Adjustable air knife and feeding equipment

Abstract

The utility model discloses an adjustable air knife and feeding equipment, relates to the technical field of air knives, and aims to solve the problem that an air outlet of the air knife is fixed in size and cannot be suitable for silicon wafers with different thickness specifications. The adjustable air knife comprises a base frame and an air knife structure. The air knife structures are arranged on the base frame, the two air knife structures are oppositely distributed at intervals, and the air knife structures are provided with air outlets. The air knife structure comprises an air knife body and an adjusting plate. The air knife body is arranged on the base frame, an open groove is formed in the surface, deviating from the base frame, of the air knife body, and the open groove forms an open end on the edge of the air knife body. The adjusting plate is arranged on the air knife body, the adjusting plate and the air knife body are oppositely arranged to form an air channel at the opening groove, the air outlet is located at the opening end, and the adjusting plate is used for adjusting the size of the air outlet. The utility model further provides feeding equipment which comprises a material box and the adjustable air knife in the technical scheme.

Description

Technical Field

[0001] The utility model relates to the technical field of air knives, in particular to an adjustable air knife and feeding equipment. Background Art

[0002] During the processing of silicon wafers, it is necessary to load the silicon wafers stacked in the material box. In the prior art, air knives are arranged on both sides of the material box to assist in loading the silicon wafers. Generally, two air knives are arranged on one side of the material box, and a total of four air knives are arranged.

[0003] In actual use, four wind knives are used to blow up the multiple silicon wafers on the upper layer. At this time, the blown silicon wafers are in a relatively loose state, and the two adjacent silicon wafers do not touch each other. Then, the suction cup is used to suck the silicon wafer at the top and put it into the conveyor line for subsequent operations. Repeat the above operation until all silicon wafers are taken out of the material box.

[0004] However, since the air outlet size of the air knife is fixed, it cannot be applied to silicon wafers of different thickness specifications. Utility Model Content

[0005] The utility model aims to provide an adjustable air knife and feeding equipment, which are used to increase the selectivity of the air outlet size of the air knife so as to expand the application range of the air knife.

[0006] In order to achieve the above-mentioned purpose, in the first aspect, the utility model provides an adjustable wind knife. The adjustable wind knife includes: a base frame and a wind knife structure. The wind knife structure is arranged on the base frame, and the two wind knife structures are opposite and spaced apart, and the wind knife structure has an air outlet. The above-mentioned wind knife structure includes: a wind knife body and an adjustment plate. The wind knife body is arranged on the base frame, and an open groove is provided on the surface of the wind knife body away from the base frame, and the open groove forms an open end at the edge of the wind knife body. The adjustment plate is arranged on the wind knife body, and the adjustment plate and the wind knife body are arranged relative to each other to form an air duct at the opening groove, and the air outlet is located at the opening end, and the adjustment plate is used to adjust the size of the air outlet.

[0007] Compared with the prior art, in the adjustable air knife provided by the utility model, since the adjustment plate is used to adjust the size of the air outlet, the adjustment plate can be used to adjust the blowing range of the adjustable air knife. Furthermore, under the condition of ensuring that the total air supply and air supply speed of the adjustable air knife are constant, the air output of the air outlet can also be adjusted by controlling the size of the air outlet. Based on this, by increasing the selectivity of the size of the adjustable air knife outlet, the adjustable air knife provided by the utility model can be applied to silicon wafers of different thickness specifications, thereby expanding the applicable range of the adjustable air knife.

[0008] In one implementation, the above-mentioned opening slot includes: a first opening slot and a second opening slot. The first opening slot is located in the edge area of ​​the wind knife body, and the bottom surface of the first opening slot is parallel to the surface of the wind knife body. The first opening slot has an opening end and a connecting end opposite to the opening end. The second opening slot is connected to the first opening slot through the connecting end, and the second opening slot is close to the central area of ​​the wind knife body.

