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2787results about "Air-flow influencers" patented technology

Method of and apparatus for tunable gas injection in a plasma processing system

A method of and apparatus for providing tunable gas injection in a plasma processing system (10, 10′). The apparatus includes a gas injection manifold (50) having a pressurizable plenum (150) and an array of adjustable nozzle units (250), or an array of non-adjustable nozzles (502, 602), through which gas from the plenum can flow into the interior region (40) of a plasma reactor chamber (14) capable of containing a plasma (41). The adjustable nozzle units include a nozzle plug (160) arranged within a nozzle bore (166). A variety of different nozzle units are disclosed. The nozzle plugs are axially translatable to adjust the flow of gas therethrough. In one embodiment, the nozzle plugs are attached to a plug plate (154), which is displacable relative to an injection plate (124) via displacement actuators (170) connecting the two plates. The displacement actuators are controlled by a displacement actuator control unit (180), which is in electronic communication with a plasma processing system control unit (80). The gas flow into the chamber interior region is preferably controlled by monitoring the pressure in the plenum and in the chamber and adjusting the nozzle units accordingly. Where the nozzle units are not adjustable, a portion of the nozzles are sized to a first flow condition, and another portion of the nozzles are sized to a second flow condition.
Owner:TOKYO ELECTRON LTD

Leading edge construction for an aerodynamic surface and method of making the same

A leading edge structure for an aerodynamic surface includes a support structure made of fiber-reinforced synthetic material and a skin structure made of metal mounted on the support structure. The support structure includes an inner laminate, an outer laminate, and longitudinally extending tubes and channels arranged between the inner and outer laminates, as well as a synthetic foam filler material in the spaces between the tubes, channels, and laminates. The skin structure includes an outer skin having perforations, especially in the form of suction holes, an inner skin, and spacer members interconnected therebetween so as to form a substantially form-stable metal skin structure. Respective holes pass through the inner skin, the outer laminate, and the walls of the tubes and channels in order to communicate the suction hole perforations of the outer skin with the interior spaces within the tubes and channels. The skin structure is adhesively bonded to the support structure. In a method for making the leading edge structure, the prefabricated components of the support structure are laid up, molded and cured in a positive mold, the prefabricated components of the skin structure are formed and soldered together on a positive mold, and then the skin structure is adhesively bonded onto the support structure.
Owner:DAIMLER CHRYSLER AEROSPACE AIRBUS +1
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