Single crystal furnace balance adjusting mechanism and single crystal furnace

Abstract

The utility model discloses a single crystal furnace balance adjusting mechanism and a single crystal furnace. The single crystal furnace balance adjusting mechanism comprises a base, a horizontal adjusting seat, a communicating piece, an adjusting assembly and a cooling assembly, and the base is fixedly installed on an auxiliary furnace chamber; the horizontal adjusting seats are arranged above the base at intervals, and lifting head mechanisms are mounted on the horizontal adjusting seats; the communicating piece is provided with a cavity for a traction rope of the lifting head mechanism to pass through, the first end of the communicating piece is connected to the base, the cavity of the communicating piece is communicated with the auxiliary furnace chamber, and the second end of the communicating piece is connected to the horizontal adjusting seat; the adjusting assembly is configured to adjust the levelness of the horizontal adjusting seat; and the cooling assembly is configured to cool heat transferred from the auxiliary furnace chamber in the cavity. The balance adjusting mechanism of the single crystal furnace is additionally provided with the cooling assembly, and heat transferred from the auxiliary furnace chamber can be cooled by the cooling assembly when passing through the cavity in the balance adjusting mechanism of the single crystal furnace, so that the service lives of the balance adjusting mechanism and the lifting head mechanism are prolonged, and the production cost is reduced.

Description

Technical Field

[0001] The present application belongs to the technical field of single crystal furnaces, and in particular relates to a single crystal furnace balancing mechanism and a single crystal furnace. Background Art

[0002] At present, a lifting head mechanism is installed on the auxiliary furnace chamber of the single crystal furnace. The lifting head mechanism has a traction rope inside, and the silicon rod is pulled and lifted by the traction rope. In order to ensure that the traction rope can normally pull the silicon rod vertically, a balancing mechanism needs to be installed between the lifting head mechanism and the auxiliary furnace chamber. The traction rope is introduced into the auxiliary furnace chamber through the balancing mechanism. The balancing mechanism is used to ensure the horizontality of the lifting head mechanism installation, so that the traction rope can vertically pull the silicon rod.

[0003] During the operation of the existing single crystal furnace, the heat generated by thermal radiation from the silicon material in the crucible of the single crystal furnace rises from the auxiliary furnace chamber upward through the balancing mechanism to the pulling head mechanism. The balancing mechanism and the pulling head mechanism are in a high temperature environment for a long time, resulting in a short service life of the balancing mechanism and the pulling head mechanism. Utility Model Content

[0004] The purpose of the present application is to provide a single crystal furnace balancing mechanism to solve the problem in the prior art that the balancing mechanism and pulling head mechanism of the single crystal furnace are in a high temperature environment for a long time and have a short service life; in addition, the present application also provides a single crystal furnace including the above-mentioned single crystal furnace balancing mechanism.

[0005] To achieve this goal, this application adopts the following technical solutions:

[0006] In a first aspect, the present application proposes a single crystal furnace balancing mechanism, which includes a base, a horizontal adjustment seat, a connecting piece, an adjustment component and a cooling component, wherein:

[0007] The base is fixedly installed on the auxiliary furnace chamber;

[0008] The horizontal adjustment seat is arranged above the base at intervals, and a lifting head mechanism is installed on the horizontal adjustment seat;

[0009] The connecting piece has a cavity for passing the traction rope of the pulling head mechanism, the first end of the connecting piece is connected to the base, the cavity of the connecting piece is connected to the auxiliary furnace chamber, and the second end of the connecting piece is connected to the horizontal adjustment seat;

[0010] The first end of the adjustment component is connected to the base, and the second end of the adjustment component is connected to the horizontal adjustment seat. The adjustment component is configured to adjust the horizontality of the horizontal adjustment seat to ensure the horizontality of the lifting head mechanism installation;

[0011] The cooling assembly is configured to cool the heat transferred from the auxiliary furnace chamber in the cavity.

[0012] The single crystal furnace balancing mechanism proposed in the present application realizes the adjustment of the horizontality of the horizontal adjustment seat through the adjustment component, and the pulling head mechanism is installed on the horizontal adjustment seat, so as to ensure the horizontality of the installation of the pulling head mechanism, and further ensure that the traction rope of the pulling head mechanism can normally lift the silicon rod vertically; the present application adds a cooling component to the single crystal furnace balancing mechanism, and cools the heat generated by thermal radiation through the cooling component, thereby reducing the temperature of the balancing mechanism and the lifting head mechanism, avoiding the balancing mechanism and the lifting head mechanism from being in a high temperature environment for a long time, extending the service life of the balancing mechanism and the lifting head mechanism, and reducing the production cost.