[0009] In one implementation, a third opening slot is provided in the edge area of ​​the wind knife body, and the bottom surface of the third opening slot is parallel to the surface of the wind knife body. The third opening slot is connected to the first opening slot and forms an adjustment slot, and the depth of the third opening slot is greater than or equal to the depth of the first opening slot. The adjustment plate is rotatably arranged on the wind knife body through the adjustment slot to controllably block or open the air outlet.

[0010] When the above technical solution is adopted, since the depth of the third opening groove is greater than or equal to the depth of the first opening groove, the adjustment plate can be prevented from getting stuck when rotating in the adjustment groove, thereby ensuring the normal operation of the adjustable air knife.

[0011] In one implementation, the adjustment plate is provided with a protrusion, which fits in the adjustment groove. The center angle of the arc segment of the protrusion is smaller than the center angle of the arc segment of the adjustment groove, and the radius of the arc segment of the protrusion is equal to the radius of the arc segment of the adjustment groove, and the protrusion can move in the adjustment groove in a controllable manner.

[0012] When the above technical solution is adopted, the adjustment plate can cover or open the air outlet by using the matching method of the protrusion and the adjustment groove. This method is simple and convenient, easy to operate, and improves work efficiency.

[0013] In one implementation, a first angle adjustment hole is provided on the wind knife body, and the wind knife structure further includes a first fixing member, which passes through the first angle adjustment hole and is fastened to the base frame. The relative positions of the first angle adjustment hole and the first fixing member are adjusted along the guide direction of the first angle adjustment hole to adjust the angle of the wind knife structure relative to the base frame.

[0014] When the above technical solution is adopted, the angle of the wind knife structure relative to the base frame can be adjusted by using the first fixing member and the first angle adjustment hole. This method is simple, convenient and easy to operate. Furthermore, in actual use, it is not necessary to completely remove the wind knife structure from the base frame. It is only necessary to loosen the first fixing member and then rotate the wind knife body. At this time, it is not necessary to spend a lot of time on assembly later, which improves work efficiency.

[0015] In one implementation, at least one second angle adjustment hole is provided on the adjustment plate. The wind knife structure further includes a second fixing member, which passes through the second angle adjustment hole to fasten the adjustment plate and the wind knife body. Along the guide direction of the second angle adjustment hole, the relative position of the second angle adjustment hole and the second fixing member is adjusted so that the adjustment plate can controllably block or open the air outlet.

[0016] When the above technical solution is adopted, the second fixing member and the second angle adjustment hole can be used to realize the rotation of the adjustment plate relative to the wind knife body. This method is simple, convenient and easy to operate. Furthermore, in actual use, it is not necessary to completely remove the adjustment plate from the wind knife body. It is only necessary to loosen the second fixing member and then rotate the adjustment plate. In this case, it is not necessary to spend a lot of time on assembly later, which improves work efficiency.

[0017] In one implementation, a plurality of second angle adjustment holes are provided on the adjustment plate and are spaced apart from each other, and the plurality of second angle adjustment holes are in a common circle.

[0018] In one implementation, the adjustable air knife further comprises: a throttle valve. The throttle valve is disposed on the air knife body and communicated with the open slot.

[0019] When the above technical solution is adopted, the throttle valve can be used to adjust the blowing flow of the adjustable air knife to adapt to different working requirements.

[0020] In one implementation, the adjustable wind knife further includes: a sealing member, which is disposed on the wind knife body and / or the adjustment plate.

[0021] When the above technical solution is adopted, it can be ensured that the gas is blown out only from the air outlet of the adjustable air knife, thereby reducing the amount of gas leakage.

[0022] In one implementation, the roughness of one side of the air knife body that is in contact with the adjustment plate is less than or equal to 1.6; the roughness of one side of the adjustment plate that is in contact with the air knife body is less than or equal to 1.6.

[0023] When the above technical solution is adopted, it can be ensured that the gas is blown out only from the air outlet of the adjustable air knife, thereby reducing the amount of gas leakage.

[0024] In a second aspect, the utility model further provides a feeding device. The feeding device comprises a material box and the adjustable air knife described in the above technical solution. The material box has a containing space, the material box is used to carry and contain silicon wafers, and two adjustable air knives are respectively located on both sides of the material box.

