Furnace body of curing vertical diffusion furnace

Abstract

The utility model discloses a solidification vertical diffusion furnace body, including furnace body, motor, refrigeration mechanism and sprocket mechanism, the middle outer wall of furnace body is fixedly connected with the cooling middle groove, and the side outer wall of cooling middle groove is fixedly equipped with the cooling box, and the side of cooling box upper surface is fixedly equipped with the motor, and the sprocket mechanism is fixedly equipped with the cooling box. A driving rod is fixedly installed at the lower end of an output shaft of the motor, a refrigerating mechanism is fixedly arranged on the outer wall of the side, away from the motor, of the cooling box, a positioning arm is fixedly installed on the inner wall of the portion, on the side of the refrigerating mechanism, of the cooling box, and a cooling ring groove is fixedly connected to the outer wall of the end of the furnace body; and one side of the cooling ring groove communicates with the cooling box through a bent pipe, and the other side of the cooling ring groove communicates with the cooling middle groove through a straight pipe. According to the curing vertical diffusion furnace body, the heat dissipation capacity is enhanced, so that the use efficiency of the furnace body is guaranteed, and the practicability of the device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of a solidifying vertical diffusion furnace, in particular to a solidifying vertical diffusion furnace body. Background Art

[0002] The curing vertical diffusion furnace is a commonly used equipment in the semiconductor manufacturing field. Its main function is to create a high-temperature environment to achieve the curing and diffusion of semiconductor materials. The furnace body of the curing vertical diffusion furnace is the core component of the curing vertical diffusion furnace. Because it is in a harsh working environment, the furnace body of the curing vertical diffusion furnace has good high temperature resistance and antioxidant properties.

[0003] However, the existing curing vertical diffusion furnace has the following problems when in use:

[0004] Since the curing vertical diffusion furnace body needs to dissipate heat after use, in order to reduce the heat dissipation time of the curing vertical diffusion furnace body and improve the working efficiency of the furnace body, it is necessary to strengthen the heat dissipation capacity of the furnace body. However, the existing curing vertical diffusion furnace body has insufficient heat dissipation capacity, resulting in insufficient use efficiency of the furnace body, which reduces the practicality of the device.

[0005] In view of the above problems, it is urgent to carry out innovative design based on the original curing vertical diffusion furnace body. Utility Model Content

[0006] The utility model aims to provide a solidifying vertical diffusion furnace body to solve the problem that the heat dissipation capacity of the existing solidifying vertical diffusion furnace body is insufficient, resulting in insufficient furnace body utilization efficiency and reduced device practicality.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a furnace body of a solidifying vertical diffusion furnace, comprising a furnace body, a motor, a refrigeration mechanism and a sprocket mechanism, a cooling middle groove is fixedly connected to the outer wall in the middle of the furnace body, and a cooling box is fixedly installed on the side outer wall of the cooling middle groove, and a motor is fixedly arranged on the side of the upper surface of the cooling box, and a driving rod is fixedly installed on the lower end of the motor output shaft, a refrigeration mechanism is fixedly arranged on the side outer wall of the cooling box away from the motor, and a positioning arm is fixedly installed on the inner wall of the cooling box on the side of the refrigeration mechanism, a cooling ring groove is fixedly connected to the end outer wall of the furnace body, and one side of the cooling ring groove is connected to the cooling box through a bent pipe, and the other side of the cooling ring groove is connected to the cooling middle groove through a straight pipe.

[0008] Preferably, heat dissipation fins are fixed to the outer wall of the furnace body inside the cooling middle groove and the cooling ring groove, and the heat dissipation fins inside the cooling middle groove and the cooling ring groove are distributed at equal intervals.

[0009] Preferably, the inner wall of the positioning arm is movably connected to a transmission rod, and fan blades are respectively fixed to the outer walls at both ends of the transmission rod.

[0010] Preferably, the transmission rod and the positioning arm form a rotating structure, and the positioning arm is symmetrically arranged with respect to the transverse center axis of the transmission rod.

[0011] Preferably, the outer wall of the transmission rod is connected to the outer wall of the driving rod through a sprocket mechanism, and the fan blades at both ends of the transmission rod are parallel to each other.

