Cavity protection layer

Abstract

The utility model relates to a cavity protection layer, which comprises a plasma reaction cavity for performing plasma treatment on an object and a slotted hole formed in the side wall of the plasma reaction cavity, and further comprises a first protection layer arranged on the inner wall of the plasma reaction cavity and used for protecting the inner wall of the plasma reaction cavity, and a second protection layer arranged on the inner wall of the plasma reaction cavity and used for protecting the inner wall of the plasma reaction cavity, wherein the first protection layer comprises a reinforcing layer, a first protection layer and a heat insulation layer, and the reinforcing layer, the first protection layer and the heat insulation layer are sequentially arranged from outside to inside from the inner wall of the plasma reaction cavity. According to the plasma reaction chamber, the two protective layers are arranged in the plasma reaction chamber, so that the reaction chamber can be integrally protected, the first protective layer can effectively resist electric power and heat generated by ionized gas, the second protective layer can provide secondary protection for the chamber body, and meanwhile, the influence of the generated heat and electric power on the chamber body due to problems of a machine body is also isolated.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma processing equipment, in particular to a cavity protection layer. Background Art

[0002] Plasma cleaning machine is also called plasma cleaning machine, or plasma surface treatment machine. For some metal accessories that have grease, oil, organic matter, oxide layer and other pollutants on the surface after the processing process, they can be cleaned by plasma cleaning machine. At the same time, this machine is also suitable for cleaning glass and ceramic materials.

[0003] After the plasma machine starts the RF power supply, the incoming gas will be ionized. The ionized gas will clean the oil stains on the surface of the object. During the gas ionization, the ionized gas will have certain electrical properties and generate heat. The reaction chamber of the plasma machine is basically made of metal. Long-term exposure to high heat and electrical properties can easily cause aging of the metal cavity, and there is also a risk of leakage.

[0004] In view of this, the present utility model is proposed. Utility Model Content

[0005] The technical problem to be solved by the utility model is to overcome the shortcomings of the prior art and provide a cavity protection layer. Through two protection layers arranged in the plasma reaction chamber, the reaction chamber can be provided with overall protection, wherein the first protection layer is arranged on the inner wall of the reaction chamber processing area. During the cavity processing, it can effectively resist the electricity and heat generated by the ionized gas, effectively realize the isolation between the reaction chamber processing area and the cavity inner wall, and enhance the service life of the cavity. At the same time, the second protection layer is arranged in the slot opened in the cavity. When the first protection layer is damaged, the cavity can be protected by the second protection layer, and at the same time, it can also isolate the heat and electricity generated by problems with the body from affecting the cavity.

[0006] In order to solve the above technical problems, the basic concept of the technical solution adopted by the utility model is:

[0007] A cavity protection layer comprises a plasma reaction chamber installed on a plasma processing body and a slot hole opened inside the side wall of the plasma reaction chamber, and also comprises a first protection layer, which is arranged on the inner wall of the plasma reaction chamber and is used to protect the inner wall of the plasma reaction chamber; wherein the first protection layer comprises a reinforcement layer, a first protection layer and a heat insulation layer, and the reinforcement layer, the first protection layer and the heat insulation layer are arranged in sequence from the outside to the inside of the inner wall of the plasma reaction chamber; the second protection layer is arranged in the slot hole opened inside the side wall of the plasma reaction chamber, and is used to protect the cavity of the plasma reaction chamber and isolate the cavity processing area from the plasma body; wherein the second protection layer comprises an insulating layer, a second protection layer and a drying layer, the insulating layer is arranged on the inner walls on both sides of the slot hole, the second protection layer is filled between two groups of the insulating layers, and the drying layer is arranged inside the second protection layer.

[0008] In a preferred embodiment of any of the above schemes, the thermal insulation layer is mainly made of high temperature resistant epoxy resin.

[0009] In a preferred embodiment of any of the above schemes, the first protective layer contains tetrachloroethylene powder and glass sand, the first protective layer is made by mixing the tetrachloroethylene powder and the glass sand in proportion and laid on the epoxy resin, and the mixing ratio of the tetrachloroethylene powder and the glass sand is 2:8.

[0010] In a preferred embodiment of any of the above schemes, the reinforcement layer is a phenolic resin glue that reinforces the first protective layer.

[0011] In a preferred embodiment of any of the above schemes, the insulating layer includes asbestos mesh and polyurethane coating, the asbestos mesh is provided in two groups and is bonded to the inner walls on both sides of the slot, and the polyurethane coating is attached to the asbestos mesh.

