Graphite boat and coating equipment

Abstract

The graphite boat comprises a plurality of boat pieces, a first supporting rod, a second supporting rod, a first insulating sleeve and a second insulating sleeve, the first supporting rod is arranged in a first connecting hole of each boat piece in a penetrating mode, a first supporting section of the first supporting rod abuts against the first connecting hole of the corresponding boat piece, and a second supporting section of the second supporting rod abuts against the second connecting hole of the corresponding boat piece. The first supporting rod penetrates through the first connecting holes of the boat pieces, the first avoiding section of the first supporting rod is spaced from the first connecting holes of the corresponding boat pieces, the second supporting rod penetrates through the second connecting holes of the boat pieces, the second supporting section of the second supporting rod abuts against the second connecting holes of the corresponding boat pieces, and the second avoiding section of the second supporting rod is spaced from the second connecting holes of the corresponding boat pieces. The second supporting section is arranged corresponding to the first avoiding section, a first insulating sleeve is arranged between every two adjacent boat pieces, the first insulating sleeve abuts against the two adjacent boat pieces, a second insulating sleeve is arranged between the two adjacent boat pieces, and the second insulating sleeve abuts against the two adjacent boat pieces. By adopting the graphite boat and the coating equipment, the service life of the graphite boat is longer.

Description

Technical Field

[0001] The utility model relates to the technical field of battery production, in particular to a graphite boat and coating equipment. Background Art

[0002] At present, during the processing of passivated contact cells, a graphite boat of a coating device is usually used to carry a silicon wafer, and doped amorphous silicon is deposited on the silicon wafer in the coating device to form an amorphous silicon layer on the surface of the silicon wafer.

[0003] However, when depositing doped amorphous silicon on silicon wafers, doped amorphous silicon will also be deposited on the graphite boat, especially on the insulating ceramic ring of the graphite boat. As the number of coatings increases, the thickness of the doped amorphous silicon layer deposited on the graphite boat increases, and the insulating ceramic ring will lose its insulating properties, causing the adjacent boat slices of the graphite boat to be conductive, and the graphite boat cannot be used normally in the coating process, and the service life of the graphite boat is short. Utility Model Content

[0004] The utility model discloses a graphite boat and a coating device. As the number of coating times increases, the graphite boat can be normally used in the coating process, and the service life of the graphite boat is relatively long.

[0005] In the first aspect, an embodiment of the utility model discloses a graphite boat, comprising a plurality of boat plates, a first support rod, a second support rod, a first insulating sleeve and a second insulating sleeve, wherein the plurality of boat plates are spaced apart along a first direction, each of the boat plates is provided with a first connecting hole and a second connecting hole, the first connecting hole and the second connecting hole are spaced apart along the second direction, the first support rod is passed through the first connecting holes of the plurality of boat plates along the first direction, the first support rod comprises a plurality of first supporting sections and a plurality of first avoiding sections, the first supporting sections and the first avoiding sections are alternately arranged one by one along the first direction and are connected in sequence, the first supporting section abuts against the first connecting hole of the corresponding boat plate, the first avoiding section is spaced apart from the first connecting hole of the corresponding boat plate, and the second support rod The second connection holes are penetrated through the plurality of boat pieces along the first direction, the second support rod comprises a plurality of second support sections and a plurality of second avoidance sections, the second support sections and the second avoidance sections are alternately arranged one by one along the first direction and are connected in sequence, the second support sections abut against the second connection holes of the corresponding boat pieces, the second avoidance sections are spaced apart from the second connection holes of the corresponding boat pieces, the first insulating sleeve is sleeved on the first support rod, the first insulating sleeve is arranged between two adjacent boat pieces, and the two ends of the first insulating sleeve abut against the two adjacent boat pieces respectively, the second insulating sleeve is sleeved on the second support rod, the second insulating sleeve is arranged between two adjacent boat pieces, and the two ends of the second insulating sleeve abut against the two adjacent boat pieces respectively;

[0006] The first direction is the thickness direction of the boat piece, and the second direction is the width direction of the boat piece.

[0007] As an optional implementation, in an embodiment of the utility model, the aperture diameter of the first connecting holes of each of the boat plates is the same, the diameter of each of the first supporting sections is equal to the aperture diameter of the first connecting hole, the diameter of each of the first avoidance sections is smaller than the aperture diameter of the first connecting hole, the aperture diameter of the second connecting holes of each of the boat plates is the same, the diameter of each of the second supporting sections is equal to the aperture diameter of the second connecting hole, and the diameter of each of the second avoidance sections is smaller than the aperture diameter of the second connecting hole.

