External water cooling device of molecular pump

Abstract

The utility model relates to the technical field of water cooling devices, and aims to provide an external water cooling device for a molecular pump. The external water cooling device for the molecular pump is flexible in structure and convenient to mount and dismount. The external molecular pump comprises a cooling pipeline assembly and a connecting assembly, the cooling pipeline assembly is arranged on the outer wall of the molecular pump and comprises a first cooling pipeline and a second cooling pipeline, one end of the first cooling pipeline is hinged to one end of the second cooling pipeline, and the other end of the first cooling pipeline is detachably connected with the other end of the second cooling pipeline. One of the first cooling pipeline and the second cooling pipeline is provided with a water inlet piece, and the other is provided with a water outlet piece; the connecting assembly comprises a connecting pipe, and the connecting pipe communicates with the first cooling pipeline and the second cooling pipeline. The external water cooling device solves the problems that in the prior art, the molecular pump is sleeved with a cylindrical rubber ring, the structure is cumbersome, and inconvenience is brought to mounting and dismounting work.

Description

Technical Field

[0001] The utility model relates to the technical field of water cooling devices, in particular to an external water cooling device for a molecular pump. Background Art

[0002] Molecular pumps are a type of pump that can be used to evacuate a vacuum and are widely used in various fields such as semiconductors, laboratory equipment, aerospace, etc. As the scope of use continues to expand, molecular pumps will also be used in harsh process conditions such as strong airborne impact.

[0003] In some process environments, such as industrial coating industries, after the molecular pump has pumped the process chamber to a given pressure, it is necessary to continuously introduce atmospheric-loaded process gases into the process chamber at full speed. These process gases will generate a large amount of heat and greatly increase the torque load during the collision with the high-speed blades of the molecular pump, that is, the load of the entire molecular pump is greatly increased.

[0004] In order to solve the problem of molecular pump heating, it is necessary to dissipate heat. At present, the cooling and heat dissipation methods of molecular pumps are mainly divided into natural cooling and forced cooling. Natural cooling is mainly dissipated through convection on the surface of the pump body such as the pump body and the pump casing to achieve the purpose of cooling the entire pump. Forced cooling is divided into air cooling and water cooling. The two methods are to add air cooling or water cooling additional modules and use efficient convection or heat conduction to cool the molecular pump. The existing molecular pump external water cooling device that uses water cooling to cool the molecular pump is to wrap a cylindrical rubber ring on the outer wall of the molecular pump. The rubber ring has a water inlet and a drain port, and a water tank inside. The molecular pump is cooled and dissipated by cooling water flowing in the water tank. This external water cooling device has a bulky structure and will bring inconvenience to installation and disassembly. Utility Model Content

[0005] Therefore, the technical problem to be solved by the utility model is to overcome the defects of the molecular pump external water cooling device in the prior art that a cylindrical rubber ring is sleeved on the molecular pump, which has a bulky structure and brings inconvenience to the installation and disassembly work, thereby providing a molecular pump external water cooling device with a flexible structure and easy installation and disassembly.

[0006] In order to solve the above problems, the utility model provides an external water cooling device for a molecular pump, comprising:

[0007] A cooling pipeline assembly, the cooling pipeline assembly is arranged on the outer wall of the molecular pump, and comprises: a first cooling pipeline and a second cooling pipeline, one end of the first cooling pipeline is hinged with one end of the second cooling pipeline, the other end of the first cooling pipeline is detachably connected with the other end of the second cooling pipeline, and one of the first cooling pipeline and the second cooling pipeline is provided with a water inlet part, and the other is provided with a water outlet part;

[0008] A connecting assembly includes a connecting pipe, and the connecting pipe is connected to the first cooling pipeline and the second cooling pipeline.

[0009] Optionally, a first connecting seat is provided at the other end of the first cooling pipeline, and a second connecting seat is provided at the other end of the second cooling pipeline. The first connecting seat and the second connecting seat are detachably connected via a locking assembly.

[0010] Optionally, the locking assembly includes: a pivot bolt and a butterfly nut, one end of the pivot bolt is hinged to the first connecting seat or the second connecting seat, and the other end passes through the second connecting seat or the first connecting seat and is provided with the butterfly nut.