[0012] In a preferred embodiment of any of the above schemes, the second protective layer is mainly made of polypropylene fibers, and the polypropylene fibers are tightly filled in the gap between the two groups of asbestos meshes.

[0013] In a preferred embodiment of any of the above schemes, the desiccant layer is mainly made of silica gel desiccant powder, and the silica gel desiccant powder is evenly distributed in the gaps between the polypropylene fibers.

[0014] After adopting the above technical scheme, the utility model has the following beneficial effects compared with the prior art.

[0015] The two protective layers arranged in the plasma reaction chamber can provide overall protection for the reaction chamber, wherein the first protective layer is arranged on the inner wall of the reaction chamber processing area, and during the cavity processing, it can effectively resist the electricity and heat generated by the ionized gas, effectively realize the isolation between the reaction chamber processing area and the inner wall of the cavity, and enhance the service life of the cavity. At the same time, the second protective layer is arranged in the slot opened in the cavity, and when the first protective layer is damaged, the cavity can be protected by the second protective layer, and the heat and electricity generated by the body can be isolated from the influence of the cavity.

[0016] The specific implementation of the utility model is further described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. Some specific embodiments of the present application will be described in detail in an illustrative and non-restrictive manner with reference to the drawings. The same reference numerals in the drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the drawings:

[0018] Figure 1 It is the overall structure diagram of the plasma reaction chamber in the utility model.

[0019] Figure 2 It is a layout diagram of the first protective layer and the second protective layer in the utility model.

[0020] Figure 3 This is the structural diagram of the first protective layer in the utility model.

[0021] Figure 4 This is a structural diagram of the second protective layer in the utility model.

[0022] In the figure: 1. plasma reaction chamber; 2. slot; 3. first protective layer; 4. second protective layer; 5. reinforcement layer; 6. first protective layer; 7. thermal insulation layer; 8. insulating layer; 9. second protective layer; 10. drying layer.

[0023] It should be noted that these drawings and text descriptions are not intended to limit the conceptual scope of the present invention in any way, but rather to illustrate the concept of the present invention for those skilled in the art by referring to specific embodiments. The elements in the drawings are schematic and not drawn to scale. DETAILED DESCRIPTION

[0024] In order to enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work should fall within the scope of protection of the present application.

[0025] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0026] In the description of the present application, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0027] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0028] The following embodiment of the present application takes a cavity protection layer as an example to explain the solution of the present application in detail, but this embodiment cannot limit the protection scope of the present application.

[0029] like Figures 1 to 4 As shown, the utility model provides a camera fixing device, including a plasma reaction chamber 1 installed on a plasma processing body and a slot 2 opened inside the side wall of the plasma reaction chamber 1, and also includes:

[0030] The first protective layer 3 is arranged on the inner wall of the plasma reaction chamber 1 to protect the inner wall of the plasma reaction chamber 1; wherein the first protective layer 3 includes a reinforcement layer 5, a first protective layer 6 and a heat insulation layer 7, and the reinforcement layer 5, the first protective layer 6 and the heat insulation layer 7 are arranged in sequence from the outside to the inside of the inner wall of the plasma reaction chamber 1;

[0031] The second protective layer 4 is arranged in the slot 2 opened inside the side wall of the plasma reaction chamber 1, and is used to protect the plasma reaction chamber 1 and isolate the chamber processing area from the plasma body; wherein the second protective layer 4 includes an insulating layer 8, a second protective layer 9 and a drying layer 10, wherein the insulating layer 8 is arranged on the inner walls of both sides of the slot 2, the second protective layer 9 is filled between the two groups of insulating layers 8, and the drying layer 10 is arranged inside the second protective layer 9;

[0032] In summary, the protective layers located in two different areas can provide comprehensive protection for the plasma reaction chamber 1. The first protective layer 3 located on the inner wall of the plasma reaction chamber 1 can provide heat insulation and insulation effects for the inner wall portion of the cavity in the processing area, so that the cavity has certain heat insulation and insulation properties. The second protective layer 4 is located in the slot 2 opened inside the side wall of the cavity, and its function is to provide protection for the cavity outside the inner wall portion of the cavity to avoid the influence of the electrical transfer and heat transfer of the body on the cavity processing area. At the same time, when the first protective layer is damaged, it will also provide certain protection for the cavity. Through the combination of the first protective layer 3 and the second protective layer 4, the protection effect of the cavity is effectively improved.

[0033] like Figure 2 and Figure 3 As shown, the heat insulation layer 7 is further explained. Long-term heat is the biggest factor for aging of the plasma reaction chamber 1. By arranging the heat insulation layer 7 for isolating heat on the wall of the plasma reaction chamber 1, the heat insulation layer 7 can better resist the high heat generated by the plasma during the processing of the article. By uniformly adhering to the high temperature resistant epoxy resin on the inner wall of the plasma reaction chamber 1, a heat insulation barrier is formed to provide effective protection for the cavity.

