Dust removal device of polishing instrument

Abstract

The utility model discloses a dust removal device of a polishing instrument, which comprises an external pipe bin, a motor is mounted in the external pipe bin, an output shaft of the motor is connected with a fan, and a dust filter screen is detachably mounted in the external pipe bin and positioned on one side of the fan. And a sealing baffle plate connected with an argon ion beam polishing instrument is arranged at one end of the external pipe bin. The polishing instrument dust removal device is externally connected to the outer wall of the instrument sample bin, dust removal operation is started in the sample polishing test interval, operation is easy, implementation is convenient, dust and chippings generated in the sample cutting process can be effectively cleaned in time, short circuit of an ion gun is reduced, cleanliness of the sample bin, a sample table and a window baffle is kept, and the service life of the polishing instrument is prolonged. The sample polishing position and progress can be accurately controlled, the number of times of instrument disassembly and maintenance is effectively reduced, ion gun short circuit and other damage caused by accumulation of sample scraps generated by cutting are effectively reduced, and the testing efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of ion beam polishing testing, in particular to a dust removal device of a polishing instrument. Background Art

[0002] Argon ion beam cross-section polishing is a technology widely used in material cross-section processing. Its mechanism is to remove materials based on the principle of ion beam sputtering. Compared with other common material surface polishing technologies, such as mechanical polishing, ion beam polishing is carried out in an inert gas, without oxidation or decarburization. The processing accuracy can reach above the atomic level, the processing environment is stable, and the surface of the polished material is almost not deformed, with good surface quality. These advantages also make ion beam polishing technology widely used in various industries, such as semiconductors, lithium batteries, etc.

[0003] During the ion beam polishing process, dust and debris will be generated, which will be scattered and accumulated on the inner wall of the sample chamber, the sample stage, the ion gun, the window baffle and other accessories. As the dust particles accumulate, the ion gun will short-circuit and fail to emit the ion beam, causing the instrument to fail to work. In addition, the dust accumulation on the sample stage and the window baffle will affect the position of the sample cutting and the judgment of the cutting progress. At present, when the ion gun short-circuits due to the accumulation of dust and debris, engineers need to disassemble the entire instrument for cleaning and maintenance. The whole process is cumbersome and complicated to operate, which seriously wastes machine time and manpower. Utility Model Content

[0004] The technical problem to be solved by the utility model is: how to provide a dust removal device which can be matched with an argon ion beam polishing instrument.

[0005] In order to solve the above technical problems, the utility model provides the following technical solutions:

[0006] A dust removal device for a polishing machine comprises an external pipe bin, a motor is installed inside the external pipe bin, and a fan is connected to the output shaft of the motor. A dust filter is detachably installed inside the external pipe bin and on one side of the fan. A sealing baffle connected to the polishing machine is provided at one end of the external pipe bin.

[0007] The dust removal device of the polishing instrument in the present application is externally connected to the outer wall of the instrument's sample bin. During the intervals between sample polishing tests, the dust removal operation is turned on. The operation is simple and easy to implement. The device can timely and effectively clean the dust and debris generated during the sample cutting process, reduce the short circuit of the ion gun, and keep the sample bin, sample table and window baffle clean. This is conducive to accurately controlling the sample polishing position and progress, effectively reducing the number of times the instrument is disassembled and repaired, as well as the ion gun short circuit and other damages caused by the accumulation of sample debris generated by cutting, thereby improving test efficiency.

[0008] As a further solution of the utility model: a motor fastener is installed inside the external pipe bin, a mounting groove for mounting the motor is opened inside the motor fastener, and the outer side of the motor fastener is fixed to the inner wall of the external pipe bin.

[0009] As a further solution of the utility model: a raised support block is provided on the inner wall of the external pipe bin and on one side of the motor fastener, and the dust filter can be detachably mounted on the raised support block.

[0010] As a further solution of the utility model: the raised support block is circular in shape and is fastened to the inner wall of the external pipe bin.

[0011] As a further solution of the utility model: the outer diameter of the raised support block is larger than the outer diameter of the dust filter.

[0012] As a further solution of the utility model: a sealing gasket is also provided at the position where the external pipe bin and the polishing machine are installed.

[0013] As a further solution of the utility model: a switch button for controlling the opening and closing of the motor is provided on the outer wall of the external pipe bin.

[0014] As a further solution of the utility model: the sealing baffle includes two sections of expandable fan-shaped door structures, wherein the sealing baffle is made of stainless steel as a whole.

[0015] As a further solution of the utility model: a threaded connection portion is provided on the outer side of one end of the external pipe bin connected to the polishing machine.

[0016] As a further solution of the present invention: the external pipe bin is made of stainless steel as a whole.

[0017] Compared with the prior art, the beneficial effects of the utility model are:

[0018] The dust removal device of the polishing instrument in the present application is externally connected to the outer wall of the instrument's sample bin. During the intervals between sample polishing tests, the dust removal operation is turned on. The operation is simple and easy to implement. The device can timely and effectively clean the dust and debris generated during the sample cutting process, reduce the short circuit of the ion gun, and keep the sample bin, sample table and window baffle clean. This is conducive to accurately controlling the sample polishing position and progress, effectively reducing the number of times the instrument is disassembled and repaired, as well as the ion gun short circuit and other damages caused by the accumulation of sample debris generated by cutting, thereby improving test efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic structural diagram of a dust removal device for a polishing machine according to an embodiment of the utility model;

[0020] Figure 2 A cross-sectional view of a dust removal device of a polishing machine according to an embodiment of the utility model;

[0021] Figure 3 For the utility model embodiment Figure 2 Schematic diagram of the three-dimensional state;

[0022] Figure 4 This is a schematic diagram of the structure of the dust filter of the embodiment of the utility model;

[0023] Explanation of the accompanying drawings: 1. External tube compartment; 2. Threaded connection part; 3. Motor fastener; 4. Motor; 5. Fan; 6. Dust filter; 7. Raised support block; 8. Sealing baffle; 9. Switch button. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution in the embodiments of the utility model will be clearly and completely described below in combination with the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 A dust removal device for a polishing machine includes an external tube bin 1, a threaded connection part 2, a motor fastener 3, a motor 4, a fan 5, a dust filter 6, a raised support block 7, a sealing baffle 8 and a switch button 9. The external tube bin 1 is a cylindrical structure as a whole, and the interior is hollow for installing the motor fastener 3, the motor 4, the fan 5, the dust filter 6, the raised support block 7 and other components.