[0025] Compared with the prior art, since the feeding equipment includes the adjustable air knife described in the above technical solution, the adjustable air knife includes an adjustment plate for adjusting the size of the air outlet, and the adjustment plate can be used to adjust the range of the adjustable air knife. Furthermore, while ensuring that the total air supply and air supply speed of the adjustable air knife are constant, the air outlet of the air outlet can also be adjusted by controlling the size of the air outlet. Based on this, by increasing the selectivity of the size of the adjustable air knife outlet, the adjustable air knife provided by the utility model can be applied to silicon wafers of different thickness specifications, thereby expanding the scope of application of the adjustable air knife. Further, in actual use, the adjustable air knife provided by the utility model is used to blow the silicon wafer, so that the silicon wafer can be in a suspended state, reducing or avoiding the shaking of the silicon wafer, so as to reduce or eliminate the probability of the edge collapse and cracking of the silicon wafer, thereby ensuring the quality of the silicon wafer. In summary, the adjustable air knife provided by the utility model can be adjusted from multiple dimensions so that the blowing effect meets the actual requirements, thereby ensuring the stability of the adjustable air knife blowing wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0027] Figure 1 This is a schematic diagram of the structure of the adjustable air knife in the embodiment of the utility model;

[0028] Figure 2 This is a schematic diagram of the structure of the air knife body in the embodiment of the utility model;

[0029] Figure 3 This is a first perspective diagram of a partial structure of the wind knife body in an embodiment of the utility model;

[0030] Figure 4 A second perspective of a partial structural schematic diagram of the wind knife body in an embodiment of the utility model;

[0031] Figure 5 This is a schematic diagram of the structure of the adjustment plate in the embodiment of the utility model;

[0032] Figure 6 This is a schematic diagram of the assembly of the wind knife body and the adjustment plate in the embodiment of the utility model;

[0033] Figure 7 It is a structural schematic diagram of the feeding equipment in the embodiment of the utility model.

[0034] Reference numerals:

[0035] 1-Adjustable air knife, 2-Base frame, 20-Bracket,

[0036] 21-base, 3-wind knife structure, 30-air outlet,

[0037] 31- air knife body, 310- opening slot, 311- first opening slot,

[0038] 312-second opening slot, 313-third opening slot, 314-adjustment slot,

[0039] 315-first angle adjustment hole, 316-mounting hole, 317-throttle valve mounting hole,

[0040] 32-adjustment plate, 320-protrusion, 321-second angle adjustment hole,

[0041] 33-first fixing member, 34-second fixing member, 4-throttle valve,

[0042] 5-Material box, 6-Silicon wafer. DETAILED DESCRIPTION

[0043] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0044] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0045] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. The meaning of "several" is one or more, unless otherwise clearly and specifically defined.

[0046] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0047] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0048] In order to solve the above technical problems, in the first aspect, the embodiment of the utility model provides an adjustable air knife. Figure 1 and Figure 2 , the adjustable wind knife comprises: a base frame 2 and a wind knife structure 3. The wind knife structure 3 is arranged on the base frame 2. The two wind knife structures 3 are opposite and spaced apart, and the wind knife structure 3 has an air outlet 30. The above-mentioned wind knife structure 3 comprises: a wind knife body 31 and an adjustment plate 32. The wind knife body 31 is arranged on the base frame 2, and an opening groove 310 is provided on the surface of the wind knife body 31 away from the base frame 2, and the opening groove 310 is formed with an open end at the edge of the wind knife body 31. The adjustment plate 32 is arranged on the wind knife body 31, and the adjustment plate 32 and the wind knife body 31 are arranged relative to each other to form an air duct at the opening groove 310, and the air outlet 30 is located at the open end, and the adjustment plate 32 is used to adjust the size of the air outlet 30. Exemplarily, the adjustment plate is rotatably arranged on the wind knife body, and the size of the air outlet is adjusted by controllable shielding or opening. Alternatively, the adjustment plate moves along the thickness direction of the wind knife body to adjust the size of the air outlet.

