Ceramic ring and graphite boat
By designing a ceramic ring with installation ring and anti -rings, setting the first anti -conductive slot and optional second anti -conductive slot, solved the problem of conductivity layer formation of the ceramic ring in the coating process. During the anti -risk of defense, short -circuit risks have been reduced.
Patent Information
- Application Number
- CN202420213608.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-29
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2034-01-29
AI Technical Summary
During the coating process of solar cells, the outer surface of the ceramic ring comes into contact with the reaction gas, resulting in the formation of a conductive layer and increasing the risk of short circuit between the graphite boat leaves.
A ceramic ring is designed, including the installation ring and the anti -conductivity ring. There is the first anti -conductive slot and the optional second anti -conductive slot on the outside, which enhances the insulation ability, prevent the reaction gas from entering the groove, and reduce the formation of the conductive layer. Essence
Effectively improve the ability of the anti -risk of graphite boat leaves, reduce short -circuit risks, delay the formation speed of electrical coating, and improve the stability of the coating process.
Smart Images
Figure CN222421913U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photovoltaic manufacturing, in particular to a ceramic ring and a graphite boat. Background Art
[0002] In the process of preparing solar cells, silicon wafers need to go through processes such as texturing, diffusion, etching, coating and printing in sequence. In the coating process, the silicon wafer is placed in the coating equipment with a graphite boat as a carrier, and the reaction gas is introduced into the coating equipment at a certain temperature to form the required reaction film on the surface of the silicon wafer.
[0003] like Figure 1 and Figure 2 As shown, two adjacent boat blades 600 in the graphite boat are separated by a ceramic ring 400 sleeved on the mounting rod 500, so that each boat blade 600 maintains a certain distance and supports the boat blade 600. The ceramic ring 400 is made of ceramic insulating material mainly to prevent the problem of short circuit between adjacent boat blades 600 of different polarities, so as to avoid affecting the normal process. During the coating process, the flow direction of the reaction gas is as follows: Figure 1 As shown by the middle arrow, the reaction gas passes between the boat blades 600 of the graphite boat and reacts between the boat blades 600 at different poles, so that the desired reaction film is formed on the silicon wafer.
[0004] However, the outer surface of the ceramic ring 400 is also directly in contact with the reaction gas, and the environmental conditions are sufficient for a coating reaction to occur. In particular, as the number of times the graphite boat is used increases, a thin film with a certain conductivity is coated on the surface of the ceramic ring 400. When the thickness of the film reaches a certain level, it has the ability to conduct electricity, causing a short circuit between the boat blades 600 of different polarities. In addition, the surface of the existing ceramic ring 400 is a cylinder. As the use time increases, the thin film can easily accumulate on the surface of the ceramic ring 400 to form a conductive layer.
[0005] Therefore, how to improve the anti-conduction capability between the graphite boat and blades during the coating process is a technical problem that technical personnel in this field currently need to solve. Utility Model Content
[0006] In view of this, an object of the present invention is to provide a ceramic ring to improve the anti-conduction capability between graphite boats and blades.
[0007] Another object of the utility model is to provide a graphite boat having the above ceramic ring.
[0008] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0009] A ceramic ring, comprising:
[0010] A mounting ring is provided with a mounting hole for being sleeved on the mounting rod;
[0011] An anti-guide ring is arranged on the outer side of the mounting ring, and a first anti-guide groove is formed between the outer wall of the mounting ring and the inner wall of the anti-guide ring, the first end of the anti-guide ring is connected to the outer wall of the mounting ring to form the bottom of the first anti-guide groove, and the second end of the anti-guide ring is separated from the outer wall of the mounting ring to form a notch of the first anti-guide groove.
[0012] Optionally, in the above ceramic ring, a second anti-guide groove is provided on at least one inner wall of the first anti-guide groove.
[0013] Optionally, in the above-mentioned ceramic ring, the second anti-guide groove is an annular connecting structure, and a plurality of the second anti-guide grooves are spaced apart and distributed along the axial direction of the mounting ring.
[0014] Optionally, in the above-mentioned ceramic ring, the second anti-guide groove is located on the anti-guide ring.