[0013] Optionally, the connecting piece includes a compensator, a first through hole is opened at the center of the horizontal adjustment seat, a second through hole is opened at the center of the base, the second end of the compensator is connected to the first through hole, the first end of the compensator is connected to the second through hole, the traction rope of the lifting head mechanism passes through the cavity of the compensator and is introduced into the auxiliary furnace chamber, and the compensator is configured to compensate for the displacement caused by the horizontal adjustment seat when adjusting the horizontality.

[0014] By arranging a compensator between the horizontal adjustment seat and the base, the traction rope of the lifting head mechanism is introduced into the auxiliary furnace chamber through the cavity of the compensator. At the same time, the compensator can also compensate for the displacement of the horizontal adjustment seat when adjusting the horizontality, so as to facilitate the adjustment of the horizontality of the horizontal adjustment seat. A connecting piece with both connection and compensation functions is provided.

[0015] Optionally, the cooling component includes a cooling medium inlet pipe, a cooling medium outlet pipe and a cooling chamber, the compensator includes an inner tube and an outer tube, the outer tube is mounted on the outer periphery of the inner tube, a cooling chamber is formed between the inner tube and the outer tube, the cooling medium inlet pipe and the cooling medium outlet pipe are arranged on the outer tube, the cooling medium inlet pipe and the cooling medium outlet pipe are connected to the cooling chamber, and the cooling medium enters the cooling chamber from the cooling medium inlet pipe and flows out through the cooling medium outlet pipe.

[0016] By setting the compensator as a double-layer structure including an inner tube and an outer tube, a cooling cavity is formed between the inner and outer tubes, and a circulating cooling medium is introduced into the cooling cavity, a compensator with connection, compensation and cooling functions is provided, the overall structure is simple, and the space occupied is small; at the same time, the inner tube directly exchanges heat with the heat generated by thermal radiation, thereby improving the efficiency of heat exchange and ensuring the cooling effect of the cooling component.

[0017] Optionally, both the inner tube and the outer tube are made of metal bellows.

[0018] Both the inner and outer cylinders are made of metal bellows, which can not only ensure the heat conduction effect of the cooling component while achieving the compensation function, but also increase the contact area between the cooling medium and the inner and outer cylinders, further improving the cooling effect of the cooling component.

[0019] Optionally, the cooling component includes a cooling jacket, which is wrapped around the outer wall of the connecting piece, and has a cooling cavity inside the cooling jacket. The cooling jacket is provided with a cooling medium inlet and a cooling medium outlet which are connected to the cooling cavity, and the cooling medium enters the cooling cavity from the cooling medium inlet and flows out through the cooling medium outlet.

[0020] By arranging a cooling jacket on the outer wall of the connecting piece, the heat rising from the auxiliary furnace chamber to the cavity of the connecting piece can be cooled, providing a cooling component that is easy to implement and convenient for subsequent maintenance and overhaul.

[0021] Optionally, the adjustment component includes three pillars, which are distributed at three vertices of a triangle, the first end of each pillar is fixed to the base, and the second end of each pillar is liftably mounted with an adjustment member, which is detachably fixedly connected to the horizontal adjustment seat.

[0022] By adjusting the height of each adjusting piece, the height of the connection between each adjusting piece and the horizontal adjustment seat is adjusted, thereby achieving the horizontal adjustment of the horizontal adjustment seat; by setting three pillars distributed in a triangle and installing an adjusting piece on each pillar, the horizontality of the horizontal adjustment seat can be guaranteed.

[0023] Optionally, the adjusting member includes a stud, an adjusting threaded hole is provided at the end face of the second end of each pillar, three third through holes are provided on the horizontal adjustment seat, each third through hole corresponds to a stud, the first end of the stud is installed in the adjusting threaded hole, and the second end of the stud passes through the third through hole and is fixed to the horizontal adjustment seat by a nut.

[0024] Specifically, each stud is equipped with two nuts, and the two nuts are respectively locked on the upper and lower sides of the horizontal adjustment seat. By loosening each nut, the horizontal adjustment seat is adjusted to a suitable height and adjusted to a horizontal state, and then the nuts are locked, the horizontal adjustment of the horizontal adjustment seat is completed, providing an adjustment component with a simple structure, low cost and easy operation.

[0025] Optionally, an air inlet is provided on one side of the base close to the horizontal adjustment seat, and an air distribution plate is provided on one side of the base close to the auxiliary furnace chamber. The air distribution plate is located outside the second through hole, and a plurality of air outlets are circumferentially provided on the air distribution plate. The air inlet is connected to the plurality of air outlets, and protective gas is introduced into the air inlet and blown into the auxiliary furnace chamber circumferentially through the plurality of air outlets.