[0049] See also Figures 1 to 6 In the adjustable air knife provided in the embodiment of the utility model, since the adjustment plate 32 is used to adjust the size of the air outlet 30, the adjustment plate 32 can be used to adjust the blowing range of the adjustable air knife. Furthermore, while ensuring that the total air supply and air supply speed of the adjustable air knife are constant, the air output of the air outlet 30 can also be adjusted by controlling the size of the air outlet 30. Based on this, by increasing the selectivity of the size of the adjustable air knife air outlet 30, the adjustable air knife provided in the embodiment of the utility model can be applied to silicon wafers of different thickness specifications, thereby expanding the applicable scope of the adjustable air knife. It should be understood that the above-mentioned adjustable air knife can be used not only to blow silicon wafers, but also to blow away tiny particles on the surface of battery cells, glass sheets and objects, and of course can also be used to dry the surface of materials.

[0050] As a possible implementation, see Figure 1The base frame 2 includes: a bracket 20 and a base 21, the bracket 20 is arranged on the base 21, and the wind knife structure 3 is arranged on the bracket 20. As for the specific structure and material of the bracket 20 and the base 21, no specific limitation is made here. In the embodiment of the utility model, two wind knife structures 3 are respectively arranged on both sides of the bracket 20, and the two wind knife structures 3 are opposite and spaced apart.

[0051] As a possible implementation, see Figure 1 and Figure 2 The cross section of the wind knife body 31 is formed by a straight line and an arc. In other words, the cross section of the wind knife body 31 is composed of a rectangle and a semicircle. For example, the first part of the wind knife body 31 is a rectangular parallelepiped, and the second part is a semi-cylinder.

[0052] As a possible implementation, see Figure 1 , Figure 5 and Figure 6 The adjustment plate 32 is cylindrical and matches the second part of the wind knife body 31 .

[0053] As another possible implementation, the wind knife body and the adjustment plate may both be in the form of a rectangular parallelepiped, and the wind knife body and the adjustment plate match each other.

[0054] As a possible implementation, see Figures 2 to 4 The above-mentioned opening slot 310 includes: a first opening slot 311 and a second opening slot 312. The first opening slot 311 is located in the edge area of ​​the wind knife body 31, and the bottom surface of the first opening slot 311 is parallel to the surface of the wind knife body 31. The first opening slot 311 has an open end and a connecting end opposite to the open end. The second opening slot 312 is connected to the first opening slot 311 through the connecting end, and the second opening slot 312 is close to the central area of ​​the wind knife body 31.

[0055] The bottom surface of the second opening groove 312 can be parallel to the surface of the wind knife body. In this case, the bottom surface of the opening groove is parallel to the surface of the wind knife body. Alternatively, the depth of the second opening groove 312 gradually increases in the direction away from the opening end, and the depth direction of the second opening groove 312 is consistent with the thickness direction of the wind knife body. In this case, it is convenient to process and manufacture the second opening groove 312, which reduces the processing difficulty and improves the processing efficiency. It should be understood that the deepest depth of the second opening groove can be set according to the thickness of the wind knife body and the actual situation, and is not specifically limited here.

[0056] The depth of the first opening groove is greater than or equal to 0.2 mm and less than or equal to 0.4 mm, and the depth direction of the first opening groove is consistent with the thickness direction of the air knife body. For example, the depth of the first opening groove can be 0.2 mm, 0.25 mm, 0.3 mm, 0.36 mm or 0.4 mm.

[0057] In an alternative approach, see Figures 1 to 4 The edge area of ​​the wind knife body 31 is provided with a third opening slot 313, and the bottom surface of the third opening slot 313 is parallel to the surface of the wind knife body 31. The third opening slot 313 is connected with the first opening slot 311 to form an adjustment slot 314, and the depth of the third opening slot 313 is greater than or equal to the depth of the first opening slot 311. The adjustment plate 32 is rotatably disposed on the wind knife body through the adjustment slot 314 to controllably block or open the air outlet 30.

