Self-circulation cooling device, self-circulation cooling system and vacuum unit

Abstract

The utility model relates to the technical field of vacuum unit cooling, and aims to provide a self-circulation cooling device, a self-circulation cooling system and a vacuum unit. The self-circulation cooling device is high in heat exchange efficiency and good in cooling effect of cooling liquid. The self-circulation cooling device comprises a shell, a heat dissipation assembly and a cooling liquid circulation driving part. The heat dissipation assembly is arranged on the inner side of the shell and comprises a heat dissipation device and a cooling liquid diffusion piece, the cooling liquid diffusion piece is provided with a cooling liquid diffusion inlet and a cooling liquid diffusion outlet, the cooling liquid diffusion inlet is suitable for being connected with a cooling pipeline, the cooling liquid diffusion outlet is communicated with a liquid inlet of the heat dissipation device, and a plurality of flow dividing holes are evenly formed in the cooling liquid diffusion outlet; the cooling liquid circulation driving part is provided with a cooling liquid inlet and a cooling liquid outlet, the cooling liquid inlet is connected with the radiator liquid outlet, and the cooling liquid outlet is suitable for being connected with a cooling pipeline. The self-circulation cooling device solves the problems that a self-circulation cooling device in the prior art is low in cooling liquid heat exchange efficiency and poor in cooling effect.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum unit cooling, in particular to a self-circulating cooling device, a self-circulating cooling system and a vacuum unit. Background Art

[0002] The vacuum unit is a device used for vacuuming, which is widely used in the chemical, semiconductor and other industries. The mechanical pump and the front pump in the unit will generate heat during operation. In order to prevent the pump body from overheating, it is often necessary to dissipate heat and cool it. Previously, most vacuum units at home and abroad used external air cooling or water cooling devices. However, the external water cooling device needs to be equipped with a water cooler for the vacuum unit separately, which not only increases the cost, but also takes up a lot of space and consumes a lot of energy.

[0003] Therefore, the cooling device of the vacuum unit has a tendency to develop towards integrated self-circulation. The self-circulation cooling device can be directly installed in the vacuum unit, which occupies a small space and does not require an external water cooler. At present, vacuum units with self-circulation cooling function have appeared but are rarely used. The cooling method is also to circulate the coolant in the cooling pipe to exchange heat with the surface of the pump body to achieve the purpose of heat dissipation and cooling. However, after the coolant is heated up, it does not need to flow out of the vacuum unit, but flows into the radiator in the cooling device for cooling. After cooling, the coolant can flow into the cooling pipe again to participate in the cooling of the pump body. The radiator is set to achieve the recycling of the coolant. However, the existing self-circulation cooling device is a direct connection between the cooling pipe and the radiator. After entering the radiator, the coolant is unevenly distributed, resulting in low heat exchange efficiency and poor cooling effect. Utility Model Content

[0004] Therefore, the technical problem to be solved by the utility model is to overcome the defects of low heat exchange efficiency and poor cooling effect when the self-circulating cooling device in the prior art cools the coolant, thereby providing a self-circulating cooling device, a self-circulating cooling system and a vacuum unit with high heat exchange efficiency and good cooling effect.

[0005] In order to solve the above problems, the utility model provides a self-circulating cooling device, comprising:

[0006] case;

[0007] A heat dissipation component, which is arranged inside the shell, and includes: a radiator and a coolant diffuser, wherein the coolant diffuser has a coolant diffuser inlet and a coolant diffuser outlet, wherein the coolant diffuser inlet is suitable for connecting to a cooling pipe, the coolant diffuser outlet is communicated with a radiator liquid inlet, and a plurality of diversion holes are evenly arranged at the coolant diffuser outlet;

[0008] The coolant circulation driving member is arranged on the shell and has a coolant inlet and a coolant outlet. The coolant inlet is connected to the radiator outlet, and the coolant outlet is suitable for connecting to the cooling pipeline.