[0011] Optionally, the first connecting seat or the second connecting seat is provided with a connecting hole, the axial direction of the connecting hole is parallel to the axial direction of the molecular pump, the connecting hole is provided with a pin shaft, the living bolt is hinged to the pin shaft, and the shoulder of the pin shaft is clamped with the first connecting seat or the second connecting seat, and a cotter pin is provided at the end away from the shoulder.

[0012] Optionally, one end of the first cooling pipeline and one end of the second cooling pipeline are hingedly connected via a hinge.

[0013] Optionally, the first cooling pipeline and the second cooling pipeline are both semicircular in shape when projected along the axial direction of the molecular pump.

[0014] Optionally, two ends of the connecting pipe are respectively connected to the first cooling pipeline and the second cooling pipeline through connecting pieces.

[0015] Optionally, the connecting member includes connecting threaded ends arranged on the first cooling pipeline and the second cooling pipeline, and a connecting pipe joint is arranged at the connecting threaded end, and the connecting pipe joint is connected to the connecting pipe.

[0016] Optionally, the water inlet component includes a water inlet threaded end provided on the first cooling pipeline or the second cooling pipeline, and a water inlet pipe joint is provided at the water inlet threaded end.

[0017] Optionally, the water outlet component includes a water outlet threaded end provided on the first cooling pipeline or the second cooling pipeline, and a water outlet pipe joint is provided at the water outlet threaded end.

[0018] The utility model has the following advantages:

[0019] 1. The molecular pump external water cooling device provided by the utility model comprises: a cooling pipeline assembly and a connecting assembly. The cooling pipeline assembly is arranged on the outer wall of the molecular pump, and comprises: a first cooling pipeline and a second cooling pipeline, one end of the first cooling pipeline is hinged with one end of the second cooling pipeline, and the other end of the first cooling pipeline is detachably connected with the other end of the second cooling pipeline. Since one end of the first cooling pipeline and the second cooling pipeline are hinged and the other end is detachable, it is convenient to install and disassemble the water cooling device.

[0020] One of the first cooling pipeline and the second cooling pipeline is provided with a water inlet, and the other is provided with a water outlet. The connecting assembly includes a connecting pipe, which is connected to the first cooling pipeline and the second cooling pipeline. External water supply enters the water cooling device through the water inlet, and the cooling water can flow in the first cooling pipeline and the second cooling pipeline through the connecting pipe, and then is discharged from the outside of the water cooling device through the water outlet. This water cooling device is coated on the outer wall of the molecular pump, and the molecular pump is cooled by the cooling water flowing in the first cooling pipeline, the connecting pipe and the second cooling pipeline. And because one end of the first cooling pipeline and the second cooling pipeline are hinged and the other end is detachably connected, the structure is flexible and can be disassembled, which is convenient for installation and disassembly, can reduce the difficulty of work, and save work time.

[0021] 2. The external water cooling device for the molecular pump provided by the utility model has a first connecting seat provided at the other end of the first cooling pipeline, and a second connecting seat provided at the other end of the second cooling pipeline. The first connecting seat and the second connecting seat are connected by a locking assembly to realize the detachable connection between the first cooling pipeline and the second cooling pipeline. The locking assembly includes: a pin shaft, a cotter pin, a swing bolt and a butterfly nut. The first connecting seat or the second connecting seat is provided with a connecting hole, the pin shaft is provided in the connecting hole, and the shoulder of the pin shaft is engaged with the first connecting seat or the second connecting seat, and a cotter pin is provided at the end away from the shoulder. One end of the swing bolt is hinged to the pin shaft, and the other end passes through the second connecting seat or the first connecting seat and is provided with a butterfly nut. When installing the water cooling device, the first cooling pipeline and the second cooling pipeline are sleeved on the outer wall of the molecular pump, and then the pin shaft is passed through the connecting hole and the swing bolt, and then a cotter pin is provided to fix the pin shaft. The other end of the swing bolt passes through the connection seat without a connection hole, and is fixed by locking with a butterfly nut to realize the connection between the first cooling pipeline and the second cooling pipeline; when disassembling the water cooling device, the butterfly nut and the split pin are removed, and then the pin shaft and the swing bolt are removed, and the first cooling pipeline and the second cooling pipeline can be removed from the molecular pump. This locking assembly can realize the detachable connection between the first cooling pipeline and the second cooling pipeline, and is easy to operate.

