodiments, the preparation method comprising:

[0020] providing a substrate;

[0021] Preparing a micro-well structure of a lower material layer on the substrate by exposure and development;

[0022] A pore structure penetrating the upper material layer and a fluid buffer structure not penetrating the upper material layer are prepared on the lower material layer having the micro-well structure by exposure and development.

[0023] Compared with the prior art, the present application has the following advantages:

[0024] The novel molecular membrane support device provided by the present application has the technical effects of uniform film formation, higher stability and smaller film formation differences between various micro-support structures.

[0025] Specifically, the present application arranges a fluid buffer structure connected to the channel structure on the peripheral edge of the channel structure of each supporting cavity structure on the upper material layer, and the fluid buffer structure is arranged on the upper surface of the upper material layer but does not penetrate the upper material layer, thereby achieving the retention of the non-polar medium and real-time circulation with the non-polar medium in the channel structure, achieving flow regulation of the non-polar medium flowing into the channel structure, ensuring the thickness uniformity of the non-polar medium flowing into the channel structure, and further ensuring that there is almost no or very little difference in film formation between the micro-support structures in the array structure, thereby greatly improving the uniformity and stability of molecular film formation in the array structure.

[0026] Furthermore, the film-forming position of the molecular membrane is located in the pore structure connected to the fluid buffer structure, so that the size of the pore structure of the upper material layer and the microwell structure of the lower material layer are no longer constrained by the film-forming area. While ensuring the stability of the film formation, the volume of the microwell structure can be increased, thereby expanding the reaction system in the microwell structure, extending the nanopore sequencing time, and greatly improving the flexibility of the micro-support structure design.

[0027] Furthermore, the present application, by providing a film-forming structure formed by a fluid buffer structure connected to the channel structure, helps to ensure that the ratio of the inner diameter l of the channel structure of the present application to the inner diameter w of the microwell structure is in the range of 0.4≤l / w≤0.8, thereby ensuring that the risk of covering the electrodes at the bottom of the microwell structure and causing the inability to transmit electrical signals due to pre-treatment of the surface of the microwell structure with a non-polar medium in the prior art is avoided.

[0028] In summary, the present application achieves an important technological breakthrough in the field of gene sequencing technology through the specific design of setting a fluid buffer structure connected to the channel structure at the peripheral edge of the channel structure of each supporting cavity structure on the upper material layer. It is a unique specific design in domestic and foreign technologies. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The following drawings are used to provide a further understanding of the present application, constitute a part of the present application, and are only intended to provide an illustrative explanation and description of the present invention, and are not intended to limit the scope of the present invention. In the drawings:

[0030] Figure 1 This is a schematic diagram of the three-dimensional structure of the molecular membrane support device in the embodiment of the present application;

[0031] Figure 2This is a schematic diagram of the top view of the molecular film forming device in the embodiment of the present application;

[0032] Figure 3 For along Figure 2 Schematic diagram of the cross-sectional structure of AA;

[0033] Figure 4 for Figure 2 A schematic diagram of the enlarged structure at B in the middle;

[0034] Figure 5a This is a schematic structural diagram of a support cavity structure according to another embodiment of the present application. Each buffer pool 121 corresponds to a communication channel 123 connected to the pore structure 11;

[0035] Figure 5b This is a schematic structural diagram of a supporting cavity structure according to another embodiment of the present application. Each buffer pool 121 corresponds to three communication channels 123 which are respectively connected to the groove structure 113 of the pore structure 11;

[0036] Figure 5c This is a schematic structural diagram of a supporting cavity structure according to another embodiment of the present application. Each groove structure 113 corresponds to two communication channels 123 that are respectively connected to two adjacent buffer tanks 121;

[0037] Figure 5d This is a schematic structural diagram of a supporting cavity structure according to another embodiment of the present application. The buffer pools 121 in the fluid buffer structure are interconnected to form an annular buffer pool 122, and a plurality of communication channels 123 correspondingly connected to the groove structure 113 are led out from the annular buffer pool 122;

