Special-shaped pipe structure of PECVD (plasma enhanced chemical vapor deposition) equipment and PECVD equipment
By adopting a special-shaped tube structure in the PECVD equipment, the distance between the electrode sheet set and the inner wall of the quartz tube is uniform, the problem of poor electric field uniformity is solved, and the film layer on the photovoltaic cell is better uniform.
Patent Information
- Application Number
- CN202420167448.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-23
- Publication Date
- 2025-02-11
- Estimated Expiration
- 2034-01-23
AI Technical Summary
In existing PECVD equipment, when a square electrode sheet set is placed in a circular quartz tube, the shortest distance from the outer periphery of the electrode sheet set to the inner wall of the quartz tube changes greatly, resulting in poor electric field uniformity, which in turn affects the uniformity of the film layer on the battery cell.
The special-shaped tube structure is adopted to ensure that the distance between the surroundings of the electrode sheet set and the inner wall of the quartz tube is the same, or the distance between the central position and the inner wall is smaller than the distance between the non-center position, thereby reducing electric field inhomogeneity.
Through the design of the special-shaped tube structure, the uniformity of the electric field is improved, the interference of the quartz tube wall on the electrode sheet set is reduced, and better coating uniformity is achieved on the photovoltaic cell.
Smart Images
Figure CN222455216U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of solar cells, in particular to a special-shaped tube structure of a PECVD device and a PECVD device. Background Art
[0002] With the development of plasma enhanced chemical vapor deposition (PECVD) technology, PECVD equipment has also undergone significant development.
[0003] PECVD equipment is a photovoltaic process equipment that can be used to prepare SiNx (silicon nitride) film layers and amorphous silicon film layers on photovoltaic cells. These prepared film layers are generally used in full back electrode contact crystalline silicon photovoltaic cells (BC type photovoltaic cells) or heterojunction cells (HJT type cells).
[0004] In a conventional PECVD device, the PECVD device includes a quartz tube and an electrode sheet group placed in the quartz tube, wherein the quartz tube is circular in shape, the electrode sheet is composed of high-frequency electrode sheets and ground electrode sheets alternately spaced, and the electrode sheet group is square in shape. When the square electrode sheet group is placed in a circular quartz tube, the shortest distance from the outer periphery of the electrode sheet group to the inner wall of the quartz tube changes greatly.
[0005] This easily leads to the situation that when the high-frequency electrode sheets in the electrode sheet group are powered on, the interference strength of the quartz tube on the edge of each high-frequency electrode sheet and the grounding electrode sheet is extremely inconsistent. The closer the high-frequency electrode sheet and the grounding electrode sheet edge are to the quartz tube, the greater the electric field strength generated between them and the inner wall of the quartz tube, which results in poor uniformity of the electric field between each high-frequency electrode sheet and the grounding electrode sheet. Due to the poor uniformity of the electric field, the uniformity of the film layer plated on the battery sheet is also significantly reduced. Utility Model Content
[0006] The utility model aims to provide a special-shaped tube structure of a PECVD device and a PECVD device, so as to solve the problem that the shape of the quartz tube of the existing PECVD device is circular, and when a square electrode sheet group is placed in the circular quartz tube, the shortest distance from the outer periphery of the electrode sheet group to the inner wall of the quartz tube changes greatly, resulting in poor uniformity of the electric field between each high-frequency electrode sheet and the grounding electrode sheet, which ultimately leads to a significant reduction in the uniformity of the film layer plated on the battery sheet.
[0007] In a first aspect, the utility model provides a special-shaped tube structure of a PECVD device and a PECVD device, wherein the special-shaped tube structure of the PECVD device comprises:
[0008] An electrode sheet group and a quartz tube, wherein the electrode sheet group is placed in the quartz tube;
[0009] The distances from the electrode sheet group to the inner wall of the quartz tube are the same, or the distances from the center of the electrode sheet group to the inner wall of the quartz tube are smaller than the distances from the non-center of the electrode sheet group to the inner wall of the quartz tube.
[0010] When the above technical solution is adopted, the special-shaped tube structure of the PECVD equipment includes: an electrode sheet group and a quartz tube, and the electrode sheet group is placed in the quartz tube; wherein, the distances from the electrode sheet group to the inner wall of the quartz tube are the same, or the distances from the center positions of the electrode sheet group to the inner wall of the quartz tube are smaller than the distances from the non-center positions of the corresponding electrode sheet group to the inner wall of the quartz tube, thereby avoiding the problem of poor electric field uniformity caused by the huge change in the shortest distance from the existing circular quartz tube to the outer periphery of the electrode sheet group, and reducing the problem of more interference of the quartz tube wall on the edges of the outer electrode sheets in the electrode sheet group and less interference on the inner edges, so that the electric field between the electrode sheet groups is more uniform, and further makes the generated glow discharge more uniform, so as to produce better coating uniformity on the photovoltaic cell.