[0008] As an optional implementation, in the embodiment of the utility model, the diameter of the first support section is d 1 , the diameter of the first avoidance section is d 2 , 0.6d 1 ≤d 2 ≤0.9d 1 , the diameter of the second support segment is d 3 , the diameter of the second avoidance section is d 4 , 0.6d 3 ≤d 4 ≤0.9d 3 .

[0009] As an optional implementation, in an embodiment of the utility model, the first insulating sleeve has a first through hole running through its two ends, the aperture of the first through hole is equal to the diameter of the first supporting segment, and the first through hole is sleeved on the first supporting segment, and the second insulating sleeve has a second through hole running through its two ends, the aperture of the second through hole is equal to the diameter of the second supporting segment, and the second through hole is sleeved on the second supporting segment.

[0010] As an optional embodiment, in an embodiment of the utility model, the first insulating sleeve has a first mounting hole and a second mounting hole that are connected, the aperture of the first mounting hole is equal to the diameter of the first supporting section, the first mounting hole is sleeved in the first supporting section, and the second mounting hole is sleeved in the first avoidance section, and the second insulating sleeve has a third mounting hole and a fourth mounting hole that are connected, the aperture of the third mounting hole is equal to the diameter of the second supporting section, the third mounting hole is sleeved in the second supporting section, and the fourth mounting hole is sleeved in the second avoidance section.

[0011] As an optional implementation, in an embodiment of the utility model, the first insulating sleeve includes two first semi-ring parts, each of the first semi-ring parts has a first groove and a second groove that are connected, the two first semi-ring parts are detachably connected, the first grooves of the two first semi-ring parts are used to enclose and form the first mounting hole, and the second grooves of the two first semi-ring parts are used to enclose and form the second mounting hole;

[0012] The second insulating sleeve includes two second semi-ring parts, each of which has a connected third groove and a fourth groove, and the two second semi-ring parts are detachably connected, and the third grooves of the two second semi-ring parts are used to enclose the third mounting hole, and the fourth grooves of the two second semi-ring parts are used to enclose the fourth mounting hole.

[0013] As an optional embodiment, in an embodiment of the utility model, a first connecting structure is provided between the two first half-ring parts, and the connecting structure includes a first part and a second part that are detachably connected; a second connecting structure is provided between the two second half-ring parts, and the connecting structure includes a third part and a fourth part that are detachably connected.

[0014] As an optional implementation, in the embodiment of the utility model, one of the first part and the second part is a recessed part, and the other is a raised part, and one of the third part and the fourth part is a recessed part, and the other is a raised part.

[0015] As an optional implementation, in an embodiment of the utility model, each of the boat pieces is provided with a plurality of first connection holes and a plurality of second connection holes, the plurality of first connection holes are arranged at intervals along the third direction, and the plurality of second connection holes are arranged at intervals along the third direction, and the graphite boat includes a plurality of first support rods and a plurality of second support rods, the plurality of first support rods are respectively arranged corresponding to the plurality of first connection holes of each of the boat pieces, and the plurality of second support rods are respectively arranged corresponding to the plurality of second connection holes of each of the boat pieces;

[0016] Wherein, the third direction is the length direction of the boat piece.

[0017] In a second aspect, an embodiment of the utility model discloses a coating device, comprising the graphite boat of the first aspect.

[0018] Compared with the prior art, the embodiments of the present invention have at least the following beneficial effects:

[0019] In an embodiment of the utility model, a first support rod is passed through a first connection hole of a plurality of boat plates along a first direction, a second support rod is passed through a second connection hole of a plurality of boat plates along the first direction, and the first support section of the first support rod is abutted against the first connection hole of the corresponding boat plate, and the second support section of the second support rod is abutted against the second connection hole of the corresponding boat plate, thereby being able to carry a plurality of boat plates, and further a first insulating sleeve is sleeved on the first support rod, and the two ends of the first insulating sleeve are respectively abutted against two adjacent boat plates, and a second insulating sleeve is sleeved on the second support rod, and the two ends of the second insulating sleeve are respectively abutted against two adjacent boat plates, thereby setting a fixed spacing between two adjacent boat plates.