[0058] Since the depth of the third opening slot 313 is greater than or equal to the depth of the first opening slot 311 , the adjustment plate 32 can be prevented from getting stuck when rotating in the adjustment slot 314 , thereby ensuring the normal operation of the adjustable air knife 1 .

[0059] In an optional manner, the width of the third opening slot 313 is equal to the width of the first opening slot 311 .

[0060] The shape of the third opening groove is described below by taking two possible cases as examples. It should be understood that the following description is only for understanding and is not intended to be a specific limitation.

[0061] In an alternative approach, see Figure 3 and Figure 4 The third opening groove 313 includes a first side wall, a second side wall and a bottom surface. The first side wall is connected to the second side wall, the second side wall is opposite to the side wall of the first opening groove 311, and the first side wall is opposite to the opening end of the third opening groove 313. The opening end of the third opening groove 313 is connected to the opening end of the opening groove to form a whole.

[0062] In another optional manner, the third opening groove includes a first side wall, a second side wall, a third side wall and a bottom surface. The first side wall, the second side wall and the third side wall are connected in sequence, the first side wall and the third side wall are opposite to each other, the second side wall is opposite to the side wall of the first opening groove, and the third side wall is located on one side of the opening end.

[0063] As a possible implementation, see Figures 2 to 5 , the above-mentioned adjustment plate 32 is provided with a protrusion 320, and the protrusion 320 is matched with the adjustment groove 314. The central angle corresponding to the arc segment of the protrusion 320 is smaller than the central angle corresponding to the arc segment of the adjustment groove 314, and the radius corresponding to the arc segment of the protrusion 320 is equal to the radius corresponding to the arc segment of the adjustment groove 314, and the protrusion 320 can move in the adjustment groove 314 in a controllable manner. By using the coordination between the protrusion 320 and the adjustment groove 314, the adjustment plate 32 can cover or open the air outlet 30. This method is simple and convenient, easy to operate, and improves work efficiency.

[0064] The shapes of the protrusion and the adjustment groove are described below by taking two possible cases as examples. It should be understood that the following description is only for understanding and is not intended to be a specific limitation.

[0065] Example 1: the protrusion can be a fan-shaped protrusion, and the adjustment groove can be a fan-shaped adjustment groove. In this case, the center of the fan-shaped protrusion is located on the surface of the adjustment plate, and the center of the fan-shaped adjustment groove is located on the surface of the air knife body.

[0066] Example 2: The protrusion has only one arc segment, which is close to the center of the adjustment plate. The adjustment groove has only one arc segment, which is close to the center of the wind knife body.

[0067] Furthermore, since the protrusion 320 fits into the adjustment groove 314 , the width of the protrusion 320 is equal to or slightly smaller than the width of the adjustment groove 314 .

[0068] Furthermore, in order to ensure that air is discharged only from the air outlet 30 , the adjustment plate 32 needs to be tightly fitted with the wind knife body 31 , and the thickness of the protrusion 320 is equal to the depth of the adjustment groove 314 .

[0069] In combination with the above description, in order to further ensure that air is discharged only from the air outlet, the following method can also be used.

[0070] First, the adjustable wind knife further comprises: a sealing member, which is arranged on the wind knife body and / or the adjustment plate.

[0071] The second method is to make the roughness of the side of the air knife body that contacts the adjustment plate less than or equal to 1.6. Alternatively, the roughness of the side of the adjustment plate that contacts the air knife body less than or equal to 1.6.

[0072] When the above technical solution is adopted, it can be ensured that the gas is blown out only from the air outlet of the adjustable air knife, thereby reducing the amount of gas leakage.

[0073] As a possible implementation, the wind knife body can be rotatably arranged on the base frame to adjust the angle of the wind knife structure relative to the base frame. Exemplarily, the wind knife body 3 can be rotatably arranged on the bracket 20. At this time, the blowing angle of the wind knife structure 3 can be adjusted. Based on this, the problem of poor blowing effect caused by the deviation of the wind outlet angle due to the deviation of the installation angle of the wind knife structure 3 can be solved.