[0009] Optionally, the coolant diffuser is located above the radiator, and the coolant circulation drive component is located below the radiator.

[0010] Optionally, the radiator has a plurality of coolant flow channels arranged along the height direction of the radiator.

[0011] Optionally, the heat dissipation assembly further includes an air cooling mechanism disposed on one side of the radiator.

[0012] Optionally, the air cooling mechanism includes a mounting plate and a fan, the mounting plate is arranged on one side of the radiator, a plurality of the fans are arranged on the mounting plate, and the air outlet side of the fan faces the radiator.

[0013] Optionally, a heat insulation cover is provided on a side of the air cooling mechanism away from the radiator.

[0014] Optionally, a plurality of ventilation holes are provided on the shell.

[0015] Optionally, the coolant circulation drive component is a circulation pump integrated with a pump box.

[0016] A self-circulating cooling system comprises the self-circulating cooling device and a cooling pipe assembly, wherein the inlet of the cooling pipe assembly is connected to the coolant outlet, and the outlet of the cooling pipe assembly is connected to the coolant diffusion inlet.

[0017] A vacuum unit includes the self-circulating cooling system and a box body, wherein a pump unit and the self-circulating cooling system are arranged in the box body, and a cooling pipe component of the self-circulating cooling system is arranged around the outer wall of the pump unit.

[0018] The utility model has the following advantages:

[0019] 1. The self-circulating cooling device provided by the utility model comprises: a housing, a heat dissipation component and a coolant circulation drive. The heat dissipation component is arranged on the inner side of the housing, and the heat dissipation component comprises a radiator and a coolant diffuser. The coolant diffuser has a coolant diffuser inlet and a coolant diffuser outlet. The coolant diffuser inlet is suitable for connecting to a cooling pipe. The coolant diffuser outlet is connected to the radiator inlet, and a plurality of diverter holes are evenly arranged at the coolant diffuser outlet. The coolant circulation drive has a coolant inlet and a coolant outlet. The coolant inlet is connected to the radiator outlet, and the coolant outlet is suitable for connecting to a cooling pipe. The high-temperature coolant enters the coolant diffuser from the coolant diffuser inlet, and enters the radiator evenly after being diverted through the plurality of diverter holes at the coolant diffuser outlet. After entering the radiator, the coolant is cooled and discharged into the cooling pipe through the coolant circulation drive. By arranging the coolant diffuser, the coolant can be evenly distributed and flow into the radiator, thereby increasing the heat dissipation area and improving the utilization rate of the radiator. Therefore, the heat exchange efficiency of this cooling device is higher and the cooling effect is better.

[0020] 2. The self-circulating cooling device provided by the utility model has a plurality of coolant flow channels arranged along the height direction of the radiator inside the radiator, which also increases the heat dissipation area of ​​the coolant and improves the cooling effect of the device on the coolant.

[0021] 3. The self-circulating cooling device provided by the utility model, the heat dissipation assembly also includes an air cooling mechanism arranged on one side of the radiator. The air cooling mechanism includes a mounting plate and a fan, the mounting plate is arranged on one side of the radiator, and a plurality of fans are arranged on the mounting plate, and the air outlet side of the fan faces the radiator, and the fan blows out cold air to accelerate the cooling of the coolant in the radiator.

[0022] 4. In the self-circulating cooling device provided by the utility model, a heat insulation cover is provided on the side of the air cooling mechanism away from the radiator. The heat insulation cover is provided to prevent the influence of the external high temperature environment on the device, thereby ensuring the cooling effect of the coolant.

[0023] 5. The self-circulating cooling device provided by the utility model has a plurality of vents on the shell. The additional vents are beneficial to the heat exchange of the radiator, accelerate the cooling of the coolant, and are also beneficial to the circulation of wind when the fan is working, which can accelerate the cooling of the coolant and improve the cooling effect.

