Heating disc structure adopting pyrolytic graphite temperature equalizing disc

Abstract

The utility model relates to the technical field of semiconductor core parts, in particular to a heating plate structure adopting a pyrolytic graphite temperature equalizing plate, which comprises a base plate, a graphite temperature equalizing plate, a heating plate and a cover plate which are sequentially and fixedly connected from top to bottom. A pyrolytic graphite sheet is arranged in the installation groove, a heater installation groove is formed in the middle of the heating disc, and an armored heater is arranged in the heater installation groove. According to the heating disc structure adopting the pyrolytic graphite temperature equalizing disc, heat is rapidly and uniformly diffused on a pyrolytic graphite layer in the transverse direction by utilizing the anisotropic characteristic of heat conduction of pyrolytic graphite, and then is longitudinally transferred to an aluminum alloy heating disc base plate, so that the temperature uniformity of the whole heating disc is improved; a brazing mode is adopted on the whole, the pyrolytic graphite layer cannot pollute other parts, the cleanliness can be guaranteed, and the overall uniformity can also be guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor core components, and in particular to a heating plate structure using a pyrolytic graphite temperature-averaging plate. Background Art

[0002] In the semiconductor industry, heating plates are core components of the front-end process of semiconductor equipment. They provide stable and uniform temperature for wafers, heat and control the temperature of wafers, and are widely used in various processes and manufacturing processes. Since semiconductor wafer manufacturing in integrated circuits requires different stable temperatures according to different processes, and with the continuous improvement of wafer process requirements, the requirements for temperature uniformity of heating plates are also increasing.

[0003] Since the heating plate is affected by the distribution of the heating device, the existing heating plate will heat unevenly when heating, and the use effect is poor. The uneven temperature distribution of the heating plate will make the surface temperature of the wafer uneven, which will directly affect the process of the wafer and lead to a decrease in the yield rate. Therefore, a heating plate structure using a pyrolytic graphite temperature plate is proposed. Utility Model Content

[0004] In order to solve the above problems, the utility model provides a heating plate structure using a pyrolytic graphite temperature-averaging plate. The heating plate structure using a pyrolytic graphite temperature-averaging plate utilizes the anisotropic properties of thermal conductivity of pyrolytic graphite, so that heat can be quickly and evenly diffused in the pyrolytic graphite layer laterally, and then transferred longitudinally to the aluminum alloy heating plate chassis, thereby improving the temperature uniformity of the entire heating plate; the entire structure is brazed, the pyrolytic graphite layer will not contaminate other components, and can ensure cleanliness and overall uniformity.

[0005] The technical solution of the utility model is as follows:

[0006] A heating plate structure using a pyrolytic graphite temperature-averaging plate comprises a chassis, a graphite temperature-averaging plate, a heating plate and a cover plate which are fixedly connected in sequence from top to bottom; a graphite sheet mounting groove is arranged on the upper surface of the graphite temperature-averaging plate, a pyrolytic graphite sheet is arranged in the mounting groove, a heater mounting groove is arranged in the middle of the heating plate, and an armored heater is arranged in the heater mounting groove.

[0007] The chassis is made of aluminum alloy.

[0008] The graphite temperature plate is made of aluminum alloy.

[0009] The chassis and the graphite temperature plate are fixedly connected by brazing.

[0010] The heating plate is made of aluminum alloy.

[0011] The graphite temperature-averaging plate and the heating plate are fixedly connected by brazing.

[0012] The cover is made of aluminum alloy.

[0013] The heating plate and the cover plate are fixedly connected by brazing.

[0014] The transverse thermal conductivity of pyrolytic graphite sheets is greater than the longitudinal thermal conductivity.

[0015] The transverse thermal conductivity of pyrolytic graphite sheets is 800-2000 W / m·K.

[0016] The beneficial effects of the utility model are:

[0017] 1. The utility model discloses a heating plate structure using a pyrolytic graphite temperature-averaging plate. The heating plate structure using a pyrolytic graphite temperature-averaging plate utilizes the anisotropic property of thermal conductivity of pyrolytic graphite, so that heat is rapidly and evenly diffused in the pyrolytic graphite layer laterally, and then is transferred longitudinally to the aluminum alloy heating plate chassis, thereby improving the temperature uniformity of the entire heating plate.

[0018] 2. The utility model discloses a heating plate structure using a pyrolytic graphite temperature-averaging plate. The heating plate structure using a pyrolytic graphite temperature-averaging plate is brazed as a whole. The pyrolytic graphite layer will not contaminate other components, and can ensure cleanliness and overall uniformity. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] By reading the detailed description of the preferred embodiment below, the scheme and advantages of the present application will become clear to those skilled in the art. The accompanying drawings are only used to illustrate the preferred embodiment and are not considered to be limiting of the present invention.