[0020] In addition, the first support section and the first avoidance section of the first support rod are alternately arranged along the first direction, the second support section and the second avoidance section of the second support rod are alternately arranged along the first direction, and the second support section is arranged corresponding to the first avoidance section along the second direction. At the same time, the first avoidance section is spaced apart from the first connection hole of the corresponding boat piece, and the second avoidance section is spaced apart from the second connection hole of the corresponding boat piece, so that each boat piece is only connected to one of the first support rod and the second support rod, and two adjacent boat pieces are respectively connected to the first support rod and the second support rod. That is, the odd-numbered boat pieces are connected through the second support rod, and the even-numbered boat pieces are connected through the first support rod. When the graphite boat is applied to the coating process, as the number of coatings increases, even if the amorphous silicon layer is doped in the first insulating sleeve and the second insulating sleeve, the odd-numbered boat pieces and the even-numbered boat pieces are always not connected, and the graphite boat can be normally used in the coating process, and the service life of the graphite boat is long. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this technical field, other drawings can be obtained based on these drawings without creative work.

[0022] Figure 1 This is a structural schematic diagram of a graphite boat (part of the first insulating sleeve and the second insulating sleeve are omitted) disclosed in the first embodiment of the utility model;

[0023] Figure 2 This is a schematic diagram of the exploded structure of a graphite boat disclosed in the first embodiment of the utility model;

[0024] Figure 3 It is a schematic structural diagram of a first support rod and a second support rod disclosed in Embodiment 1 of the present utility model;

[0025] Figure 4 It is a schematic cross-sectional structure diagram of a first insulating sleeve and a second insulating sleeve disclosed in Embodiment 1 of the present utility model;

[0026] Figure 5 It is a schematic cross-sectional structure diagram of another first insulating sleeve and a second insulating sleeve disclosed in Embodiment 1 of the present utility model;

[0027] Figure 6 It is a schematic diagram of the exploded structure of the two first half ring parts disclosed in the first embodiment of the utility model;

[0028] Figure 7 It is a schematic diagram of the exploded structure of the two second half ring parts disclosed in the first embodiment of the utility model;

[0029] Figure 8 It is a structural schematic diagram of the boat piece disclosed in the first embodiment of the utility model;

[0030] Fig. 9 It is a simplified schematic diagram of the structure of the coating equipment disclosed in the second embodiment of the present utility model.

[0031] Description of main reference numerals

[0032] 100. Graphite boat; 10. Boat sheet; 10a. First connecting hole; 10b. Second connecting hole; 20. First supporting rod; 21. First supporting section; 22. First avoiding section; 30. Second supporting rod; 31. Second supporting section; 32. Second avoiding section; 40. First insulating sleeve; 40a. First through hole; 40b. First mounting hole; 40c. Second mounting hole; 41. First semi-ring; 41a. First groove; 41b. Second groove; 50. Second insulating sleeve; 50a. Second through hole; 50b. Third mounting hole; 50c. Fourth mounting hole; 51. Second semi-ring; 51a. Third groove; 51b. Fourth groove; 61. First connecting structure; 61a. First part; 61b. Second part; 62. Second connecting structure; 62a. Third part; 62b. Fourth part; x. First direction; y. Second direction; z. Third direction; 200. Coating equipment. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] In the present invention, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inside", "outside", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings. These terms are mainly used to better describe the present invention and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0035] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those skilled in the art, the specific meanings of these terms in this utility model can be understood according to specific circumstances.

[0036] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0037] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0038] The utility model discloses a graphite boat and coating equipment. As the number of coating times increases, the graphite boat can be normally used in the coating process, and the service life of the graphite boat is relatively long.

[0039] Embodiment 1

[0040] Please also read Figure 1 and Figure 2, is a structural schematic diagram of a graphite boat 100 provided in Embodiment 1 of the present utility model, the graphite boat 100 comprises a plurality of boat sheets 10, a first support rod 20, a second support rod 30, a first insulating sleeve 40 and a second insulating sleeve 50, the plurality of boat sheets 10 are arranged at intervals along a first direction x, each boat sheet 10 is provided with a first connecting hole 10a and a second connecting hole 10b, the first connecting hole 10a and the second connecting hole 10b are arranged at intervals along a second direction y, the first support rod 20 is penetrated through the first connecting holes 10a of the plurality of boat sheets 10 along the first direction x, the first support rod 20 comprises a plurality of first supporting sections 21 and a plurality of first avoiding sections 22, the first supporting sections 21 and the first avoiding sections 22 are arranged alternately one by one along the first direction x, and are connected in sequence, the first supporting sections 21 abut against the first connecting holes 10a of the corresponding boat sheets 10, the first avoiding sections 22 abut against the first connecting holes 10a of the corresponding boat sheets 10, The first connection holes 10a are spaced apart, the second support rod 30 is penetrated through the second connection holes 10b of the plurality of boat pieces 10 along the first direction x, the second support rod 30 includes a plurality of second support sections 31 and a plurality of second avoidance sections 32, the second support sections 31 and the second avoidance sections 32 are alternately arranged one by one along the first direction x, and are connected in sequence, the second support sections 31 abut against the second connection holes 10b of the corresponding boat pieces 10, the second avoidance sections 32 are spaced apart from the second connection holes 10b of the corresponding boat pieces 10, the first insulating sleeve 40 is sleeved on the first support rod 20, the first insulating sleeve 40 is arranged between two adjacent boat pieces 10, and the two ends of the first insulating sleeve 40 abut against the two adjacent boat pieces 10 respectively, the second insulating sleeve 50 is sleeved on the second support rod 30, the second insulating sleeve 50 is arranged between two adjacent boat pieces 10, and the two ends of the second insulating sleeve 50 abut against the two adjacent boat pieces 10 respectively;

