Stirring device for pickling semiconductor

Abstract

The stirring device comprises an assembling bearing plate, the top of the assembling bearing plate is connected with an assembling transverse plate through an assembling supporting plate, the top of the assembling bearing plate is provided with a reaction barrel, the bottom of the reaction barrel is fixedly connected with a liquid discharging pipe, and the side wall of the liquid discharging pipe is fixedly connected with a liquid discharging valve. A reaction sleeve is rotationally sleeved with the reaction barrel, and reaction stop blocks are fixedly connected to the two sides of the inner wall of the reaction sleeve. According to the acid pickling device, materials are stirred and dispersed after being in contact with the fixed stirring rod, then the fixed electric telescopic rod pushes the fixed rack on the fixed push block to move, and the fixed rack drives the fixed auger on the fixed gear to rotate, so that the fixed auger drives the stirred materials to be subjected to acid pickling reaction after being turned upwards; and the materials are fully pickled after being stirred, so that dirt on the materials is removed, repeated pickling is not needed, and the using effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of stirring devices, in particular to a stirring device used for semiconductor pickling. Background Art

[0002] Semiconductor wafers need to go through a cleaning process. Taking sapphire substrates as an example, as LED manufacturing technology matures and production costs continue to decrease, the current mainstream LED substrate material is single crystal sapphire substrates. The growth of the epitaxial layer places very high demands on the cleanliness of the patterned sapphire surface, and the patterning process also places very high demands on the cleanliness of the sapphire wafer surface. Generally, when cleaning semiconductor wafers, the pickling solution can only be simply stirred manually. Because the cleaning basket is fixed, this will cause uneven reaction on the wafer surface, resulting in the inability to fully remove surface dirt. Repeated pickling is required, which is time-consuming and labor-intensive, thereby reducing the use effect. Utility Model Content

[0003] The utility model aims to solve the shortcomings in the prior art and proposes a stirring device for semiconductor pickling.

[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a stirring device for semiconductor pickling, comprising an assembly receiving plate, the top of the assembly receiving plate is connected to an assembly horizontal plate through an assembly support plate, a reaction barrel is arranged on the top of the assembly receiving plate, a drain pipe is fixedly connected to the bottom of the reaction barrel, a drain valve is fixedly connected to the side wall of the drain pipe, a reaction sleeve is rotatably sleeved inside the reaction barrel, reaction blocks are fixedly connected to both sides of the inner wall of the reaction sleeve, a reaction screen barrel is arranged inside the reaction sleeve, reaction tooth grooves are opened on the side wall of the reaction sleeve, and an adjustment component is connected to the bottom of the reaction barrel;

[0005] A fixed push plate is provided at the bottom of the assembly cross plate, and two fixed cylinders are fixedly connected to the top of the assembly cross plate. The piston ends of the fixed cylinders penetrate the assembly cross plate and are fixedly connected to the fixed push plate. Two fixed stirring rods are fixedly connected to the bottom of the fixed push plate. A fixed auger is penetrated and rotatably connected to the bottom of the fixed push plate, one end of the fixed auger is fixedly connected to a fixed gear, and the top of the fixed push plate is connected to a fixed component for adjusting the fixed gear to rotate.

[0006] As a further description of the above technical solution:

[0007] The adjustment component includes an adjustment rod that passes through and is rotatably connected to the bottom of the reaction barrel, the two ends of the adjustment rod are respectively fixedly connected to an adjustment stirring disk and an adjustment worm gear, the outer side wall of the adjustment rod is fixedly sleeved with an adjustment transmission disk, and the top of the assembly receiving plate is fixedly connected to two drive blocks.

[0008] As a further description of the above technical solution:

[0009] A driving motor is fixedly connected to the side wall of one of the driving blocks, a driving worm is fixedly connected to the output end of the driving motor, a distal end of the driving worm passes through one of the driving blocks and is rotationally connected to the other driving block, and the driving worm is meshingly connected to the adjusting worm wheel.

[0010] As a further description of the above technical solution:

[0011] The top of the assembly receiving plate is rotatably connected with a driving support rod, the end of the driving support rod is fixedly connected with a driving gear, the driving gear is meshingly connected with the reaction tooth groove, the outer side wall of the driving support rod is fixedly sleeved with a driving transmission disk, and the driving transmission disk is connected to the adjusting transmission disk through a belt.