[0026] By arranging a gas distribution plate on the periphery of the second through hole, the protective gas is evenly delivered into the auxiliary furnace chamber along the circumferential direction, so that the protective gas in the auxiliary furnace chamber is evenly distributed, which is beneficial to ensuring the quality of crystal pulling.

[0027] In a second aspect, the present application further proposes a single crystal furnace, which includes a base, a main furnace chamber, an auxiliary furnace chamber, a single crystal furnace balancing mechanism and a lifting head mechanism, wherein:

[0028] The main furnace chamber is arranged on the base, and the auxiliary furnace chamber is arranged above the main furnace chamber;

[0029] The single crystal furnace balancing mechanism is installed at the upper end of the auxiliary furnace chamber, and the single crystal furnace balancing mechanism is configured to adjust the horizontality of the installation of the lifting head mechanism, and the single crystal furnace balancing mechanism is also configured to cool the heat transferred from the auxiliary furnace chamber;

[0030] The pulling head mechanism is installed on the single crystal furnace balancing mechanism, and the pulling head mechanism is configured to pull and pull the silicon rod.

[0031] The single crystal furnace adjusting and balancing mechanism of the single crystal furnace proposed in the present application ensures the horizontality of the installation of the lifting head mechanism by adjusting the horizontality of the installation of the lifting head mechanism, thereby ensuring that the traction rope of the lifting head mechanism can normally lift the silicon rod vertically; at the same time, the single crystal furnace adjusting and balancing mechanism can also cool the heat generated by thermal radiation at the single crystal furnace adjusting and balancing mechanism, thereby avoiding the adjusting and balancing mechanism and the lifting head mechanism being in a high temperature environment for a long time, extending the service life of the adjusting and balancing mechanism and the lifting head mechanism, and reducing the use cost of the single crystal furnace.

[0032] Optionally, the single crystal furnace further includes a column, a main furnace chamber moving mechanism and an auxiliary furnace chamber moving mechanism, wherein:

[0033] The column is fixedly arranged on one side of the base, and the main furnace chamber moving mechanism is installed on the column, and the main furnace chamber moving mechanism is configured to assist in disassembling the main furnace chamber;

[0034] The auxiliary furnace chamber moving mechanism is installed on the column, and the auxiliary furnace chamber moving mechanism is configured to drive the auxiliary furnace chamber, the single crystal furnace adjustment and balancing mechanism and the pulling head mechanism to rotate or lift together, or the auxiliary furnace chamber moving mechanism is configured to drive the furnace cover, the rotary valve, the auxiliary furnace chamber, the single crystal furnace adjustment and balancing mechanism and the pulling head mechanism on the main furnace chamber to rotate or lift together.

[0035] Through the main furnace chamber moving mechanism, the main furnace chamber can be automatically disassembled to facilitate cleaning of the main furnace chamber, saving manpower, with a high degree of automation, and improving the cleaning efficiency of the main furnace chamber; through the auxiliary furnace chamber moving mechanism, the auxiliary furnace chamber, the single crystal furnace balancing mechanism and the pulling head mechanism can be rotated or lifted together, or the furnace cover, rotary valve, auxiliary furnace chamber, single crystal furnace balancing mechanism and the pulling head mechanism on the main furnace chamber can be rotated or lifted together; thereby realizing automatic unloading of the drawn silicon rods and automatic feeding of silicon materials, thereby improving the production efficiency of the single crystal furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a schematic diagram of the three-dimensional structure of the single crystal furnace balancing mechanism provided in an embodiment of the present application from a first viewing angle;

[0037] Figure 2is a schematic diagram of the three-dimensional structure of the single crystal furnace balancing mechanism provided in an embodiment of the present application from a second viewing angle;

[0038] Figure 3 is a cross-sectional schematic diagram of a single crystal furnace balancing mechanism provided in an embodiment of the present application;

[0039] Figure 4 It is a schematic diagram of the three-dimensional structure of the single crystal furnace provided in the embodiment of the present application.

