Silicon wafer and flower basket drying equipment

Abstract

The utility model discloses silicon wafer and flower basket drying equipment. The silicon wafer and flower basket drying equipment comprises a drying mechanism and a conveying mechanism, wherein the conveying mechanism penetrates through the drying mechanism so as to input and output a flower basket for placing silicon wafers into and out of the drying mechanism; the discharging mechanism is arranged on a discharging section of the conveying mechanism, and the discharging mechanism is used for discharging and weighing the silicon wafers and the flower baskets which are input into the drying mechanism by the conveying mechanism; according to the utility model, the problems of small one-time silicon wafer drying amount and low drying efficiency in the way of carrying the flower basket through a manipulator can be solved, and the problems of low drying efficiency and low cleanliness in the traditional drying way adopting hot air drying can be solved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production, in particular to silicon wafer and flower basket drying equipment. Background Art

[0002] Silicon wafer and flower basket drying equipment is used to dry silicon wafers. In the processing of silicon wafers, drying is a very important link because it can ensure the surface of the silicon wafer is clean and dry, thereby improving its performance and reliability. Traditional drying equipment is generally trough drying. The process of drying silicon wafers is as follows: load the silicon wafers on the flower basket, use a robot to put the flower basket into the drying trough, use hot air to dry the flower basket and the silicon wafers on the flower basket, and then use a robot to take the flower basket out of the trough after drying. However, the method of transporting the flower basket by a robot has the problem of small amount of silicon wafers dried at one time and low drying efficiency. At the same time, traditional drying uses hot air drying, which has the problems of low drying efficiency and low cleanliness. Utility Model Content

[0003] In order to overcome the above shortcomings, the purpose of the utility model is to provide a silicon wafer and flower basket drying device.

[0004] In order to achieve the above objectives, the technical solution adopted by the utility model includes:

[0005] A drying mechanism and a conveying mechanism, wherein the conveying mechanism passes through the drying mechanism to input and output the flower baskets containing the silicon wafers into and out of the drying mechanism;

[0006] A material unloading mechanism is arranged in the unloading section of the conveying mechanism, and is used to unload and weigh the silicon wafers and flower baskets input by the conveying mechanism into the drying mechanism.

[0007] The flower basket loaded with silicon wafers is sent into the drying mechanism through the conveying mechanism. After the drying mechanism finishes drying the silicon wafers located in the middle section of the conveying mechanism, the conveying mechanism can transport the silicon wafers out of the drying mechanism and place them in the unloading section of the conveying mechanism. At this time, the flower basket at the end of the conveying mechanism can be taken out of the conveying chain plate through the unloading mechanism and weighed. It has the characteristics of simple structure, convenient operation and high drying efficiency.

[0008] In the preferred technical solution of the above-mentioned silicon wafer and flower basket drying equipment, the drying mechanism at least includes an oven body, a heating component arranged in the oven body, and an exhaust device and an air intake device connected to the interior of the oven body.

[0009] In the preferred technical solution of the above-mentioned silicon wafer and flower basket drying equipment, the conveying mechanism at least includes a bracket, a conveying chain plate rotatably mounted on the bracket, a driving device for driving the conveying chain plate to rotate, and a carrier arranged on the conveying chain plate, and the carrier is used to carry the flower basket.

[0010] In the preferred technical solution of the above-mentioned silicon wafer and flower basket drying equipment, the unloading mechanism at least includes a carrier arranged on the unloading section of the conveying mechanism, a first linear module arranged on the carrier and located below the conveying mechanism, a lifting device driven by the first linear module, and a conveying module arranged on the carrier and extending to the top of the conveying mechanism, and the conveying module is used to convey the flower basket of the unloading section of the conveying mechanism to the carrier.

[0011] In the preferred technical solution of the above-mentioned silicon wafer and flower basket drying equipment, the loading rack is provided with a weighing platform on the side away from the unloading section of the conveying mechanism.