[0015] Optionally, in the above-mentioned ceramic ring, anti-guide protrusions are formed on both sides of the second anti-guide groove; the anti-guide protrusions include a first anti-guide protrusion and a second anti-guide protrusion, the protruding height of the first anti-guide protrusion is greater than the protruding height of the second anti-guide protrusion, and the first anti-guide protrusion is located at the notch of the first anti-guide groove, and / or the first anti-guide protrusion is located between the notch of the first anti-guide groove and the bottom of the first anti-guide groove.
[0016] Optionally, in the above-mentioned ceramic ring, the first end of the anti-guide protrusion is connected to the inner wall of the first anti-guide groove, the second end of the anti-guide protrusion extends toward the inner cavity of the first anti-guide groove, and the cross-section of the anti-guide protrusion gradually decreases in the direction from the first end of the anti-guide protrusion to the second end of the anti-guide protrusion.
[0017] Optionally, in the above ceramic ring, one end of the mounting ring located at the bottom of the first anti-guide groove is the first end of the mounting ring, and one end of the mounting ring located at the notch of the first anti-guide groove is the second end of the mounting ring;
[0018] A transition shoulder is formed between the second end of the anti-guide ring and the second end of the mounting ring, and the second end of the anti-guide ring is located between the second end of the mounting ring and the first end of the mounting ring.
[0019] Optionally, in the above-mentioned ceramic ring, the mounting ring and the anti-guide ring are an integrated structure, or the mounting ring and the anti-guide ring are a split structure.
[0020] Optionally, in the above-mentioned ceramic ring, when the mounting ring and the anti-guide ring are of a split structure, a bearing boss is provided on the inner wall of the anti-guide ring, and the bearing boss is limitedly abutted against the first end of the mounting ring.
[0021] When the ceramic ring provided by the utility model is used, it is arranged between two boat blades. When the reaction gas flows between the boat blades, it is not easy to enter the inner cavity of the first anti-guide groove, which reduces the probability of forming a coating layer on the inner wall of the first anti-guide groove and improves the insulation and conduction prevention ability of the ceramic ring.
[0022] A graphite boat comprises the ceramic ring disclosed in the present application.
[0023] The graphite boat provided by the utility model has all the technical effects of the above-mentioned ceramic rings, and will not be described in detail herein. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0025] Figure 1 is a top view of the graphite boat;
[0026] Figure 2 is an axial view of a graphite boat;
[0027] Figure 3 This is a schematic diagram of the structure of the ceramic ring disclosed in the embodiment of the utility model;
[0028] Figure 4 This is a schematic diagram of the structure of a ceramic ring disclosed in another embodiment of the utility model;
[0029] Figure 5 A schematic diagram of the structure of the first anti-guided protrusion and the second anti-guided protrusion disclosed in an embodiment of the utility model;
[0030] Figure 6 A schematic structural diagram of a first anti-guided protrusion and a second anti-guided protrusion disclosed in another embodiment of the utility model;
[0031] Figure 7 It is a structural schematic diagram of an anti-guiding protrusion disclosed in another embodiment of the utility model;
[0032] Figure 8 This is a schematic structural diagram of a mounting ring and a guide-preventing ring disclosed in an embodiment of the utility model as being separated.
[0033] Wherein, 100 is a mounting ring, and 110 is a mounting hole;
[0034] 200 is a guide ring, 210 is a bearing boss, and 220 is a transition shoulder.
[0035] 300 is a first anti-guide groove, 310 is a second anti-guide groove, 320 is an anti-guide protrusion, 321 is a first anti-guide protrusion, and 322 is a second anti-guide protrusion;
[0036] 400 is a ceramic ring;
[0037] 500 is a mounting rod;
[0038] 600 is the boat leaf. DETAILED DESCRIPTION
[0039] The core of the utility model is to provide a ceramic ring, which can improve the insulation capacity of the ceramic ring and prevent the problem of circuit conduction in the graphite boat;
[0040] Another core of the utility model is to provide a graphite boat with the ceramic ring.
