Negative pressure container with control unit

Abstract

The utility model discloses a negative pressure container with a control unit. The negative pressure container comprises a bottle body, a valve and a carrier material filled in the bottle body, the carrier material comprises graphene, the negative pressure container further comprises a temperature sensor, a heating element and a control unit, and the control unit controls the heating element based on a signal from the temperature sensor and a signal from a pressure sensor. When the electronic gas is supplied to the gas system, heating by means of the heating element facilitates unloading of the electronic gas from the carrier material and discharging of the electronic gas from the negative pressure container. In the process, the heating element is controlled by monitoring the temperature and the pressure in the negative pressure container, so that the safety of electronic gas unloading can be ensured at a relatively high unloading rate.

Description

Technical Field

[0001] The utility model relates to the technical field of electronic gas storage, and more specifically, to a negative pressure container with a control unit. Background Art

[0002] Phosphine (PH3), arsine (AsH3) and boron trifluoride (BF3) are electronic gases. Especially after their impurities are removed to obtain high-purity gases, they play a very important role in the electronics industry, mainly the integrated circuit and photovoltaic industries. The integrated circuit and photovoltaic industries have made great progress in the past few decades and are expected to have greater development in the future. Therefore, the use of these gases is quite large and will increase significantly in the future. However, these gases are highly toxic and can kill people with a very small amount. Therefore, they will cause great trouble in every aspect of their use. How to use them safely is an important issue that cannot be avoided.

[0003] In order to deal with this problem and achieve the safe use of these gases, people have developed negative pressure containers (such as common negative pressure cylinders), which are filled with special adsorbent materials that can absorb or load a large amount of gas. A unit volume of adsorbent material can load dozens or even hundreds of times the volume of gas, while the absolute pressure of the gas in the container remains below one atmosphere (for example, 650mmHg, about 85kPa). This not only increases the capacity of the container to load the amount of gas, but also effectively avoids the leakage of toxic gases, which effectively improves the safety of using these gases.

[0004] However, the existing negative pressure containers are not perfect either. Since the pressure of the electronic gas in the negative pressure container is low, when faced with a high-pressure gas system, the electronic gas cannot be released from the negative pressure container, which to a considerable extent limits the promotion and use of negative pressure containers. Utility Model Content

[0005] In order to solve the problems existing in the prior art, the purpose of the utility model is to provide a negative pressure container with a control unit.

[0006] Unless otherwise specified, the pressure in the present invention refers to absolute pressure.

[0007] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0008] The utility model provides a negative pressure container with a control unit, the negative pressure container comprises a bottle body, a valve and a carrier material filled in the bottle body, the carrier material comprises graphene, and the negative pressure container further comprises

[0009] Temperature sensor;

[0010] Heating elements, and

[0011] A control unit controls the power of the heating element based on the signal from the temperature sensor and the signal from the pressure sensor.

[0012] Preferably, the negative pressure container further comprises a pressure sensor mounted on the bottle body.

[0013] Preferably, the control unit controls the heating element to stop heating when the signal of the temperature sensor exceeds a first set value or the signal of the pressure sensor exceeds a second set value.

[0014] Preferably, the heating element and the temperature sensor are arranged in the bottle body.

[0015] Preferably, a protective cover for accommodating a temperature sensor and a protective cover for accommodating the heating element are provided in the negative pressure container.

[0016] Preferably, the heating element is arranged outside the bottle body, and the negative pressure container further comprises a heat-insulating layer wrapping the heating element and the bottle body.

[0017] Preferably, the temperature sensor is arranged outside the bottle body and close to the outer wall of the bottle body.

[0018] Preferably, the negative pressure container further comprises a heat equalizing unit for evenly dispersing heat.

[0019] Preferably, the heat equalizing unit is a heat conducting fin that evenly divides the space inside the negative pressure container.

[0020] Preferably, the support material further comprises activated carbon.

[0021] Preferably, the pressure resistance value of the negative pressure container is 50-100 atmospheres.

[0022] Preferably, the bulk volume of the carrier material is greater than or equal to 90% of the volume of the container.

[0023] Preferably, the negative pressure container stores an electronic gas. Exemplarily, the electronic gas is selected from one of arsine, phosphine, silane, diborane, boron trifluoride, phosgene, and hydrogen sulfide.