[0074] As a possible implementation, see Figure 1 and Figure 2The wind knife body 31 is provided with a first angle adjustment hole 315, and the wind knife structure 3 further includes a first fixing member 33, which passes through the first angle adjustment hole 315 and is fastened to the base frame 2. The relative positions of the first angle adjustment hole 315 and the first fixing member 33 are adjusted along the guide direction A of the first angle adjustment hole 315 to adjust the angle of the wind knife structure 3 relative to the base frame 2.

[0075] When the above technical solution is adopted, the angle of the wind knife structure 3 relative to the base frame 2 can be adjusted by using the first fixing member 33 and the first angle adjustment hole 315. This method is simple, convenient and easy to operate. Furthermore, in actual use, it is not necessary to completely remove the wind knife structure 3 from the base frame 2. It is only necessary to loosen the first fixing member 33 and then rotate the wind knife body 31. At this time, it is not necessary to spend a lot of time on assembly later, which improves work efficiency.

[0076] In an alternative approach, see Figure 2 The first angle adjustment hole 315 may be a waist-shaped hole, or a cross section of which is a figure formed by arc lines, for example, the cross section of the first angle adjustment hole 315 is annular.

[0077] The connection and fixing method between the adjustment plate and the air knife body can be bolt connection or magnetic attraction. The following description takes the bolt connection as an example. It should be understood that the following description is only for understanding and is not for specific limitation.

[0078] In an embodiment of the utility model, the adjustment plate is rotatably disposed on the wind knife body, and the size of the air outlet is adjusted by controllably blocking or opening the air outlet.

[0079] As a possible implementation, see Figure 1 , Figure 2 and Figure 5 , at least one second angle adjustment hole 321 is provided on the adjustment plate 32. The wind knife structure 3 further includes a second fixing member 34, which penetrates the second angle adjustment hole 321 to fasten the adjustment plate 32 and the wind knife body 31. Along the guide direction B of the second angle adjustment hole 321, the relative position of the second angle adjustment hole 321 and the second fixing member 34 is adjusted so that the adjustment plate 32 can controllably block or open the air outlet 30, thereby adjusting the size of the air outlet.

[0080] When the above technical solution is adopted, the second fixing member 34 and the second angle adjustment hole 321 can be used to realize the rotation of the adjustment plate 32 relative to the wind knife body 31. This method is simple, convenient and easy to operate. Furthermore, in actual use, it is not necessary to completely remove the adjustment plate 32 from the wind knife body 31. It is only necessary to loosen the second fixing member 34 and then rotate the adjustment plate 32. At this time, it is not necessary to spend a lot of time on assembly later, which improves work efficiency.

[0081] In an alternative approach, see Figure 5 The second angle adjustment hole 321 may be a waist-shaped hole, or a cross section of which is a figure formed by arc lines, for example, the cross section of the second angle adjustment hole 321 is annular.

[0082] In an alternative approach, see Figure 5 The adjustment plate 32 is provided with a plurality of second angle adjustment holes 321 spaced apart from each other, and the plurality of second angle adjustment holes 321 are in a common circle (for ease of description, they are defined as the first circle).

[0083] In an optional manner, the protrusion 320 is located at an edge area of ​​the adjustment plate 32 and at the periphery of the plurality of second angle adjustment holes 321 .

[0084] In an alternative approach, see Figure 2 , Figure 5 and Figure 6 A plurality of installation holes 316 are provided on the air knife body 31, and the plurality of installation holes 316 are in a circle (defined as a second circle for ease of description). Each installation hole 316 corresponds to a second angle adjustment hole 321, and the center of the first circle coincides with the center of the second circle, and the radius of the first circle is equal to the radius of the second circle. Furthermore, the plurality of installation holes 316 are distributed on the periphery of the opening slot, so that an air duct is formed at the opening slot after the adjustment plate 32 is attached to the air knife body 31.

