System for preventing storage and selection errors of photoresist materials and access unit structure thereof

Abstract

The utility model discloses a system for preventing storage and selection errors of photoresist materials and an access unit structure of the system, and relates to the technical field of management equipment. The storing and taking unit structure comprises a main manipulator and branch manipulators, the main manipulator is installed on a selection column located in the center of the management system, and the selection column is provided with a rotation driving part used for driving the main manipulator to rotate around the selection column and a lifting part used for driving the main manipulator to slide in the vertical direction. The storage and taking unit structure can drive the main manipulator to move up and down and rotate around the selecting column, the main manipulator ascends and descends, materials can be taken or placed, the materials can be placed on the conveying belts at the positions of the branch manipulators through rotation, respective storage is achieved, storage and selection of the materials are facilitated, and errors are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of management equipment, in particular to a system for preventing photoresist material storage selection errors and a storage and access unit structure thereof. Background Art

[0002] Photoresist is one of the eight core materials for semiconductors. Photoresist accounts for 5% of the value of semiconductor wafer manufacturing materials, and photoresist auxiliary materials account for 7%. The two together account for 12%. Photoresist and auxiliary materials are the fourth largest semiconductor materials after silicon wafers, electronic special gases and photomasks.

[0003] Since the storage conditions of photoresist are relatively harsh compared to other materials, such as the temperature needs to be below -20℃, avoid direct sunlight, dry and avoid moisture, avoid violent vibrations, and have a corresponding validity period and many other restrictions, it is necessary to be very careful in its storage and use. Therefore, there are many devices for storing photoresist materials on the market.

[0004] For example, a Chinese patent with publication number CN214398106U discloses a storage cabinet for protecting photoresist on the surface of silicon wafers, which storage cabinet includes: a cabinet body, which is provided with a storage space for storing silicon wafers; a cabinet door movably connected to the cabinet body, and the cabinet door is used to close or open the storage space; a nitrogen pipe and a nitrogen detector arranged in the storage space, and the nitrogen pipe is connected to a nitrogen source through a control valve; a heating device and a temperature detector arranged in the storage space; a humidifier and a humidity detector arranged in the storage space; and a controller, which is electrically connected to the control valve, the heating device, the temperature detector, the humidifier and the humidity detector respectively.

[0005] This method can ensure that the nitrogen content, temperature and humidity in the storage space remain constant, so that the photoresist on the surface of the silicon wafer placed in the storage space will not evaporate for a long time, which is conducive to the long-term storage of the photoresist on the surface of the silicon wafer. However, it only involves the storage of materials. In the process of taking the photoresist materials, it is also easy to mix them. There are many cases in the industry due to improper management, which not only cause losses of hundreds of millions of yuan, but also require a long cleaning process to allow the production line to resume normal production.

[0006] Therefore, it is necessary to develop a management system that is convenient for the storage and selection of photoresist materials. Utility Model Content

[0007] The utility model aims at the above technical problems, overcomes the shortcomings of the prior art, and provides a system for preventing wrong selection of photoresist material storage and a storage and access unit structure thereof.

[0008] The technical solution further defined in the utility model is: a storage and retrieval unit structure, including a main manipulator and a sub-manipulator, the main manipulator is installed on a selection column located at the central position of the management system, and the selection column is provided with a rotating driving member for driving the main manipulator to rotate around the selection column, and a lifting member for driving the main manipulator to slide in a vertical direction;

[0009] The lifting member includes a guide rail provided on the selected column, and the guide rail is distributed in the vertical direction;

[0010] A slider is slidably connected in the guide rail, and a lifting ring is provided on the slider, and the lifting ring is sleeved outside the selected column;

[0011] The lifting member includes a lifting motor disposed in the guide rail and located at the top of the guide rail, and a lifting screw is integrally provided on the output shaft of the lifting motor, and the lifting screw penetrates the slider and is threadedly connected to the slider.

[0012] Furthermore, at least two groups of guide rails and sliders are provided outside the selection column and are evenly distributed around the circumference of the selection column.