[0040] Figures 1 to 4 The following reference numerals are included:

[0041] Single crystal furnace balancing mechanism 10, base 11, second through hole 110, horizontal adjustment seat 12, first through hole 120, connecting piece 13, compensator 130, inner cylinder 1300, outer cylinder 1301, adjustment assembly 14, support 140, adjustment piece 141, stud 1410, cooling assembly 15, cooling medium inflow pipe 150, cooling medium outflow pipe 151, cooling cavity 152, gas supply pipe 16;

[0042] Auxiliary furnace chamber 20;

[0043] Lifting head mechanism 30;

[0044] Gas distribution plate 40, gas outlet 400;

[0045] Base 50;

[0046] Main furnace chamber 60;

[0047] Column 70;

[0048] Main furnace chamber moving mechanism 80;

[0049] Auxiliary furnace chamber moving mechanism 90;

[0050] Furnace cover 100. DETAILED DESCRIPTION

[0051] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0052] At present, a lifting head mechanism is installed on the auxiliary furnace chamber of the single crystal furnace. The lifting head mechanism has a traction rope inside, and the silicon rod is pulled and lifted by the traction rope. In order to ensure that the traction rope can normally pull the silicon rod vertically, a balancing mechanism needs to be installed between the lifting head mechanism and the auxiliary furnace chamber. The traction rope is introduced into the auxiliary furnace chamber through the balancing mechanism. The balancing mechanism is used to ensure the horizontality of the lifting head mechanism installation, so that the traction rope can vertically pull the silicon rod.

[0053] During operation of the existing single crystal furnace, the heat in the auxiliary furnace chamber will rise to the lifting head mechanism through the balancing mechanism. The balancing mechanism and the lifting head mechanism are in a high temperature environment for a long time, resulting in a short service life of the balancing mechanism and the lifting head mechanism.

[0054] Therefore, in the first aspect, the present application provides a single crystal furnace balancing mechanism, see Figure 1 and Figure 4 As shown, the single crystal furnace balancing mechanism 10 provided in the embodiment of the present application includes a base 11, a horizontal adjustment seat 12, a connecting piece 13, an adjusting component 14 and a cooling component 15, wherein: the base 11 is fixedly mounted on the auxiliary furnace chamber 20; the horizontal adjustment seat 12 is spaced above the base 11, and a pulling head mechanism 30 is installed on the horizontal adjustment seat 12; the connecting piece 13 has a cavity for providing a traction rope of the pulling head mechanism 30 to pass through, a first end of the connecting piece 13 is connected to the base 11, the cavity of the connecting piece 13 is connected to the auxiliary furnace chamber 20, and a second end of the connecting piece 13 is connected to the horizontal adjustment seat 12; a first end of the adjusting component 14 is connected to the base 11, and a second end of the adjusting component 14 is connected to the horizontal adjustment seat 12, and the adjusting component 14 is configured to adjust the horizontality of the horizontal adjustment seat 12 to ensure the horizontality of the installation of the pulling head mechanism 30; the cooling component 15 is configured to cool the heat transferred from the auxiliary furnace chamber 20 in the cavity.

[0055] The single crystal furnace adjustment and balancing mechanism 10 proposed in the present application realizes the adjustment of the horizontality of the horizontal adjustment seat 12 through the adjustment component 14, and the pulling head mechanism 30 is installed on the horizontal adjustment seat 12, so as to ensure the horizontality of the installation of the pulling head mechanism 30, and further ensure that the traction rope of the pulling head mechanism 30 can normally lift the silicon rod vertically; the present application adds a cooling component 15 to the single crystal furnace adjustment and balancing mechanism 10, and the heat rising from the auxiliary furnace chamber 20 can be cooled by the cooling component 15 when passing through the cavity in the single crystal furnace adjustment and balancing mechanism 10, thereby avoiding the single crystal furnace adjustment and balancing mechanism 10 and the pulling head mechanism 30 from being in a high temperature environment for a long time, extending the service life of the single crystal furnace adjustment and balancing mechanism 10 and the pulling head mechanism 30, and reducing the production cost.

[0056] See also Figures 1 to 4 As shown, as an embodiment, the connecting piece 13 includes a compensator 130, a first through hole 120 is opened at the center of the horizontal adjustment seat 12, a second through hole 110 is opened at the center of the base 11, the second end of the compensator 130 is connected to the first through hole 120, the first end of the compensator 130 is connected to the second through hole 110, the traction rope of the lifting head mechanism 30 passes through the cavity of the compensator 130 and is introduced into the auxiliary furnace chamber 20, and the compensator 130 is configured to compensate for the displacement generated by the horizontal adjustment seat 12 when adjusting the horizontality.

[0057] By arranging the compensator 130 between the horizontal adjustment seat 12 and the base 11, the traction rope of the lifting head mechanism 30 is introduced into the auxiliary furnace chamber 20 through the cavity of the compensator 130. At the same time, the compensator 130 can also compensate for the displacement of the horizontal adjustment seat 12 when adjusting the horizontality, so as to facilitate the adjustment of the horizontality of the horizontal adjustment seat 12. A connecting piece 13 with both connecting and compensating functions is provided.