[0024] 6. The self-circulating cooling system provided by the utility model includes a self-circulating cooling device and a cooling pipe assembly. The inlet of the cooling pipe assembly is connected to the coolant outlet, and the outlet of the cooling pipe assembly is connected to the coolant diffusion inlet. When the coolant circulates in the cooling pipe assembly, it can cool down the heat-generating components such as the pump body. After the temperature is increased, the coolant can be cooled in time after entering the self-circulating cooling device, and then can return to the cooling pipe assembly to participate in the cooling of the pump body. This self-circulating cooling system can realize the recycling of the coolant, does not require an external water chiller, and has a good cooling effect of the coolant.

[0025] 7. The vacuum unit provided by the utility model includes a box body, a self-circulating cooling system and a pump unit arranged in the box body. When the pump unit is working, it generates heat, and the pump unit is cooled and dissipated by a cooling pipe assembly arranged on the outer wall of the pump unit by the self-circulating cooling system. The coolant in the cooling pipe assembly is circulated and cooled by the self-circulating cooling device and reused. This vacuum unit does not need to be equipped with an additional water cooler, has a simple structure, is highly practical, and has a wider range of applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 It is a schematic diagram of the self-circulating cooling device of the utility model;

[0028] Figure 2 It is an explosion diagram of the self-circulating cooling device of the utility model;

[0029] Figure 3 It is a schematic diagram of the self-circulating cooling system of the utility model;

[0030] Figure 4 It is a schematic diagram of the vacuum unit of the utility model.

[0031] Description of reference numerals:

[0032] 1. Shell;

[0033] 201, radiator, 202, coolant diffuser, 203, heat shield;

[0034] 3. Coolant circulation drive parts;

[0035] 401, mounting plate, 402, fan;

[0036] 501, cooling pipe, 502, cooling plate;

[0037] 6. Box body;

[0038] 701, mechanical booster pump, 702, foreline pump;

[0039] 8. Electric control box. DETAILED DESCRIPTION

[0040] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0041] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0042] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0043] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0044] like Figure 1 , Figure 2As shown, it is a preferred embodiment of the self-circulating cooling device of the utility model. This self-circulating cooling device includes: a housing 1, a heat dissipation component and a coolant circulation drive 3. The housing 1 plays the role of installing and protecting the heat dissipation component and the coolant circulation drive 3, and the housing 1 also facilitates the cooling device to be set on other equipment. The heat dissipation component is used for cooling the coolant, and the heat dissipation component is arranged on the inner side of the housing 1, and includes: a radiator 201 and a coolant diffuser 202. The coolant diffuser 202 has a coolant diffusion inlet and a coolant diffusion outlet, the coolant diffusion inlet is suitable for connecting the cooling pipe, and the coolant diffusion outlet is connected to the liquid inlet of the radiator 201. That is, the coolant that heats up after the heat dissipation cooling of the heating element in the cooling pipe enters the cooling device from the coolant diffusion inlet, and then enters the radiator 201 from the coolant diffuser 202 for cooling. Moreover, a plurality of diverter holes are evenly arranged at the coolant diffusion outlet, and the coolant can be evenly distributed through these diverter holes, so that the coolant enters the radiator 201 evenly. In this way, the radiator 201 can be fully utilized, so that the coolant has a larger contact area with the radiator 201, and then has a larger heat dissipation area, which is conducive to the rapid heat dissipation and cooling of the coolant. Therefore, the heat exchange efficiency of the cooling device is higher, and the cooling effect of the coolant is also better. The function of the coolant circulation drive component 3 is to allow the coolant to circulate. The coolant circulation drive component 3 has a coolant inlet and a coolant outlet. The coolant inlet is connected to the liquid outlet of the radiator 201, and the coolant outlet is suitable for connecting to the cooling pipe. The coolant after cooling by the radiator 201 can be transported out of the cooling device through the coolant circulation drive component 3 and returned to the cooling pipe, and the heat-generating component is cooled and dissipated again, thereby realizing the recycling of the coolant.