[0038] Figure 5e This is a schematic structural diagram of a support cavity structure according to another embodiment of the present application. A plurality of communication channels 123 corresponding to the groove structure 113 are drawn out from the annular buffer pool 122;

[0039] Figure 6 This is a schematic diagram of the coordination structure between a micro-well structure with a star-shaped structure and a supporting cavity structure in another embodiment of the present application;

[0040] Figure 7 This is a schematic structural diagram of a micro-well structure having a fluid storage cavity structure disposed on a lower material layer in a molecular membrane support device in another embodiment of the present application;

[0041] Figure 8 It is a schematic diagram of grayscale exposure of the supporting cavity structure in the upper material layer, that is, the fluid buffer structure 12 part has low exposure energy, and the channel structure 11 part has high exposure energy, and then developed to obtain the fluid buffer structure 12 that does not penetrate the upper material layer and the channel structure 11 that penetrates the upper material layer.

[0042] Reference numerals:

[0043] 1. Upper material layer; 10. Support cavity structure; 11. Channel structure; 110. Center hole; 111. Edge hole; 112. Limiting protrusion; 113. Groove structure; 114. Neck shrinkage; 12. Fluid buffer structure; 121. Buffer pool; 122. Annular buffer pool; 123. Communication channel;

[0044] 2. Lower material layer; 20. Microwell structure; 21. Fluid storage cavity; 23. Communication channel;

[0045] 3. Substrate. DETAILED DESCRIPTION

[0046] Several implementation modes of the present application will be disclosed below in the form of drawings, which clearly and completely describe the technical solution of the present application and constitute a part of the specification of the present application. The drawings are used to provide a further understanding of the present application. The schematic embodiments and descriptions of the present application are used to explain the present utility model and do not constitute an improper limitation on the application. Based on the embodiments of the present utility model, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0047] It should be noted that unless a direction is defined separately, the directions such as up, down, left, and right mentioned in this document are based on the embodiments of this application. Figure 1 The directions of up, down, left, right, etc. shown are used as the basis. If the specific posture changes, the directional indication will also change accordingly. The words "first", "second", "third", "fourth" and similar words used in this application do not indicate any order, quantity or importance, but are only used to distinguish different components. In addition, in various embodiments of the present disclosure, the same or similar reference numerals represent the same or similar components.

[0048] In this application, unless otherwise specified and limited, the terms "connection", "fixation" and the like should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral body, unless otherwise specified. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0049] In addition, the technical solutions between the various embodiments of the present application can be combined with each other, but it must be based on the fact that ordinary technicians in the field can implement it. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0050] Embodiment 1

[0051] See also Figure 1 , Figure 2, Figure 3 As shown, this embodiment provides a molecular membrane support device, including a plurality of micro-support structure units arranged in an array on a substrate 3, each of the micro-support structure units including a support cavity structure 10 provided on an upper material layer 1 and a micro-well structure 20 corresponding to the support cavity structure 10 provided on a lower material layer 2, the support cavity structure 10 including a channel structure 11 and a plurality of fluid buffer structures 12 provided on the peripheral edges of the channel structure 11 and connected to the channel structure 11, the channel structure 11 passes through the upper material layer 1, and the fluid buffer structure 12 is provided on the upper surface of the upper material layer 1 but does not pass through the upper material layer 1.

[0052] It should be noted that if Figure 3 As shown, the device in this embodiment includes a substrate 3, a lower material layer 2 and an upper material layer 1 from bottom to top, and an electrode (not shown) is arranged on the substrate. The micro-well structure 20 in the lower material layer is a columnar micro-well, which runs through the lower material layer 2. The fluid in the micro-well structure is connected and conductive with the electrode of the substrate to realize the transmission and collection of sequencing electrical signals; wherein, the micro-well structure 20 can be a conventional cylindrical structure, or a prism structure with a projection shape of a quadrilateral, hexagon or enneagon, which is used to enhance the support effect on the supporting cavity structure of the upper material layer. The pore structure 11 on the upper material layer 1 is suspended above the micro-well structure of the lower material layer 2, and the geometric center of the pore structure is axially aligned with the geometric center of the film-forming cavity of the micro-well structure. The size of the pore structure is smaller than that of the micro-well structure. The amphiphilic molecular film is formed in the pore structure in the supporting cavity structure, which is conducive to reducing the actual film-forming area to enhance the stability of the film, and can ensure the continuous progress of the gene sequencing reaction.