[0013] In the aforementioned access unit structure, the rotary drive member includes an annular groove formed on the lifting ring, a movable ring is movably connected in the annular groove, and the movable ring is connected to the lifting ring via a bearing.

[0014] In the aforementioned access unit structure, a rotating worm wheel is coaxially fixed on the movable ring, a rotating worm is rotatably connected to the slider, and the rotating worm and the rotating worm wheel are meshed with each other.

[0015] In the aforementioned access unit structure, a servo motor is provided on the slider, and the output shaft of the servo motor is fixed coaxially with the rotating worm.

[0016] The utility model also provides a management system for preventing semiconductor photoresist material storage selection errors, which is applied with any of the above access unit structures, including an inlet and outlet, a central processing unit located in the middle, and also includes

[0017] The conveyor lanes are arranged to radiate outwards from the central processing unit, and each conveyor lane is provided with a conveyor belt that can transport materials in both forward and reverse directions;

[0018] The refrigerating chamber is parallel to the conveying passage and is distributed on both sides of the conveying passage. The refrigerating chamber is provided with several layers, and each layer is provided with several refrigerating chamber cabinets arranged in an array;

[0019] The scanning unit includes a main RFID reader / writer located at the central processing unit and a sub-RFID reader / writer located at the entrance of the conveying path;

[0020] In the aforementioned management system for preventing incorrect storage of semiconductor photoresist materials, a temperature recovery zone is provided at the bottom of each cold storage compartment. After the photoresist bottles are taken out, they are placed in the corresponding temperature recovery zone for temperature recovery.

[0021] In the aforementioned management system for preventing incorrect storage of semiconductor photoresist materials, each refrigerator compartment has independent temperature control and the temperature is controlled by a central processing unit to adapt to photoresist materials with different storage conditions.

[0022] The above-mentioned management system for preventing incorrect storage selection of semiconductor photoresist materials, the scanning unit includes a data acquisition box arranged in the central processing unit and the machine in the cold storage room, the data acquisition box is provided with several groups, all of which are electrically connected to the switch arranged in the central processing unit and controlled by the host computer.

[0023] The beneficial effects of the utility model are:

[0024] (1) In the present invention, all photoresist bottles managed by the system of the present invention need to be equipped with an RFID label. All photoresists managed by the system need to be connected to the enterprise's ERP system when entering the freezer to obtain relevant information about the photoresist, and then brought into the management system of the present invention so that it can be used by the system.

[0025] (2) In the present invention, the conveyor paths are arranged in a divergent shape around the central processing unit, and cold storage rooms are set on both sides of the conveyor paths. The main RFID reader-writer in the central processing unit can be used to distribute the incoming photoresist materials, place them in the cold storage cabinets in the designated conveyor paths, and then record the information. When storing and accessing, the operator only needs to operate at the entrance and exit, and the storage and access of photoresist materials can be completed through the cooperation of the main manipulator, the sub-manipulators and the RFID reader-writer;

[0026] (3) In the present invention, the number of RFID readers and writers and the number of manipulators required are greatly reduced. The central processing unit in the middle can monitor several groups of cold storage rooms and store and retrieve corresponding materials, which is convenient for operators to operate and greatly reduces labor costs and equipment costs.

[0027] (4) In the utility model, the storage and retrieval unit structure can drive the main manipulator to move up and down and rotate around the selection column. The main manipulator can be raised and lowered to pick up or place materials. The rotation can place the materials on the conveyor belts at the positions of each sub-manipulator, thereby realizing separate storage, facilitating the storage and selection of materials, and reducing the occurrence of errors. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is the overall structure diagram of Example 1;

[0029] Figure 2 This is a schematic diagram of the distribution of the refrigerating chamber in Example 1;

[0030] Figure 3This is the warehousing flow chart of the utility model;

[0031] Figure 4 This is the feeding process of the utility model;

[0032] Figure 5 It is a schematic diagram of the access unit structure in the utility model.