[0024] The beneficial effects of the utility model are as follows:

[0025] The utility model provides a negative pressure container with a control unit. The negative pressure container is filled with graphene with a high specific surface area and a large pore volume, and exhibits excellent loading capacity when loading electronic gas through a physical process. The pressure in the negative pressure container is less than one atmosphere at room temperature, and the gas in the negative pressure container will not leak out, which is safe for the use and storage of usually toxic electronic gas, and expands the product types of negative pressure containers that can accommodate electronic gas.

[0026] In order to match the gas system with high pressure (for example, close to or greater than one atmosphere), the heating element in the negative pressure container is used to heat the negative pressure container, so that the electronic gas in the negative pressure container can be unloaded from the carrier material more easily and discharged from the port of the negative pressure container. With the help of the temperature sensing unit and the pressure sensor, the temperature and pressure changes in the negative pressure container during the heating process are measured in time and fed back to the temperature control unit to adjust the heating power of the heating element according to the temperature and pressure conditions in the negative pressure container. This can effectively prevent the safety problems of electronic gas caused by excessive temperature and pressure, and realize the safe use of electronic gas in a high-pressure gas system. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The specific implementation of the utility model is further described in detail below with reference to the accompanying drawings.

[0028] Figure 1A and 1B A schematic diagram of a negative pressure container with a control unit according to Example 1 of the utility model is shown.

[0029] Figure 2A and 2B A schematic diagram of a negative pressure container with a control unit according to Embodiment 2 of the present invention is shown.

[0030] Figure 3A and 3B A schematic diagram of a negative pressure container with a control unit according to Embodiment 3 of the present invention is shown.

[0031] Figure 4A and 4B A schematic diagram of a negative pressure container with a control unit according to Embodiment 4 of the present invention is shown.

[0032] Figure 5A and 5B A schematic diagram of a negative pressure container with a control unit according to Example 5 of the utility model is shown.

[0033] Fig. 6A and 6B A schematic diagram of a negative pressure container with a control unit according to Example 6 of the utility model is shown. DETAILED DESCRIPTION

[0034] In order to more clearly illustrate the utility model, the utility model is further described below in conjunction with preferred embodiments and drawings. The components schematically shown in the drawings are not drawn according to scale and quantity. Those skilled in the art should understand that the content described below is illustrative rather than restrictive, and should not be used to limit the scope of protection of the utility model.

[0035] Negative pressure containers are mainly used in the ion implantation process in the field of integrated circuits. The ion implantation process is carried out under high vacuum conditions (e.g., less than 1mPa), which means that the working pressure of the ion implantation equipment is much lower than the gas pressure in the negative pressure cylinder. At this time, the gas in the negative pressure container can be automatically unloaded (leave the carrier material). The "negative pressure" in the negative pressure container means that the pressure of the gas inside it is negative relative to the atmospheric pressure, but positive relative to the high vacuum.

[0036] In most cases, these electronic gases are not used in vacuum equipment, but often in an environment above atmospheric pressure. In order for the gas to leave the carrier material and be used by the wider electronics industry, the electronic gas loaded in the negative pressure container needs to have a positive pressure higher than atmospheric pressure.

[0037] The negative pressure container with a control unit provided by the utility model can allow the electronic gas in the negative pressure container to directly enter the use equipment without using additional boosting equipment, thereby simplifying the production process of electronic gas use and reducing equipment costs and process costs.

[0038] The negative pressure container includes a bottle body, a valve, and a carrier material filled in the bottle body, wherein the carrier material includes graphene. The negative pressure container also includes a temperature sensor, a pressure sensor, a heating element, and a control unit, wherein the control unit controls the power of the heating element based on a signal from the temperature sensor and a signal from the pressure sensor.

[0039] Considering that the carrier material used in the negative pressure container must have the following two functions: 1. It can load electronic gas when loading gas. To ensure the safety of use, the gas pressure after loading is lower than one atmosphere; 2. It can also unload gas when unloading gas, and the purity of the unloaded gas remains the original high purity (electronic gas needs to be more than 99.99% when used, for example, the purity of phosphine and arsine is not less than 99.9999%, and the purity of boron trifluoride is not less than 99.995%). Therefore, the actual role of this carrier material is the function of a carrier, which can safely carry the target gas from one time and space to another time and space. If the material used can only achieve the first function, that is, it can only load gas (such as adsorbed gas), but the loaded gas cannot be unloaded (such as desorption), or even if the gas can be unloaded, but the unloaded gas has lost its original high purity, then it cannot be used as a carrier material for negative pressure containers.