[0011] In some embodiments, when the distances from the four sides of the electrode sheet group to the inner wall of the quartz tube are the same, the shape of the quartz tube includes a square structure.
[0012] In some embodiments, the electrode sheet group includes a plurality of high-frequency electrode sheets and ground electrode sheets that are alternately stacked.
[0013] In some embodiments, when the distance from the center position of the electrode sheet group to the inner wall of the quartz tube is less than the distance from the non-center position of the corresponding electrode sheet group to the inner wall of the quartz tube, the shape of the quartz tube includes a concave structure. In the electrode sheet group, the high-frequency electrode sheet and the grounding electrode sheet at the non-center position near the quartz tube can generate relatively smaller interference, so there is no need to weaken the interference at this location. The high-frequency electrode sheet and the grounding electrode sheet at the center position near the quartz tube can generate relatively higher interference. Therefore, the interference at this location is weakened by the concave structure, so that the uniformity of the electric field between the electrode sheet groups is improved, and the generated glow discharge is further made more uniform, so as to produce better coating uniformity on the photovoltaic cell.
[0014] In some embodiments, the four corners of the square structure or the concave structure are provided with rounded corners or chamfers, and the chamfers or rounded corners can improve the yield.
[0015] In some embodiments, a corrugated structure is disposed on the inner wall of the quartz tube, and the corrugated structure includes a plurality of raised corrugated substructures.
[0016] In some embodiments, the corrugated substructure protrudes between the adjacent high-frequency electrode sheet and the ground electrode sheet, which can reduce the influence of the inner wall of the quartz tube 20 on the edges of the high-frequency electrode sheet and the ground electrode sheet.
[0017] In some embodiments, the electrode sheets at the upper and lower ends of the electrode sheet group are both the grounding electrode sheets. Since the interference between the grounding electrode sheets and the quartz tube is smaller, it is more conducive to generating a uniform electric field between the high-frequency electrode sheets and the grounding electrode sheets, further improving the uniformity of the photovoltaic cell coating.
[0018] In some embodiments, the electrode sheet group formed by the multiple alternately stacked high-frequency electrode sheets and grounding electrode sheets is a rectangular structure, and the equipment solution can be designed to match the site according to the height and width of the site and the specific production capacity requirements.
[0019] In a second aspect, the utility model provides a PECVD device, including a PECVD body, and a special-shaped tube structure of the PECVD device described in any one of the first aspects connected to the PECVD body.
[0020] When the above technical scheme is adopted, the special-shaped tube structure of the PECVD equipment provided by the embodiment of the utility model includes: an electrode sheet group and a quartz tube, wherein the electrode sheet group is placed in the quartz tube; wherein the distances from the electrode sheet group to the inner wall of the quartz tube are the same, or the distances from the center positions of the electrode sheet group to the inner wall of the quartz tube are smaller than the distances from the non-center positions of the corresponding electrode sheet group to the inner wall of the quartz tube, thereby avoiding the problem of poor electric field uniformity caused by the huge change in the shortest distance from the existing circular quartz tube to the outer periphery of the electrode sheet group, and reducing the problem of more interference of the quartz tube wall on the edges of the outer electrode sheets in the electrode sheet group and less interference on the inner edges, thereby making the electric field between the electrode sheet groups more uniform, and further making the generated glow discharge more uniform, and in the process of the PECVD main body combined with the special-shaped tube structure to perform surface coating on the battery surface, better coating uniformity can be produced on the photovoltaic battery sheet. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:
[0022] Figure 1 A structural schematic diagram of a special-shaped tube structure of a PECVD device provided by the utility model is shown;
[0023] Figure 2It shows a structural schematic diagram of another special-shaped tube structure of a PECVD device provided by an embodiment of the utility model;
[0024] Figure 3 A structural schematic diagram showing another special-shaped tube structure of a PECVD device provided by an embodiment of the utility model is shown;
[0025] Figure 4 A schematic structural diagram of a special-shaped tube structure of another PECVD device provided by an embodiment of the utility model is shown;
[0026] Figure 5 A structural schematic diagram showing another special-shaped tube structure of a PECVD device provided by an embodiment of the utility model is shown;
[0027] Figure 6 A structural schematic diagram of a special-shaped tube structure of a PECVD device with a corrugated structure provided by an embodiment of the utility model is shown.