[0033] Among them: 1. Conveyor track; 11. Conveyor belt; 2. Refrigerator; 21. Refrigerator cabinet; 3. Scanning unit; 31. Main RFID reader / writer; 32. Sub-RFID reader / writer; 4. Access unit; 41. Main manipulator; 42. Sub-manipulator; 5. Reheating zone; 6. Central processing unit; 7. Selection column; 8. Rotating drive member; 81. Annular groove; 82. Movable ring; 83. Rotating worm gear; 84. Rotating worm; 85. Servo motor; 86. Lifting ring; 9. Lifting member; 91. Guide rail; 92. Sliding block; 93. Lifting screw; 94. Lifting motor. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical scheme and advantages of the utility model clearer, a detailed description is given below in conjunction with the accompanying drawings and specific implementation methods. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model. Therefore, the utility model is not limited by the specific implementation disclosed below.

[0035] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to an element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0037] This embodiment provides a management system for preventing semiconductor photoresist material storage from being incorrectly selected, the structure of which is as follows: Figure 1 and Figure 2 As shown, it includes an import and export, a central processing unit 6 arranged in the middle, and also includes a conveying path 1, a cold storage room 2, a scanning unit 3 and an access unit 4.

[0038] The conveyor path 1 is arranged to radiate outwards with the central processing unit 6 as the center, and each conveyor path 1 is provided with a conveyor belt 11 that can transport materials in both directions; the cold storage room 2 is arranged on both sides of the conveyor path 1 in parallel with the conveyor path 1, and the cold storage room 2 is provided with several layers, and each layer is provided with several array-arranged cold storage compartments 2. A temperature recovery zone 5 is provided at the bottom of each cold storage compartment 2, and the photoresist bottle is placed in the corresponding temperature recovery zone 5 for temperature recovery after being taken out.

[0039] The scanning unit 3 includes a main RFID reader / writer 31 arranged at the central processing unit 6 and a sub-RFID reader / writer 32 arranged at the entrance of the conveying path 1; the access unit 4 includes a main manipulator 41 arranged at the central processing unit 6 and a sub-manipulator 42 arranged at the cold storage room 2; the main manipulator 41 can rotate around the circumferential direction of the central processing unit 6 and can be lifted and lowered in the vertical direction; the sub-manipulator 42 can slide along the length direction, height direction and depth direction of the cold storage room 2.

[0040] Each refrigerator compartment 2 is independently temperature-controlled and is controlled by the central processing unit 6 to adapt to photoresist materials with different storage conditions. The scanning unit 3 also includes a data acquisition box disposed in the central processing unit 6 and the machine in the refrigerator 2. The data acquisition box is provided with a plurality of groups, which are all electrically connected to the switch disposed in the central processing unit 6 and controlled by the host computer.

[0041] In existing storage devices, photoresist materials are generally stored in multiple parallel refrigerators. In the management system, multiple RFID readers are required to process the material information in several refrigerators respectively, which increases the required number of RFID readers and writers and increases the cost. At the same time, operators need to enter refrigerators in different locations when accessing materials, and the access efficiency is low.

[0042] In the utility model, the conveyor path 1 is arranged in a divergent shape around the central processing unit 6, and the cold storage room 2 is set on both sides of the conveyor path 1. The main RFID reader 31 in the central processing unit 6 can be used to distribute the incoming photoresist materials, put them in the cold storage room cabinet 2 in the designated conveyor path 1, and then record the information. When storing and accessing, the operator only needs to operate at the entrance and exit, and the storage and access of the photoresist materials can be completed through the cooperation of the main manipulator 41, the sub-manipulator 42 and the RFID reader.

[0043] The number of RFID readers and writers and the number of manipulators required are greatly reduced. The central processing unit 6 in the middle position can monitor several groups of cold storage rooms 2 and store and retrieve corresponding materials, which is convenient for operators to operate and greatly reduces labor costs and equipment costs.

[0044] The access unit structure mainly includes a main manipulator and a sub-manipulator. The main manipulator is installed on a selection column 7 located in the central position of the management system. The selection column 7 is provided with a rotating driving member 8 for driving the main manipulator to rotate around the selection column 7, and a lifting member 9 for driving the main manipulator to slide in a vertical direction.