[0045] Specifically, one side of the housing 1 is an open side, which is convenient for installing the heat dissipation component and the coolant circulation drive 3. The other side walls of the housing 1 are provided with vents, which can be in various shapes such as square and circular. By providing the vents, the air circulation inside and outside the housing 1 is enhanced, which is beneficial for the heat exchange of the radiator 201 and the rapid cooling of the internal coolant.

[0046] Furthermore, the coolant diffuser 202 is located above the radiator 201, and the coolant circulation drive 3 is located below the radiator 201. That is, the coolant diffuser 202, the radiator 201 and the coolant circulation drive 3 are arranged and connected in sequence from top to bottom. The coolant diffusion outlet and the liquid inlet of the radiator 201, as well as the liquid outlet of the radiator 201 and the coolant inlet of the coolant circulation drive 3 are directly opposite, which is conducive to the smooth circulation of the coolant and also reduces the load pressure of the coolant circulation drive 3.

[0047] In other embodiments, the coolant diffuser 202 , the radiator 201 and the coolant circulation drive 3 may also be arranged in other ways. For example, the coolant circulation drive 3 may be arranged on one side of the radiator 201 , and the coolant diffuser 202 may be arranged on the other side of the radiator 201 .

[0048] Furthermore, the radiator 201 has a plurality of coolant flow channels arranged along the height direction of the radiator 201. The coolant flow channels are long and narrow channels, and the heat dissipation area of ​​the coolant can be further increased by setting the coolant flow channels, thereby improving the heat dissipation effect of the radiator 201. The coolant is dispersed in the radiator 201 to the greatest extent, and after dispersion, it is in full contact with the heat dissipation surface of the radiator 201, thereby maximizing the heat dissipation area and the heat exchange efficiency in a limited space.

[0049] The heat dissipation assembly also includes an air cooling mechanism disposed on one side of the radiator 201, and the air cooling mechanism includes a mounting plate 401 and a fan 402. The mounting plate 401 is disposed on the side of the radiator 201 facing the opening side of the housing 1, and a plurality of fans 402 are arranged in an array on the mounting plate 401, and ventilation holes are provided at positions corresponding to the fans 402 on the mounting plate 401, and the air outlet side of the fan 402 faces the radiator 201, so that cold air can be blown to the surface of the radiator 201. By arranging the fan 402, the cooling of the coolant in the radiator 201 can be accelerated. Specifically, in this embodiment, a total of eight fans 402 are arranged in an array of two columns and four rows.

[0050] In other embodiments, the number of fans 402 can be adjusted according to the area of ​​the heat sink 201, for example, it can be four, six, ten, twelve, etc., and the array arrangement can also be adjusted accordingly.

[0051] In other embodiments, the air cooling mechanism may not be provided, and a fin-type heat sink 201 may be used for heat dissipation.

[0052] The heat dissipation assembly also includes a heat shield 203 disposed on the side of the air cooling mechanism away from the radiator 201. The heat shield 203 uses a heat insulating material to thermally isolate the cooling device from the outside to prevent the high-temperature heating element from transferring heat to the cooling device and affecting the cooling of the coolant.

[0053] Furthermore, the coolant circulation drive 3 is a circulating pump integrated with a pump box. The circulating pump is made of corrosion-resistant, low-density, high-strength materials, and is internally provided with a pressure sensor, a flow sensor, and a temperature sensor, so that it has the functions of monitoring pressure, flow, and temperature. The pressure regulating valve on the water tank is adjusted by the feedback signal of the pressure sensor to control the internal pressure of the system within a safe range; the speed of the circulating pump is controlled by the feedback of the temperature sensor and the flow monitoring, and the circulation flow is adjusted to achieve real-time adjustment of the heat dissipation efficiency to ensure the constant temperature of the cooling system to achieve temperature control of the vacuum pump.