[0058] See also Figures 2 to 4 As shown, as an embodiment, the cooling component 15 includes a cooling medium inlet pipe 150, a cooling medium outlet pipe 151 and a cooling cavity 152, the compensator 130 includes an inner cylinder 1300 and an outer cylinder 1301, the outer cylinder 1301 is sleeved on the periphery of the inner cylinder 1300, and a cooling cavity 152 is formed between the inner cylinder 1300 and the outer cylinder 1301, the cooling medium inlet pipe 150 and the cooling medium outlet pipe 151 are arranged on the outer cylinder 1301, the cooling medium inlet pipe 150 and the cooling medium outlet pipe 151 are connected with the cooling cavity 152, and the cooling medium enters the cooling cavity 152 from the cooling medium inlet pipe 150 and flows out through the cooling medium outlet pipe 151.

[0059] Specifically, the cooling medium is either cooling water or cooling oil.

[0060] By setting the compensator 130 as a double-layer structure including an inner tube 1300 and an outer tube 1301, a cooling chamber 152 is formed between the inner tube 1300 and the outer tube 1301, and a circulating cooling medium is introduced into the cooling chamber 152, thereby providing a compensator 130 with connectivity, compensation and cooling functions, with a simple overall structure and small space occupation. At the same time, the inner tube 1300 directly exchanges heat with the heat rising from the auxiliary furnace chamber 20 to the cavity of the compensator 130, thereby improving the efficiency of heat exchange and ensuring the cooling effect of the cooling component 15.

[0061] As an implementation mode, both the inner cylinder 1300 and the outer cylinder 1301 are made of metal bellows.

[0062] Both the inner cylinder 1300 and the outer cylinder 1301 use metal bellows, which can not only ensure the heat conduction effect of the cooling component while achieving the compensation function, but also increase the contact area between the cooling medium and the inner cylinder 1300 and the outer cylinder 1301, further improving the cooling effect of the cooling component 15.

[0063] See also Figure 1 and Figure 4 As shown, as an embodiment, the cooling component 15 includes a cooling jacket (not shown in the figure), which is covered on the outer wall of the connecting piece 13, and has a cooling cavity inside the cooling jacket. The cooling jacket is provided with a cooling medium inlet and a cooling medium outlet which are connected to the cooling cavity. The cooling medium enters the cooling cavity from the cooling medium inlet and flows out through the cooling medium outlet.

[0064] By arranging a cooling jacket on the outer wall of the connecting piece 13, the heat rising from the auxiliary furnace chamber 20 to the cavity of the connecting piece 13 is cooled, providing a cooling component 15 that is easy to implement and convenient for subsequent maintenance and repair.

[0065] See also Figures 1 to 3 As shown, as an embodiment, the adjustment component 14 includes three pillars 140, and the three pillars 140 are distributed at three vertices of a triangle. The first end of each pillar 140 is fixed to the base 11, and the second end of each pillar 140 is liftably mounted with an adjustment member 141, and the adjustment member 141 is detachably fixedly connected to the horizontal adjustment seat 12.

[0066] Specifically, the three pillars 140 are distributed at three vertices of an equilateral triangle.

[0067] By adjusting the height of each adjusting member 141, the height of each adjusting member 141 at the connection point of the horizontal adjustment seat 12 is adjusted, thereby achieving the horizontal adjustment of the horizontal adjustment seat 12; by setting three pillars 140 distributed in a triangle, with an adjusting member 141 installed on each pillar 140, the horizontality of the horizontal adjustment seat 12 can be ensured.

[0068] As an embodiment, the adjusting member 141 includes a stud 1410, and an adjusting threaded hole is opened at the end face of the second end of each pillar 140, and three third through holes are opened on the horizontal adjustment seat 12, and each third through hole corresponds to a stud 1410. The first end of the stud 1410 is installed in the adjusting threaded hole, and the second end of the stud 1410 passes through the third through hole and is locked and fixed on the horizontal adjustment seat 12 by a nut (not shown in the figure).

[0069] Specifically, each stud 1410 is matched with two nuts, and the two nuts are respectively locked on the upper and lower sides of the horizontal adjustment seat 12. By loosening each nut, the horizontal adjustment seat 12 is adjusted to a suitable height and adjusted to a horizontal state and then the nuts are locked. The adjustment of the horizontal degree of the horizontal adjustment seat 12 is completed, providing an adjustment member 141 with a simple structure, low cost and easy operation.