[0041] The first direction x is the thickness direction of the boat piece 10 , and the second direction y is the width direction of the boat piece 10 .

[0042] In this embodiment, a first support rod 20 is used to penetrate a plurality of first connection holes 10a of the boat pieces 10 along the first direction x, and a second support rod 30 is used to penetrate a plurality of second connection holes 10b of the boat pieces 10 along the first direction x, and the first support section 21 of the first support rod 20 is abutted against the first connection hole 10a of the corresponding boat piece 10, and the second support section 31 of the second support rod 30 is abutted against the second connection hole 10b of the corresponding boat piece 10, so that a plurality of boat pieces 10 can be carried, and further a first insulating sleeve 40 is sleeved on the first support rod 20, and the two ends of the first insulating sleeve 40 are respectively abutted against two adjacent boat pieces 10, and a second insulating sleeve 50 is sleeved on the second support rod 30, and the two ends of the second insulating sleeve 50 are respectively abutted against two adjacent boat pieces 10, so that a fixed spacing is set between two adjacent boat pieces 10.

[0043] In addition, the first support section 21 and the first avoidance section 22 of the first support rod 20 are alternately arranged along the first direction x, the second support section 31 and the second avoidance section 32 of the second support rod 30 are alternately arranged along the first direction x, and the second support section 31 is arranged corresponding to the first avoidance section 22 along the second direction y. At the same time, the first avoidance section 22 is spaced apart from the first connection hole 10a of the corresponding boat piece 10, and the second avoidance section 32 is spaced apart from the second connection hole 10b of the corresponding boat piece 10, so that each boat piece 10 is only connected to one of the first support rod 20 and the second support rod 30, and two adjacent boat pieces 10 are respectively connected to the first support rod 20 and the second support rod 30. That is, the odd-numbered boat pieces 10 are connected through the second support rod 30, and the even-numbered boat pieces 10 are connected through the first support rod 20. When the graphite boat 100 is used in the coating process, as the number of coating times increases, even if the amorphous silicon layer is doped in the first insulating sleeve 40 and the second insulating sleeve 50, the odd-numbered boat pieces 10 and the even-numbered boat pieces 10 are always not conductive, and the graphite boat 100 can be normally used in the coating process, and the service life of the graphite boat 100 is long.

[0044] In some embodiments, Figure 2 As shown, the apertures of the first connection holes 10a of the boat pieces 10 are the same, the diameter of the first support sections 21 is equal to the aperture of the first connection holes 10a, the diameter of the first avoidance sections 22 is smaller than the aperture of the first connection holes 10a, the apertures of the second connection holes 10b of the boat pieces 10 are the same, the diameter of the second support sections 31 is equal to the aperture of the second connection holes 10b, and the diameter of the second avoidance sections 32 is smaller than the aperture of the second connection holes 10b. In this way, the diameter of the first support section 21 is the same as the aperture of the first connection hole 10a, and the first support rod 20 can abut against the first connection hole 10a when it is inserted into the first connection hole 10a, while the diameter of the first avoidance section 22 is smaller than the space of the first connection hole 10a, and the first avoidance section 22 is spaced apart from the first connection hole 10a. The diameter of the second support section 31 is the same as the aperture of the second connecting hole 10b. When the second support rod 30 is inserted into the second connecting hole 10b, it can abut against the second connecting hole 10b. The diameter of the second avoidance section 32 is smaller than the space of the second connecting hole 10b, and the second avoidance section 32 is spaced apart from the second connecting hole 10b.