[0041] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0042] like Figure 3As shown, the embodiment of the utility model discloses a ceramic ring, including a mounting ring 100, an anti-guide ring 200 and a first anti-guide groove 300. The mounting ring 100 is provided with a mounting hole 110, and the mounting ring 100 is sleeved on the mounting rod through the mounting hole 110, and the mounting rod is usually a ceramic rod. The anti-guide ring 200 is arranged on the outside of the mounting ring 100, and the first end of the anti-guide ring 200 is connected to the outer wall of the mounting ring 100, and the part between the first end of the anti-guide ring 200 and the second end of the anti-guide ring 200 is separated from the outer wall of the mounting ring 100, and the second end of the anti-guide ring 200 is separated from the outer wall of the mounting ring 100, thereby forming the first anti-guide groove 300. The opening between the second end of the anti-guide ring 200 and the outer wall of the mounting ring 100 is the notch of the first anti-guide groove 300, and the part where the first end of the anti-guide ring 200 is connected to the mounting ring 100 is the groove bottom of the first anti-guide groove 300. During the coating process, it is not easy for the reaction gas to enter the inner cavity of the first anti-conductance groove 300, and it is not easy to form a conductive film on the inner wall of the first anti-conductance groove 300. The structure of the first anti-conductance groove 300 significantly delays the formation speed of the conductive coating on the outer surface of the ceramic ring provided in this embodiment, thereby improving the ability to prevent circuit conduction between the graphite boat sheets.
[0043] In a specific embodiment, Figure 4 As shown, in order to further increase the difficulty of forming a conductive coating on the inner wall of the first anti-guide groove 300, a second anti-guide groove 310 is provided on at least one side of the inner wall of the first anti-guide groove 300. The second anti-guide groove 310 further increases the overall area of the inner wall of the first anti-guide groove 300, and at the same time further increases the difficulty of the reaction gas filling the inner cavity space of the first anti-guide groove 300, making it more difficult to form a conductive coating layer on the inner wall of the first anti-guide groove 300.
[0044] In a specific embodiment, Figure 4 As shown, the second anti-guide groove 310 is an annular groove with a connected internal space. In addition, the number of the second anti-guide grooves 310 is set to be multiple, and the multiple second anti-guide grooves 310 are arranged at intervals along the axial direction of the mounting ring 100, further increasing the overall area of the inner wall of the first anti-guide groove 300 and enhancing the anti-conduction capability of the ceramic ring provided in this embodiment.
[0045] In a specific embodiment, Figure 4As shown, the second anti-guide groove 310 is arranged on the side of the first anti-guide groove 300 away from the mounting ring 100, that is, on the inner wall of the anti-guide ring 200, which can ensure the structural integrity of the mounting ring 100, improve the structural strength of the mounting ring 100 when it cooperates with the mounting rod, reduce the probability of damage or cracking and falling due to bumps and vibrations during use, and improve the stability of the coating process; each second anti-guide groove 310 is distributed on the anti-guide ring 200 at intervals along the axial direction of the mounting ring 100. When processing the anti-guide ring 200, the second anti-guide groove 310 can be integrally formed with other parts of the anti-guide ring 200, which not only improves the overall structural strength, but also reduces the difficulty and cost of production and processing. The second anti-guide groove 310 can also be obtained on the surface of the anti-guide ring by boring and other machining methods.
[0046] In another specific embodiment, the second anti-guide groove 310 can be arranged on the side of the first anti-guide groove 300 away from the anti-guide ring 200, that is, on the outer wall of the mounting ring 100. The second anti-guide groove 310 can be obtained by integral molding or machining.
[0047] In a specific embodiment, the second anti-guide groove 310 can be arranged on both sides of the first anti-guide groove 300, that is, the outer wall of the mounting ring 100 and the inner wall of the anti-guide ring 200 located in the first anti-guide groove 300 are both provided with the second anti-guide groove 310. In addition, the second anti-guide groove 310 on the outer wall of the mounting ring 100 and the second anti-guide groove 310 on the inner wall of the anti-guide ring 200 can be arranged opposite to each other one by one, or can be arranged in an interlaced manner, or can be partially arranged opposite to each other and partially arranged in an interlaced manner.