[0040] The loading of electronic gas can be achieved by physical adsorption, which is referred to as adsorption loading in the present invention. Adsorbent materials usually have a large surface area. Because the atoms, molecules or active centers on the surface of the adsorbent material have high surface energy, the gas molecules have a large interaction force with them and are adsorbed.

[0041] According to different mechanisms, the adsorption process can be divided into two categories: one is irreversible chemical adsorption, in which the adsorbed substance undergoes a chemical reaction with the adsorbent material during the adsorption process and is converted into other substances, so that the adsorbed substance is apparently adsorbed by the adsorbent material. The characteristic of this type of adsorption is that the adsorbed substance cannot be desorbed from the adsorbent material in the subsequent process because the adsorbed substance has reacted during the adsorption process. This type of adsorption is generally used in the process of removing harmful substances, including environmental protection, production safety, etc. Obviously, this type of adsorption must never be used in negative pressure containers for storing electronic gases. Electronic gases require very high purity when used. Even if a trace amount of other substances is newly generated during the adsorption process or some impurities are discharged together during the desorption process, the original high purity will be destroyed. The other type is physical adsorption. The characteristic of this type of adsorption is that the molecular structure of the adsorbate is kept intact during the adsorption and desorption process, and the apparent result is that the adsorbate only undergoes a physical process with the adsorbent material during the adsorption process. The adsorption loading mechanism of the carrier material used for electronic gases must be physical adsorption.

[0042] Another important physical process is to liquefy the electron gas in the carrier material. This loading is called condensation loading in the present invention. According to the Kelvin equation:

[0043]

[0044] Where R is the universal gas constant, T is the temperature of the negative pressure container; the parameters determined by the gas type include: saturated vapor pressure p * , corresponding to the surface tension γ of the liquid and the molar volume V of the liquid m ; The remaining two variables that can be manipulated are the radius r of the droplet and the actual vapor pressure p. In order to make the actual vapor pressure lower than one atmosphere, a negative liquid radius is required, which can be achieved by constructing micro-nano holes (i.e., the size of the holes is in the nanometer or micrometer range, less than 1 mm) in the carrier material. Once the holes in the carrier material are too large, the actual vapor pressure will be close to the saturated vapor pressure. Then, under the working conditions of the negative pressure container, these large holes will lose the condensation loading function because they cannot liquefy the electron gas.

[0045] Graphene has high physical stability and is the thinnest two-dimensional material in the material world. It has a large specific surface area and good adsorption capacity. Such thin two-dimensional graphene naturally brings such characteristics: it can be bent, wrinkled, folded, etc. at will to form graphene materials with different structural morphologies. Therefore, graphene is an ideal material for constructing micro-nano holes. The carbon nanotubes we are familiar with are a kind of graphene with a special shape that is bent into a ring-shaped hole. Therefore, the graphene in the utility model covers carbon nanotubes.

[0046] Activated carbon is an ideal basic material. It is cheap, rich in pores, low in bulk density, and large in specific surface area. It can fully contact with the electronic gas and load the electronic gas. The carrier material of the utility model also includes activated carbon. The graphene is used together with the activated carbon to further increase the loading amount of the electronic gas.