[0028] Reference numerals:
[0029] 10-electrode sheet group, 20-quartz tube, L-chamfer, P-rounded corner, 101-high-frequency electrode sheet, 102-ground electrode sheet, V-corrugated substructure, D-the distance from the electrode sheet group to the inner wall of the quartz tube, D1-the distance from the center position of the electrode sheet group to the inner wall of the quartz tube, D2-the distance from the non-center position of the electrode sheet group to the inner wall of the quartz tube. DETAILED DESCRIPTION
[0030] In order to clearly describe the technical solutions of the embodiments of the present utility model, in the embodiments of the present utility model, words such as "first" and "second" are used to distinguish the same or similar items with basically the same functions and effects. Those skilled in the art can understand that words such as "first" and "second" do not limit the quantity and execution order, and words such as "first" and "second" do not necessarily limit the difference.
[0031] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.
[0032] It should be noted that in the present invention, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the present invention should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.
[0033] In the present utility model, "at least one" means one or more, and "plurality" means two or more. "And / or" describes the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone, where A and B can be singular or plural. The character " / " generally indicates that the objects associated before and after are in an "or" relationship. "At least one of the following" or similar expressions refers to any combination of these items, including any combination of single or plural items. For example, at least one of a, b or c can mean: a, b, c, the combination of a and b, the combination of a and c, the combination of b and c, or the combination of a, b and c, where a, b, c can be single or plural.
[0034] Figure 1 The schematic diagram of the structure of a special-shaped tube structure of a PECVD device provided by the utility model is shown as follows: Figure 1 As shown, the special-shaped tube structure of the PECVD equipment includes:
[0035] An electrode sheet group 10 and a quartz tube 20, wherein the electrode sheet group 10 is placed in the quartz tube 20;
[0036] The distance D from the electrode sheet group 10 to the inner wall of the quartz tube 20 is the same, or the distance D1 from the center position of the electrode sheet group 10 to the inner wall of the quartz tube 20 is smaller than the distance D2 from the non-center position of the electrode sheet group 10 to the inner wall of the quartz tube 20.
[0037] In summary, the special-shaped tube structure of the PECVD equipment provided by the embodiment of the utility model includes: an electrode sheet group and a quartz tube, wherein the electrode sheet group is placed in the quartz tube; wherein the distances from the electrode sheet group to the inner wall of the quartz tube are the same, or the distances from the center positions of the electrode sheet group to the inner wall of the quartz tube are smaller than the distances from the non-center positions of the corresponding electrode sheet group to the inner wall of the quartz tube, thereby avoiding the problem of poor electric field uniformity caused by the huge change in the shortest distance from the existing circular quartz tube to the periphery of the electrode sheet group, and reducing the problem of more interference of the quartz tube wall on the edges of the outer electrode sheets in the electrode sheet group and less interference on the inner edges, thereby making the electric field between the electrode sheet groups more uniform, and further making the generated glow discharge more uniform, so as to produce better coating uniformity on the photovoltaic cell sheets.
[0038] Optional, Figure 2 A structural schematic diagram showing another special-shaped tube structure of a PECVD device provided in an embodiment of the utility model is shown. Figure 3 A structural schematic diagram of another PECVD device provided by an embodiment of the utility model is shown, see Figure 1 , Figure 2 or Figure 3 When the distances from the electrode sheet group 10 to the inner wall of the quartz tube 20 are the same, the shape of the quartz tube 20 includes Figure 1 The square structure shown.
[0039] See also Figure 2 The four corners of the square structure are provided with chamfers L, see Figure 3 The four corners of the square structure are provided with chamfered corners P, and chamfering or rounding the corners can improve the yield rate.
[0040] Optionally, the value range of the chamfer may be [C10-C20], and the value range of the rounded corners may be [R15-R30]. The embodiment of the utility model does not specifically limit the specific values of the chamfer or rounded corners, and specific settings may be made according to actual application scenarios.