[0053] Furthermore, the pore structure 11 in this embodiment penetrates the upper material layer, while the fluid buffer structure 12 arranged around the edge of the pore structure does not penetrate the upper material layer. This unique design can achieve the retention of the non-polar medium and real-time circulation with the non-polar medium in the pore structure 11, realize the flow regulation of the non-polar medium flowing into the pore structure, and ensure the stability of the fluid stock and thickness uniformity of the non-polar medium in the pore structure 11.

[0054] The principle of the film-forming process of the amphiphilic molecular film by using the technical solution of the molecular film support device provided in this embodiment is briefly introduced as follows:

[0055] First, when the polar medium flows through the surface of the micro-support structure units distributed in the array, the micro-well structure of the lower material layer is filled. The polar medium is filled in the micro-well structure of the lower material layer, and the upper surface of the micro-well structure bulges upward due to the effect of surface tension, and part of the interface appears in the pore structure of the upper material layer.

[0056] Then, the non-polar medium is introduced. The non-polar medium that first enters the surface of the micro-support structure unit will drive the excess polar medium out of the surface of the micro-support structure unit. The non-polar medium enters the fluid buffer structure and the pore structure of the upper material layer. The fluid buffer structure can achieve the retention of the non-polar medium and the real-time flow of the non-polar medium in the pore structure, and achieve the uniformity of the thickness of the non-polar medium flowing into the pore structure. In the pore structure, it contacts with the upper surface of the polar structure to form an interface, providing conditions for the spreading of the amphiphilic molecule layer.

[0057] Finally, a polar medium is introduced into the pore structure and covers the non-polar medium, thereby forming a stable amphiphilic molecular membrane in the pore structure.

[0058] Embodiment 2

[0059] Based on Example 1, as a preferred implementation, Figure 4 As shown, the fluid buffer structure 12 in this embodiment includes a buffer pool 121 and a communication channel 123 for connecting the buffer pool 121 and the channel structure 11; further, the channel structure 11 includes a central hole 110 and an edge hole 111, and the edge hole 111 is provided with a plurality of limiting protrusions 112 extending toward the central hole 110 on the hole wall close to the fluid buffer structure 12, and a groove structure 113 is formed between each adjacent two limiting protrusions 112. The setting of the limiting protrusions, the groove structure and the necking part can provide a strong supporting effect for the molecular membrane during the process of forming the molecular membrane in the supporting cavity structure, greatly enhance the stability of the combination of the membrane and the supporting cavity structure, and help to improve the film forming rate of the molecular membrane and the stability after film formation.

[0060] Furthermore, the groove structure 113 in this embodiment is directly connected to the buffer pool 121 through the communication channel 123, which is beneficial to ensure the full cooperation of the upper surface convex interface of the micro-well structure appearing in the pore structure, providing more favorable conditions for the spreading of the amphiphilic molecular layer.

[0061] It should be noted that if Figure 4 , Figure 5a , Figure 5b , Figure 5c As shown, each buffer tank 121 in the present embodiment is independently arranged, and the projection shape of the buffer tank 121 takes a circle as an example. In actual application design, the projection shape of the buffer tank 121 can be set to one or more of an ellipse or a polygon according to actual conditions, as long as it can ensure the flow regulation of the non-polar medium flowing into the channel structure and ensure the thickness uniformity of the non-polar medium flowing into the channel structure.