[0048] In a specific embodiment, Figure 5 and Figure 6 As shown, anti-guide protrusions 320 are formed on both sides of the second anti-guide groove 310, wherein the anti-guide protrusions 320 include a first anti-guide protrusion 321 and a second anti-guide protrusion 322, and the protruding height of the first anti-guide protrusion 321 is greater than the protruding height of the second anti-guide protrusion 322, and at the same time, the first anti-guide protrusion 321 is located at the notch of the first anti-guide groove 300, or the first anti-guide protrusion 321 is arranged in the middle part between the notch of the first anti-guide groove 300 and the bottom of the guide groove, or the first anti-guide protrusion 321 is arranged at the bottom of the first anti-guide groove 300; the first anti-guide protrusion 321 with a higher height can locally narrow the gap of the first anti-guide groove 300, thereby further increasing the difficulty of the reaction gas flowing into the deeper part of the first anti-guide groove 300, and it is more difficult to form a complete reaction film inside the first anti-guide groove 300 and conduct. In addition, the number of the first anti-guided protrusions 321 can be set to be multiple, and those skilled in the art can design the number of the first anti-guided protrusions 321 according to actual needs, which will not be listed one by one in this article.
[0049] In a specific embodiment, anti-guide protrusions 320 are provided on both sides of the second anti-guide groove 310. The anti-guide protrusions 320 can be fixed in position by bonding, diffusion welding, brazing, or other connection means. The anti-guide protrusions 320 are provided to construct a convex structure, and the second anti-guide groove 310 is formed between the two convex structures. This method of providing the anti-guide protrusions 320 can avoid complex processing of the surface shape of the mounting ring 100 and / or the anti-guide ring 200, reduce the preparation cost, and improve the yield, and can avoid secondary processing of the surface of the mounting ring 100 and / or the anti-guide ring 200, thereby reducing the overall cost of the ceramic ring and facilitating mass promotion and application.
[0050] In a specific embodiment, Figure 7 As shown, the first end of the anti-guide protrusion 320 is connected to the inner wall of the first anti-guide groove 300, and the second end of the anti-guide protrusion 320 extends toward the inner cavity of the first anti-guide groove 300, and along the direction from the first end of the anti-guide protrusion 320 to the second end of the anti-guide protrusion 320, the cross-section of the anti-guide protrusion 320 gradually decreases to form a contour shape of a serrated structure, thereby increasing the space between the second anti-guide grooves 310 through this design scheme, which is beneficial for using machining tools such as boring tools to have sufficient space to adjust the position during operations such as retracting the tool.
[0051] In a specific embodiment, Figure 5 As shown, one end of the mounting ring 100 located at the bottom of the first anti-guide groove 300 is the first end of the mounting ring 100, and one end of the mounting ring 100 located at the notch of the first anti-guide groove 300 is the second end of the mounting ring 100, a transition shoulder 220 is formed between the second end of the anti-guide ring 200 and the second end of the mounting ring 100, and the second end of the anti-guide ring 200 is located between the second end of the mounting ring 100 and the first end of the mounting ring 100, so that when the ceramic ring provided in this embodiment is installed between two adjacent boat blades, the design of the inward-retracted transition shoulder 220 can prevent the ceramic ring from contacting with processing objects such as silicon wafers near the corresponding position, thereby ensuring the process effect.
[0052] In a specific embodiment, the mounting ring 100 and the anti-guide ring 200 can be processed as one piece, so that the mounting ring 100 and the anti-guide ring 200 are an integrated structure. When the mounting ring 100 and the anti-guide ring 200 are an integrated structure, not only the overall structural strength of the ceramic ring provided in this embodiment is improved, but also the ceramic ring provided in this embodiment is convenient for quick installation with the mounting rod, thereby improving work efficiency.
[0053] In a specific embodiment, the mounting ring 100 and the anti-guide ring 200 are processed separately, and the mounting ring 100 and the anti-guide ring 200 are assembled and matched when in use. This solution helps to reduce the processing difficulty and cost of the second anti-guide groove 310. Of course, technical personnel in this field can design the specific connection method of the mounting ring 100 and the anti-guide ring 200 according to actual needs.
[0054] like Figure 8 As shown, when the mounting ring 100 and the anti-guide ring 200 are split structures, a boss structure extending toward the center is provided on the inner wall of the anti-guide ring 200 to form a bearing boss 210. When the mounting ring 100 is placed in the inner cavity of the anti-guide ring 200, the mounting ring 100 is abutted and limited by the bearing boss 210. At the same time, the anti-guide ring 200 is also provided with a mounting hole 110, and cooperates with the mounting hole 110 of the mounting ring 100 so that the mounting rod can pass through the ceramic ring provided in this embodiment. When the mounting rod passes through the mounting holes 110 on the mounting ring 100 and the anti-guide ring 200, the mounting ring 100 and the anti-guide ring 200 can be aligned so that the first anti-guide groove 300 has a fixed inner cavity space.
