Ultraviolet degumming device for sapphire substrate
By designing a sapphire substrate ultraviolet degluing device including a chassis shell, processing chamber, exposure chamber, development chamber and erosion chamber, the problem of complex and low efficiency of the sapphire substrate removal process in the prior art is solved, and automation is achieved Remove glue and improve work efficiency.
Patent Information
- Application Number
- CN202420822517.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-19
- Publication Date
- 2025-02-07
- Estimated Expiration
- 2034-04-19
AI Technical Summary
The prior art is difficult to realize the automated degluing process of sapphire substrates, resulting in complex operations and inefficient efficiency.
Design a sapphire substrate ultraviolet degluing device including a chassis housing, processing chamber, exposure chamber, development chamber and erosion chamber. The degluing operation is performed using ultraviolet lamp exposure, developer nozzle and water purification nozzle, and through double row tracks and The track plate realizes automated loading and degluing processes.
The automatic glue removal process of sapphire substrate is realized, the operation process is simplified, the work efficiency is improved, and the use of developer is reduced.
Smart Images
Figure CN222428721U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of degumming devices, in particular to a sapphire substrate ultraviolet degumming device. Background Art
[0002] Sapphire substrate refers to a technology that uses sapphire as a substrate material. Sapphire has excellent physical and chemical properties and is often used as a substrate material for semiconductor devices, laser devices, etc. When preparing a sapphire substrate, a layer of glue is usually coated on its surface to fix the substrate during processing.
[0003] When a reworked sapphire substrate appears, it is often necessary to remove all the glue on the surface. The common removal method is to use acetone to clean for 20 minutes, then use isopropyl alcohol to clean for 10 minutes, then use sulfuric acid to clean for 10 minutes, and finally spin dry for 9 minutes and rinse with yellow light. When using ultraviolet light to remove the glue, use ultraviolet light to expose the reworked sheet with glue, then use developer to remove the photoresist, and finally rinse. The whole operation is relatively simple, so it is necessary to design an automated degumming equipment that can complete the above steps to improve work efficiency. Utility Model Content
[0004] The utility model aims to provide a sapphire substrate ultraviolet degumming device in view of the problems existing in the background technology.
[0005] The technical solution of the utility model is: a sapphire substrate ultraviolet degumming device, comprising a chassis shell, a processing chamber is opened in the chassis shell, a controller is fixed on the front side of the chassis shell and located at the periphery of the processing chamber, the processing chamber is divided into a discharge chamber, a developing chamber, a flushing chamber and an exposure chamber by a partition, an ultraviolet lamp is fixed in the exposure chamber, a developer nozzle is installed in the developing chamber, a clean water nozzle is installed in the flushing chamber, a double-row track is fixed in the processing chamber and located below the processing chamber, a track plate is slidably connected to the double-row track, and a storage frame is installed on the track plate.
[0006] Preferably, support frames are fixed to the four corners of the bottom of the storage frame, and the bottom of the support frame is fixed to the track plate.
[0007] Preferably, a drainage hole is opened in the middle position of the bottom of the storage frame, a placement plate is arranged in the storage frame, a sealing plate corresponding to the drainage hole is fixed at the center position of the bottom of the placement plate, a telescopic cylinder is fixed on the track plate and at a position corresponding to the drainage hole, and the output end of the telescopic cylinder is fixed at the bottom of the sealing plate.
[0008] Preferably, a group of rubber suction cups are fixed to the upper end of the placement plate.
[0009] Preferably, a waste liquid collection box is fixed in the processing chamber and below the double-row tracks.
[0010] Preferably, the front side of the processing chamber is an open structure and is slidably connected to a group of sliding doors, and the sliding doors are provided with observation windows.
[0011] Compared with the prior art, the utility model has the following beneficial technical effects: after exposure with ultraviolet light and immersion in developer, flushing and degumming are performed, and after loading, the track plate slides to automatically complete the above operation process, making the entire operation simpler and improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 This is a schematic diagram of the internal structure of the processing chamber of the utility model;
[0013] Figure 2 This is a schematic diagram of the front appearance structure of the utility model;
[0014] Figure 3 This is a schematic diagram of the combined appearance of the track plate and the storage frame of the utility model;
[0015] Figure 4 This is a schematic diagram of the combined structure of the storage frame of the utility model.
[0016] Figure numerals: 1. Chassis shell; 11. Controller; 12. Sliding door; 13. Observation window; 2. Processing chamber; 21. Partition; 22. Discharge chamber; 23. Exposure chamber; 24. Developing chamber; 25. Flushing chamber; 26. Ultraviolet lamp; 27. Developer nozzle; 28. Clean water nozzle; 3. Double-row track; 4. Track plate; 41. Telescopic cylinder; 5. Storage frame; 51. Support frame; 52. Drain hole; 53. Placement plate; 54. Sealing plate; 55. Rubber suction cup; 6. Waste liquid collection box. DETAILED DESCRIPTION
[0017] The technical solution of the utility model is further described below in conjunction with the accompanying drawings and specific embodiments.
[0018] Example
[0019] like Figure 1-4As shown, the utility model proposes a sapphire substrate ultraviolet degumming device, including a chassis shell 1, a processing chamber 2 is opened in the chassis shell 1, a controller 11 is fixed on the front side of the chassis shell 1 and located at the periphery of the processing chamber 2, the processing chamber 2 is divided into a discharge chamber 22, a developing chamber 24, a flushing chamber 25 and an exposure chamber 23 by a partition 21, an ultraviolet lamp 26 is fixed in the exposure chamber 23, a developer nozzle 27 is installed in the developing chamber 24, and a clean water nozzle 28 is installed in the flushing chamber 25, a double-row track 3 is fixed in the processing chamber 2 and located below the processing chamber 2, a track plate 4 is slidably connected to the double-row track 3, a storage frame 5 is installed on the track plate 4, a waste liquid collection box 6 is fixed in the processing chamber 2 and located below the double-row track 3, the front side of the processing chamber 2 is an open structure, and a group of sliding doors 12 are slidably connected, and an observation window 13 is arranged on the sliding door 12.