[0062] Further, as a preferred embodiment, Figure 4 As shown in the structural diagram of the support cavity structure, each buffer pool 121 is connected to two adjacent groove structures 113 through two communication channels 123; Figure 5a As shown in the structural diagram of the supporting cavity structure, each buffer pool 121 corresponds to a communication channel 123 connected to the groove structure 113 in the pore structure 11; Figure 5b As shown in the structural schematic diagram of the support cavity structure, each buffer pool 121 is connected to three adjacent groove structures 113 close to the buffer pool in the channel structure 11 through three communication channels 123; Figure 5c As shown in the structural schematic diagram of the supporting cavity structure, each groove structure 113 is connected to two adjacent buffer tanks 121 through two communication channels 123 .

[0063] As a preferred embodiment, Figure 5d , Figure 5e As shown, the buffer pools 121 in the plurality of fluid buffer structures are interconnected to form an annular buffer pool 122, and a plurality of communication channels 123 are drawn out from the annular buffer pool 122 and are respectively connected to the groove structures 113 of the pore structure.

[0064] The above-mentioned embodiments can all achieve flow regulation of the non-polar medium flowing into the pore structure, and ensure the thickness uniformity of the non-polar medium flowing into the pore structure.

[0065] Furthermore, a constricted neck 114 is provided on one side of the groove structure 113 close to the center hole 110. The constricted neck is formed by two adjacent limiting protrusions 112 being provided at one end close to the center hole. The arc-shaped protrusions protrude to both sides to form corresponding constricted necks 114, which is beneficial for the fluid flowing into the buffer tank from the buffer tank into the groove structure to form a fluid pressure rushing toward the center hole, thereby ensuring smooth flow on the protrusion interface in the pore structure, and greatly improving the uniformity, consistency and stability of molecular film formation.

[0066] At the same time, the depth of the communication channel 123 in this embodiment can be designed as a channel with uniform depth; or, it can be designed as a depth that gradually increases in the direction of the groove structure. Of course, in order to facilitate the realization of ensuring the real-time smooth flow of the fluid between the fluid buffer structure and the pore structure, it is more preferably designed to be a depth that gradually increases in the direction of the groove structure. In addition, the characteristic design of the neck 114 is more conducive to the fluid flowing from the buffer pool into the groove structure to form a fluid pressure rushing toward the center hole, ensuring smooth flow on the convex interface in the pore structure, greatly improving the uniformity, consistency and stability of the molecular film formation.

[0067] Embodiment 3

[0068] On the basis of Example 1 and Example 2, as a preferred implementation mode, in order to ensure the film formation stability of the molecular membrane support device of the present application while also ensuring the reaction volume of the microwell structure and achieving the detection requirements of extending the nanopore sequencing time, the ratio of the inner diameter l of the pore structure of this embodiment to the inner diameter w of the microwell structure is set to a value range of: 0.4≤l / w≤0.8; further designs are 0.4, 0.5, 0.6, 0.7, 0.8, etc., and the inner diameter w of the microwell structure is 10μm-1000μm.

[0069] Furthermore, in the present embodiment, the aspect ratio of the pore structure is H / l≥3, and the ratio of the depth h of the fluid buffer structure to the depth H of the pore structure is h / H≤0.5.

[0070] As a preferred embodiment, Figure 6 , Figure 7 As shown, the cross-sectional shape of the micro-well structure 20 in this embodiment is a star-shaped structure that is compatible with the limiting protrusion, groove structure and fluid buffer structure of the channel structure. For example, the fluid buffer structure is correspondingly arranged above the mountain-shaped protrusion protruding inward from the star-shaped structure, and the groove structure 113 is correspondingly arranged above the mountain-shaped groove surrounded by two adjacent mountain-shaped protrusions, which is beneficial to increase the rigidity and stability of the support cavity structure.

[0071] Furthermore, combined with Figure 7 As shown, in order to better ensure the stability of film formation while ensuring that the volume of the fluid stored in the micro-well structure is large enough, a fluid storage chamber 21 connected to the film forming chamber of the micro-well structure through a connecting channel 23 is provided on the lower material layer, that is, the micro-well structure includes a film forming chamber and a fluid storage chamber connected to the film forming chamber shown, and the fluid storage chamber 21 runs through the lower material layer, and the fluid therein is in direct contact with the detection electrode of the substrate, thereby realizing the transmission and collection of sequencing electrical signals.