[0022] 3. In the molecular pump external water cooling device provided by the utility model, the first cooling pipeline and the second cooling pipeline are both semi-circular in shape along the axial projection of the molecular pump, and can be coated on the outer wall surface of the molecular pump, so as to achieve good heat dissipation effect.

[0023] 4. The external water cooling device for the molecular pump provided by the utility model has a water inlet component which is a water inlet threaded end provided on the first cooling pipeline or the second cooling pipeline, and a water inlet pipe joint is provided at the water inlet threaded end. The water outlet component is a water outlet threaded end provided on the first cooling pipeline or the second cooling pipeline, and a water outlet pipe joint is provided at the water outlet threaded end. The water inlet pipe joint and the water outlet pipe joint can be directly connected to the water inlet pipe and the water outlet pipe of the molecular pump, which is convenient and quick. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 This is a front view of the external water cooling device of the molecular pump of the utility model;

[0026] Figure 2 This is a bottom view of the external water cooling device of the molecular pump of the utility model;

[0027] Figure 3 It is a cross-sectional view of the external water cooling device of the molecular pump of the utility model.

[0028] Description of reference numerals:

[0029] 1. first cooling pipeline, 111. water inlet threaded end, 112. water inlet pipe joint, 12. first connecting seat;

[0030] 2. second cooling pipeline, 211. water outlet threaded end, 212. water outlet pipe joint, 22. second connecting seat;

[0031] 3. Connecting pipe;

[0032] 41. live bolt, 42. butterfly nut, 43. pin, 44. cotter pin;

[0033] 5. Hinge;

[0034] 61. Connect the threaded end, 62. Connect the pipe joint. DETAILED DESCRIPTION

[0035] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0036] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0037] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0038] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0039] like Figures 1 to 3 As shown, it is a preferred embodiment of the external water cooling device for molecular pumps of the utility model. This external water cooling device for molecular pumps can be used for cooling and dissipating the heat of molecular pumps. Since this external water cooling device for molecular pumps has a simple and flexible structure, it is easy to install and disassemble.

[0040] The above-mentioned molecular pump external water cooling device includes: a cooling pipeline assembly and a connecting assembly. The cooling pipeline assembly is arranged on the outer wall of the molecular pump, and the cooling pipeline assembly includes: a first cooling pipeline 1 and a second cooling pipeline 2, one end of the first cooling pipeline 1 located on the same side of the molecular pump is hinged with one end of the second cooling pipeline 2, and the other end of the first cooling pipeline 1 located on the other side of the molecular pump is detachably connected with the other end of the second cooling pipeline 2, that is, the other end of the first cooling pipeline 1 and the other end of the second cooling pipeline 2 can be connected together or disassembled, which is convenient for the assembly and disassembly of the cooling pipeline assembly. In addition, one of the first cooling pipeline 1 and the second cooling pipeline 2 is provided with a water inlet part, and the other is provided with a water outlet part, which is connected with the external water supply and drainage pipelines through the water inlet part and the water outlet part to realize water circulation in the water cooling device. And since the first cooling pipeline 1 and the second cooling pipeline 2 are not directly connected, they are connected through the connecting assembly. The connecting assembly includes a connecting pipe 3, and the connecting pipe 3 is connected with the first cooling pipeline 1 and the second cooling pipeline 2. When installing the water cooling device, first disassemble the other end of the first cooling pipeline 1 from the other end of the second cooling pipeline 2, then rotate around the hinge point to expand the distance between the first cooling pipeline 1 and the second cooling pipeline 2, so as to cover the first cooling pipeline 1 and the second cooling pipeline 2 on the outer wall of the molecular pump, and then connect the other end of the first cooling pipeline 1 with the other end of the second cooling pipeline 2 to complete the connection between the water cooling device and the molecular pump. The water inlet and the water outlet are respectively connected to the external water supply pipeline and the drainage pipeline, and the cooling water enters the water cooling device from the water inlet, passes through the first cooling pipeline 1, the connecting pipe 3 and the second cooling pipeline 2, and performs heat exchange on the outer wall of the molecular pump to achieve the purpose of cooling and heat dissipation, and then the cooling water is discharged from the water outlet. When the water cooling device needs to be disassembled, disassemble the other end of the first cooling pipeline 1 from the other end of the second cooling pipeline 2, then rotate around the hinge point to expand the distance between the first cooling pipeline 1 and the second cooling pipeline 2, and remove the water cooling device from the molecular pump. The overall structure of the molecular pump external water cooling device is flexible and can be connected or disassembled, so it is convenient to install it on the molecular pump or remove it from the molecular pump.