[0034] Based on the above, since the plasma reaction chamber 1 plasmatizes the gas through the radio frequency power supply, while generating heat, it will also generate electricity. Since the cavity of the plasma reaction chamber 1 is generally made of metal materials, insulation is also a key factor in the safety protection of the cavity;

[0035] Further explained, the first protective layer 6 is mainly composed of a mixture of tetrachloroethylene powder and glass sand, which is laid on the epoxy resin after mixing, and serves as an insulating layer for preventing electricity in the plasma reaction chamber 1. The best insulation effect can be achieved by mixing tetrachloroethylene powder and glass sand in a ratio of 2:8;

[0036] In order to improve the stability of the first protective layer 6, a reinforcement layer 5 is added to the first protective layer 6, and the mixed tetrachloroethylene powder and glass sand are reinforced by using high temperature resistant phenolic resin glue, so as to extend the long-term protective performance of the first protective layer 6 and reduce the impact of long-term high temperature on the protective performance of the first protective layer 6 as much as possible;

[0037] like Figure 3 and Figure 4 As shown, the second protective layer 4 has two functions. First, when the first protective layer has problems, the second protective layer 4 can provide protection for the rest of the cavity except the inner wall of the cavity. Second, it can isolate the heat transfer and conductivity between the cavity processing area and the machine body, and realize the independence between the machine body and the cavity. Among them, the insulating layer 8 contains asbestos mesh and polyurethane coating. There are two groups of asbestos mesh, which are attached to the inner walls of both sides of the slot 2, and the polyurethane coating is attached to the asbestos mesh;

[0038] Further explained, the meshed asbestos is attached to the inner walls on both sides of the slot 2. The asbestos has high fire resistance, electrical insulation and thermal insulation. When the first protective layer 3 is damaged or the electricity and heat generated outside the cavity are transferred to the cavity, they can be isolated by the asbestos mesh, so that the slot 2 is in an independent space that is not affected by the cavity and the outside world, thereby achieving the isolation effect of the inside and outside of the cavity;

[0039] At the same time, in order to ensure that the slot 2 maintains a high degree of dryness and to achieve the best protective effect of the second protective layer 4, the second protective layer 9 is filled between the two groups of asbestos meshes. The polypropylene fiber of the second protective layer 9 has good water absorption, insulation, strong acid and alkali resistance and chemical properties, is not easy to be corroded and damaged, and also has a certain heat resistance effect. Through the above characteristics, the slot 2 can be protected for a long time, and the asbestos mesh can also be protected to a certain extent.

[0040] In order to further improve the drying characteristics of the polypropylene fibers, silica gel desiccant powder is evenly distributed in the gaps between the polypropylene fibers to form a drying layer 10 that improves the drying effect of the polypropylene fibers. Through the combination of the polypropylene fibers and the silica gel desiccant powder, the drying effect is improved while further improving the overall protective effect of the second protective layer 4.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A cavity protection layer, comprising a plasma reaction chamber (1) mounted on a plasma processing body and a slot (2) opened inside a side wall of the plasma reaction chamber (1), characterized in that: Also includes: A first protective layer (3) is arranged on the inner wall of the plasma reaction chamber (1) and is used to protect the inner wall of the plasma reaction chamber (1); The first protective layer (3) comprises a reinforcement layer (5), a first protective layer (6) and a heat-insulating layer (7), wherein the reinforcement layer (5), the first protective layer (6) and the heat-insulating layer (7) are arranged in sequence from the outside to the inside of the inner wall of the plasma reaction chamber (1); A second protective layer (4) is arranged in a slot (2) provided inside a side wall of the plasma reaction chamber (1) and is used to protect the plasma reaction chamber (1) and to isolate a processing area of ​​the chamber from the plasma machine body; The second protective layer (4) comprises an insulating layer (8), a second protective layer (9) and a drying layer (10); the insulating layer (8) is arranged on the inner walls on both sides of the slot hole (2); the second protective layer (9) is filled between two groups of the insulating layers (8); and the drying layer (10) is arranged inside the second protective layer (9).

2. A cavity protection layer according to claim 1, characterized in that: The heat insulation layer (7) is mainly made of high temperature resistant epoxy resin.

3. The cavity protection layer according to claim 1, characterized in that: The reinforcement layer (5) is a phenolic resin glue that reinforces the first protective layer (6).

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