[0045] Alternatively, if Figure 3 As shown, the diameter of the first support section 21 is d 1 , the diameter of the first avoidance section 22 is d 2 , 0.6d 1 ≤d 2 ≤0.9d 1 , the diameter of the second support section 31 is d 3 , the diameter of the second avoidance section 32 is d 4 , 0.6d 3 ≤d 4≤0.9d 3 Take the diameter ratio of the first supporting section 21 and the first avoiding section 22 as an example for explanation. 2 <0.6d 1 , then the diameter d of the first avoidance section 22 2 The diameter d of the first support segment 21 1 The overall diameter of the first support rod 20 varies greatly. When the first support rod 20 is used to carry multiple boat sheets 10, stress concentration is likely to occur, causing the first support rod 20 to deform or even break, and the service life of the graphite boat 100 is short. 2 >0.9d 1 , then the diameter d of the first avoidance section 22 is 2 The diameter d of the first support segment 21 1 The difference is small, the distance between the first avoidance section 22 and the first connection hole 10a is short, and the first avoidance section 22 is easy to accidentally touch the first connection hole 10a due to processing errors, assembly errors, etc., thereby causing the adjacent boat pieces 10 to be connected, and the graphite boat 100 cannot be used normally in the coating process. Therefore, the diameter d of the first avoidance section 22 is 2 Can be 0.6d 1 ≤d 2 ≤0.9d 1 , which can avoid the deformation or even breakage of the first support rod 20 caused by stress concentration, and the service life of the graphite boat 100 is long. It can also avoid the first avoidance section 22 from accidentally touching the first connecting hole 10a, thereby preventing the adjacent boat pieces 10 from being connected, thereby ensuring that the graphite boat 100 can be normally used in the coating process.

[0046] The diameter ratio of the second support section 31 and the second avoidance section 32 can refer to the diameter ratio of the first support section 21 and the first avoidance section 22, and will not be described in detail. 4 Can be 0.6d 3 ≤d 4 ≤0.9d 3 , which can avoid the deformation or even breakage of the second support rod 30 caused by stress concentration, and the service life of the graphite boat 100 is long. It can also avoid the second avoidance section 32 and the second connecting hole 10b from accidentally touching each other, thereby preventing the adjacent boat pieces 10 from being connected, thereby ensuring that the graphite boat 100 can be normally used in the coating process.

[0047] As an optional implementation, Figure 4As shown, the first insulating sleeve 40 has a first through hole 40a that passes through both ends of the first insulating sleeve 40, the aperture of the first through hole 40a is equal to the diameter of the first support section 21, and the first through hole 40a is sleeved on the first support section 21, and the second insulating sleeve 50 has a second through hole 50a that passes through both ends of the second insulating sleeve 50, the aperture of the second through hole 50a is equal to the diameter of the second support section 31, and the second through hole 50a is sleeved on the second support section 31. In this way, when the graphite boat 100 is assembled, the boat sheet 10 can be inserted into the first support rod 20 and the second support rod 30 along the first direction x, the first insulating sleeve 40 is inserted into the first support rod 20 along the first direction x, and the second insulating sleeve 50 is inserted into the second support rod 30 along the first direction x, and after each boat sheet 10 is inserted, a first insulating sleeve 40 and a second insulating sleeve 50 are inserted. When the first insulating sleeve 40 is inserted into the first support rod 20 along the first direction x, the first insulating sleeve 40 can be tightly sleeved on the first support section 21, and the second insulating sleeve 50 can be tightly sleeved on the second support section 31. Conversely, the graphite boat 100 is disassembled, and the assembly and disassembly difficulty of the graphite boat 100 is relatively low.

[0048] As another optional implementation, Figure 5 As shown, the first insulating sleeve 40 has a first mounting hole 40b and a second mounting hole 40c that are connected, the aperture of the first mounting hole 40b is equal to the diameter of the first supporting section 21, the first mounting hole 40b is sleeved on the first supporting section 21, and the second mounting hole 40c is sleeved on the first avoidance section 22, and the second insulating sleeve 50 has a third mounting hole 50b and a fourth mounting hole 50c that are connected, the aperture of the third mounting hole 50b is equal to the diameter of the second supporting section 31, the third mounting hole 50b is sleeved on the second supporting section 31, and the fourth mounting hole 50c is sleeved on the second avoidance section 32. In this way, when the first insulating sleeve 40 is inserted into the first support rod 20, the first mounting hole 40b is sleeved in the first support section 21, and the second mounting hole 40c is sleeved in the first avoidance section 22. On the one hand, the contact area between the first insulating sleeve 40 and the first support rod 20 can be increased to improve the connection strength. On the other hand, the diameter difference between the first support section 21 and the first avoidance section 22 can be used to limit the first insulating sleeve 40 along the first direction x. When the second insulating sleeve 50 is inserted into the second support rod 30, the third mounting hole 50b is sleeved in the second support section 31, and the fourth mounting hole 50c is sleeved in the second avoidance section 32. On the one hand, the contact area between the second insulating sleeve 50 and the second support rod 30 can be increased to improve the connection strength. On the other hand, the diameter difference between the second support section 31 and the second avoidance section 32 can be used to limit the second insulating sleeve 50 along the first direction x.