[0012] Preferably, the cooling ring grooves are symmetrically distributed about the transverse center axis of the cooling center groove, and the cooling ring grooves, heat dissipation fins, curved pipes and straight pipes are arranged in a one-to-one correspondence.

[0013] Compared with the prior art, the utility model has the following beneficial effects: the heat dissipation capacity of the solidification vertical diffusion furnace is enhanced, thereby ensuring the use efficiency of the furnace body and improving the practicability of the device;

[0014] The motor drives the driving rod, which drives the transmission rod to rotate through the sprocket mechanism, and then drives the fan blades through the transmission rod, so that the fan blades drive the coolant cooled by the refrigeration mechanism to circulate in the cooling middle tank, cooling box, cooling ring groove, curved pipe and straight pipe to absorb the heat emitted by the furnace body, thereby enhancing the heat dissipation capacity of the device, ensuring the use efficiency of the furnace body, and improving the practicability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the front section structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the front cross-section structure of the cooling box of the utility model;

[0017] Figure 3 This is a schematic diagram of the top-sectional structure of the cooling box of the utility model;

[0018] Figure 4 This is a schematic diagram of the top-sectional structure of the cooling ring groove of the utility model;

[0019] Figure 5 For this utility model Figure 1 Enlarged structural diagram at A in the middle.

[0020] In the figure: 1. furnace body; 2. cooling middle tank; 3. cooling box; 4. motor; 5. driving rod; 6. refrigeration mechanism; 7. positioning arm; 8. transmission rod; 9. sprocket mechanism; 10. fan blades; 11. cooling ring groove; 12. heat dissipation fins; 13. bent pipe; 14. straight pipe. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] See also Figure 1-5 The utility model provides a technical solution: a solidification vertical diffusion furnace body, comprising a furnace body 1, a cooling middle groove 2, a cooling box 3, a motor 4, a driving rod 5, a refrigeration mechanism 6, a positioning arm 7, a transmission rod 8, a sprocket mechanism 9, a fan blade 10, a cooling ring groove 11, a heat dissipation fin 12, a bend pipe 13 and a straight pipe 14, the outer wall of the middle part of the furnace body 1 is fixedly connected with the cooling middle groove 2, and the cooling box 3 is fixedly installed on the side outer wall of the cooling middle groove 2, and the motor 4 is fixedly arranged on the side of the upper surface of the cooling box 3, and the driving rod 5 is fixedly installed on the lower end of the output shaft of the motor 4, the refrigeration mechanism 6 is fixedly arranged on the side outer wall of the cooling box 3 away from the motor 4, and the positioning arm 7 is fixedly installed on the inner wall of the cooling box 3 on the side of the refrigeration mechanism 6, the end outer wall of the furnace body 1 is fixedly connected with the cooling ring groove 11, and one side of the cooling ring groove 11 is connected with the cooling box 3 through the bend pipe 13, and the other side of the cooling ring groove 11 is connected with the cooling middle groove 2 through the straight pipe 14.

[0023] The outer wall of the furnace body 1 inside the cooling middle groove 2 and the cooling ring groove 11 is fixed with heat dissipation fins 12, and the heat dissipation fins 12 inside the cooling middle groove 2 and the cooling ring groove 11 are distributed at equal intervals, so as to increase the heat dissipation area of ​​the furnace body 1 through the heat dissipation fins 12.

[0024] The inner wall of the positioning arm 7 is movably connected with a transmission rod 8, and the outer walls at both ends of the transmission rod 8 are respectively fixed with fan blades 10, so as to facilitate the circulation of the coolant in the device to fully dissipate the heat of the furnace body.

[0025] The transmission rod 8 and the positioning arm 7 form a rotating structure, and the positioning arm 7 is symmetrically arranged about the transverse center axis of the transmission rod 8, so that the transmission rod 8 can rotate stably relative to the positioning arm 7.

[0026] The outer wall of the transmission rod 8 is connected to the outer wall of the driving rod 5 through the sprocket mechanism 9, and the fan blades 10 at both ends of the transmission rod 8 are parallel to each other, so that the motor 4 drives the driving rod 5 so that the sprocket mechanism 9 drives the transmission rod 8, thereby allowing the fan blades 10 to rotate, so that the fan blades 10 drive the coolant to circulate in the cooling middle tank 2, the cooling box 3, the cooling ring groove 11, the curved pipe 13 and the straight pipe 14 to dissipate heat from the furnace body.