[0047] The utility model uses graphene as a carrier material because of its large specific surface area and pore volume, and can load a larger amount of electronic gas through physical means. When unloading electronic gas from a gas-using system, if the gas pressure in the negative pressure container is lower than the pressure of the gas-using system, in order not to affect the use of the electronic gas by the gas-using system, the utility model heats the negative pressure container with the help of a heating element. After heating, the movement rate of the gas molecules will increase, which is conducive to unloading (desorption unloading and vaporization unloading) of the electronic gas from the carrier material and discharging from the port of the negative pressure container. The higher the temperature, the more electronic gas will leave the carrier material. Although the negative pressure container is in a negative pressure state when not in operation, when heated and used, as the electronic gas is continuously discharged from the port, the gas pressure in the negative pressure container will increase, and may even reach a very high pressure. If the temperature is too high, too much electronic gas will be unloaded from the carrier material, and the discharged electronic gas cannot be completely used or digested by the gas system, which may cause leakage of the electronic gas. However, electronic gases (such as arsine, phosphine, boron trifluoride, etc.) are highly toxic, and even a small amount of leakage is very dangerous. Therefore, it is necessary to monitor the temperature and (or) pressure in the negative pressure container. When the temperature or pressure reaches the set value, the heating should be stopped to avoid possible gas leakage and safety accidents. The control unit of the negative pressure container can control the start and stop of the heating element on the one hand, and on the other hand, it can receive the temperature signal fed back by the temperature sensor and the pressure signal fed back by the pressure sensor, and further adjust the heating power of the heating element to control the temperature and pressure in the negative pressure container. The heating power of the heating element is not limited by a specific value, but depends on the amount of the carrier material and the type of gas.

[0048] As a preferred embodiment, the control unit controls the heating element to stop heating when the signal of the temperature sensor exceeds the first set value or the signal of the pressure sensor exceeds the second set value. The pressure sensor and the temperature sensor can monitor the temperature and pressure of the negative pressure container at the same time. As long as one of the temperature and pressure indicators exceeds the corresponding set value, the control unit controls the heating element to stop heating, which effectively prevents safety problems of electronic gas caused by excessive temperature and pressure. If it is observed that sufficient electronic gas cannot be provided for the gas system through heating, it means that the content of electronic gas stored in the negative pressure container is relatively low, and it is impossible to further provide electronic gas to the gas system. At this time, other negative pressure containers loaded with electronic gas are replaced. The first set value and the second set value are also determined according to the amount of carrier material, the type of gas and the use environment.

[0049] As a preferred embodiment, the heating element and the temperature sensor are arranged in the bottle body. The negative pressure container may include a plurality of temperature sensors, and each temperature sensor is evenly dispersed in the bottle body, and it is not advisable to arrange the heating elements too densely or too sparsely in local areas. The heating element is selected from one or more of a heating rod, a heating tube, a heating wire, and a heating sheet. As a preferred embodiment, the negative pressure container also includes a protective cover for accommodating a temperature sensor and a protective cover for accommodating the heating element, so as to prevent the temperature sensor and the heating element from being corroded by corrosive electronic gases and extend the service life of the temperature sensor and the heating element.

[0050] As a preferred embodiment, the heating element is arranged outside the container, the negative pressure container also includes an insulation layer wrapping the heating element and the bottle body, and the temperature sensor is arranged close to the outer wall of the bottle body. The heating element is a heating sleeve or a heating blanket wrapped on the outer wall of the bottle body. For a negative pressure container filled with a carrier material, arranging the temperature sensor and the heating element outside the bottle body can not only extend the service life of the temperature sensor and the heating element, but also facilitate the inspection and replacement of the temperature sensor and the heating element, thereby improving the application flexibility of the negative pressure container. In this case, the temperature control component needs to calibrate the signal from the temperature sensor to accurately characterize the temperature inside the container.

[0051] As a preferred embodiment, the negative pressure container also includes a heat equalization unit for evenly dispersing heat. With the use of the heat equalization unit, the heat transfer in the negative pressure container can be quickly realized to prevent local temperature anomalies. The heat equalization unit is, for example, a plurality of heat-conducting fins radially extending from the inner wall of the bottle body, and the radial length of the heat-conducting fins does not exceed the radius of the container; or it is a heat-conducting material arranged between the heating sleeve and / or heating blanket and the negative pressure container. The metal heat-conducting fins can be welded to the inner wall of the negative pressure container, the radial length of the metal heat-conducting fins is not greater than the radius of the container, and the axial height of the metal heat-conducting fins should be equivalent to the height of the heating element. When multiple groups of metal heat-conducting fins are arranged in the negative pressure container, the multiple groups of metal heat-conducting fins evenly divide the space in the negative pressure container. If there are two groups of metal thermal conductive fins, the two groups of metal thermal conductive fins can be spread along the plane where the central axis of the negative pressure container is located, and the negative pressure container is evenly divided into two parts. If there are three groups of metal thermal conductive fins, a 120° angle is formed between every two metal thermal conductive fins, and the three groups of metal thermal conductive fins can intersect at the central axis of the negative pressure container, and the negative pressure container is evenly divided into three parts.