[0012] As a further description of the above technical solution:

[0013] The fixing assembly comprises a fixing groove opened on the top of the fixing push plate, a fixing slide block is slidably connected inside the fixing groove, a fixing rack is fixedly connected to the top of the fixing slide block, and the fixing rack is meshingly connected with the fixing gear.

[0014] As a further description of the above technical solution:

[0015] The surface of the fixed rack is fixedly connected with a fixed push block, the top of the fixed push plate is fixedly connected with a fixed support block, the side wall of the fixed support block is fixedly connected with a fixed electric telescopic rod, and the piston end of the fixed electric telescopic rod is fixedly connected to the fixed push block.

[0016] The utility model has the following beneficial effects:

[0017] The adjusting assembly can be used to coordinate the adjusting rod, the adjusting stirring disk, the adjusting worm wheel, the adjusting transmission disk, the driving block, the driving motor, the driving worm, the driving support rod, the driving gear and the driving transmission disk, so that the driving motor can drive the adjusting worm wheel on the driving worm and the adjusting stirring disk on the adjusting rod to rotate, so that the adjusting stirring disk stirs the pickling liquid, and then the pickling liquid becomes fluid and contacts the material through the reaction screen barrel for pickling reaction, and at the same time, the adjusting transmission disk drives the driving support rod and the driving gear on the driving transmission disk to rotate through the belt, so that the driving gear drives the reaction sleeve on the reaction tooth groove to rotate, and then the reaction sleeve also drives the supporting The reaction screen barrel rotates to facilitate the pickling effect of the material inside the reaction screen barrel during centrifugal rotation and dispersion. The fixed component can be used to cooperate with the fixed slider, the fixed rack, the fixed push block, the fixed support block and the fixed electric telescopic rod, so that the material can be stirred and dispersed after contacting the fixed stirring rod. Then the fixed electric telescopic rod pushes the fixed rack on the fixed push block to move, and then the fixed rack also drives the fixed auger on the fixed gear to rotate, so that the fixed auger drives the stirred material to turn the material upward and then the pickling reaction takes place, so that the material is fully pickled after stirring, thereby removing the dirt on the material without repeated pickling, thereby improving the use effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the overall structure of a stirring device for semiconductor pickling proposed by the utility model;

[0019] Figure 2 This is a schematic diagram of the structure of a reaction barrel, a reaction sleeve and a reaction screen barrel of a stirring device for semiconductor pickling proposed by the utility model;

[0020] Figure 3 for Figure 1 The enlarged structural diagram at A in the middle;

[0021] Figure 4 The utility model discloses a structural schematic diagram of a fixed push plate, a fixed auger, a fixed gear, a fixed rack and a fixed electric telescopic rod of a stirring device for semiconductor pickling proposed by the utility model.

[0022] Legend:

[0023] 1. Assemble the receiving plate; 2. Assemble the support plate; 3. Assemble the cross plate; 4. Reaction barrel; 5. Reaction sleeve; 6. Reaction block; 7. Reaction screen barrel; 8. Adjustment rod; 9. Adjustment stirring plate; 10. Adjustment worm gear; 11. Adjustment transmission plate; 12. Drive block; 13. Drive motor; 14. Drive worm; 15. Drive support rod; 16. Drive gear; 17. Drive transmission plate; 18. Fix the push plate; 19. Fix the cylinder; 20. Fix the stirring rod; 21. Fix the auger; 22. Fix the gear; 23. Fix the slider; 24. Fix the rack; 25. Fix the push block; 26. Fix the support block; 27. Fix the electric telescopic rod. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] Reference Figure 1-4 The utility model provides a stirring device for semiconductor pickling, comprising an assembly receiving plate 1, the top of the assembly receiving plate 1 is connected to an assembly horizontal plate 3 through an assembly support plate 2, a reaction barrel 4 is arranged on the top of the assembly receiving plate 1, a drainage pipe is fixedly connected to the bottom of the reaction barrel 4, a drainage valve is fixedly connected to the side wall of the drainage pipe, a reaction sleeve 5 is rotatably sleeved inside the reaction barrel 4, reaction blocks 6 are fixedly connected to both sides of the inner wall of the reaction sleeve 5, a reaction sieve barrel 7 is arranged inside the reaction sleeve 5, a reaction tooth groove is opened on the side wall of the reaction sleeve 5, and an adjusting component is connected to the bottom of the reaction barrel 4, which plays a role in adjusting the pickling of semiconductor wafers, referring to Figure 1 , Figure 2 and Figure 3The adjusting component includes an adjusting rod 8 that penetrates and is rotatably connected to the bottom of the reaction barrel 4, and the two ends of the adjusting rod 8 are respectively fixedly connected with an adjusting stirring disk 9 and an adjusting worm gear 10, and the outer wall of the adjusting rod 8 is fixedly sleeved with an adjusting transmission disk 11, and the top of the assembly receiving plate 1 is fixedly connected with two driving blocks 12, one of which is fixedly connected to a driving motor 13 on the side wall, and a driving worm 14 is fixedly connected to the output end of the driving motor 13, and the end of the driving worm 14 penetrates one of the driving blocks 12 and is rotatably connected to the other driving block 12, and the driving worm 14 is meshed with the adjusting worm gear 10, and the top of the assembly receiving plate 1 is rotatably connected with a driving support rod 15, and the end of the driving support rod 15 is fixedly connected with a driving gear 16, and the driving gear 16 is meshed with the reaction tooth groove, and the outer wall of the driving support rod 15 is fixedly sleeved with a driving transmission disk 17, and the driving transmission disk 17 is connected to the adjusting transmission disk 11 through a belt, and the driving motor 13 drives the driving worm 14 to rotate.