[0054] like Figure 3 As shown, this embodiment also provides a self-circulating cooling system, including a self-circulating cooling and a cooling pipe assembly, wherein the structure of the self-circulating cooling device is the same as the structure of the self-circulating cooling device in the above embodiment, so it will not be repeated.

[0055] The inlet of the cooling pipe assembly is connected to the coolant outlet of the coolant circulation driving member 3, and the outlet of the cooling pipe assembly is connected to the coolant diffusion inlet of the coolant diffuser 202. That is to say, the low-temperature coolant discharged from the cooling device enters the cooling pipe assembly from the inlet of the cooling pipe assembly, and the high-temperature coolant after heat dissipation and cooling of the heat-generating component is discharged into the cooling device from the outlet of the cooling pipe assembly. The coolant is cooled by the cooling device and then returns to the cooling pipe assembly. Such circulation realizes the self-circulation cooling function of the system.

[0056] Specifically, the cooling pipe assembly includes a plurality of cooling pipes 501 connected by ferrule joints. The cooling pipes 501 are arranged on the outer wall of the heating element. When the coolant flows in the cooling pipes 501, the heat emitted by the heating element can be absorbed and removed to achieve cooling and heat dissipation of the heating element.

[0057] In addition, to improve the cooling efficiency of the system, the cooling pipe assembly also includes a cooling plate 502, which is connected in series to the cooling pipe 501. The plate-type cooling plate 502 can be specifically set at the location where the heating element has severe local heating to improve the heat dissipation efficiency.

[0058] like Figure 4 As shown, this embodiment also provides a vacuum unit, including a box body 6, in which a pump group, a self-circulating cooling system and an electrical control box 8 are arranged, wherein the structure of the self-circulating cooling system is the same as the self-circulating cooling system structure described in the above embodiment, so it will not be repeated.

[0059] A pump unit, a self-circulating cooling system and an electric control box 8 are arranged in the square box 6, wherein the self-circulating cooling system and the electric control box 8 are arranged on both sides of the box 6, respectively, and the pump unit is located between the self-circulating cooling system and the electric control box 8. In order to improve the mobility of the unit, moving wheels can be arranged at the bottom of the box 6 to facilitate the transfer of the unit.

[0060] The pump group can be a single-stage pump or a multi-stage pump. The pump group is the main heat-generating component in the unit. The cooling pipe assembly of the self-circulating cooling system will be arranged around the outer wall of the pump group to cool and dissipate heat for the pump group in a timely manner.

[0061] Specifically, in this embodiment, the pump group includes: a mechanical booster pump 701 and a front pump 702, and the two are arranged in an upper and lower interval, with the mechanical booster pump 701 on the upper side and the front pump 702 on the lower side, and the two pumps are connected by a pipeline.

[0062] A cooling pipe 501 in the cooling pipe assembly is connected to the coolant outlet of the coolant circulation drive 3, and then extends from one side of the front pump 702 to the end away from the cooling device until it reaches the end of the front pump 702, and after winding two circles at the end, it extends from the other side of the front pump 702 to the end close to the cooling device. And a cooling plate 502 is arranged in series in the cooling pipe 501 at the end position, and this cooling plate 502 is also facing the electric control box 8, and can also cool the electric control box 8. When the cooling line extends on the other side of the front pump 702, two upper and lower cooling plates 502 are arranged in the middle position of the front pump 702, and then when it extends to the end of the front pump 702 close to the cooling device, it is coiled in a U shape at the end, and then extends upward to the mechanical booster pump 701. The arrangement of the cooling pipe 501 at the mechanical booster pump 701 is similar to that at the front pump 702, and it also starts to extend from one side of the mechanical booster pump 701, and the extension direction is from the side of the mechanical booster pump 701 close to the cooling device to the side away from the cooling device, and extends to the end position of the mechanical booster pump 701 away from the cooling device. The cooling pipe 501 is coiled twice, and a cooling plate 502 is arranged in series, and then extends from the other side of the mechanical booster pump 701. At this time, the extension direction is from the side of the mechanical booster pump 701 away from the cooling device to the side close to the cooling device. When it extends to the end close to the cooling device, a cooling plate 502 is arranged in series in the cooling pipeline, and then the coolant diffusion inlet of the coolant diffuser 202 is connected.