[0070] See also Figures 1 to 4 As shown, as an embodiment, an air inlet is provided on one side of the base 11 close to the horizontal adjustment seat 12, and an air distribution plate 40 is provided on one side of the base 11 close to the auxiliary furnace chamber 20. The air distribution plate 40 is located on the periphery of the second through hole 110, and a plurality of air outlets 400 are circumferentially opened on the air distribution plate 40. The air inlet is connected with the plurality of air outlets 400, and the protective gas introduced into the air inlet is blown into the auxiliary furnace chamber 20 along the circumferential direction through the plurality of air outlets 400.

[0071] Specifically, the air inlet is connected to a gas supply pipe 16, and the gas supply pipe 16 is connected to a gas source for supplying a protective gas; the protective gas is argon.

[0072] By arranging a gas distributor 40 at the periphery of the second through hole 110, the protective gas is uniformly delivered into the auxiliary furnace chamber 20 along the circumferential direction, so that the protective gas in the auxiliary furnace chamber 20 is evenly distributed, which is beneficial to ensuring the quality of crystal pulling.

[0073] The single crystal furnace balancing mechanism provided in this application has the following advantages:

[0074] 1) A cooling component is added to cool the heat rising from the auxiliary furnace chamber; the balancing mechanism and the pulling head mechanism are prevented from being in a high temperature environment for a long time, thereby extending the service life of the balancing mechanism and the pulling head mechanism and reducing the production cost.

[0075] 2) High integration, the compensator has the functions of connection, compensation and cooling, the overall structure is compact and occupies little space;

[0076] 3) Both the inner and outer tubes are made of metal bellows, which can not only ensure the heat conduction effect of the cooling component but also improve the cooling effect of the cooling component under the premise of achieving the compensation function;

[0077] 4) The overall structure of the adjustment component is simple, low cost and easy to operate.

[0078] In the second aspect, the present application also provides a single crystal furnace, see Figure 4 As shown, the single crystal furnace provided in the embodiment of the present application includes a base 50, a main furnace chamber 60, an auxiliary furnace chamber 20, a single crystal furnace adjustment and balancing mechanism 10 and a pulling head mechanism 30, wherein: the main furnace chamber 60 is arranged on the base 50, and the auxiliary furnace chamber 20 is arranged above the main furnace chamber 60; the single crystal furnace adjustment and balancing mechanism 10 is installed at the upper end of the auxiliary furnace chamber 20, and the single crystal furnace adjustment and balancing mechanism 10 is configured to adjust the horizontality of the installation of the pulling head mechanism 30, and the single crystal furnace adjustment and balancing mechanism 10 is also configured to cool the heat transferred from the auxiliary furnace chamber 20; the pulling head mechanism 30 is installed on the single crystal furnace adjustment and balancing mechanism 10, and the pulling head mechanism 30 is configured to pull and pull silicon rods.

[0079] The single crystal furnace adjusting and balancing mechanism 10 of the single crystal furnace proposed in the present application ensures the horizontality of the installation of the lifting head mechanism 30 by adjusting the horizontality of the installation of the lifting head mechanism 30, thereby ensuring that the traction rope of the lifting head mechanism 30 can normally lift the silicon rod vertically; at the same time, the single crystal furnace adjusting and balancing mechanism 10 can also cool the heat transferred from the auxiliary furnace chamber 20, thereby preventing the single crystal furnace adjusting and balancing mechanism 10 and the lifting head mechanism 30 from being in a high temperature environment for a long time, thereby extending the service life of the single crystal furnace adjusting and balancing mechanism 10 and the lifting head mechanism 30, and reducing the use cost of the single crystal furnace.

[0080] As an embodiment, the single crystal furnace also includes a column 70, a main furnace chamber moving mechanism 80 and an auxiliary furnace chamber moving mechanism 90, wherein: the column 70 is fixedly arranged on one side of the base 50, the main furnace chamber moving mechanism 80 is installed on the column 70, and the main furnace chamber moving mechanism 80 is configured to assist in disassembling and assembling the main furnace chamber 60; the auxiliary furnace chamber moving mechanism 90 is installed on the column 70, and the auxiliary furnace chamber moving mechanism 90 is configured to drive the auxiliary furnace chamber 20, the single crystal furnace adjustment and balancing mechanism 10 and the pulling head mechanism 30 to rotate or rise and fall together, or the auxiliary furnace chamber moving mechanism 90 is configured to drive the furnace cover 100, the rotary valve, the auxiliary furnace chamber 20, the single crystal furnace adjustment and balancing mechanism 10 and the pulling head mechanism 30 on the main furnace chamber 60 to rotate or rise and fall together.