[0045] The lifting member 9 includes a guide rail 91 provided on the selection column 7, and the guide rail 91 is distributed in the vertical direction;

[0046] A slider 92 is slidably connected in the guide rail 91, and a lifting ring 86 is provided on the slider 92. The lifting ring 86 is sleeved outside the selection column 7;

[0047] The lifting member 9 includes a lifting motor 94 disposed in the guide rail 91 and located at the top of the guide rail 91. The output shaft of the lifting motor 94 is integrally provided with a lifting screw 93, which penetrates the slider 92 and is threadedly connected thereto.

[0048] At least two groups of guide rails 91 and sliders 92 are provided outside the selection column 7 and are equally spaced around the circumference of the selection column 7. The rotary drive member 8 includes an annular groove 81 provided on the lifting ring 86, and a movable ring 82 is movably connected in the annular groove 81, and the movable ring 82 is connected to the lifting ring 86 through a bearing. A rotating worm wheel 83 is coaxially fixed on the movable ring 82, and a rotating worm 84 is rotatably connected to the slider 92, and the rotating worm 84 and the rotating worm wheel 83 are meshed with each other. A servo motor 85 is provided on the slider 92, and the output shaft of the servo motor 85 is coaxially fixed with the rotating worm 84.

[0049] The utility model also provides a method for preventing semiconductor photoresist material storage selection errors, comprising the following steps:

[0050] S1, material storage, manual loading to the central processing unit, installing RFID tags on the photoresist bottles in turn, and the main RFID reader at the central processing unit records the basic information of the photoresist materials;

[0051] S2, the central processing unit allocates the storage location of the photoresist bottle, and the main robot places the photoresist bottle on the designated conveyor belt and transports it to the corresponding storage area;

[0052] S3, the sub-manipulator in the storage area stores the photoresist bottle in the preset cold storage cabinet;

[0053] S4, material taking, inputting the taking command at the central processing unit, the taking command is sent to the main controller in the central processing unit, the main controller compares the information and sends the command to the sub-manipulator, opens the refrigerator compartment door, calls the corresponding photoresist bottle, closes the refrigerator compartment door, places the photoresist bottle in the corresponding temperature recovery zone for temperature recovery, and times the temperature recovery time;

[0054] S5, after the temperature recovery time is reached, the sub-manipulator places the photoresist bottle on the conveyor belt and transmits it back to the central processing unit. After the main RFID reader compares the information and confirms that it is correct, the retrieval is completed.

[0055] In step S1, the basic information of the photoresist material includes the brand, model, weight, temperature and storage time of the photoresist material. In step S2, the storage information includes the storage temperature of the photoresist material, the time of entering the cold storage compartment and the number of the cold storage compartment.

[0056] All photoresist outer bottles managed by the system of the utility model need to be equipped with an RFID label. All photoresists managed by the system need to be connected to the company's ERP system when entering the freezer to obtain relevant information of the photoresist, and bring it into the management system of the utility model so that it can be used by the system.

[0057] When necessary, an RFID reader / writer can be used at the entrance of each storage area to record the storage information of the corresponding photoresist bottle, and the information can be transmitted to the central processing unit for combined recording.

[0058] The warehousing process in the utility model is as follows Figure 3 As shown, it mainly includes the following steps:

[0059] When entering the warehouse, you need to scan or enter the QR code on the photoresist bottle to query the ERP material number, photoresist name, manufacturer and other information, check the above information, and read the RFID tag information if it is correct, select the low-temperature warehouse and fill in the remarks, check the information again, and give an error prompt if the verification is wrong. If the verification is correct, bind the photoresist material information and enter the storage process.

[0060] The feeding process in the utility model is as follows Figure 4 As shown, it mainly includes the following steps:

[0061] After receiving the order to use, the materials in the freezer are taken out and placed in a normal temperature warehouse for thawing, which is placed in the temperature return area for thawing in the utility model. After thawing to the specified time, the materials are taken out of the warehouse to the workbench at the entrance and exit. The system reads the RFID tag information on the photoresist through the RFID reader and writer, and compares it with the photoresist information set in the system. If the comparison is wrong, the photoresist information is confirmed to replace the correct photoresist; if the comparison is correct, the normal production process is entered.