[0020] Support frames 51 are fixed at the four corners of the bottom of the storage frame 5. The bottom of the support frame 51 is fixed on the track plate 4. A drainage hole 52 is opened in the middle of the bottom of the storage frame 5. A placement plate 53 is arranged in the storage frame 5. A sealing plate 54 corresponding to the drainage hole 52 is fixed at the center of the bottom of the placement plate 53. A telescopic cylinder 41 is fixed on the track plate 4 and at a position corresponding to the drainage hole 52. The output end of the telescopic cylinder 41 is fixed to the bottom of the sealing plate 54. A group of rubber suction cups 55 are fixed on the upper end of the placement plate 53. When the storage frame 5 moves to the developing chamber 24, the storage frame 5 moves to the developing chamber 24. When inside, the placement plate 53 and the sealing plate 54 can be driven by the telescopic cylinder 41 to move downward to seal the drainage hole 52. Therefore, by using the developer nozzle 27 to inject the developer, it is only necessary to fill the storage frame 5 to ensure that the sapphire substrate is immersed in the developer. There is no need to flush it continuously, thereby reducing the use of the developer. On the contrary, when flushing the inside of the cavity 25, the placement plate 53 is lifted up, and then it is continuously flushed and cleaned with clean water to flush the glue and developer on the surface of the sapphire substrate, and finally the waste water is discharged through the drainage hole 52.
[0021] In this embodiment, the entire device is first connected to an external power supply, and the track plate 4 slides on the double-row track 3 to drive the storage frame 5 to sequentially pass through the exposure chamber 23, the developing chamber 24 and the flushing chamber 25. Therefore, the sapphire substrate is placed on the placement plate 53 in the discharge chamber 22, so that it moves with the storage frame 5 and the track plate 4 to complete the entire degumming process. The operation is simple and convenient. The rubber suction cup 55 is used to assist the adsorption of the entire process, which can increase the stability of the movement process of the sapphire substrate and the flushing process. When the storage frame 5 moves to the inside of the developing chamber 24, the telescopic cylinder 41 is used to drive the storage frame 5 to move the sapphire substrate. The placement plate 53 and the sealing plate 54 are moved downward to seal the drainage hole 52. Therefore, by using the developer nozzle 27 to inject the developer, it is only necessary to fill the storage frame 5 to ensure that the sapphire substrate is immersed in the developer. There is no need to flush it continuously, thereby reducing the use of the developer. On the contrary, when flushing the inside of the cavity 25, the placement plate 53 is lifted upward, and then it is continuously flushed and cleaned with clean water to flush the glue and developer on the surface of the sapphire substrate. Finally, the waste water is discharged through the drainage hole 52 and flows into the waste liquid collection box 6 for collection, completing the entire degumming process. The entire step is completed automatically, and the operation is simple and convenient.
[0022] The above-mentioned specific embodiments are only several preferred embodiments of the present invention. Based on the technical solution of the present invention and the relevant inspiration of the above-mentioned embodiments, those skilled in the art can make various alternative improvements and combinations to the above-mentioned specific embodiments.
Claims
1. A sapphire substrate UV degumming device, comprising a housing (1), characterized in that: A processing chamber (2) is provided in the chassis shell (1), a controller (11) is fixed on the front side of the chassis shell (1) and located outside the processing chamber (2), the processing chamber (2) is divided into a discharge chamber (22), a developing chamber (24), a flushing chamber (25) and an exposure chamber (23) by a partition (21), an ultraviolet lamp (26) is fixed in the exposure chamber (23), a developer nozzle (27) is installed in the developing chamber (24), a clean water nozzle (28) is installed in the flushing chamber (25), a double-row track (3) is fixed in the processing chamber (2) and located below the processing chamber (2), a track plate (4) is slidably connected to the double-row track (3), and a storage frame (5) is installed on the track plate (4).
2. The sapphire substrate UV stripping device according to claim 1, characterized in that: Support frames (51) are fixed at the four corners of the bottom of the storage frame (5), and the bottom of the support frame (51) is fixed on the track plate (4).
3. The sapphire substrate UV stripping device according to claim 1, characterized in that: A drainage hole (52) is provided at the middle position of the bottom of the storage frame (5); a placement plate (53) is arranged inside the storage frame (5); a sealing plate (54) corresponding to the drainage hole (52) is fixed at the center position of the bottom of the placement plate (53); a telescopic cylinder (41) is fixed on the track plate (4) at a position corresponding to the drainage hole (52); an output end of the telescopic cylinder (41) is fixed at the bottom of the sealing plate (54).
4. The sapphire substrate UV stripping device according to claim 3, characterized in that: A group of rubber suction cups (55) are fixed to the upper end of the placement plate (53).
5. The sapphire substrate UV stripping device according to claim 1, characterized in that: A waste liquid collection box (6) is fixed in the processing chamber (2) and below the double-row tracks (3).
6. The sapphire substrate UV stripping device according to claim 1, characterized in that: The front side of the processing chamber (2) is an open structure and is slidably connected to a group of sliding doors (12), and an observation window (13) is provided on the sliding door (12).