[0049] For example, Figure 5 and Figure 6As shown, the first insulating sleeve 40 includes two first semi-ring parts 41, each of which has a first groove 41a and a second groove 41b that are connected, and the two first semi-ring parts 41 are detachably connected. The first grooves 41a of the two first semi-ring parts 41 are used to enclose and form a first mounting hole 40b, and the second grooves 41b of the two first semi-ring parts 41 are used to enclose and form a second mounting hole 40c. Figure 5 and Figure 7 As shown, the second insulating sleeve 50 includes two second semi-ring parts 51, each of which has a third groove 51a and a fourth groove 51b that are connected, and the two second semi-ring parts 51 are detachably connected. The third grooves 51a of the two second semi-ring parts 51 are used to enclose and form a third mounting hole 50b, and the fourth grooves 51b of the two second semi-ring parts 51 are used to enclose and form a fourth mounting hole 50c. In this way, when the graphite boat 100 is assembled, the boat sheet 10 can be inserted into the first support rod 20 and the second support rod 30 along the first direction x, and after each boat sheet 10 is inserted, the two first semi-ring parts 41 are buckled onto the first support rod 20, and the two first semi-ring parts 41 are connected. At this time, the first mounting hole 40b formed by the first grooves 41a of the two first semi-ring parts 41 is sleeved on the first support section 21, and the second mounting hole 40b formed by the second grooves 41b of the two first semi-ring parts 41 is enclosed 40c is sleeved on the first avoidance section 22, and at the same time, the two second semi-ring portions 51 are buckled onto the second support rod 30, and the two second semi-ring portions 51 are connected. At this time, the third mounting hole 50b formed by the third grooves 51a of the two second semi-ring portions 51 is sleeved on the second support section 31, and the fourth mounting hole 50c formed by the fourth grooves 51b of the two second semi-ring portions 51 is sleeved on the second avoidance section 32. On the contrary, the graphite boat 100 is easy to assemble and disassemble.

[0050] In some embodiments, Figure 6 and Figure 7 As shown, a first connecting structure 61 is provided between the two first semi-ring parts 41, and the connecting structure includes a first part 61a and a second part 61b that are detachably connected. A second connecting structure 62 is provided between the two second semi-ring parts 51, and the connecting structure includes a third part 62a and a fourth part 62b that are detachably connected. In this way, the two first semi-ring parts 41 can be assembled by connecting the first part 61a and the second part 61b, and the first part 61a and the second part 61b are separated, so that the two first semi-ring parts 41 can be disassembled, so that the first insulating sleeve 40 is sleeved on or detached from the first support rod 20. And the two second semi-ring parts 51 can be assembled by connecting the third part 62a and the fourth part 62b, and the third part 62a and the fourth part 62b are separated, so that the two second semi-ring parts 51 can be disassembled, so that the second insulating sleeve 50 is sleeved on or detached from the second support rod 30.

[0051] For example, one of the first part 61a and the second part 61b is a recessed portion, and the other is a raised portion, and one of the third part 62a and the fourth part 62b is a recessed portion, and the other is a raised portion. By using the method of matching the raised portion with the recessed portion, the first part 61a and the second part 61b are easier to disassemble and have a higher connection strength, and the third part 62a and the fourth part 62b are easier to disassemble and have a higher connection strength.

[0052] In some other embodiments, the first part 61a and the second part 61b may also be an adhesive layer or an insulating magnetic part, and the third part 62a and the fourth part 62b may also be an adhesive layer or an insulating magnetic part, which is not specifically limited in this embodiment.