[0012] In the preferred technical solution of the above-mentioned silicon wafer and flower basket drying equipment, the lifting device supports the flower basket loaded with silicon wafers through a tray.

[0013] In the preferred technical solution of the above-mentioned silicon wafer and flower basket drying equipment, a plurality of first air inlet ducts are evenly arranged on the inner bottom surface of the oven body, and the air inlet device is connected to the first air inlet duct via a second air inlet duct.

[0014] In the preferred technical solution of the above-mentioned silicon wafer and flower basket drying equipment, a plurality of first air outlet ducts connected to the interior of the oven body are evenly arranged on the top surface of the oven body, and the exhaust device is connected to the first air outlet duct through a second air outlet duct.

[0015] In the preferred technical solution of the above silicon wafer and flower basket drying equipment, the heating component is composed of one or more of heating wires or heating tubes. The present application adopts the heating wire and heating tube for heat radiation drying, which can effectively improve the drying cleanliness of silicon wafers.

[0016] In the preferred technical solution of the above-mentioned silicon wafer and flower basket drying equipment, the first air inlet duct is arranged at the bottom of the heating component so that: the airflow blown out through the first air inlet duct passes through the heating component.

[0017] The beneficial effects of the utility model are that a flower basket loaded with silicon wafers is sent into an oven body for drying by a conveyor chain plate; after the silicon wafers are dried, the flower basket is sent out of the oven body by a conveyor chain plate, and the flower basket is unloaded by a handling module, a first linear module and a lifting device; because the conveyor chain plate can withstand a large load, the utility model can send a large number of silicon wafers into the oven body for drying at one time, and has the characteristics of simple structure, convenient operation, high silicon wafer drying efficiency and high degree of automation; in addition, the utility model dries the silicon wafers and the flower basket by means of heat radiation from a heating wire, and has the characteristics of high drying efficiency, low energy consumption and high drying cleanliness. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is the front view of the utility model;

[0019] Figure 2 It is a top view of the utility model;

[0020] Figure 3 It is the connection relationship diagram between the conveyor chain plate and the carrier;

[0021] Figure 4 It is a position relationship diagram of the first linear module, the lifting device and the flower basket;

[0022] Figure 5 It is a right view of the first linear module, the lifting device and the flower basket;

[0023] Figure 6 It is a front view of the first linear module, the lifting device and the flower basket;

[0024] Figure 7 It is a top view of the first linear module, the lifting device and the flower basket;

[0025] Figure 8 It is the right view of the blanking mechanism;

[0026] Fig. 9 It is the structural relationship diagram of the unloading mechanism and the conveying chain plate;

[0027] Fig.10 The connection between the conveyor chain and the flower basket Figure 1 ;

[0028] Fig.11 The connection between the conveyor chain and the flower basket Figure 2 ;

[0029] Fig.12 It is the connection diagram between the flower basket and the silicon wafer;

[0030] In the figure:

[0031] Silicon wafer 101, flower basket 102;

[0032] Drying mechanism 1, oven body 11, exhaust device 12, first air outlet duct 121, second air outlet duct 122, air inlet device 13;

[0033] Conveying mechanism 2, bracket 21, conveying chain plate 22, carrier 23;

[0034] Unloading mechanism 3, loading rack 31, first linear module 32, lifting device 33, tray 34, transport module 35, second linear module 351, gripper 352, lifting device 353;

[0035] Weighing platform 4. DETAILED DESCRIPTION

[0036] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the protection scope of the present invention.