[0052] The carrier material also includes activated carbon. The carrier material has a high specific surface area and a large pore volume, and can load electronic gas through a physical mechanism, so that the pressure of the gas in the negative pressure container is less than one atmosphere at room temperature, and no leakage occurs, which is safer during storage, transportation and use. Graphene is used together with activated carbon, which can increase the loading amount of electronic gas under negative pressure in the container, save graphene usage, and reduce the production cost of the negative pressure container. The carrier material including graphene and activated carbon is reusable, and the negative pressure container loaded with the carrier material of graphene and activated carbon is reusable, which can improve the utilization rate of the carrier material and the negative pressure container while reducing the transportation cost of the electronic gas.

[0053] Preferably, the stacking volume of the carrier material is greater than or equal to 90% of the volume of the container to increase the loading amount of the electronic gas.

[0054] As a preferred embodiment, at least one air duct is further provided in the bottle body, the air duct is at least partially surrounded by the carrier material, the top of the air duct is connected to the valve of the negative pressure container, and a plurality of air ports are provided on the side wall of the air duct for gas loading and unloading.

[0055] As a preferred embodiment, the gas guide ports are evenly distributed on the gas guide tube. On the side wall of the gas guide tube, multiple gas guide ports are arranged along the extension direction of the gas guide tube, shortening the diffusion path of the electronic gas in the carrier material, ensuring that the electronic gas can be loaded or unloaded in multiple areas in the negative pressure container at the same time, thereby facilitating the improvement of the loading efficiency of the carrier material for the electronic gas when the electronic gas is filled into the negative pressure container, and also facilitating the improvement of the unloading rate when the electronic gas is led out.

[0056] The bottle body is made of carbon steel or stainless steel, and the air guide tube is made of stainless steel. The pressure resistance level of the negative pressure container should be greater than or equal to the maximum safe pressure during its use, that is, 50 atmospheres, preferably 100 atmospheres.

[0057] The negative pressure container also includes a nozzle for releasing gas. The outlet end of the nozzle can be connected to an adsorber to adsorb the electronic gas that may be discharged and convert it into non-toxic or less toxic compounds to protect the environment and achieve safe production.

[0058] Furthermore, in order to ensure the purity of the electronic gas coming out of the negative pressure container, the gas guide port is equipped with a filter screen or a filter membrane to prevent the carrier material from mixing into the electronic gas.

[0059] Furthermore, a bottle cap is provided on the top of the bottle body.

[0060] As a preferred embodiment, the negative pressure container stores electronic gas, and the electronic gas is selected from one of arsine, phosphine, silane, diborane, boron trifluoride, phosgene, and hydrogen sulfide. This type of electronic gas has extremely high requirements for purity during use, and most of the gases are toxic, so the storage and transportation processes are strict, especially the filling and release requirements in the gas container are extremely high. The negative pressure container provided by the utility model can not only load a large amount of electronic gas in a state of less than one atmosphere, but also can achieve rapid release in a vacuum use environment and a positive pressure adaptation environment.

[0061] Example 1

[0062] This embodiment provides a negative pressure container 100 with a control unit, see Figure 1A (section view) and Figure 1B (Top view), the negative pressure container includes a bottle body 110 and a valve 150, the bottle body is filled with a carrier material (not shown), and the carrier material includes graphene. The negative pressure container also includes a heating element 120, a plurality of temperature sensors 130, a pressure sensor 140 and a control unit 160, which are used to monitor the temperature change and pressure change in the negative pressure container when the gas is unloaded by heating the negative pressure container, and control the heating element to heat the container.

[0063] In a specific embodiment, the heating element is a heating rod, and the number of the heating rods can be single or multiple, for example, Figure 1B It can be seen that the number of heating rods is 3. The plurality of heating rods are evenly arranged radially in the bottle body, so as to evenly provide heat to each area in the bottle body. The length of the heating rod is not less than 2 / 3 of the length of the negative pressure container.

[0064] In a specific embodiment, the number of the temperature sensors may be single or multiple, for example Figure 1B It can be seen that the number of temperature sensors is 2, and multiple temperature sensors are evenly arranged radially in the bottle body. During the unloading process of gas, the safety temperature of the negative pressure container is within 200°C, preferably within 100°C, and the temperature setting value is within the safety temperature range.