[0081] Through the main furnace chamber moving mechanism 80, the main furnace chamber 60 can be automatically disassembled to facilitate cleaning of the main furnace chamber 60, saving manpower, with a high degree of automation, and improving the cleaning efficiency of the main furnace chamber 60. The main furnace chamber 60 can also be installed with the help of the main furnace chamber moving mechanism 80; through the auxiliary furnace chamber moving mechanism 90, the auxiliary furnace chamber 20, the single crystal furnace adjustment and balancing mechanism 10 and the pulling head mechanism 30 are rotated or lifted together, or the furnace cover 100, the rotary valve, the auxiliary furnace chamber 20, the single crystal furnace adjustment and balancing mechanism 10 and the pulling head mechanism 30 on the main furnace chamber 60 are rotated or lifted together; thereby realizing the automatic unloading of the drawn silicon rods and the automatic feeding of silicon materials, thereby improving the production efficiency of the single crystal furnace.

[0082] The working principle of the single crystal furnace proposed in this application is:

[0083] For the sake of convenience, the auxiliary furnace chamber 20, the single crystal furnace adjustment and balancing mechanism 10 and the pulling head mechanism 30 are regarded as component 1, and the furnace cover 100, the rotary valve, the auxiliary furnace chamber 20, the single crystal furnace adjustment and balancing mechanism 10 and the pulling head mechanism 30 on the main furnace chamber 60 are regarded as component 2. The furnace cover 100 on the main furnace chamber 60 is connected to the auxiliary furnace chamber 20 through the rotary valve.

[0084] There is silicon material in the crucible inside the main furnace chamber 60, and the pulling head mechanism 30 releases the traction rope downward, and the lower end of the traction rope is connected to the seed crystal. The traction rope moves downward to drive the seed crystal into the silicon material in the crucible, and the traction rope slowly pulls the seed crystal upward, so that the lower end of the seed crystal slowly grows until a silicon rod is formed. The silicon rod is inside the auxiliary furnace chamber 20, and the rotary valve is closed. The auxiliary furnace chamber moving mechanism 90 drives the assembly to rotate to one side, and the traction rope is released to release the silicon rod in the auxiliary furnace chamber 20 into the crystal retrieval vehicle, and then the traction rope is used to pull the feeding bucket into the auxiliary furnace chamber 20, and the auxiliary furnace chamber moving mechanism 90 is used to drive the assembly Component one returns to its original position, opens the rotary valve, and adds the silicon material in the feeding barrel into the crucible. The auxiliary furnace chamber moving mechanism 90 then drives component one to rotate to one side, releases the feeding barrel, and the auxiliary furnace chamber moving mechanism 90 drives component one back to its original position to continue drawing the second silicon rod. Repeat the above actions. When all silicon rods are drawn and need to be disassembled, the auxiliary furnace chamber moving mechanism 90 drives component two (wherein the last silicon rod is in the auxiliary furnace chamber 20) to rotate to one side, and the last silicon rod is placed on the crystal retrieval car. The main furnace chamber 60 is disassembled and cleaned using the main furnace chamber moving mechanism 80.

[0085] The rotary valve and the auxiliary furnace chamber 20 are generally connected via a locking ring assembly, which can automatically control the auxiliary furnace chamber 20 and the rotary valve to be fixedly connected or separated, so as to switch the rotating assembly one and the assembly two.

[0086] The above embodiments are only to illustrate the basic principles and characteristics of the present application. The present application is not limited by the above examples. Without departing from the spirit and scope of the present application, the present application may be subject to various changes and modifications, which are within the scope of the present application to be protected. The scope of protection claimed in the present application is defined by the attached claims and their equivalents.

Claims

1. A single crystal furnace balancing mechanism, characterized in that: The single crystal furnace balancing mechanism comprises a base, a horizontal adjustment seat, a connecting piece, an adjustment component and a cooling component, wherein: The base is fixedly mounted on the auxiliary furnace chamber; The horizontal adjustment seat is arranged above the base at intervals, and a lifting head mechanism is installed on the horizontal adjustment seat; The connecting piece has a cavity for the traction rope of the lifting head mechanism to pass through, the first end of the connecting piece is connected to the base, the cavity of the connecting piece is connected to the auxiliary furnace chamber, and the second end of the connecting piece is connected to the horizontal adjustment seat; The first end of the adjustment component is connected to the base, and the second end of the adjustment component is connected to the horizontal adjustment seat. The adjustment component is configured to adjust the horizontality of the horizontal adjustment seat to ensure the horizontality of the lifting head mechanism installation; The cooling assembly is configured to cool the heat transferred from the auxiliary furnace chamber in the cavity.