[0037] It should be noted that in the description of the present invention, the terms "upper", "lower", "left", "right", "front", "rear" and the like indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, which are only for the convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0038] In addition, it should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] like Figures 1 to 12 As shown, the silicon wafer 101 drying device of the utility model comprises: a drying mechanism 1 and a conveying mechanism 2, the conveying mechanism 2 passes through the drying mechanism 1 to input and output the flower basket 102 on which the silicon wafers 101 are placed into and out of the drying mechanism 1, the conveying mechanism 2 at least comprises a bracket 21, a conveying chain plate 22 rotatably mounted on the bracket 21, a driving device for driving the conveying chain plate 22 to rotate, and a carrier 23 arranged on the conveying chain plate 22, the carrier 23 is used to carry the flower basket 102; a feeding mechanism 3, the feeding mechanism 3 is arranged in the feeding section of the conveying mechanism 2, and the feeding mechanism 3 is used to feed the silicon wafers 101 and the flower basket 102 input by the conveying mechanism 2 into the drying mechanism 1 for feeding and weighing.

[0040] See also Fig.12, the silicon wafer 101 is placed on the flower basket 102 , that is, when the silicon wafer 101 is transported from the cleaning production line to the drying equipment, the silicon wafer 101 is always stored on the flower basket 102 .

[0041] See also Figures 1 to 3 The conveying mechanism 2 includes a bracket 21 and a conveying chain plate 22 rotatably configured on the bracket 21. The chain plate replaces the chain or conveyor belt and utilizes the strength of the conveying chain plate 22, so that the conveying mechanism 2 can convey more flower baskets 102 at one time, thereby improving the drying efficiency of the silicon wafers 101; the conveying mechanism 2 also includes a driving device for controlling the rotation of the chain plate, and the driving device can be a servo motor, which is connected to the conveying chain plate 22 through a sprocket; in addition, a carrier 23 for receiving the flower basket 102 is also installed on the conveying chain plate 22. By receiving the flower basket 102 by the carrier 23, the stability of the flower basket 102 during the conveying process can be guaranteed, and the safety of the silicon wafer 101 during the conveying process can be improved.

[0042] See also Figure 1 , Figures 4 to 7 After the drying mechanism has finished drying the silicon wafer 101 located in the middle section of the conveying mechanism 2, the conveying mechanism 2 can transport the silicon wafer 101 out of the drying mechanism 1 and place it in the unloading section of the conveying mechanism 2. At this time, the flower basket 102 at the end of the conveying mechanism 2 can be taken out of the conveying chain plate 22 through the unloading mechanism 3 and weighed. It has the advantages of simple structure, convenient operation, and large drying capacity of one-time silicon wafers 101.

[0043] In one or more embodiments, the drying mechanism 1 at least includes an oven body 11 , a heating component disposed in the oven body 11 , and an exhaust device 12 and an air intake device 13 connected to the interior of the oven body 11 .

[0044] See also Figure 1 , Figure 2 The heating components are evenly arranged in the oven body 11, or evenly arranged below the oven body 11. The heating components can be one or more of heating wires or heating tubes. The silicon wafer 101 is heated by radiation heating. The exhaust device 12 and the air inlet device 13 configured on the oven body 11 can ensure the airflow in the oven body 11 and improve the drying effect of the silicon wafer 101.

[0045] In one or more embodiments, a plurality of first air inlet ducts are evenly arranged on the inner bottom surface of the oven body 11, and the air inlet device 13 is connected to the first air inlet ducts through the second air inlet ducts.

[0046] It should be noted that there are multiple first air inlet ducts so that the air outlets of the multiple first air inlet ducts are evenly arranged on the bottom surface of the oven body 11. The air inlet device 13 connects several first air inlet ducts through the second air inlet duct. The air inlet device 13 can be a blower. Through this arrangement, uniform flow of air in the oven body 11 can be achieved, ensuring the drying effect of the silicon wafers 101 at different positions.

[0047] In a possible implementation, the first air inlet duct is arranged at the bottom of the heating component in the oven body so that: the airflow blown out through the first air inlet duct passes through the heating component. Through this arrangement, the airflow blown into the oven body 11 through the first air inlet duct can be heated once by the heating component, and the hot air flow acts on the surface of the silicon wafer 101 to accelerate the drying efficiency of the silicon wafer 101. At the same time, the present application can greatly improve the drying efficiency of the silicon wafer 101 and the flower basket 102 by means of hot air flow and heat radiation of the heating wire, improve the drying efficiency of the present application, and can effectively reduce energy consumption and reduce the production cost of the enterprise compared with the traditional hot air drying method.