[0065] During the process of unloading gas from the negative pressure container 100, the safety pressure of the gas in the negative pressure container is 1-50 atmospheres, preferably 1-10 atmospheres, and the set pressure value is within the safety pressure range.

[0066] The control unit is connected to the heating rod, the temperature sensor and the pressure sensor through wires. On the one hand, the control unit can control the start and stop of the heating rod, and on the other hand, it can receive the temperature signal and pressure signal fed back by the temperature sensor and the pressure sensor to adjust the heating power to ensure that the gas in the negative pressure container is within a safe temperature and pressure range, and is quickly unloaded from the carrier material and released from the container. The heating power of the heating element is not limited by a specific value, but should be determined according to the amount of carrier material and the type of gas. If the temperature or pressure reaches the set value, the control unit cuts off the power supply of the heating rod to ensure that there is no overpressure in the negative pressure container.

[0067] The manufacturing method of the negative pressure container of this embodiment includes fixing the heating element and the temperature sensor in the bottle body, filling the carrier material from the reserved opening for installing the valve, installing the valve and the pressure sensor, and thus completing the manufacturing of the negative pressure container.

[0068] Example 2

[0069] This embodiment provides a negative pressure container 200 with a control unit, which is a structural variation of the negative pressure container in Embodiment 1. Figure 2A (section view) and Figure 2B (Top view). In this embodiment, the heating form is transferred from the inside of the negative pressure container to the outside. Specifically, the heating rod is replaced by a heating blanket 220. The heating blanket is closely attached to the outer wall of the bottle body, allowing heat to be transferred from the outside to the inside through the bottle body wall. The heating blanket 220 completely surrounds the wall of the negative pressure container, and its axial length is preferably not less than 2 / 3 of the length of the negative pressure container.

[0070] In order to ensure temperature stability and fully utilize the heating power, a heat insulating layer 221 is wrapped around the outside of the heating blanket 220 . The other main structures are the same as those in Example 1.

[0071] The manufacturing method of the negative pressure container of this embodiment includes fixing the temperature sensor in the bottle body, filling the carrier material from the reserved opening for installing the valve, installing the valve and the pressure sensor, installing the temperature sensor and the heating blanket outside the bottle body, and installing the insulation layer, thereby completing the manufacturing of the negative pressure container.

[0072] Example 3

[0073] This embodiment provides a negative pressure container 300 with a control unit, which is a structural variation of the negative pressure container in Embodiment 2. Figure 3A (section view) and Figure 3B (Top view). In order to ensure that the heat emitted by the heating blanket can be evenly dispersed inside the negative pressure container, one or more groups of heat equalization units 322 can be set on the inner wall of the negative pressure container. With the assistance of the heat equalization units, the heat transfer in the negative pressure container can be quickly achieved to prevent local temperature abnormalities.

[0074] In a specific embodiment, the heat equalizing unit is selected from metal thermal conductive fins, and the number of metal thermal conductive fins is 3 groups. The metal thermal conductive fins are generally rectangular sheets, one end of which is fixed on the inner wall of the negative pressure container, and the other end intersects with the other two groups of metal thermal conductive fins on the central axis of the negative pressure container and is fixed. The angle between the two metal thermal conductive fins is 120°, which divides the internal area of ​​the negative pressure container into three parts evenly. The other main structures are the same as those in Example 2.

[0075] The manufacturing method of the negative pressure container of this embodiment includes fixing the heating element, the temperature sensor and the metal heat-conducting fins in the bottle body, filling the carrier material from the reserved opening for installing the valve, installing the valve and the pressure sensor, thereby completing the manufacturing of the negative pressure container.

[0076] Example 4

[0077] This embodiment provides another negative pressure container 400 with a control unit, which is a structural variation of the negative pressure container in Embodiment 2. Figure 4A (section view) and Figure 4B (Top view). In the structure of the negative pressure container, the temperature sensor 430 is arranged outside the bottle body and close to the outer wall of the negative pressure container. In this way, the measured temperature is actually closer to the temperature of the heating blanket rather than the temperature inside the negative pressure container. The accuracy is slightly lower, but it is convenient to make the negative pressure container filled with carrier material and replace the heating element and temperature sensor.

