The invention discloses a spatial light type electro-
optical modulator based on a
phase change material, and a manufacturing method thereof. The electro-
optical modulator is formed by a multi-layer
composite structure comprising a substrate, a lower
electrode layer, a
phase change layer, an upper
electrode layer and a covering layer, and the upper
electrode layer and the lower electrode layer respectively comprise N-bit
metal micro-nano gratings and M-bit
metal micro-nano gratings which are regularly arranged as electrodes and
light field regulation units of the modulator. By controlling the bias
voltage of the upper electrode and the lower electrode, the
phase change material forms phase change areas with different
crystallization degrees, so that the optical
dielectric constant is obviously changed, and the reflected light and the
resonance absorption peak of the modulator are dynamically electrically modulated. The modulator disclosed by the invention can realize
spatial light modulation with N * M area array units, and the working
frequency band is positioned in a
middle infrared band of 3-10 [mu]m. When the
phase change material is in an amorphous state, the device can realize perfect absorption close to 100%; and when the amorphous state and the crystalline state are converted, the modulation depth of about 80% is realized. Not only can the dynamic regulation and control of a perfect absorption peak be realized, but also the dynamic amplitude regulation and control of spatial incident light can be realized.