[0020] In the attached picture:

[0021] Figure 1 This is a schematic diagram of an exploded structure of a heating plate structure using a pyrolytic graphite temperature-averaging plate according to an embodiment of the utility model;

[0022] Figure 2 This is a schematic cross-sectional view of a heating plate structure using a pyrolytic graphite temperature-averaging plate according to an embodiment of the utility model;

[0023] Figure 3 It is a top view of the aluminum alloy graphite temperature equalizing plate and the pyrolytic graphite sheet;

[0024] The components represented by the reference numerals in the figure are:

[0025] The utility model comprises: 1. a bottom plate, 2. a graphite temperature-averaging plate, 3. a heating plate, 4. a cover plate, 5. a pyrolytic graphite sheet, and 6. an armored heater. DETAILED DESCRIPTION

[0026] like Figure 1 and Figure 2As shown, the heating plate structure using a pyrolytic graphite temperature-averaging plate includes a chassis 1, a graphite temperature-averaging plate 2, a heating plate 3 and a cover plate 4 which are fixedly connected in sequence from top to bottom, a graphite sheet mounting groove is provided on the upper surface of the graphite temperature-averaging plate 2, a pyrolytic graphite sheet 5 is provided in the mounting groove, a heater mounting groove is provided in the middle of the heating plate 3, and an armored heater 6 is provided in the heater mounting groove.

[0027] A graphite temperature-averaging plate 2 made of aluminum alloy is arranged on one side of a chassis 1 made of aluminum alloy, and the chassis 1 and the graphite temperature-averaging plate 2 are brazed.

[0028] The surface of the graphite temperature plate 2 made of aluminum alloy is provided with a mounting groove, and a pyrolytic graphite sheet 5 is arranged in the mounting groove. Figure 3 As shown, a heating plate 3 made of aluminum alloy is arranged on the other side of the graphite temperature-averaging plate 2 , and the graphite temperature-averaging plate 2 and the heating plate 3 are brazed and welded.

[0029] An installation groove is arranged on the middle surface of the heating plate 3 made of aluminum alloy, in which an armored heater 6 is installed, and a cover plate 4 made of aluminum alloy is fixedly installed on the top of the installation groove above the armored heater 6, and the heating plate 3 and the cover plate 4 are brazed.

[0030] The transverse thermal conductivity of the pyrolytic graphite sheet 5 is greater than the longitudinal thermal conductivity; the transverse thermal conductivity of the pyrolytic graphite sheet 5 is 800-2000 W / m·K

[0031] After the armored heating wire 6 is heated, the heat is transferred to the aluminum alloy graphite temperature-averaging plate 2 via the aluminum alloy heating plate 3. Since the heat conduction of the pyrolytic graphite sheet 5 is fast in the X / Y direction, i.e., the lateral direction, and slow in the Z direction, i.e., the longitudinal direction, the heat of the aluminum alloy graphite temperature-averaging plate 2 is transferred faster along the X / Y direction through the pyrolytic graphite sheet 5. When the temperature of the aluminum alloy graphite temperature-averaging plate 2 is evenly transferred, the heat is transferred to the aluminum alloy heating plate chassis 1 along the Z direction, making the temperature of the aluminum alloy heating plate chassis 1 more uniform.

[0032] The heating plate structure using pyrolytic graphite temperature-averaging plate utilizes the anisotropic property of thermal conductivity of pyrolytic graphite, so that heat can be rapidly and evenly diffused in the pyrolytic graphite layer laterally, and then transferred longitudinally to the aluminum alloy heating plate chassis, thereby improving the temperature uniformity of the entire heating plate; the entire heating plate is brazed, and the pyrolytic graphite layer will not contaminate other components, thereby ensuring cleanliness and overall uniformity.

Claims

1. A heating plate structure using a pyrolytic graphite temperature equalizing plate, characterized in that: The invention comprises a chassis (1), a graphite temperature-averaging plate (2), a heating plate (3) and a cover plate (4) which are fixedly connected in sequence from top to bottom; a graphite sheet mounting groove is provided on the upper surface of the graphite temperature-averaging plate (2); a pyrolytic graphite sheet (5) is provided in the mounting groove; a heater mounting groove is provided in the middle of the heating plate (3); and an armored heater (6) is provided in the heater mounting groove.

2. A heating plate structure using a pyrolytic graphite temperature equalizing plate according to claim 1, characterized in that: The chassis (1) is made of aluminum alloy.

3. A heating plate structure using a pyrolytic graphite temperature equalizing plate according to claim 2, characterized in that: The graphite temperature-averaging plate (2) is made of aluminum alloy.

4. A heating plate structure using a pyrolytic graphite temperature equalizing plate according to claim 3, characterized in that: The chassis (1) and the graphite temperature-averaging plate (2) are fixedly connected by brazing.

5. The heating plate structure using pyrolytic graphite temperature equalizing plate according to claim 3, characterized in that: The heating plate (3) is made of aluminum alloy.

6. The heating plate structure using pyrolytic graphite temperature equalizing plate according to claim 5, characterized in that: The graphite temperature-averaging plate (2) and the heating plate (3) are fixedly connected by brazing.

7. The heating plate structure using pyrolytic graphite temperature equalizing plate according to claim 5, characterized in that: The cover plate (4) is made of aluminum alloy.

8. The heating plate structure using pyrolytic graphite temperature equalizing plate according to claim 7, characterized in that: The heating plate (3) and the cover plate (4) are fixedly connected by brazing.

9. The heating plate structure using pyrolytic graphite temperature equalizing plate according to claim 1, characterized in that: The transverse thermal conductivity of the pyrolytic graphite sheet (5) is greater than the longitudinal thermal conductivity.

10. A heating plate structure using a pyrolytic graphite temperature equalizing plate according to claim 9, characterized in that: The transverse thermal conductivity of the pyrolytic graphite sheet (5) is 800-2000 W / m·K.

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