[0072] It should be noted that, in the present embodiment, the cross-sectional shape of the micro-well structure 20 can also be designed to be one or more of circular and / or regular shapes according to actual conditions; by designing a fluid buffer structure on the upper material layer of the molecular membrane support device and a fluid storage chamber on the lower material layer, the aspect ratio d / w of the micro-well structure film-forming cavity can be fully realized in the range of 1≤d / w≤20, and the depth d of the micro-well structure is 50μm≤d≤1000μm, and the inner diameter w of the micro-well structure is 10μm-1000μm, which further ensures that the width of the micro-well structure film-forming cavity is 1μm-100μm, fundamentally realizing the beneficial effect that the film-forming aperture of the molecular support device is small but the volume is not small, greatly improving the uniformity and stability of the molecular film formation in the array structure.

[0073] Furthermore, through the unique design of the fluid buffer structure and the fluid storage chamber, the size of the pore structure 11 of the upper material layer and the microwell structure 20 of the lower material layer are no longer constrained by the film forming area, and the detection requirements of reaction and extension of nanopore sequencing time can be met while ensuring the stability of film formation. At the same time, the pore structure designed in combination with the fluid buffer structure is conducive to ensuring that the ratio of the inner diameter l of the pore structure to the inner diameter w of the microwell structure is in the range of 0.4≤l / w≤0.8, thereby ensuring that the risk of covering the electrode at the bottom of the microwell structure due to the pre-treatment of the microwell structure surface with a non-polar medium in the prior art is avoided, resulting in the risk of electrical signal transmission failure, which is conducive to improving the film formation rate and film stability of the molecular film.

[0074] Embodiment 4

[0075] The present embodiment provides a method for preparing a molecular membrane support device as described in any of the above embodiments, the method comprising: providing a substrate; preparing a micro-well structure of a lower material layer on the substrate by exposure and development; and preparing a pore structure penetrating an upper material layer and a fluid buffer structure that does not penetrate the upper material layer on the lower material layer having the micro-well structure by exposure and development.

[0076] It should be noted that the substrate in this embodiment is a mature product in the prior art, and the exposure and development technology are prior art, which will not be described in detail here. The upper and lower material layers of the molecular film support device in this application are made of the same material, such as SU-8 photoresist spin coating or dry film lamination. The following is a brief introduction to the preparation process using dry film as an example:

[0077] First, a lower dry film with a moderate thickness is attached to a substrate, and a photomask of the lower material layer is used for exposure and development to obtain a micro-well structure of the lower material layer;

[0078] Furthermore, the upper material layer dry film is closely attached to the lower material layer having the micro-well structure, and the Figure 8 As shown, the upper material layer is exposed using a grayscale exposure method. Figure 8 The fluid buffer structure 12 shown in FIG. 1 is a lighter grayscale, indicating low exposure energy, and the channel structure 11 is a darker grayscale, indicating high exposure energy;

[0079] Then, the fluid buffer structure 12 that does not penetrate the upper material layer and the pore structure 11 that penetrates the upper material layer are obtained by development.

[0080] In summary, the novel molecular membrane support device provided by the present application has the technical effects of uniform film formation, higher stability and smaller film formation differences between various micro-support structures.

[0081] Specifically, a fluid buffer structure 12 connected to the pore structure 11 is arranged on the peripheral edge of the pore structure 11 of each supporting cavity structure 10 on the upper material layer 1, and the fluid buffer structure 12 is arranged on the upper surface of the upper material layer 1 but does not penetrate the upper material layer 1, so as to achieve retention of the non-polar medium and real-time circulation with the non-polar medium in the pore structure, realize flow regulation of the non-polar medium flowing into the pore structure, ensure the thickness uniformity of the non-polar medium flowing into the pore structure, further ensure that there is almost no or very little difference in film formation between the micro-support structures in the array structure, thereby greatly improving the uniformity and stability of molecular film formation in the array structure.

