Probe grinding machine for probe card

By designing a needle grinder for probe cards, the needle grinding image is displayed in real time using light sources and camera components, the problem of unobservable grinding of probe cards is solved, and precise control of probe cards is achieved, reducing losses and improving product qualification rate .

CN222430283UActive Publication Date: 2025-02-07ZHEJIANG MICROFLEX SEMICON CO LTD
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Patent Information

Application Number
CN202420437453.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-06
Publication Date
2025-02-07
Estimated Expiration
2034-03-06

AI Technical Summary

Technical Problem

During the grinding process of the probe card, the grinding situation cannot be directly observed, which may lead to the needle tip being too short, increasing probe loss and affecting the product pass rate.

Method used

A needle grinder for probe cards is designed, including a needle grinding platform, a platform rotation mechanism, a light source assembly, a camera assembly and a display screen. Through the light source component lighting and the camera component shooting, the grinding needle image is displayed in real time, making it easier for users to monitor the grinding progress.

Benefits of technology

It realizes direct observation of the grinding condition of the probe needle, accurately grasps the grinding progress, reduces probe loss, and improves product pass rate.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN222430283U_ABST
    Figure CN222430283U_ABST
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Abstract

The utility model discloses a probe grinding machine for a probe card, which comprises a base, and a probe grinding platform and a platform rotating mechanism for driving the probe grinding platform to rotate are arranged on the base. A fixed table top is erected on the base, and an opening for the needle grinding platform to penetrate out is formed in the middle of the fixed table top; needle card pressing plates are slidably mounted on the fixed table top and located on the left side and the right side of the opening; a groove is formed in the front side and the rear side of the opening, and the needle grinding platform is located in the middle of the groove; one end of the groove is provided with a light source assembly, and the other end is provided with a camera assembly; a display screen is further installed on the base and used for displaying a grinding needle image shot by the camera shooting assembly. The lighting assembly and the camera shooting assembly are arranged on the two sides of the connecting position of the needle grinding platform and the probe, the camera shooting assembly is used for shooting the needle grinding image, the needle grinding image is sent to the display screen and is amplified and displayed on the display screen, a user can conveniently know the needle grinding condition from the display screen and accurately grasp the needle grinding progress, and the loss of the probe is reduced.
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Description

Technical Field

[0001] The utility model relates to the technical field of probe cards, in particular to a needle grinding machine used for probe cards. Background Art

[0002] The probe card is the interface between the electronic test system and the semiconductor wafer. Typically, the probe card is mechanically docked with probes and electrically connected to the tester. Its purpose is to provide an electrical path between the test system and the circuit on the wafer, allowing the circuit to be tested and verified at the wafer level. During the production process of the probe card, its probe needs to go through a grinding process to ensure the normal use of the probe card.

[0003] Currently, when grinding the tip of the probe, the grinding condition cannot be directly observed. Problems such as the tip being ground too short may occur during the grinding process, resulting in large probe loss and affecting the product qualification rate. Utility Model Content

[0004] In order to solve the above problems, the utility model provides a probe grinding machine for a probe card, which can directly observe the grinding condition of the probe and reduce the loss of the probe.

[0005] To this end, the technical solution of the utility model is: a needle grinding machine for a probe card, comprising a base, on which is provided a needle grinding platform and a platform rotating mechanism for driving the needle grinding platform to rotate; a fixed table top is mounted on the base, and an opening is provided in the middle of the fixed table top for the needle grinding platform to pass through; a needle card pressing plate is slidably mounted on the fixed table top, and is located on the left and right sides of the opening; a groove is provided on the front and rear sides of the opening, and the needle grinding platform is located in the middle of the groove; a light source assembly is provided at one end of the groove, and a camera assembly is provided at the other end; a display screen is also installed on the base, and the display screen is used to display the needle grinding image taken by the camera assembly.