[0026] Reference Figure 1 and Figure 2 The external tube bin 1 is made of stainless steel as a whole. A threaded connection part 2 is provided on the outside of one end of the external tube bin 1. The threaded connection part 2 can be detachably connected to the sample bin of the argon ion beam polisher. A sealing gasket is also provided at the connection position between the threaded connection part 2 and the argon ion beam polisher. The sealing gasket is used to ensure the sealing performance at the connection position between the two. The sealing gasket can be a rubber ring with elastic effect. The purpose of the external tube bin 1 is to bear the internal components. The external tube bin 1 is detachable to realize timely cleaning of dust.

[0027] Reference Figure 1 , Figure 2 and Figure 3The motor fastener 3 is installed inside the external pipe bin 1. The motor fastener 3 is a cylindrical structure as a whole, and a mounting groove is opened at the middle position inside it. The motor 4 can be detachably installed, and the outer wall of the motor fastener 3 is close to the inner wall of the external pipe bin 1.

[0028] Reference Figure 2 and Figure 3 The output shaft of the motor 4 is connected to the fan 5, and the motor 4 can drive the fan 5 to be turned on and off; a switch button 9 is also provided on the outer wall of the external pipe bin 1, wherein the switch button 9 is used to control the motor 4, and the opening and closing of the fan 5 are controlled by controlling the operation of the motor 4.

[0029] Reference Figure 2 and Figure 3 The dust filter 6 is a circular structure as a whole, and can be detachably mounted on a raised support block 7 provided on the inner wall of the external pipe bin 1, and can be detachably mounted on the raised support block 7 by bolts or pins.

[0030] Reference Figure 2 and Figure 3 The raised support block 7 is circularly fastened to the inner wall of the external pipe bin 1, and the raised support block 7 and the external pipe bin 1 are of an integrated structure design. The outer diameter of the raised support block 7 is larger than the outer diameter of the dust filter 6, thereby supporting the dust filter 6.

[0031] Reference Figure 2 and Figure 3 The sealing baffle 8 includes two sections of expandable fan-shaped door structures, which can be opened manually, and the sealing baffle 8 is made of stainless steel as a whole.

[0032] The specific operating principles of this application are as follows:

[0033] The last ion beam polishing test is stopped, and the vacuum is released; the sealing baffle 8 is manually pushed open from the inner chamber of the instrument, the dust removal device switch button 9 is turned on, the motor 4 is turned on, and the fan 5 rotates to start sucking dust; after a certain period of time, when the dust is sucked clean, the switch button 9 is clicked, the motor 4 stops working, the sealing baffle 8 is pulled back to the original position, and the sample chamber is sealed. Change to the next test sample, vacuumize and start the test.

[0034] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A dust removal device for a polishing machine, characterized in that: The invention comprises an external pipe bin (1), wherein a motor (4) is installed inside the external pipe bin (1), and the output shaft of the motor (4) is connected to a fan (5), a dust filter (6) is detachably installed inside the external pipe bin (1) and located on one side of the fan (5), and a sealing baffle (8) connected to a polishing machine is provided at one end of the external pipe bin (1).

2. The dust removal device for a polishing machine according to claim 1, characterized in that: A motor fastener (3) is installed inside the external pipe bin (1), a mounting groove for mounting the motor is provided inside the motor fastener (3), and the outer side of the motor fastener (3) is fixed to the inner wall of the external pipe bin (1).

3. The dust removal device for a polishing machine according to claim 1, characterized in that: A raised support block (7) is provided on the inner wall of the external pipe bin (1) and located on one side of the motor fastener (3), and the dust filter (6) is detachably mounted on the raised support block (7).

4. The dust removal device for a polishing machine according to claim 3, characterized in that: The raised support block (7) is circular in shape and is fastened to the inner wall of the external pipe bin (1).

5. The dust removal device for a polishing machine according to claim 3, characterized in that: The outer diameter of the raised support block (7) is greater than the outer diameter of the dust filter (6).

6. The dust removal device for a polishing machine according to claim 1, characterized in that: A sealing gasket is also provided at the location where the external pipe bin (1) and the polishing machine are installed.

7. The dust removal device for a polishing machine according to claim 1, characterized in that: A switch button (9) for controlling the opening and closing of the motor (4) is provided on the outer wall of the external pipe bin (1).

8. The dust removal device for a polishing machine according to claim 1, characterized in that: The sealing baffle (8) comprises two sections of expandable fan-shaped door structures, wherein the sealing baffle (8) is entirely made of stainless steel.

9. The dust removal device for a polishing machine according to claim 1, characterized in that: A threaded connection portion (2) is provided on the outer side of one end of the external pipe bin (1) connected to the polishing machine.

10. The dust removal device for a polishing machine according to claim 1, characterized in that: The external pipe bin (1) is entirely made of stainless steel.

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