Mask robot clamp

Abstract

The utility model discloses a mask robot clamp which comprises an electric sliding rail and a clamping assembly arranged on the electric sliding rail. The clamping assembly comprises a first clamping piece and a second clamping piece which are oppositely arranged, the first clamping piece and the second clamping piece clamp the two sides of the mask correspondingly, and each of the first clamping piece and the second clamping piece comprises a mounting module, a clamping block assembly arranged on the mounting module and a driving assembly used for driving the clamping block assembly to move. And the supporting piece is arranged on the mounting module in a sliding manner and is used for supporting the mask plate. According to the scheme, the clamp is an end effector of a robot and is directly used for grabbing and gripping, the first clamping piece and the second clamping piece can reduce the contact area of products to the maximum extent while it is guaranteed that the products are grabbed safely, and therefore pollution to the products is reduced. In the process that the clamping block assembly clamps and fixes the mask, the supporting piece arranged in the sliding mode and the mask move together, friction between the mask and the clamp is avoided, and then the mask is prevented from being scratched and abraded.

Description

Technical Field

[0001] The utility model relates to the technical field of mask clamps, and more specifically to a mask robot clamp. Background Art

[0002] Photomask, also known as mask or MASK for short, is an important tool used to make fine patterns in semiconductor-related fields. The use of photomask can achieve rapid replication of target patterns, making it possible to produce large quantities of semiconductor devices and display devices. As a master pattern, the production process of Mask has higher precision and quality requirements. It is necessary to chrome plate, glue, photolithography, development, etching, stripping, inspection, repair and other processes on the quartz or other material surface that meets the transmittance and flatness requirements. The photomask needs to be continuously transported between each process. Due to the high cleanliness requirements of dust-free workshops, product safety protection, optimization and upgrading of industrial structure, and improvement of production efficiency, industrial robots have now appeared to replace manual handling of masks.

[0003] The glass used to make photolithography masks is smooth and fragile, which places high demands on controllers and actuators. The existing transfer fixtures have a large contact area with the mask, which can easily cause mask contamination. At the same time, the fixtures can easily cause friction and scratches on the mask during the clamping process. Utility Model Content

[0004] The utility model aims to provide a mask robot fixture to solve the technical problems existing in the above-mentioned background technology.

[0005] The utility model technical solution is a mask robot clamp, comprising an electric slide rail, and a clamping assembly arranged on the electric slide rail;

[0006] The clamping assembly includes a clamping member 1 and a clamping member 2 which are arranged opposite to each other, and the clamping member 1 and the clamping member 2 respectively clamp two sides of the mask plate. The clamping member 1 and the clamping member 2 each include a mounting module, a clamping block assembly arranged on the mounting module, a driving assembly for driving the clamping block assembly to move, and a supporting member slidably arranged on the mounting module for supporting the mask plate.

[0007] In a preferred embodiment, the clamping member includes a fixed clamping block and a movable clamping block arranged opposite to the fixed clamping block, the movable clamping block is connected to a mounting block, the mounting block is connected to the driving assembly, and the mounting block is limited by a mounting module.

[0008] In a preferred embodiment, the drive assembly comprises a drive cylinder.

[0009] In a preferred embodiment, a mounting cavity is provided in the mounting module, a guide rail is provided in the mounting cavity, and the support member is provided on the guide rail.

[0010] In a preferred embodiment, the support member includes a slider slidably connected to the guide rail, a support block arranged on the slider, a guide rod arranged on both sides of the slider, and a spring sleeved on the guide rod, and both sides of the spring are in pressure contact with the side walls of the installation cavity.

[0011] In a preferred embodiment, a laser sensor is disposed on one side of the mounting module.

[0012] The beneficial effects of the technical solution of the utility model are:

[0013] The clamp of this solution is the end effector of the robot, which is directly used for grasping and holding. Clamping part one and clamping part two can minimize the contact area of ​​the product while ensuring the safe grasping of the product, thereby reducing contamination to the product.

[0014] When the clamping block assembly clamps and fixes the mask, the slidably arranged support member moves together with the mask to avoid friction between the mask and the clamp, thereby preventing the mask from being scratched and worn. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the overall structure of the utility model.

[0016] Figure 2 This is a schematic diagram of the structure of the clamping assembly of the utility model.

[0017] Figure 3 This is a cross-sectional view of the clamping assembly of the utility model.

[0018] Explanation of the reference numerals: 1 electric slide rail, 2 clamping member 1, 3 clamping member 2, 4 mounting module, 5 fixed clamping block, 6 movable clamping block, 7 mounting block, 8 driving cylinder, 9 guide rail, 10 slider, 11 supporting block, 12 guide rod, 13 spring, 14 laser sensor. DETAILED DESCRIPTION

[0019] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the sake of illustration and convenience of description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations are obvious to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific purposes.