[0041] Figure 4 A structural schematic diagram of a special-shaped tube structure of another PECVD device provided by an embodiment of the utility model is shown. Figure 5 FIG. 2 shows a structural schematic diagram of another special-shaped tube structure of a PECVD device provided by an embodiment of the utility model, such as Figure 4 or Figure 5 As shown, when the distance D1 from the center position around the electrode sheet group 10 to the inner wall of the quartz tube 20 is smaller than the distance D2 from the non-center position around the corresponding electrode sheet group 10 to the inner wall of the quartz tube 20, the shape of the quartz tube 20 includes a concave structure.
[0042] Optional, see Figure 1 , Figure 2 , Figure 3 , Figure 4 or Figure 5 The electrode sheet group 10 includes a plurality of high-frequency electrode sheets 101 and ground electrode sheets 102 that are alternately stacked.
[0043] In the electrode sheet group, the high-frequency electrode sheets and the grounding electrode sheets at the non-central positions near the quartz tube can generate relatively smaller interference, so there is no need to weaken the interference at this location. The high-frequency electrode sheets and the grounding electrode sheets at the central positions near the quartz tube can generate relatively higher interference, so the interference at this location is weakened through the concave structure, so that the uniformity of the electric field between the electrode sheet groups is improved, and the generated glow discharge is further made more uniform, so as to produce better coating uniformity on the photovoltaic cell.
[0044] Optional, see Figure 1 , Figure 2 , Figure 3 , Figure 4 or Figure 5 The electrode sheets at the upper and lower ends of the electrode sheet group 10 are both the grounding electrode sheets 102. Since the interference between the grounding electrode sheets and the quartz tube is smaller, it is more conducive to generating a uniform electric field between the high-frequency electrode sheets and the grounding electrode sheets, further improving the uniformity of the photovoltaic cell coating. Furthermore, the electrode sheet group 10 formed by the multiple alternatingly stacked high-frequency electrode sheets 101 and the grounding electrode sheets 102 is a rectangular structure, that is, a rectangular structure. The equipment solution can be designed to match the site according to the height and width of the site and the specific production capacity requirements.
[0045] See also Figure 4 The four corners of the concave structure are provided with chamfers L, see Figure 5 The four corners of the concave structure are provided with chamfered corners P, and chamfering or rounding the corners can improve the yield rate.
[0046] Optionally, the value range of the chamfer may be [C10-C20], and the value range of the rounded corners may be [R15-R30]. The embodiment of the utility model does not specifically limit the specific values of the chamfer or rounded corners, and specific settings may be made according to actual application scenarios.
[0047] Optional, Figure 6 The schematic diagram of the structure of a special-shaped tube structure of a PECVD device with a corrugated structure provided by an embodiment of the utility model is shown as follows: Figure 6As shown, a corrugated structure is arranged on the inner wall of the quartz tube 20, and the corrugated structure includes a plurality of raised corrugated substructures V. The corrugated substructure V protrudes between the adjacent high-frequency electrode sheet 101 and the grounding electrode sheet 102, so as to reduce the influence of the inner wall of the quartz tube 20 on the edges of the high-frequency electrode sheet 101 and the grounding electrode sheet 102.
[0048] In summary, the special-shaped tube structure of the PECVD equipment provided by the embodiment of the utility model includes: an electrode sheet group and a quartz tube, wherein the electrode sheet group is placed in the quartz tube; wherein the distances from the electrode sheet group to the inner wall of the quartz tube are the same, or the distances from the center positions of the electrode sheet group to the inner wall of the quartz tube are smaller than the distances from the non-center positions of the corresponding electrode sheet group to the inner wall of the quartz tube, thereby avoiding the problem of poor electric field uniformity caused by the huge change in the shortest distance from the existing circular quartz tube to the periphery of the electrode sheet group, and reducing the problem of more interference of the quartz tube wall on the edges of the outer electrode sheets in the electrode sheet group and less interference on the inner edges, thereby making the electric field between the electrode sheet groups more uniform, and further making the generated glow discharge more uniform, so as to produce better coating uniformity on the photovoltaic cell sheets.
[0049] The utility model also provides a PECVD device, comprising a PECVD main body and a Figures 1 to 6 Any of the special-shaped tube structures of the PECVD equipment.
[0050] Optionally, the PECVD main body includes interconnected vacuum and pressure control systems, deposition systems, gas and flow control, system safety protection systems and computer control units, wherein the special-shaped tube structure of the PECVD equipment described in the present application is arranged in the deposition system, and the surface coating of the battery surface is completed through the vacuum and pressure control system, deposition system, gas and flow control, system safety protection system and computer control unit.