[0085] During actual installation, the second fixing member 34 simultaneously passes through the mounting hole 316 and the second angle adjustment hole 321. The cross section of the mounting hole 316 can be circular or annular. Further, when the adjustment groove 314 is a fan-shaped adjustment groove, the center of the fan-shaped adjustment groove is coaxial with the center of the second circle.

[0086] As a possible implementation, see Figure 1 and Figure 2 The adjustable air knife 1 further comprises a throttle valve 4. The throttle valve 4 is arranged on the air knife body 31 and communicated with the opening slot. The throttle valve 4 can be used to adjust the blowing flow of the adjustable air knife 1 to meet different working requirements.

[0087] In the embodiment of the utility model, a throttle valve installation hole 317 is defined in the second opening groove 312 , and the throttle valve 4 is disposed on the air knife body 31 through the throttle valve installation hole 317 .

[0088] In a second aspect, the present invention also provides a feeding device. Figure 7 The feeding device comprises a material box 5 and the adjustable air knife 1 described in the above technical solution. The material box has a containing space, and the material box is used to carry and contain silicon wafers. The two adjustable air knives 1 are respectively located on both sides of the material box 5. Exemplarily, the adjustable air knife 1 is spaced apart from the material box 5.

[0089] See also Figures 1 to 7 , since the feeding equipment includes the adjustable air knife 1 described in the above technical solution, the adjustable air knife 1 includes an adjustment plate 32 for adjusting the size of the air outlet 30, and the adjustment plate 32 can be used to adjust the range of the adjustable air knife. Further, under the condition of ensuring that the total air supply and air supply speed of the adjustable air knife are constant, the air output of the air outlet 30 can also be adjusted by controlling the size of the air outlet 30. Based on this, by increasing the selectivity of the size of the adjustable air knife outlet 30, the adjustable air knife provided in the embodiment of the utility model can be applied to silicon wafers of different thickness specifications, thereby expanding the applicable scope of the adjustable air knife. Further, in actual use, by using the adjustable air knife 1 provided in the embodiment of the utility model to blow the silicon wafer 6, the silicon wafer 6 can be placed in a suspended state, reducing or avoiding the shaking of the silicon wafer 6, so as to reduce or eliminate the probability of edge collapse and cracking of the silicon wafer 6, thereby ensuring the quality of the silicon wafer 6. In summary, the adjustable air knife 1 provided in the embodiment of the utility model can be adjusted from multiple dimensions so that the blowing effect meets the actual requirements, thereby ensuring the stability of the adjustable air knife 1 blowing the wafer. In addition, since the shaking of the silicon wafer 6 can be reduced or avoided, it is conducive to the suction cup to absorb the silicon wafer 6 and avoid the suction cup leakage. Based on this, not only the quality of the silicon wafer 6 can be ensured, but also the work efficiency can be improved.

[0090] The following describes the use process of the feeding equipment in a possible way. It should be understood that the following description is only for understanding and is not used for specific limitation.

[0091] See also Figures 1 to 7 After the material box 5 filled with silicon wafers 6 enters the designated position of the material box through the automated equipment, the silicon wafers 6 are lifted up to the air outlet 30 of the adjustable air knife 1 by the lifting mechanism at the bottom of the material box 5 .

[0092] Next, according to the specifications of the silicon wafer 6 and the relative position between the silicon wafer 6 and the adjustable air knife 1 , the size of the air outlet 30 of the adjustable air knife 1 and the angle of the air knife structure 3 relative to the base frame 2 are adjusted.

[0093] Afterwards, the adjustable air knife 1 starts to ventilate to blow up the stacked silicon wafers 6 and keep the silicon wafers 6 in a suspended state.

[0094] After that, the uppermost silicon wafer 6 is sucked away by the suction cup of the automated device. This action is repeated in a cycle until all the silicon wafers 6 in the material box 5 are sucked away.