[0020] like Figure 1-3 As shown, the technical solution of the utility model is a mask robot clamp, including an electric slide rail 1 and a clamping assembly arranged on the electric slide rail 1. The clamp of this solution is the end effector of the robot, which is directly used for grasping and holding. The electric slide rail 1 can drive the clamping assembly to move to clamp the mask, which can minimize the product contact area while ensuring the safe grasping of the product, thereby reducing the contamination of the product.

[0021] The clamping assembly includes a clamping member 2 and a clamping member 3 that are arranged opposite to each other, and the clamping member 2 and the clamping member 3 respectively clamp the two sides of the mask plate. The clamping member 2 and the clamping member 3 both include a mounting module 4, a clamping block assembly arranged on the mounting module 4, a driving assembly for driving the clamping block assembly to move, and a supporting member slidably arranged on the mounting module 4 for supporting the mask plate.

[0022] During transportation, the clamping member 1 2 and the clamping member 2 3 are driven by the electric slide rail 1 to approach each other and contact the two sides of the mask respectively. Then the driving assembly drives the clamping block assembly to move and clamp the mask. During this process, the sliding support moves together with the mask to avoid friction between the mask and the clamp, thereby preventing the mask from being scratched and worn.

[0023] The clamping member includes a fixed clamping block 5 and a movable clamping block 6 arranged opposite to the fixed clamping block 5, the movable clamping block 6 is connected to a mounting block 7, the mounting block 7 is connected to the driving assembly, and the mounting block 7 is limited by the mounting module 4, and the driving assembly includes a driving cylinder 8.

[0024] A laser sensor 14 is provided on one side of the mounting module 4. After the laser sensor 14 detects that a mask has been placed in, the mask clamping operation begins. During clamping, the mask is located between the fixed clamp block 5 and the movable clamp block 6. The driving cylinder 8 drives the mounting block 7 to move, thereby driving the movable clamp block 6 to move toward the fixed clamp block 5, thereby clamping the mask. In this process, the support member not only supports the mask but also moves with the mask to avoid relative friction with the mask.

[0025] The installation module 4 is provided with an installation cavity, the installation cavity is provided with a guide rail 9, and the support member is provided on the guide rail 9. The support member includes a slider 10 slidably connected to the guide rail 9, a support block 11 provided on the slider 10, a guide rod 13 provided on both sides of the slider 10, and a spring 13 sleeved on the guide rod 12, and both sides of the spring 13 are pressed against the side wall of the installation cavity. After the mask is placed in the fixture, the clamping member 1 2 and the clamping member 2 3 on both sides are close to each other, so that the two sides of the mask are respectively pressed against by the support blocks 11 on the clamping member 1 2 and the clamping member 2 3. When the moving block pushes the mask to move toward the fixed block, the support block 11 also moves together to avoid relative friction with the mask. After the fixture is connected with other clamping devices, the support block 11 is automatically reset under the action of the spring 14.

[0026] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. Structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to conventional means in the field unless otherwise specified and limited.

Claims

1. A mask robot fixture, characterized in that: It comprises an electric slide rail and a clamping assembly arranged on the electric slide rail; The clamping assembly includes a clamping member 1 and a clamping member 2 which are arranged opposite to each other, and the clamping member 1 and the clamping member 2 respectively clamp two sides of the mask plate. The clamping member 1 and the clamping member 2 each include a mounting module, a clamping block assembly arranged on the mounting module, a driving assembly for driving the clamping block assembly to move, and a supporting member slidably arranged on the mounting module for supporting the mask plate.

2. The mask robot fixture according to claim 1, characterized in that: The clamping member comprises a fixed clamping block and a movable clamping block arranged opposite to the fixed clamping block, the movable clamping block is connected with a mounting block, the mounting block is connected to the driving assembly, and the mounting block is limited by a mounting module.

3. The mask robot fixture according to claim 1, characterized in that: The drive assembly includes a drive cylinder.

4. The mask robot fixture according to claim 1, characterized in that: The installation module is provided with an installation cavity, the installation cavity is provided with a guide rail, and the support member is provided on the guide rail.

5. The mask robot fixture according to claim 4, characterized in that: The support member includes a slider slidably connected to the guide rail, a support block arranged on the slider, guide rods arranged on both sides of the slider and a spring sleeved on the guide rod, and both sides of the spring are in pressure contact with the side walls of the installation cavity.

6. The mask robot fixture according to claim 1, characterized in that: A laser sensor is arranged on one side of the installation module.

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