[0041] Furthermore, the first cooling pipeline 1 and the second cooling pipeline 2 have the same shape, and the first cooling pipeline 1 and the second cooling pipeline 2 are both semi-circular in shape when projected along the axial direction of the molecular pump, so that the inner wall surface of the first cooling pipeline 1 and the second cooling pipeline 2 can fit with the outer wall surface of the molecular pump to dissipate heat and cool in time. In addition, in this embodiment, the water inlet component is arranged on the first cooling pipeline 1, and the water outlet component is arranged on the second cooling pipeline 2.

[0042] Specifically, the water inlet component includes: a water inlet threaded end 111 and a water inlet pipe joint 112. The water inlet threaded end 111 is arranged on the first cooling pipeline 1. The water inlet threaded end 111 can be integrally formed with the first cooling pipeline 1, or can be arranged on the first cooling pipeline 1 later by welding or other methods, but it is necessary to ensure that the connection is sealed and does not leak. The water inlet pipe joint 112 is arranged at the water inlet threaded end 111. The water inlet pipe joint 112 can be a straight pipe joint with external threads at both ends. The external thread at one end of the water inlet pipe joint 112 is connected to the internal thread of the water inlet threaded end 111, and the other end can be connected to an external water supply pipeline.

[0043] The structure of the water outlet part is similar to that of the water inlet part. The water outlet part includes: a water outlet threaded end 211 and a water outlet pipe joint 212. The water outlet threaded end 211 is arranged on the second cooling pipeline 2. The water outlet threaded end 211 can be integrally formed with the second cooling pipeline 2, or can be subsequently arranged on the second cooling pipeline 2 by welding or other methods, but it is necessary to ensure that the connection is sealed and does not leak. The water outlet threaded end 211 is provided with a water outlet pipe joint 212. The water outlet pipe joint 212 can be a straight pipe joint with external threads at both ends. The external thread at one end of the water outlet pipe joint 212 is connected to the internal thread of the water outlet threaded end 211, and the other end can be connected to an external drainage pipeline.

[0044] Since the molecular pump itself is provided with a water inlet pipe and a water outlet pipe, the water inlet pipe and the water outlet pipe can be directly connected to the water inlet component and the water outlet component. Specifically, the water outlet pipe on the molecular pump is connected to the water inlet component to supply water to the water cooling device, and the water inlet pipe on the molecular pump is connected to the water outlet component to discharge the water in the water cooling device.

[0045] In other embodiments, the water supply pipeline and the drainage pipeline may be separately provided without using the water pipe of the molecular pump itself.

[0046] In other embodiments, the water inlet component may also be disposed on the second cooling pipeline 2, and the water outlet component may also be disposed on the first cooling pipeline 1, and the flow direction of the cooling water is then changed in the opposite direction.

[0047] like Figure 1 As shown, one end of the first cooling pipeline 1 and one end of the second cooling pipeline 2 are hingedly connected by a hinge 5. When the other end of the first cooling pipeline 1 and the other end of the second cooling pipeline 2 are not connected together, the first cooling pipeline 1 and the second cooling pipeline 2 can rotate around the hinge point.

[0048] In other embodiments, one end of the first cooling pipeline 1 and one end of the second cooling pipeline 2 may also be hingedly connected via a structure such as a pivot.

[0049] Furthermore, a first connecting seat 12 is provided at the other end of the first cooling pipeline 1, and a second connecting seat 22 is provided at the other end of the second cooling pipeline 2. The first connecting seat 12 and the second connecting seat 22 are connected by a locking assembly. The locking assembly is provided to achieve a detachable connection between the first cooling pipeline 1 and the second cooling pipeline 2.