[0048] In one or more embodiments, a plurality of first air outlet ducts 121 connected to the interior of the oven body 11 are evenly arranged on the top surface of the oven body 11 , and the exhaust device 12 is connected to the first air outlet duct 121 via the second air outlet duct 122 .

[0049] See also Figure 1 , Figure 2 By evenly arranging a plurality of first air outlet pipes 121 on the top of the oven body 11, the exhaust device 12 evenly extracts the airflow in the oven body 11, thereby ensuring the stability of the airflow in the oven body 11; in addition, the present application performs air intake from bottom to top in the oven body 11, and extracts the airflow in the oven body 11 through the exhaust device 12 on the top of the oven body 11, thereby accelerating the airflow flow rate in the oven body 11, ensuring the flow of the airflow in the oven body 11, and improving the drying effect on the silicon wafer 101.

[0050] In one or more embodiments, the unloading mechanism 3 at least includes a carrier 31 arranged in the unloading section of the conveying mechanism 2, a first linear module 32 arranged on the carrier 31 and relatively located below the conveying mechanism 2, a lifting device 33 driven by the first linear module 32, and a transport module 35 arranged on the carrier 31 and extending to the top of the unloading section of the conveying mechanism 2, and the transport module 35 is used to transport the flower basket 102 of the unloading section of the conveying mechanism 2 to the carrier 31.

[0051] See also Figures 4 to 8 The lifting device 33 is a lifting cylinder, and a tray 34 is disposed at the extended shaft end of the lifting cylinder. The top surface of the tray 34 is adapted to the bottom of the flower basket 102 to stably support the flower basket 102 .

[0052] The transport module 35 is installed above the carrier 31, and the transport module 35 can extend on the carrier 31 to just above the unloading section of the conveyor chain plate 22; the transport module 35 at least includes a second linear module 351 configured on the carrier 31, a gripper 352 and a lifting device 353 synchronously driven by the second linear module 351, wherein the lifting device 353 is used to control the vertical movement of the gripper 352, the lifting device 353 can be a driving cylinder, and the gripper 352 can be a clamping cylinder, and the specific types of the lifting device 353 and the gripper 352 are not limited.

[0053] After the silicon wafers 101 are dried, the flower basket 102 loaded with the silicon wafers 101 is transported to the unloading section by the conveying chain plate 22, and the lifting device 353 and the gripper 352 are controlled by the second linear module 351 to move from the top of the carrier 31 to the unloading section of the conveying chain plate 22. Thereafter, the lifting device 353 controls the gripper 352 to move downward, and the gripper 352 grabs the flower basket 102, and then the lifting device 353 is used to lift the gripper 352 and the flower basket 102, and the second linear module 351 is used to transport the flower basket to the top of the carrier 31, and then, The lifting device 353 controls the gripper 352 and the flower basket 102 to move downward to be placed on the loading rack 31, and the first linear module 32 controls the lifting device 33 to move to the bottom of the flower basket 102, and then controls the lifting device 33 to move upward so that the tray 34 supports the flower basket 102, and the first linear module 32 controls the lifting device 33 and the flower basket 102 to be away from the conveying chain plate 22, so as to realize the unloading of the flower basket 102 and the silicon wafers 101; in this way, the mechanization degree of drying the silicon wafers 101 can be effectively improved, and the unloading efficiency of the silicon wafers 101 can be accelerated.

[0054] It should be noted that the first linear module 32 and the second linear module 351 are synchronous belt driven. In other possible implementations, the first linear module 32 and the second linear module 351 can also be ball screw linear transmission mechanisms, linear motion modules, linear slides, etc.