[0055] The utility model also discloses a graphite boat, including a ceramic ring. Since the graphite boat has the ceramic ring, it has all the technical effects of the ceramic ring, which will not be described in detail herein.
[0056] It should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.
[0057] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "a kind" and / or "the" do not refer to the singular, but also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements. The elements defined by the sentence "includes a..." do not exclude the existence of other identical elements in the process, method, commodity or device that includes the elements.
[0058] In the description of the embodiments of the present application, unless otherwise specified, " / " means or, for example, A / B can mean A or B; "and / or" in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships, for example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone. In addition, in the description of the embodiments of the present application, "multiple" means two or more than two.
[0059] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features.
[0060] This article uses specific examples to illustrate the principles and implementation methods of the utility model. The above examples are only used to help understand the core idea of the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.
Claims
1. A ceramic ring, characterized in that: include: A mounting ring (100) is provided with a mounting hole (110) for being sleeved on the mounting rod; The anti-guide ring (200) is arranged on the outer side of the mounting ring (100), and a first anti-guide groove (300) is formed between the outer wall of the mounting ring (100) and the inner wall of the anti-guide ring (200); the first end of the anti-guide ring (200) is connected to the outer wall of the mounting ring (100) to form the bottom of the first anti-guide groove (300); the second end of the anti-guide ring (200) is separated from the outer wall of the mounting ring (100) to form a notch of the first anti-guide groove (300).
2. The ceramic ring according to claim 1, characterized in that: At least one inner wall of the first anti-guidance groove (300) is provided with a second anti-guidance groove (310).
3. The ceramic ring according to claim 2, characterized in that: The second anti-guide groove (310) is an annular communication structure, and a plurality of the second anti-guide grooves (310) are distributed at intervals along the axial direction of the mounting ring (100).
4. The ceramic ring according to claim 2, characterized in that: The second anti-guiding groove (310) is located on the anti-guiding ring (200).
5. The ceramic ring according to claim 2, characterized in that: Anti-guide protrusions (320) are formed on both sides of the second anti-guide groove (310); the anti-guide protrusions (320) include a first anti-guide protrusion (321) and a second anti-guide protrusion (322); the protruding height of the first anti-guide protrusion (321) is greater than the protruding height of the second anti-guide protrusion (322), and the first anti-guide protrusion (321) is located at the notch of the first anti-guide groove (300), and / or the first anti-guide protrusion (321) is located between the notch and the bottom of the first anti-guide groove (300).
6. The ceramic ring according to claim 5, characterized in that: The first end of the anti-guide protrusion (320) is connected to the inner wall of the first anti-guide groove (300), the second end of the anti-guide protrusion (320) extends toward the inner cavity of the first anti-guide groove (300), and the cross-section of the anti-guide protrusion (320) gradually decreases in the direction from the first end of the anti-guide protrusion (320) to the second end of the anti-guide protrusion (320).
7. The ceramic ring according to claim 1, characterized in that: One end of the mounting ring (100) located at the bottom of the first anti-guide groove (300) is the first end of the mounting ring (100), and one end of the mounting ring (100) located at the notch of the first anti-guide groove (300) is the second end of the mounting ring (100); A transition shoulder (220) is formed between the second end of the anti-guiding ring (200) and the second end of the mounting ring (100), and the second end of the anti-guiding ring (200) is located between the second end of the mounting ring (100) and the first end of the mounting ring (100).
8. The ceramic ring according to any one of claims 1 to 7, characterized in that: The mounting ring (100) and the anti-guiding ring (200) are an integrated structure, or the mounting ring (100) and the anti-guiding ring (200) are a split structure.
9. The ceramic ring according to claim 8, characterized in that: When the mounting ring (100) and the anti-guiding ring (200) are of a split structure, the inner wall of the anti-guiding ring (200) is provided with a bearing boss (210), and the bearing boss (210) is in limited contact with the first end of the mounting ring (100).
10. A graphite boat, characterized in that: It comprises a ceramic ring, wherein the ceramic ring is the ceramic ring as described in any one of claims 1-9.