[0050] Specifically, the locking assembly includes: a pin 43, a cotter pin 44, a hinge bolt 41 and a butterfly nut 42. A connecting hole is provided on the first connecting seat 12, and the axial direction of the connecting hole is parallel to the axial direction of the molecular pump. The connecting hole is provided with a pin 43, and the shoulder of the pin 43 is engaged with the first connecting seat 12. A cotter pin 44 is provided at one end of the pin 43 away from the shoulder, so that the pin 43 can be fixed and the pin 43 will not be separated from the connecting hole. One end of the hinge bolt 41 is hinged to the pin 43, and the other end passes through the second connecting seat 22, and a butterfly nut 42 is provided at the end of the hinge bolt 41 extending out of the second connecting seat 22, and the hinge bolt 41 is fixed by the butterfly nut 42.

[0051] When installing the first cooling pipeline 1 and the second cooling pipeline 2, first place the first cooling pipeline 1 and the second cooling pipeline 2 close to the outer wall of the molecular pump, then insert the pin 43 into the connecting hole of the first connecting seat 12, and allow the hinge bolt 41 to be hingedly connected with the pin 43. Then, the cotter pin 44 is set on the pin 43 to complete the fixation of the pin 43. Finally, a butterfly nut 42 is set and tightened at the end of the hinge bolt 41 passing through the second connecting seat 22, so that the installation of the first cooling pipeline 1 and the second cooling pipeline 2 is completed, so that the first cooling pipeline 1 and the second cooling pipeline 2 are set on the outer wall of the molecular pump and will not slip or detach from the molecular pump. When removing the first cooling pipeline 1 and the second cooling pipeline 2, the process is opposite, remove the butterfly nut 42 and the cotter pin 44, then remove the hinge bolt 41 and the pin 43, and the other end of the first cooling pipeline 1 and the other end of the second cooling pipeline 2 can be separated, and the first cooling pipeline 1 and the second cooling pipeline 2 can be taken away from the outer wall of the molecular pump.

[0052] Of course, in other embodiments, a connecting hole can also be set in the second connecting seat 22, and a pin shaft 43 can be set in the connecting hole of the second connecting seat 22. The movable bolt 41 is hinged to the second connecting seat 22 through the pin shaft 43, and the other end passes through the first connecting seat 12 and a butterfly nut 42 is set.

[0053] In other embodiments, the locking assembly may not be provided, and the first cooling pipeline 1 and the second cooling pipeline 2 may be connected by means of a buckle or other structure, which can also achieve a detachable connection.

[0054] Since one end of the first cooling pipeline 1 and the second cooling pipeline 2 are hinged and the other end is provided with a locking component, the first cooling pipeline 1 and the second cooling pipeline 2 are not directly connected, and the cooling water cannot circulate in the first cooling pipeline 1 and the second cooling pipeline 2. Therefore, a connecting component is provided to connect the first cooling pipeline 1 and the second cooling pipeline 2.

[0055] The connection assembly includes: a connecting pipe 3 and a connecting piece. The two ends of the connecting pipe 3 are connected to the first cooling pipeline 1 and the second cooling pipeline 2 respectively through the connecting piece. The connecting piece includes a connecting threaded end 61 arranged on the first cooling pipeline 1 and the second cooling pipeline 2. The connecting threaded end 61 can be integrally formed with the first cooling pipeline 1 and the second cooling pipeline 2, or can be subsequently arranged on the cooling pipeline by welding or other methods, but it is necessary to ensure that the connection is sealed and does not leak. A connecting pipe joint 62 is provided at the connecting threaded end 61. The external thread at one end of the connecting pipe joint 62 is connected to the internal thread of the water inlet threaded end 111, and the other end can be connected to the connecting pipe 3.

[0056] Specifically, the connecting pipe 3 is a curved pipe, and its curvature matches the first cooling pipeline 1 and the second cooling pipeline 2. The connecting pipe 3 can preferably be a PU pipe (POLYURETHANE TUBING). To facilitate the connection between the connecting pipe 3 and the connecting pipe joint 62, the connecting pipe joint 62 can be a 90° right-angle pipe joint.

[0057] In other embodiments, the two ends of the connecting pipe 3 may be made into a 90° right angle shape, and the connecting pipe joint 62 may be a straight pipe joint.