[0006] On the basis of the above scheme and as a preferred scheme of the above scheme: the light source assembly is installed at the front end of the groove and irradiates toward the needle grinding platform; the camera assembly is located at the rear end of the groove and captures the needle grinding image of the needle grinding platform.

[0007] On the basis of the above scheme and as a preferred scheme of the above scheme: a slide groove is provided on the fixed table top, and the needle card pressure plate includes a pressure plate seat and a pressure plate block, the pressure plate seat is movably installed in the slide groove and fixed by a locking piece; the pressure plate block is installed on the pressure plate seat through a long slot hole.

[0008] On the basis of the above scheme and as a preferred scheme of the above scheme: the platform rotation mechanism includes a base plate, an X-axis movable table, a Y-axis movable table, a rotating table and a rotating motor, the X-axis movable table and the rotating motor are installed on the base plate, the Y-axis movable table is movably installed on the X-axis movable table below, the rotating table is movably installed on the Y-axis movable table below, and the needle grinding platform is fixed on the rotating table; the output end of the rotating motor is connected to the rotating table through an eccentric shaft, driving the rotating table and the needle grinding platform to rotate.

[0009] On the basis of the above scheme and as a preferred scheme of the above scheme: an X-axis guide rail is provided above the X-axis moving table, and a first slider that slides with the X-axis guide rail is provided below the Y-axis moving table; a Y-axis guide rail is provided above the Y-axis moving table, and a second slider that slides with the Y-axis guide rail is provided below the rotating table.

[0010] On the basis of the above scheme and as a preferred scheme of the above scheme: a lifting platform is also provided on the base, and the bottom plate of the platform rotating mechanism is installed on the lifting platform.

[0011] On the basis of the above scheme and as a preferred scheme of the above scheme: it also includes an electric control cabinet, an operation panel is provided on the outside of the electric control cabinet, and a PLC control unit is provided inside the electric control cabinet for controlling the operation of the rotating motor and the lifting platform.

[0012] When in use, adjust the position of the pressure plate seat, place the probe card on the pressure plate seat, and fix it with the pressure plate. At this time, the probe on the probe card faces the needle grinding platform; then adjust the height of the lifting platform on the operation panel of the electric control cabinet so that the needle grinding platform moves up to contact the tip of the probe; then start the rotating motor, which drives the rotating table to rotate through the eccentric shaft. During the rotation of the rotating table, the directions of the X-axis and Y-axis change, that is, the rotating table moves along the Y-axis guide rail and the Y-axis moving table moves along the X-axis guide rail, which finally manifests as the needle grinding platform performing a grinding operation on the probe.

[0013] During the needle grinding process, the light source component is facing the junction of the needle grinding platform and the probe and illuminates it, so that the camera component on the other side can capture the needle grinding image of the needle grinding platform and enlarge it on the display screen, making it convenient for users to grasp the progress of the needle grinding.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. Set up lighting components and camera components on both sides of the junction of the needle grinding platform and the probe, use the camera component to shoot the needle grinding image, and send the needle grinding image to the display screen, which is enlarged and displayed on the display screen, so that users can understand the needle grinding situation from the display screen, accurately grasp the needle grinding progress, and reduce the loss of the probe.

[0016] 2. The probe card pressing plate can slide along the slide groove on the fixed table, so that the distance between the two probe card pressing plates can be adjusted to adapt to probe cards of different specifications.

[0017] 3. There is a platform rotation mechanism and a lifting platform under the needle grinding platform, which can drive the needle grinding platform to rotate and grind, and can also accurately control the height of the needle grinding platform, and ultimately control the grinding length of the probe. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The following is a further detailed description of the embodiments of the present invention in conjunction with the accompanying drawings.

[0019] Figure 1 It is a schematic diagram of the structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the structure of the fixed table of the utility model (illumination and camera components are omitted);

[0021] Figure 3 This is a top view of the structure of the fixed tabletop of the utility model;

[0022] Figure 4 It is a structural schematic diagram of the platform rotating mechanism of the utility model;

[0023] Figure 5 It is an exploded view of the parts of the platform rotating mechanism of the utility model;

[0024] Figure 6 It is a structural schematic diagram of the needle clamping plate of the utility model.