[0095] It should be understood that in the process of using the adjustable air knife 1 to blow the silicon wafer 6, the size of the air outlet 30, the air output, and the angle of the air knife structure 3 relative to the base frame 2 of each adjustable air knife 1 can be adjusted in real time according to the state of the silicon wafer 6 and the blowing effect.

[0096] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0097] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. An adjustable air knife, characterized in that: include: Scaffolding; An air knife structure is arranged on the base frame; The two wind knife structures are opposite to each other and spaced apart, and each wind knife structure has an air outlet; The wind knife structure comprises: The wind knife body is arranged on the base frame; an open groove is formed on the surface of the wind knife body away from the base frame, and the open groove forms an open end at the edge of the wind knife body; An adjustment plate is arranged on the wind knife body; the adjustment plate and the wind knife body are arranged relative to each other to form an air duct at the opening groove; the air outlet is located at the opening end; the adjustment plate is used to adjust the size of the air outlet.

2. The adjustable air knife according to claim 1, characterized in that: The open slot comprises: A first opening slot is located in the edge area of ​​the wind knife body; the first opening slot has a bottom surface parallel to the surface of the wind knife body; the first opening slot has the opening end and a connecting end opposite to the opening end; The second opening slot is connected to the first opening slot through the connecting end; the second opening slot is close to the central area of ​​the wind knife body.

3. The adjustable air knife according to claim 2, characterized in that: A third opening groove is provided in the edge area of ​​the wind knife body, and the bottom surface of the third opening groove is parallel to the surface of the wind knife body; the third opening groove is connected with the first opening groove to form an adjustment groove, and the depth of the third opening groove is greater than or equal to the depth of the first opening groove; the adjustment plate is rotatably arranged on the wind knife body through the adjustment groove to controllably block or open the air outlet.

4. The adjustable air knife according to claim 3, characterized in that: A protrusion is provided on the adjustment plate, and the protrusion fits with the adjustment groove; the central angle corresponding to the arc segment of the protrusion is smaller than the central angle corresponding to the arc segment of the adjustment groove, and the radius corresponding to the arc segment of the protrusion is equal to the radius corresponding to the arc segment of the adjustment groove; the protrusion can move in the adjustment groove in a controllable manner.

5. The adjustable air knife according to claim 1, characterized in that: The air knife body is provided with a first angle adjustment hole; The wind knife structure further includes a first fixing member, which passes through the first angle adjustment hole and is firmly connected to the base frame; The relative positions of the first angle adjustment hole and the first fixing member are adjusted along the guiding direction of the first angle adjustment hole to adjust the angle of the wind knife structure relative to the base frame.

6. The adjustable air knife according to claim 1 or 4, characterized in that: The adjustment plate is provided with at least one second angle adjustment hole; The wind knife structure further includes a second fixing member, which passes through the second angle adjustment hole to fasten the adjustment plate and the wind knife body; The relative positions of the second angle adjustment hole and the second fixing member are adjusted along the guiding direction of the second angle adjustment hole, so that the adjustment plate can controllably block or open the air outlet.

7. The adjustable air knife according to claim 6, characterized in that: The adjustment plate is provided with a plurality of second angle adjustment holes distributed at intervals, and the plurality of second angle adjustment holes are in a circle.

8. The adjustable air knife according to any one of claims 1 to 5, characterized in that: The adjustable air knife further comprises: a throttle valve, which is arranged on the air knife body and communicated with the opening groove.

9. The adjustable air knife according to any one of claims 1 to 5, characterized in that: The adjustable wind knife further comprises: a sealing member, which is arranged on the wind knife body and / or the adjustment plate.

10. The adjustable air knife according to any one of claims 1 to 5, characterized in that: The roughness of the surface of the air knife body that contacts the adjustment plate is less than or equal to 1.6; The roughness of a surface of the adjustment plate that contacts the air knife body is less than or equal to 1.

6.

11. A feeding device, characterized in that: include: A material box having a containing space; the material box is used to carry and contain silicon wafers; The adjustable air knife according to any one of claims 1 to 10; The two adjustable air knives are respectively located on two sides of the material box.

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