[0051] In summary, the PECVD device provided in the embodiment of the present invention comprises a PECVD body and a Figures 1 to 6Any of the special-shaped tube structures of the PECVD equipment, the special-shaped tube structure of the PECVD equipment includes: an electrode sheet group and a quartz tube, the electrode sheet group is placed in the quartz tube; wherein, the distances from the electrode sheet group to the inner wall of the quartz tube are the same, or the distances from the center positions of the electrode sheet group to the inner wall of the quartz tube are smaller than the distances from the non-center positions of the corresponding electrode sheet group to the inner wall of the quartz tube, thereby avoiding the problem of poor electric field uniformity caused by the huge change in the shortest distance from the existing circular quartz tube to the outer periphery of the electrode sheet group, and reducing the problem of more interference of the quartz tube wall on the edges of the outer electrode sheets in the electrode sheet group and less interference on the inner edges, thereby making the electric field between the electrode sheet groups more uniform, and further making the generated glow discharge more uniform, and in the process of the PECVD main body combined with the special-shaped tube structure to perform surface coating on the battery surface, better coating uniformity can be produced on the photovoltaic battery sheet.
[0052] Although the present invention is described herein in conjunction with various embodiments, in the process of implementing the claimed invention, those skilled in the art may understand and implement other variations of the disclosed embodiments by viewing the drawings, the disclosure, and the appended claims. In the claims, the word "comprising" does not exclude other components or steps, and "one" or "a" does not exclude multiple components. Certain measures are recorded in different dependent claims, but this does not mean that these measures cannot be combined to produce good results.
[0053] Although the utility model has been described in conjunction with specific features and embodiments thereof, it is obvious that various modifications and combinations may be made thereto without departing from the spirit and scope of the utility model. Accordingly, this specification and the drawings are merely exemplary illustrations of the utility model as defined by the appended claims, and are deemed to have covered any and all modifications, variations, combinations or equivalents within the scope of the utility model. Obviously, those skilled in the art may make various modifications and variations to the utility model without departing from the spirit and scope of the utility model. Thus, if these modifications and variations of the utility model fall within the scope of the claims of the utility model and their equivalents, the utility model is also intended to include these modifications and variations.
Claims
1. A special-shaped tube structure of a PECVD device, characterized in that: include: An electrode sheet group and a quartz tube, wherein the electrode sheet group is placed in the quartz tube; The distances from the electrode sheet group to the inner wall of the quartz tube are the same, or the distances from the center of the electrode sheet group to the inner wall of the quartz tube are smaller than the distances from the non-center of the electrode sheet group to the inner wall of the quartz tube.
2. The special-shaped tube structure of the PECVD equipment according to claim 1, characterized in that: When the distances from the four sides of the electrode sheet group to the inner wall of the quartz tube are the same, the shape of the quartz tube includes a square structure.
3. The special-shaped tube structure of the PECVD equipment according to claim 2, characterized in that: When the distance from the center position around the electrode sheet group to the inner wall of the quartz tube is smaller than the distance from the non-center position around the corresponding electrode sheet group to the inner wall of the quartz tube, the shape of the quartz tube includes a concave structure.
4. The special-shaped tube structure of the PECVD equipment according to claim 3, characterized in that: The four corners of the square structure or the concave structure are provided with rounded corners or chamfered corners.
5. The special-shaped tube structure of the PECVD equipment according to claim 2, characterized in that: The electrode sheet group includes a plurality of high-frequency electrode sheets and grounding electrode sheets which are alternately stacked and arranged.
6. The special-shaped tube structure of the PECVD equipment according to claim 5, characterized in that: A corrugated structure is arranged on the inner wall of the quartz tube, and the corrugated structure comprises a plurality of raised corrugated substructures.
7. The special-shaped tube structure of the PECVD equipment according to claim 6, characterized in that: The corrugated substructure protrudes at a position between the high-frequency electrode sheet and the ground electrode sheet that are adjacent to each other.
8. The special-shaped tube structure of the PECVD equipment according to claim 5, characterized in that: The electrode sheets at the upper and lower ends of the electrode sheet group are both the grounding electrode sheets.
9. The special-shaped tube structure of the PECVD equipment according to claim 5, characterized in that: The electrode sheet group formed by the plurality of alternately stacked high-frequency electrode sheets and grounding electrode sheets has a rectangular structure.
10. A PECVD device, characterized in that: It comprises a PECVD body and a special-shaped tube structure of the PECVD equipment according to any one of claims 1 to 9 connected to the PECVD body.