[0062] The utility model can carry out more standardized and process-oriented management of the storage and use of photoresist materials. The entire storage and use process does not need to be recorded manually, thus avoiding the mixing of photoresist materials, improving management effects, greatly reducing the possibility of errors in material use, and reducing economic losses caused by factors such as employee operations, thereby improving the production yield of the enterprise and improving the profitability of the enterprise.

[0063] In addition to the above embodiments, the present invention may also have other implementations. Any technical solution formed by equivalent replacement or equivalent transformation falls within the protection scope required by the present invention.

Claims

1. A storage and access unit structure, comprising a main manipulator and a sub-manipulator, characterized in that: The main manipulator is mounted on a selection column (7) located at the central position of the management system, and the selection column (7) is provided with a rotation driving member (8) for driving the main manipulator to rotate around the selection column (7), and a lifting member (9) for driving the main manipulator to slide in a vertical direction; The lifting member (9) comprises a guide rail (91) provided on the selection column (7), and the guide rail (91) is distributed in a vertical direction; A slider (92) is slidably connected inside the guide rail (91), a lifting ring (86) is provided on the slider (92), and the lifting ring (86) is sleeved outside the selection column (7); The lifting member (9) comprises a lifting motor (94) disposed in the guide rail (91) and located at the top of the guide rail (91), and a lifting screw (93) is integrally provided on the output shaft of the lifting motor (94), and the lifting screw (93) penetrates the slider (92) and is threadedly connected thereto.

2. An access unit structure according to claim 1, characterized in that: At least two groups of the guide rails (91) and the sliders (92) are provided outside the selection column (7) and are evenly distributed around the circumference of the selection column (7).

3. An access unit structure according to claim 1, characterized in that: The rotary drive member (8) comprises an annular groove (81) formed on the lifting ring (86), a movable ring (82) being movably connected in the annular groove (81), and the movable ring (82) is connected to the lifting ring (86) via a bearing.

4. An access unit structure according to claim 3, characterized in that: A rotating worm wheel (83) is coaxially fixed to the movable ring (82), and a rotating worm (84) is rotatably connected to the sliding block (92), wherein the rotating worm (84) and the rotating worm wheel (83) are meshed with each other.

5. An access unit structure according to claim 4, characterized in that: A servo motor (85) is provided on the slider (92), and an output shaft of the servo motor (85) is fixed coaxially with the rotating worm (84).

6. A system for preventing wrong selection of photoresist material storage, using a storage and access unit structure as claimed in any one of claims 1 to 5, characterized in that: It includes an inlet and outlet, a central processing unit (6) arranged in the middle, and also includes The conveyor paths (1) are arranged to radiate outwards from the central processing unit (6) as the center, and each of the conveyor paths (1) is provided with a conveyor belt (11) capable of transporting materials in both forward and reverse directions; A refrigerating chamber (2) is arranged parallel to the conveying passage (1) and on both sides of the conveying passage (1); the refrigerating chamber (2) is provided with a plurality of layers, and each layer is provided with a plurality of refrigerating chamber cabinets (21) arranged in an array; The scanning unit (3) comprises a main RFID reader / writer (31) arranged at the central processing unit (6) and a sub-RFID reader / writer (32) arranged at the entrance of the conveying path (1).

7. The system for preventing wrong selection of photoresist material storage according to claim 6, characterized in that: A temperature recovery zone (5) is provided at the bottom of each compartment of the cold storage room (2); after the photoresist bottle is taken out, it is placed in the corresponding temperature recovery zone (5) to recover the temperature.

8. The system for preventing wrong selection of photoresist material storage according to claim 6, characterized in that: Each of the refrigerator compartment compartments (21) is independently temperature-controlled, and the temperature is controlled by a central processing unit (6) to adapt to photoresist materials under different storage conditions.

9. The system for preventing wrong selection of photoresist material storage according to claim 6, characterized in that: The scanning unit (3) comprises a data acquisition box arranged in the central processing unit (6) and a machine in the refrigerating chamber (2); the data acquisition box is provided in a plurality of groups, all of which are electrically connected to a switch arranged in the central processing unit (6) and are controlled by a host computer.

Images