[0055] In one or more embodiments, a weighing platform 4 is disposed on the side of the carrier 31 away from the unloading section of the conveying mechanism 2 .

[0056] It should be noted that the weighing platform 4 uses a gravity sensor to weigh the flower basket 102 and the silicon wafers 101 on the flower basket 102. When the total weight of the flower basket 102 and the silicon wafers 101 placed on the flower basket 102 is within a predetermined range, the drying standard is met.

[0057] The weighing of the flower basket 102 and the silicon wafer 101 is carried out on the object carrier 31, and the specific process is as follows:

[0058] After the flower basket 102 of the unloading section of the conveyor chain plate 22 is transported to the loading rack 31 by the transport module 35, the jacking device 33 is controlled by the first linear module 32 to move to the bottom of the flower basket 102, and then the jacking device 33 is controlled to move upward so that the tray 34 supports the flower basket 102. The first linear module 32 is used to control the flower basket 102 and the silicon wafer 101 to be located above the weighing platform 4. At this time, the jacking device 33 drives the flower basket 102 to move downward so that the flower basket 102 is located on the weighing platform 4. The gravity sensor configured on the weighing platform 4 can be used to measure the weight of the flower basket 102 and the silicon wafer 101. After the measurement is completed, the flower basket 102 is lifted up by the jacking device 33, and the flower basket 102 is moved out of the weighing platform 4 by the first linear module 32.

[0059] The above implementation modes are only for illustrating the technical concept and features of the utility model, and their purpose is to allow people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A silicon wafer and flower basket drying device, characterized in that: include: A drying mechanism and a conveying mechanism, wherein the conveying mechanism passes through the drying mechanism to input and output the flower baskets containing the silicon wafers into and out of the drying mechanism; A material unloading mechanism is arranged in the unloading section of the conveying mechanism, and is used to unload and weigh the silicon wafers and flower baskets input by the conveying mechanism into the drying mechanism.

2. The silicon wafer and flower basket drying equipment according to claim 1, characterized in that: The drying mechanism at least comprises an oven body, a heating component arranged in the oven body, and an exhaust device and an air inlet device communicating with the interior of the oven body.

3. The silicon wafer and flower basket drying equipment according to claim 1, characterized in that: The conveying mechanism at least includes a bracket, a conveying chain plate rotatably mounted on the bracket, a driving device for driving the conveying chain plate to rotate, and a carrier arranged on the conveying chain plate, wherein the carrier is used to carry the flower basket.

4. The silicon wafer and flower basket drying equipment according to claim 1, characterized in that: The unloading mechanism at least includes a carrier configured at the unloading section of the conveying mechanism, a first linear module configured at the carrier and relatively located below the conveying mechanism, a lifting device driven by the first linear module, and a transport module configured at the carrier and extending to above the conveying mechanism, wherein the transport module is used to transport the flower basket of the unloading section of the conveying mechanism to the carrier.

5. The silicon wafer and flower basket drying equipment according to claim 4, characterized in that: The load carrier is provided with a weighing platform at a side away from the unloading section of the conveying mechanism.

6. The silicon wafer and flower basket drying equipment according to claim 4, characterized in that: The lifting device supports the flower basket loaded with the silicon wafers through a tray.

7. The silicon wafer and flower basket drying equipment according to claim 2, characterized in that: A plurality of first air inlet ducts are evenly arranged on the inner bottom surface of the oven body, and the air inlet device is connected to the first air inlet ducts via second air inlet ducts.

8. The silicon wafer and flower basket drying equipment according to claim 2, characterized in that: A plurality of first air outlet ducts connected to the interior of the oven body are evenly arranged on the top surface of the oven body, and the exhaust device is connected to the first air outlet duct through a second air outlet duct.

9. The silicon wafer and flower basket drying equipment according to claim 2, characterized in that: The heating component is composed of one or more components of a heating wire or a heating tube.

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