[0027] The cooling annular groove 11 is symmetrically distributed about the transverse center axis of the cooling middle groove 2, and the cooling annular groove 11, the heat dissipation fins 12, the curved pipe 13 and the straight pipe 14 are arranged in a one-to-one correspondence, so as to increase the flow area of ​​the coolant and improve the heat dissipation capacity of the device.

[0028] Working principle: When using the curing vertical diffusion furnace, first Figure 1-5 As shown, the solidifying vertical diffusion furnace body is installed in the diffusion furnace for use. When the furnace body needs to be cooled, the user starts the refrigeration mechanism 6 and the motor 4. At this time, the refrigeration mechanism 6 cools the coolant in the cooling box 3. At the same time, the motor 4 drives the driving rod 5. Then the driving rod 5 drives the transmission rod 8 to rotate relative to the positioning arm 7 through the sprocket mechanism 9. Next, the transmission rod 8 drives the fan blades 10 to rotate, so that the rotating fan blades 10 drive the coolant to circulate in the cooling middle groove 2, the cooling box 3, the cooling ring groove 11, the curved pipe 13 and the straight pipe 14. As the refrigeration mechanism 6 continuously cools the coolant, the coolant fully absorbs the heat emitted by the furnace body 1. At the same time, the heat dissipation fins 12 increase the heat dissipation area of ​​the furnace body 1, thereby enhancing the heat dissipation capacity of the device, ensuring the use efficiency of the furnace body, and improving the practicality of the device.

[0029] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art may still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A solidification vertical diffusion furnace body, comprising a furnace body (1), a motor (4), a refrigeration mechanism (6) and a sprocket mechanism (9), characterized in that: The outer wall at the middle of the furnace body (1) is fixedly connected to a cooling middle groove (2), and a cooling box (3) is fixedly installed on the side outer wall of the cooling middle groove (2), and a motor (4) is fixedly arranged on the side of the upper surface of the cooling box (3), and a driving rod (5) is fixedly installed on the lower end of the output shaft of the motor (4), a refrigeration mechanism (6) is fixedly arranged on the side outer wall of the cooling box (3) away from the motor (4), and a positioning arm (7) is fixedly installed on the inner wall of the cooling box (3) on the side of the refrigeration mechanism (6), and a cooling ring groove (11) is fixedly connected to the end outer wall of the furnace body (1), and one side of the cooling ring groove (11) is connected to the cooling box (3) through a bent pipe (13), and the other side of the cooling ring groove (11) is connected to the cooling middle groove (2) through a straight pipe (14).

2. The solidification vertical diffusion furnace body according to claim 1, characterized in that: The outer wall of the furnace body (1) inside the cooling middle groove (2) and the cooling ring groove (11) are both fixed with heat dissipation fins (12), and the heat dissipation fins (12) inside the cooling middle groove (2) and the cooling ring groove (11) are all distributed at equal intervals.

3. The solidification vertical diffusion furnace body according to claim 1, characterized in that: The inner wall of the positioning arm (7) is movably connected to a transmission rod (8), and fan blades (10) are respectively fixed to the outer walls at both ends of the transmission rod (8).

4. The solidification vertical diffusion furnace body according to claim 3, characterized in that: The transmission rod (8) and the positioning arm (7) form a rotating structure, and the positioning arm (7) is symmetrically arranged with respect to the transverse center axis of the transmission rod (8).

5. The vertical diffusion furnace body for curing according to claim 3, characterized in that: The outer wall of the transmission rod (8) is connected to the outer wall of the driving rod (5) via a sprocket mechanism (9), and the fan blades (10) at both ends of the transmission rod (8) are parallel to each other.

6. The vertical diffusion furnace body for curing according to claim 1, characterized in that: The cooling annular grooves (11) are symmetrically distributed about the transverse center axis of the cooling middle groove (2), and the cooling annular grooves (11), the heat dissipation fins (12), the bent pipes (13), and the straight pipes (14) are arranged in a one-to-one correspondence.

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