[0026] A fixed push plate 18 is provided at the bottom of the assembly horizontal plate 3, and two fixed cylinders 19 are fixedly connected to the top of the assembly horizontal plate 3. The piston end of the fixed cylinder 19 penetrates the assembly horizontal plate 3 and is fixedly connected to the fixed push plate 18. Two fixed stirring rods 20 are fixedly connected to the bottom of the fixed push plate 18. A fixed auger 21 penetrates and is rotatably connected to the bottom of the fixed push plate 18. A fixed gear 22 is fixedly connected to one end of the fixed auger 21. A fixed component for adjusting the fixed gear 22 for rotation is connected to the top of the fixed push plate 18. Figure 1 and Figure 4 The fixed component includes a fixed groove opened on the top of the fixed push plate 18, a fixed slider 23 is slidably connected inside the fixed groove, a fixed rack 24 is fixedly connected to the top of the fixed slider 23, the fixed rack 24 is meshed with the fixed gear 22, a fixed push block 25 is fixedly connected to the surface of the fixed rack 24, a fixed support block 26 is fixedly connected to the top of the fixed push plate 18, a fixed electric telescopic rod 27 is fixedly connected to the side wall of the fixed support block 26, a piston end of the fixed electric telescopic rod 27 is fixedly connected to the fixed push block 25, and the fixed electric telescopic rod 27 plays a role in pushing the fixed push block 25 to move.

[0027] Working principle: When in use, first pour the pickling liquid into the reaction barrel 4, and the pickling liquid passes through the reaction sleeve 5 and falls on the bottom of the reaction barrel 4, and is stored to a suitable height as needed, then the material is placed in the reaction screen barrel 7, and then the reaction screen barrel 7 is embedded in the reaction sleeve 5, and is contacted and supported with the reaction block 6, followed by starting the drive motor 13, and the drive motor 13 drives the adjusting worm wheel 10 on the driving worm 14 to rotate, and then the adjusting worm wheel 10 also drives the adjusting stirring disk 9 on the adjusting rod 8 to rotate, so that the adjusting stirring disk 9 stirs the pickling liquid, so that the pickling liquid is fluid and passes through the reaction screen barrel 7 to contact the material for pickling reaction.

[0028] Then the adjusting rod 8 also drives the adjusting transmission disk 11 to rotate, and then the adjusting transmission disk 11 drives the driving transmission disk 17 to rotate through the belt, and then the driving transmission disk 17 also drives the driving gear 16 on the driving support rod 15 to rotate, and at the same time the driving gear 16 is engaged with the reaction tooth groove, so that the reaction sleeve 5 on the reaction tooth groove is driven to rotate, and then the reaction sleeve 5 also drives the supported reaction screen barrel 7 to rotate, so that the material inside the reaction screen barrel 7 is also centrifugally rotated and dispersed, so as to further fully contact and react with the pickling liquid, thereby ensuring the adjustment of the pickling stirring effect.