[0082] Furthermore, the film-forming position of the molecular membrane is located in the pore structure 11 connected to the fluid buffer structure 12, so that the size of the pore structure 11 of the upper material layer and the micro-well structure 20 of the lower material layer are no longer constrained by the film-forming area. While ensuring the stability of the film formation, the volume of the micro-well structure can be increased, thereby expanding the reaction system in the micro-well structure 20, extending the nanopore sequencing time, and greatly improving the flexibility of the micro-support structure design, thereby enabling the molecular membrane film-forming device of the present application to have overall film-forming uniformity and stability and achieve the technical effect of smaller film-forming differences between the micro-support structures.

[0083] Finally, it should be noted that Figure 5a , Figure 5b , Figure 5c , Figure 5d , Figure 5e The middle fluid buffer structure is marked as a shaded area to more clearly express that the fluid buffer structure in the present application is a structure that does not penetrate the upper material layer.

[0084] The above description shows and describes the preferred implementation of the present application, but as mentioned above, it should be understood that the present application is not limited to the form disclosed herein, and should not be regarded as excluding other implementations, but can be used in various other combinations, modifications and environments, and can be modified within the scope of the object concept of this article through the above teachings or the technology or knowledge of the relevant field. The changes and modifications made by those skilled in the art do not depart from the spirit and scope of the present application, and should be within the scope of protection of the claims attached to the present application.

Claims

1. A molecular film support device, comprising a plurality of micro-support structure units arranged in an array on a substrate, characterized in that: Each of the micro-support structure units includes a support cavity structure provided on an upper material layer and a micro-well structure corresponding to the support cavity structure provided on a lower material layer; The supporting cavity structure includes a channel structure and a plurality of fluid buffer structures arranged at the peripheral edge of the channel structure and connected to the channel structure, the channel structure passes through the upper material layer, and the fluid buffer structure is arranged on the upper surface of the upper material layer but does not pass through the upper material layer.

2. The molecular membrane support device according to claim 1, characterized in that: The fluid buffer structure includes a buffer pool and a communication channel for connecting the buffer pool and the pore structure.

3. The molecular membrane support device according to claim 2, characterized in that: The projection shape of the buffer pool includes one or more of a circle, an ellipse or a polygon.

4. The molecular membrane support device according to claim 2, characterized in that: The buffer pools in the plurality of fluid buffer structures are independently arranged, and at least one communication channel is led out from the buffer pool to communicate with the pore structure; Alternatively, the buffer pools in the plurality of fluid buffer structures are interconnected to form an annular buffer pool, and a plurality of the communication channels are led out from the annular buffer pool to communicate with the pore structure.

5. The molecular membrane support device according to claim 2, characterized in that: The channel structure includes a central hole and an edge hole. A plurality of limiting protrusions extending toward the central hole are arranged on the hole wall of the edge hole. A groove structure is formed between each two adjacent limiting protrusions. The groove structure is connected to the buffer tank through the communication channel.

6. The molecular membrane support device according to claim 5, characterized in that: A constricted portion is provided on one side of the groove structure close to the central hole; Preferably, the communication channel is a channel with uniform depth relative to the horizontal plane; Alternatively, the depth of the communication channel gradually increases toward the groove structure.

7. The molecular membrane support device according to claim 1, characterized in that: The ratio of the inner diameter l of the pore structure to the inner diameter w of the micro-well structure has a value range of: 0.4≤l / w≤0.8; the inner diameter w of the micro-well structure is 10 μm-1000 μm.

8. The molecular membrane support device according to claim 1, characterized in that: The value range of the aspect ratio d / w of the micro-well structure is 1≤d / w≤20, and the depth d of the micro-well structure is 50μm≤d≤1000μm; Preferably, the aspect ratio of the pore structure H / l≥3, and the ratio of the depth h of the fluid buffer structure to the depth H of the pore structure is h / H≤0.

5.

9. The molecular membrane support device according to claim 1, characterized in that: The cross-sectional shape of the micro-well structure is one or more of a circle, a star or a regular shape.

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