[0063] In other implementations, the cooling pipes 501 in the cooling pipe assembly may also be arranged in other ways, such as being arranged on the upper and lower sides of the pump body, or being arranged in a spiral shape around the pump body. And when the pump group is a single-stage pump or a multi-stage pump with a larger number, the number and direction of the cooling pipes 501 may also be adaptively changed.

[0064] The working process of the vacuum unit provided in this embodiment is described as follows:

[0065] When the pump group in the unit starts working, heat will be generated. At this time, the coolant circulation drive 3 is started to promote the circulation of the coolant. The coolant in the cooling pipe assembly absorbs the heat generated by the pump group during the circulation process. It flows into the cooling device, and the high-temperature coolant is evenly diffused into the radiator 201 through the coolant diffuser 202. When the coolant circulates in the radiator 201, it is quickly cooled down under the action of the external fan 402, and then discharged from the coolant circulation drive 3 to the cooling pipe assembly again. In this way, the pump group in the working process is continuously cooled and circulated.

[0066] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A self-circulating cooling device, characterized in that: include: Housing (1); A heat dissipation component, the heat dissipation component is arranged inside the shell (1), and comprises: a radiator (201) and a coolant diffuser (202), the coolant diffuser (202) having a coolant diffuser inlet and a coolant diffuser outlet, the coolant diffuser inlet is suitable for connecting to a cooling pipe, the coolant diffuser outlet is connected to a liquid inlet of the radiator (201), and a plurality of diversion holes are evenly arranged at the coolant diffuser outlet; A coolant circulation drive component (3) is arranged on the housing (1) and has a coolant inlet and a coolant outlet. The coolant inlet is connected to the liquid outlet of the radiator (201), and the coolant outlet is suitable for connecting to the cooling pipeline.

2. The self-circulating cooling device according to claim 1, characterized in that: The coolant diffuser (202) is located above the radiator (201), and the coolant circulation drive component (3) is located below the radiator (201).

3. The self-circulating cooling device according to claim 2, characterized in that: The radiator (201) has a plurality of cooling liquid flow channels arranged along the height direction of the radiator (201).

4. The self-circulating cooling device according to claim 1, characterized in that: The heat dissipation component also includes an air cooling mechanism arranged on one side of the heat sink (201).

5. The self-circulating cooling device according to claim 4, characterized in that: The air cooling mechanism comprises a mounting plate (401) and a fan (402); the mounting plate (401) is arranged on one side of the radiator (201); a plurality of fans (402) are arranged on the mounting plate (401), and the air outlet side of the fan (402) faces the radiator (201).

6. The self-circulating cooling device according to claim 4, characterized in that: A heat insulation cover (203) is provided on a side of the air cooling mechanism away from the radiator (201).

7. The self-circulating cooling device according to any one of claims 1 to 6, characterized in that: The shell (1) is provided with a plurality of ventilation openings.

8. The self-circulating cooling device according to any one of claims 1 to 6, characterized in that: The coolant circulation driving component (3) is a circulating pump integrated with a pump box.

9. A self-circulating cooling system, comprising the self-circulating cooling device according to any one of claims 1 to 8, characterized in that: It also includes a cooling pipe assembly, wherein the inlet of the cooling pipe assembly is connected to the coolant outlet, and the outlet of the cooling pipe assembly is connected to the coolant diffusion inlet.

10. A vacuum unit, comprising the self-circulating cooling system according to claim 9, characterized in that: It also comprises a box body (6), in which a pump group and the self-circulating cooling system are arranged, and a cooling pipe component of the self-circulating cooling system is arranged around the outer wall of the pump group.

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