[0029] Then the fixed cylinder 19 is started, and the fixed push plate 18 is pushed downward by the fixed cylinder 19, and then the fixed auger 21 and the fixed stirring rod 20 on the fixed push plate 18 are embedded in the reaction screen barrel 7, so that the material is stirred and dispersed after contacting the fixed stirring rod 20, and then the fixed electric telescopic rod 27 on the fixed support block 26 is started, so that the fixed electric telescopic rod 27 pushes the fixed rack 24 on the fixed push block 25 to move, and then the fixed slider 23 on the fixed rack 24 slides along the inside of the fixed groove, thereby guiding the fixed rack 24, and then the fixed rack 24 drives the fixed auger 21 on the fixed gear 22 to rotate, so that the fixed auger 21 drives the stirred material to turn the material upward, thereby ensuring further adjustment of the pickling stirring and turning effect.

[0030] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A stirring device for semiconductor pickling, comprising an assembly receiving plate (1), characterized in that: The top of the assembly receiving plate (1) is connected to an assembly transverse plate (3) via an assembly support plate (2); a reaction barrel (4) is arranged on the top of the assembly receiving plate (1); a drainage pipe is fixedly connected to the bottom of the reaction barrel (4); a drainage valve is fixedly connected to the side wall of the drainage pipe; a reaction sleeve (5) is rotatably sleeved inside the reaction barrel (4); reaction blocks (6) are fixedly connected to both sides of the inner wall of the reaction sleeve (5); a reaction screen barrel (7) is arranged inside the reaction sleeve (5); a reaction tooth groove is provided on the side wall of the reaction sleeve (5); and an adjustment component is connected to the bottom of the reaction barrel (4); A fixed push plate (18) is arranged at the bottom of the assembly transverse plate (3), and two fixed cylinders (19) are fixedly connected to the top of the assembly transverse plate (3). The piston ends of the fixed cylinders (19) penetrate the assembly transverse plate (3) and are fixedly connected to the fixed push plate (18). Two fixed stirring rods (20) are fixedly connected to the bottom of the fixed push plate (18). A fixed auger (21) penetrates and is rotatably connected to the bottom of the fixed push plate (18), and one end of the fixed auger (21) is fixedly connected to a fixed gear (22). A fixed component for adjusting the rotation of the fixed gear (22) is connected to the top of the fixed push plate (18).

2. A stirring device for semiconductor pickling according to claim 1, characterized in that: The adjustment component comprises an adjustment rod (8) penetrating through and rotatably connected to the bottom of the reaction barrel (4); the two ends of the adjustment rod (8) are respectively fixedly connected to an adjustment stirring disk (9) and an adjustment worm gear (10); an outer side wall of the adjustment rod (8) is fixedly sleeved with an adjustment transmission disk (11); and the top of the assembly receiving plate (1) is fixedly connected to two driving blocks (12).

3. A stirring device for semiconductor pickling according to claim 2, characterized in that: A driving motor (13) is fixedly connected to the side wall of one of the driving blocks (12); a driving worm (14) is fixedly connected to the output end of the driving motor (13); a distal end of the driving worm (14) passes through one of the driving blocks (12) and is rotationally connected to the other driving block (12); and the driving worm (14) is meshingly connected to the adjusting worm wheel (10).

4. A stirring device for semiconductor pickling according to claim 3, characterized in that: The top of the assembly receiving plate (1) is rotatably connected to a driving support rod (15), the end of the driving support rod (15) is fixedly connected to a driving gear (16), the driving gear (16) is meshingly connected to the reaction tooth groove, and the outer side wall of the driving support rod (15) is fixedly sleeved with a driving transmission disk (17), and the driving transmission disk (17) is transmission-connected to the adjustment transmission disk (11) via a belt.

5. A stirring device for semiconductor pickling according to claim 1, characterized in that: The fixing assembly comprises a fixing groove opened on the top of the fixing push plate (18), a fixing slider (23) is slidably connected inside the fixing groove, a fixing rack (24) is fixedly connected to the top of the fixing slider (23), and the fixing rack (24) is meshingly connected to the fixing gear (22).

6. A stirring device for semiconductor pickling according to claim 5, characterized in that: A fixed push block (25) is fixedly connected to the surface of the fixed rack (24), a fixed support block (26) is fixedly connected to the top of the fixed push plate (18), a fixed electric telescopic rod (27) is fixedly connected to the side wall of the fixed support block (26), and a piston end of the fixed electric telescopic rod (27) is fixedly connected to the fixed push block (25).

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