[0078] When in use, the control unit uses the pressure sensor signal in conjunction with the pressure sensor to control the heating of the heating element. The other main structures are the same as those in the second embodiment.

[0079] The manufacturing method of the negative pressure container of this embodiment includes fixing the temperature sensor in the bottle body, filling the carrier material from the reserved opening for installing the valve, installing the valve and the pressure sensor, installing the temperature sensor and the heating blanket outside the bottle body, and installing the insulation layer, thereby completing the manufacturing of the negative pressure container.

[0080] Example 5

[0081] This embodiment provides a negative pressure container 500 with a control unit, which is a structural variation of the negative pressure container in embodiment 4, see Figure 5A (section view) and Figure 5B (Top view). In the structure of the negative pressure container, the pressure sensor can be installed outside the valve. This can simplify the manufacture of the negative pressure container itself. It should be noted that the negative pressure container of this embodiment can only detect the pressure in the negative pressure container when the valve is open (that is, when the gas in the negative pressure container is used). When the valve is closed, the vacuum pressure gauge is disconnected from the negative pressure container and detection cannot be achieved. Therefore, when the valve is closed, the heating of the heating blanket needs to be stopped at the same time. The other main structures are the same as those in Example 4.

[0082] Example 6

[0083] This embodiment provides a negative pressure container 600 with a control unit, which is a structural variation of the negative pressure container in Embodiment 1. Fig. 6A (section view) and Figure 6B (Top view). For the structural design of installing the heating rod and the temperature sensor in the negative pressure container, it is usually necessary to pre-weld the sleeves for accommodating the heating rod and the temperature sensor in the negative pressure container, namely, the heating rod sleeve 621 and the temperature sensor sleeve 631. The design of the sleeves can ensure the integrity of the interior of the negative pressure container to prevent electronic gas leakage, and at the same time facilitate the plugging and unplugging of the heating rod and the temperature sensor and keep their surfaces clean.

[0084] The manufacturing method of the negative pressure container of this embodiment includes fixing the sleeve of the heating element and the sleeve of the temperature sensor in the bottle body, and filling the carrier material from the reserved opening for installing the valve. The valve and the pressure sensor are installed, thereby completing the manufacturing of the negative pressure container. The inner diameter of the sleeve is usually slightly larger than the outer diameter of the matching heating rod and temperature sensor. When it is necessary to heat and monitor the temperature in the negative pressure container, it is only necessary to insert the heating rod and the temperature sensor into the corresponding sleeve.

[0085] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not limitations on the implementation methods of the present invention. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made based on the above description. It is impossible to list all the implementation methods here. All obvious changes or modifications derived from the technical solution of the present invention are still within the scope of protection of the present invention.

Claims

1. A negative pressure container with a control unit, the negative pressure container comprising a bottle body, a valve and a carrier material filled in the bottle body, characterized in that: The carrier material includes graphene, and the negative pressure container also includes Temperature sensor; Heating elements, and A control unit controls the power of the heating element based on the signal from the temperature sensor and the signal from the pressure sensor.

2. The negative pressure container according to claim 1, characterized in that: The negative pressure container also includes a pressure sensor installed on the bottle body.

3. The negative pressure container according to claim 1, characterized in that: The heating element and the temperature sensor are arranged in the bottle body.

4. The negative pressure container according to claim 3, characterized in that: The negative pressure container is provided with a protective cover for accommodating a temperature sensor and a protective cover for accommodating the heating element.

5. The negative pressure container according to claim 1, characterized in that: The heating element is arranged outside the bottle body, and the negative pressure container further comprises a heat preservation layer wrapping the heating element and the bottle body.

6. The negative pressure container according to claim 5, characterized in that: The temperature sensor is arranged outside the bottle body and close to the outer wall of the bottle body.

7. The negative pressure container according to claim 1, characterized in that: The negative pressure container also includes a heat equalizing unit for evenly dispersing heat.

8. The negative pressure container according to claim 7, characterized in that: The heat equalizing unit is a heat conducting fin that evenly divides the space in the negative pressure container.

9. The negative pressure container according to claim 1, characterized in that: The support material also includes activated carbon.

10. The negative pressure container according to claim 1, characterized in that: The stacking volume of the carrier material is greater than or equal to 90% of the container volume.

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