[0025] Marked in the figure are: base 1, needle grinding platform 2, platform rotating mechanism 3, bottom plate 31, X-axis moving table 32, Y-axis moving table 33, rotating table 34, rotating motor 35, eccentric shaft 36, lifting platform 4, fixed table top 5, opening 51, slide groove 52, groove 53, needle card pressure plate 6, pressure plate seat 61, pressure plate 62, bolt 63, locking piece 64, light source assembly 7, camera assembly 8, display screen 9, and electric control cabinet 10. DETAILED DESCRIPTION

[0026] In the description of the present invention, it should be noted that directional words, such as the terms "center", "lateral (X)", "longitudinal (Y)", "vertical (Z)", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating directions and positional relationships are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of narrating the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and cannot be understood as limiting the specific protection scope of the present invention.

[0027] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. Therefore, the definition of "first" and "second" features can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "several" and "a number" is two or more, unless otherwise clearly and specifically defined.

[0028] The needle grinding machine for the probe card in this embodiment comprises a base 1, on which a needle grinding platform 2, a platform rotating mechanism 3 for driving the needle grinding platform to rotate, and a lifting platform 4 are arranged; the needle grinding platform 2 is a circular structure, and the upper surface is a grinding surface.

[0029] The platform rotating mechanism 3 includes a base plate 31, an X-axis movable table 32, a Y-axis movable table 33, a rotating table 34 and a rotating motor 35. The base plate 31 is installed on the lifting platform 4 and can be lifted and lowered in the Z-axis direction to change the height of the needle grinding platform 2; the X-axis movable table 32 and the rotating motor 35 are installed on the base plate 31, an X-axis guide rail is provided above the X-axis movable table 32, and a first slider that slides with the X-axis guide rail is provided below the Y-axis movable table 33, so that the Y-axis movable table 33 can be movably installed on the X-axis movable table 32.

[0030] A Y-axis guide rail is provided above the Y-axis movable table 33, and a second slider which slides with the Y-axis guide rail is provided below the rotating table 34, so that the rotating table 34 can be movably mounted on the Y-axis movable table 33, and the needle grinding platform 2 is fixed on the rotating table 34; the output end of the rotating motor 35 is connected to the rotating table 34 through the eccentric shaft 36, driving the rotating table 34 and the needle grinding platform 2 to rotate, and during the rotation, displacement in the X-axis and Y-axis directions will occur.

[0031] A fixed table top 5 is mounted on the base 1, and an opening 51 is provided in the middle of the fixed table top 5 for the needle grinding platform 2 to pass through; a needle card pressure plate 6 is slidably installed on the fixed table top 5, and is located on the left and right sides of the opening 51; a slide groove 52 is provided on the fixed table top 5, and the needle card pressure plate 6 includes a pressure plate seat 61 and a pressure plate 62, and the pressure plate seat 61 is movably installed in the slide groove 52 by bolts 63, and can be fixed by a locking member 64; the pressure plate 62 is installed on the pressure plate seat 61 through a long slot hole, and the probe card can be placed on the pressure plate seat and pressed by the pressure plate.

[0032] A groove 53 is provided at the front and rear sides of the opening 51, and the needle grinding platform 2 is located in the middle of the groove 53; a light source assembly 7 and a camera assembly 8 are provided at both ends of the groove 53; the light source assembly 7 is installed at the front side of the groove 53 to illuminate the needle grinding platform 2; the camera assembly 8 is located at the rear side of the groove to shoot the needle grinding picture of the needle grinding platform 2. A display screen 9 is also installed on the base 1, and the display screen 9 is used to display the needle grinding image shot by the camera assembly 8.