[0058] The following is a description of the use of the external water cooling device of the molecular pump in this embodiment:

[0059] First, the water cooling device needs to be installed on the molecular pump, the first cooling pipeline 1 and the second cooling pipeline 2 are attached to the outer wall of the molecular pump, and then the first cooling pipeline 1 and the second cooling pipeline 2 are connected and fixed to the molecular pump through a locking component.

[0060] The water inlet is connected to the external water supply pipeline, and the water outlet is connected to the external drainage pipeline. Cooling water is supplied to the water cooling device through the water inlet, and the cooling water flows through the first cooling pipeline 1, the connecting pipe 3, and the second cooling pipeline 2 to cool and dissipate the outer wall of the molecular pump. Finally, the cooling water is discharged from the water outlet to the outside of the water cooling device. During the use of the molecular pump, the molecular pump can be continuously cooled by continuously supplying water to the water cooling device.

[0061] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A molecular pump external water cooling device, characterized in that: include: A cooling pipeline assembly, the cooling pipeline assembly being arranged on the outer wall of the molecular pump, comprising: a first cooling pipeline (1) and a second cooling pipeline (2), one end of the first cooling pipeline (1) being hinged to one end of the second cooling pipeline (2), the other end of the first cooling pipeline (1) being detachably connected to the other end of the second cooling pipeline (2), and one of the first cooling pipeline (1) and the second cooling pipeline (2) being provided with a water inlet component, and the other being provided with a water outlet component; A connecting assembly, comprising a connecting pipe (3), wherein the connecting pipe (3) is connected to the first cooling pipeline (1) and the second cooling pipeline (2).

2. The molecular pump external water cooling device according to claim 1, characterized in that: The other end of the first cooling pipeline (1) is provided with a first connecting seat (12), and the other end of the second cooling pipeline (2) is provided with a second connecting seat (22); the first connecting seat (12) and the second connecting seat (22) are detachably connected via a locking assembly.

3. The molecular pump external water cooling device according to claim 2, characterized in that: The locking assembly comprises: a hinge bolt (41) and a butterfly nut (42); one end of the hinge bolt (41) is hinged to the first connecting seat (12) or the second connecting seat (22), and the other end passes through the second connecting seat (22) or the first connecting seat (12) and is provided with the butterfly nut (42).

4. The molecular pump external water cooling device according to claim 3, characterized in that: The first connecting seat (12) or the second connecting seat (22) is provided with a connecting hole, the axial direction of the connecting hole is parallel to the axial direction of the molecular pump, the connecting hole is provided with a pin shaft (43), the movable bolt (41) is hinged to the pin shaft (43), and the shoulder of the pin shaft (43) is clamped with the first connecting seat (12) or the second connecting seat (22), and a cotter pin (44) is provided at the end away from the shoulder.

5. The molecular pump external water cooling device according to claim 1, characterized in that: One end of the first cooling pipeline (1) and one end of the second cooling pipeline (2) are hingedly connected via a hinge (5).

6. The molecular pump external water cooling device according to claim 1, characterized in that: The first cooling pipeline (1) and the second cooling pipeline (2) are both semi-circular in shape when projected along the axial direction of the molecular pump.

7. The molecular pump external water cooling device according to claim 1, characterized in that: Both ends of the connecting pipe (3) are respectively connected to the first cooling pipeline (1) and the second cooling pipeline (2) through connecting pieces.

8. The molecular pump external water cooling device according to claim 7, characterized in that: The connecting piece comprises a connecting threaded end (61) arranged on the first cooling pipeline (1) and the second cooling pipeline (2), a connecting pipe joint (62) being arranged at the connecting threaded end (61), and the connecting pipe joint (62) is connected to the connecting pipe (3).

9. The molecular pump external water cooling device according to any one of claims 1 to 8, characterized in that: The water inlet component comprises a water inlet threaded end (111) arranged on the first cooling pipeline (1) or the second cooling pipeline (2), and a water inlet pipe joint (112) is arranged at the water inlet threaded end (111).

10. The molecular pump external water cooling device according to any one of claims 1 to 8, characterized in that: The water outlet component comprises a water outlet threaded end (211) arranged on the first cooling pipeline (1) or the second cooling pipeline (2), and a water outlet pipe joint (212) is arranged at the water outlet threaded end (211).

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