[0053] In some embodiments, Figure 1 and Figure 8 As shown, each boat piece 10 is provided with a plurality of first connection holes 10a and a plurality of second connection holes 10b, the plurality of first connection holes 10a are arranged at intervals along a third direction z, and the plurality of second connection holes 10b are arranged at intervals along the third direction z, the graphite boat 100 includes a plurality of first support rods 20 and a plurality of second support rods 30, the plurality of first support rods 20 are arranged corresponding to the plurality of first connection holes 10a of each boat piece 10 respectively, the plurality of second support rods 30 are arranged corresponding to the plurality of second connection holes 10b of each boat piece 10 respectively, and the third direction z is the length direction of the boat piece 10. In this way, a plurality of first support rods 20 are respectively passed through the plurality of first connecting holes 10a of each boat piece 10, and a plurality of second support rods 30 are respectively passed through the plurality of second connecting holes 10b of each boat piece 10. Each boat piece 10 is supported by the plurality of first support rods 20 and the plurality of second support rods 30. The arrangement of each boat piece 10 is relatively stable, and the arrangement stability of the boat piece 10 is relatively high, which is beneficial to improving the coating accuracy of the graphite boat 100 when it is used for coating.

[0054] Embodiment 1 of the present invention provides a graphite boat 100, wherein a first support rod 20 is used to penetrate a plurality of first connecting holes 10a of the boat plates 10 along a first direction x, a second support rod 30 is used to penetrate a plurality of second connecting holes 10b of the boat plates 10 along the first direction x, and a first supporting section 21 of the first support rod 20 abuts against the first connecting hole 10a of the corresponding boat plate 10, and a second supporting section 31 of the second support rod 30 abuts against the second connecting hole 10b of the corresponding boat plate 10, thereby being able to carry a plurality of boat plates 10, and further a first insulating sleeve 40 is sleeved on the first support rod 20, and two ends of the first insulating sleeve 40 abut against two adjacent boat plates 10 respectively, a second insulating sleeve 50 is sleeved on the second support rod 30, and two ends of the second insulating sleeve 50 abut against two adjacent boat plates 10 respectively, thereby enabling a fixed spacing between two adjacent boat plates 10.

[0055] In addition, the first support section 21 and the first avoidance section 22 of the first support rod 20 are alternately arranged along the first direction x, the second support section 31 and the second avoidance section 32 of the second support rod 30 are alternately arranged along the first direction x, and the second support section 31 is arranged corresponding to the first avoidance section along the second direction y. At the same time, the first avoidance section 22 is spaced apart from the first connection hole 10a of the corresponding boat piece 10, and the second avoidance section 32 is spaced apart from the second connection hole 10b of the corresponding boat piece 10, so that each boat piece 10 is only connected to one of the first support rod 20 and the second support rod 30, and two adjacent boat pieces 10 are respectively connected to the first support rod 20 and the second support rod 30. That is, the odd-numbered boat pieces 10 are connected through the second support rod 30, and the even-numbered boat pieces 10 are connected through the first support rod 20. When the graphite boat 100 is used in the coating process, as the number of coating times increases, even if the amorphous silicon layer is doped in the first insulating sleeve 40 and the second insulating sleeve 50, the odd-numbered boat pieces 10 and the even-numbered boat pieces 10 are always not conductive, and the graphite boat 100 can be normally used in the coating process, and the service life of the graphite boat 100 is long.

[0056] Embodiment 2

[0057] See also Fig. 9 , which is a schematic structural diagram of a coating device 200 provided in the second embodiment of the present invention. The coating device 200 includes the graphite boat 100 of the first embodiment.

[0058] The second embodiment of the present invention provides a coating device 200. As the number of coating times increases, the graphite boat 100 can be normally used in the coating process, and the service life of the graphite boat 100 is longer.

[0059] The above is a detailed introduction to a graphite boat and a coating device disclosed in the embodiments of the present invention. This article uses individual examples to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the graphite boat and the coating device of the present invention and its core idea; at the same time, for general technical personnel in this field, according to the idea of ​​the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A graphite boat, characterized in that: include: A plurality of boat pieces, wherein the plurality of boat pieces are spaced apart along a first direction, each of the boat pieces is provided with a first connection hole and a second connection hole, and the first connection hole and the second connection hole are spaced apart along a second direction; a first support rod, the first support rod being inserted through the first connection holes of the plurality of boat pieces along the first direction, the first support rod comprising a plurality of first support sections and a plurality of first avoidance sections, the first support sections and the first avoidance sections being alternately arranged one by one along the first direction and connected in sequence, the first support sections being in contact with the first connection holes of the corresponding boat pieces, and the first avoidance sections being spaced apart from the first connection holes of the corresponding boat pieces; a second support rod, the second support rod being passed through the second connection holes of the plurality of boat pieces along the first direction, the second support rod comprising a plurality of second support sections and a plurality of second avoidance sections, the second support sections and the second avoidance sections being alternately arranged one by one along the first direction and connected in sequence, the second support sections being arranged corresponding to the first avoidance sections along the second direction, the second support sections being in contact with the second connection holes of the corresponding boat pieces, and the second avoidance sections being spaced apart from the second connection holes of the corresponding boat pieces; a first insulating sleeve, wherein the first insulating sleeve is sleeved on the first supporting rod, the first insulating sleeve is arranged between two adjacent boat pieces, and two ends of the first insulating sleeve are respectively abutted against the two adjacent boat pieces; and A second insulating sleeve, wherein the second insulating sleeve is disposed on the second support rod, the second insulating sleeve is disposed between two adjacent boat pieces, and two ends of the second insulating sleeve are respectively abutted against the two adjacent boat pieces; The first direction is the thickness direction of the boat piece, and the second direction is the width direction of the boat piece.