[0033] An electric control cabinet 10 is also provided on one side of the base 1. An operation panel is provided on the outside of the electric control cabinet 10. The operation panel is provided with a power switch, a power indicator light, an emergency switch and a control hand wheel, etc. A PLC control unit is provided in the electric control cabinet for controlling the operation of the rotating motor and the lifting platform.

[0034] When in use, adjust the position of the pressure plate seat 61, place the probe card on the pressure plate seat 61, and fix it with the pressure plate 62. At this time, the probe on the probe card faces the needle grinding platform 2; then adjust the lifting platform 4 on the operation panel of the electric control cabinet 10, so that the needle grinding platform 2 moves up to contact the tip of the probe; then start the rotating motor 35, and the rotating motor 35 drives the rotating table 34 to rotate through the eccentric shaft 36. During the rotation of the rotating table 34, the X-axis and Y-axis directions of the rotating table 34 change, that is, the rotating table moves along the Y-axis guide rail and the Y-axis moving table moves along the X-axis guide rail, which finally manifests as the needle grinding platform 2 performing a grinding operation on the probe.

[0035] During the needle grinding process, the light source assembly 7 faces the junction of the needle grinding platform and the probe and illuminates it, so that the camera assembly 8 on the other side can capture the needle grinding image of the needle grinding platform and enlarge it on the display screen 9 to facilitate the user to grasp the progress of the needle grinding.

[0036] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A needle grinding machine for a probe card, comprising a base, characterized in that: A needle grinding platform and a platform rotating mechanism for driving the needle grinding platform to rotate are provided on the base; a fixed table top is mounted on the base, and an opening is provided in the middle of the fixed table top for the needle grinding platform to pass through; a needle card pressing plate is slidably installed on the fixed table top, and is located on the left and right sides of the opening; a groove is provided on the front and back sides of the opening, and the needle grinding platform is located in the middle of the groove; a light source assembly is provided at one end of the groove, and a camera assembly is provided at the other end; a display screen is also installed on the base, and the display screen is used to display the needle grinding image taken by the camera assembly.

2. A needle grinding machine for a probe card as claimed in claim 1, characterized in that: The light source assembly is installed at the front end of the groove to illuminate the needle grinding platform; the camera assembly is located at the rear end of the groove to capture the needle grinding image of the needle grinding platform.

3. A needle grinding machine for a probe card as claimed in claim 1, characterized in that: The fixed table is provided with a slide groove, and the needle card pressure plate includes a pressure plate seat and a pressure plate block. The pressure plate seat is movably installed in the slide groove and fixed by a locking piece; the pressure plate block is installed on the pressure plate seat through a long slot hole.

4. A needle grinding machine for a probe card as claimed in claim 1, characterized in that: The platform rotating mechanism includes a base plate, an X-axis moving table, a Y-axis moving table, a rotating table and a rotating motor. The X-axis moving table and the rotating motor are mounted on the base plate, the Y-axis moving table is movably mounted on the X-axis moving table, the rotating table is movably mounted on the Y-axis moving table, and the needle grinding platform is fixed on the rotating table; the output end of the rotating motor is connected to the rotating table through an eccentric shaft to drive the rotating table and the needle grinding platform to rotate.

5. A needle grinding machine for a probe card as claimed in claim 4, characterized in that: An X-axis guide rail is arranged above the X-axis moving platform, and a first slider which is slidably matched with the X-axis guide rail is arranged below the Y-axis moving platform; a Y-axis guide rail is arranged above the Y-axis moving platform, and a second slider which is slidably matched with the Y-axis guide rail is arranged below the rotating platform.

6. A needle grinding machine for a probe card as claimed in claim 1, characterized in that: The base is also provided with a lifting platform, and the bottom plate of the platform rotating mechanism is installed on the lifting platform.

7. A needle grinding machine for a probe card as claimed in claim 1, characterized in that: It also includes an electric control cabinet with an operation panel on the outside and a PLC control unit inside the electric control cabinet for controlling the operation of the rotating motor and the lifting platform.