2. The single crystal furnace balancing mechanism according to claim 1, characterized in that: The connecting piece includes a compensator, a first through hole is opened at the center of the horizontal adjustment seat, a second through hole is opened at the center of the base, the second end of the compensator is connected to the first through hole, the first end of the compensator is connected to the second through hole, the traction rope of the lifting head mechanism passes through the cavity of the compensator and is introduced into the auxiliary furnace chamber, and the compensator is configured to compensate for the displacement of the horizontal adjustment seat when adjusting the horizontality.

3. The single crystal furnace balancing mechanism according to claim 2, characterized in that: The cooling component includes a cooling medium inlet pipe, a cooling medium outlet pipe and a cooling cavity. The compensator includes an inner tube and an outer tube. The outer tube is sleeved on the periphery of the inner tube. The cooling cavity is formed between the inner tube and the outer tube. The cooling medium inlet pipe and the cooling medium outlet pipe are arranged on the outer tube. The cooling medium inlet pipe and the cooling medium outlet pipe are connected to the cooling cavity. The cooling medium enters the cooling cavity from the cooling medium inlet pipe and flows out through the cooling medium outlet pipe.

4. The single crystal furnace balancing mechanism according to claim 3, characterized in that: The inner cylinder and the outer cylinder are both made of metal bellows.

5. The single crystal furnace balancing mechanism according to claim 1, characterized in that: The cooling assembly includes a cooling jacket, which is covered on the outer wall of the connecting piece. The cooling jacket has a cooling cavity inside. The cooling jacket is provided with a cooling medium inlet and a cooling medium outlet which are connected to the cooling cavity. The cooling medium enters the cooling cavity from the cooling medium inlet and flows out through the cooling medium outlet.

6. The single crystal furnace balancing mechanism according to claim 1, characterized in that: The adjustment component includes three pillars, which are distributed at three vertices of a triangle. The first end of each pillar is fixed to the base, and the second end of each pillar is liftably mounted with an adjustment member, which is detachably fixedly connected to the horizontal adjustment seat.

7. The single crystal furnace balancing mechanism according to claim 6, characterized in that: The adjusting member includes a stud, and an adjusting threaded hole is provided at the end face of the second end of each of the pillars. Three third through holes are provided on the horizontal adjustment seat, and each of the third through holes corresponds to a stud. The first end of the stud is installed in the adjusting threaded hole, and the second end of the stud passes through the third through hole and is fixed to the horizontal adjustment seat by a nut.

8. The single crystal furnace balancing mechanism according to claim 2, characterized in that: An air inlet is provided on one side of the base close to the horizontal adjustment seat, and an air distribution plate is provided on one side of the base close to the auxiliary furnace chamber. The air distribution plate is located on the periphery of the second through hole, and a plurality of air outlets are circumferentially provided on the air distribution plate. The air inlet is connected with the plurality of air outlets, and protective gas is introduced into the air inlet and blown into the auxiliary furnace chamber circumferentially through the plurality of air outlets.

9. A single crystal furnace, characterized in that: The single crystal furnace comprises a base, a main furnace chamber, an auxiliary furnace chamber, a single crystal furnace balancing mechanism and a lifting head mechanism as claimed in any one of claims 1 to 8, wherein: The main furnace chamber is arranged on the base, and the auxiliary furnace chamber is arranged above the main furnace chamber; The single crystal furnace balancing mechanism is installed at the upper end of the auxiliary furnace chamber, and the single crystal furnace balancing mechanism is configured to adjust the horizontality of the installation of the lifting head mechanism, and the single crystal furnace balancing mechanism is also configured to cool the heat transferred from the auxiliary furnace chamber; The pulling head mechanism is installed on the single crystal furnace balancing mechanism, and the pulling head mechanism is configured to pull and pull the silicon rod.

10. The single crystal furnace according to claim 9, characterized in that: The single crystal furnace further comprises a column, a main furnace chamber moving mechanism and an auxiliary furnace chamber moving mechanism, wherein: The column is fixedly arranged on one side of the base, the main furnace chamber moving mechanism is installed on the column, and the main furnace chamber moving mechanism is configured to assist in disassembling the main furnace chamber; The auxiliary furnace chamber moving mechanism is installed on the column, and the auxiliary furnace chamber moving mechanism is configured to drive the auxiliary furnace chamber, the single crystal furnace adjustment and balancing mechanism and the pulling head mechanism to rotate or lift together, or the auxiliary furnace chamber moving mechanism is configured to drive the furnace cover, the rotary valve, the auxiliary furnace chamber, the single crystal furnace adjustment and balancing mechanism and the pulling head mechanism on the main furnace chamber to rotate or lift together.

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