2. The graphite boat according to claim 1, characterized in that: The aperture diameters of the first connecting holes of each of the boat plates are the same, the diameter of each of the first supporting sections is equal to the aperture diameter of the first connecting hole, the diameter of each of the first avoiding sections is smaller than the aperture diameter of the first connecting hole, the aperture diameters of the second connecting holes of each of the boat plates are the same, the diameter of each of the second supporting sections is equal to the aperture diameter of the second connecting hole, and the diameter of each of the second avoiding sections is smaller than the aperture diameter of the second connecting hole.

3. The graphite boat according to claim 2, characterized in that: The diameter of the first supporting section is d1, the diameter of the first avoiding section is d2, 0.6d1≤d2≤0.9d1, the diameter of the second supporting section is d3, the diameter of the second avoiding section is d4, 0.6d3≤d4≤0.9d3.

4. The graphite boat according to any one of claims 1 to 3, characterized in that: The first insulating sleeve has a first through hole running through both ends thereof, the aperture of the first through hole is equal to the diameter of the first supporting section, and the first through hole is sleeved on the first supporting section. The second insulating sleeve has a second through hole running through both ends thereof, the aperture of the second through hole is equal to the diameter of the second supporting section, and the second through hole is sleeved on the second supporting section.

5. The graphite boat according to any one of claims 1 to 3, characterized in that: The first insulating sleeve has a first mounting hole and a second mounting hole that are connected, the aperture of the first mounting hole is equal to the diameter of the first supporting section, the first mounting hole is sleeved on the first supporting section, and the second mounting hole is sleeved on the first avoidance section, the second insulating sleeve has a third mounting hole and a fourth mounting hole that are connected, the aperture of the third mounting hole is equal to the diameter of the second supporting section, the third mounting hole is sleeved on the second supporting section, and the fourth mounting hole is sleeved on the second avoidance section.

6. The graphite boat according to claim 5, characterized in that: The first insulating sleeve comprises two first semi-ring parts, each of the first semi-ring parts has a first groove and a second groove that are connected, the two first semi-ring parts are detachably connected, the first grooves of the two first semi-ring parts are used to enclose and form the first mounting hole, and the second grooves of the two first semi-ring parts are used to enclose and form the second mounting hole; The second insulating sleeve includes two second semi-ring parts, each of which has a connected third groove and a fourth groove, and the two second semi-ring parts are detachably connected, and the third grooves of the two second semi-ring parts are used to enclose the third mounting hole, and the fourth grooves of the two second semi-ring parts are used to enclose the fourth mounting hole.

7. The graphite boat according to claim 6, characterized in that: A first connection structure is provided between the two first half-ring parts, and the connection structure includes a first part and a second part that are detachably connected. A second connection structure is provided between the two second half-ring parts, and the connection structure includes a third part and a fourth part that are detachably connected.

8. The graphite boat according to claim 7, characterized in that: One of the first part and the second part is a recessed portion, and the other is a raised portion; one of the third part and the fourth part is a recessed portion, and the other is a raised portion.

9. The graphite boat according to any one of claims 1 to 3, characterized in that: Each of the boat pieces is provided with a plurality of first connection holes and a plurality of second connection holes, the plurality of first connection holes are arranged at intervals along the third direction, and the plurality of second connection holes are arranged at intervals along the third direction, the graphite boat comprises a plurality of first support rods and a plurality of second support rods, the plurality of first support rods are arranged corresponding to the plurality of first connection holes of each of the boat pieces respectively, and the plurality of second support rods are arranged corresponding to the plurality of second connection holes of each of the boat pieces respectively; Wherein, the third direction is the length direction of the boat piece.

10. A coating device, characterized in that: Comprising the graphite boat according to any one of claims 1 to 9.

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