Precise ceramic surface roughness multi-angle detection equipment

Abstract

The utility model discloses precision ceramic surface roughness multi-angle detection equipment, which comprises an interferometer main body, an interference microscope and an objective table, the interference microscope and the objective table are arranged on the interferometer main body, the objective table is arranged at the top of a fixed seat arranged on the interferometer main body, a movable frame is arranged around the periphery of the objective table at the top of the fixed seat, and the movable frame is connected with the interferometer main body. The movable frame comprises a first movable frame body and a second movable frame body, the first movable frame body is hinged to the fixed base through a first adjusting piece arranged on the first movable frame body, and the second movable frame body is hinged to the first movable frame body through a second adjusting piece arranged on the second movable frame body and rotates at different angles. And the interference microscope is mounted on the second movable frame through a mounting seat arranged on the second movable frame and is arranged above the objective table.

Description

Technical Field

[0001] The utility model relates to the technical field of ceramic production and processing, in particular to a multi-angle detection device for the roughness of the surface of precision ceramics. Background Art

[0002] Precision ceramics are made of strictly controlled ingredients and specific processes without mechanical grinding, and have a smooth surface and tolerance dimensions that meet the requirements. Surface roughness testing is often required after the ceramic workpiece is processed. The purpose of surface roughness testing is to evaluate whether the actual roughness of the workpiece meets the design requirements through measurement. When testing surface roughness, the testing method and testing instrument or measuring tool must be reasonably selected based on the shape of the tested part, the required testing accuracy, the testing equipment, and the on-site conditions.

[0003] At present, the commonly used detection methods in production usually include comparison method, light section method, interference method and needle tracing method for surface roughness detection. In view of the characteristics of precision ceramic products, most precision ceramic parts usually have a small volume and have high requirements for surface roughness. Therefore, the interference method is usually used for surface roughness detection. The interference method for measuring surface roughness is a method that uses the principle of light wave interference to measure the microscopic geometric shape of the workpiece surface. This method uses an interference microscope to display the shape error of the measured surface as an interference fringe pattern, and uses a microscope with a high magnification to magnify the microscopic part of these interference fringes for measurement to obtain the roughness of the measured surface. Roughness has a higher measurement accuracy. The interferometer commonly used in the interference method is more sensitive to the measurement environment when measuring surface roughness. The interference microscope and the stage structure of the common interferometer are usually fixed structures. Therefore, a long time of adjustment is required in the early stage of measurement. In addition, although there are some movable stages, they can only be adjusted in a single direction when used with an interference microscope, which leads to this interferometer can only measure the horizontal part on the surface of the workpiece to be measured. For example, it is not convenient to adjust and measure the porous structure or irregular surface structure of precision ceramic parts, and there are certain limitations in its use. Utility Model Content

[0004] The utility model aims to provide a multi-angle detection device for the rough surface of precision ceramics, which can conveniently perform multi-angle position adjustment and measurement.

[0005] The technical solution adopted by the utility model to solve the above problems is:

[0006] A multi-angle detection device for the roughness of a precision ceramic surface comprises an interferometer body and an interference microscope and a stage arranged thereon, wherein the stage is placed on the top of a fixed seat arranged on the interferometer body, and a movable frame is arranged around the outer periphery of the stage on the top of the fixed seat, and the movable frame comprises a first movable frame and a second movable frame, wherein the first movable frame is hingedly arranged on the fixed seat via a first adjusting member arranged thereon, and the second movable frame is hingedly arranged on the first movable frame via a second adjusting member arranged thereon, and the interference microscope is mounted on the second movable frame via a mounting seat arranged on the second movable frame and is placed above the stage.

[0007] Further: the loading platform is rotatably arranged on the top of the fixing seat through a rotating shaft arranged inside the fixing seat.

[0008] Furthermore: one end of the rotating shaft arranged in the fixing seat is connected to the top stage thereof, and the other end thereof passes through the fixing seat and is connected to the third adjusting member arranged on the interferometer body connected to the bottom and is driven to rotate.

[0009] Further: the first adjusting member and the second adjusting member are respectively rotated by means of gear sets that are meshed with each other and arranged in different sizes and are rotatably arranged at the connection between the first movable frame and the second movable frame; the third adjusting member is rotatably arranged on the interferometer body, and is connected to the rotating shaft through the bottom of its fixed seat, and is rotated by means of the third adjusting member in the interferometer body and the gear sets that are meshed with each other and arranged in different sizes on the rotating shaft.

[0010] Furthermore: the interference microscope is installed on the second movable frame through a detachable structure of a snap-fit ​​piece provided on the mounting seat.

[0011] Furthermore: the interferometer body adopts an integrated structure, on which a human-machine interactive display screen is arranged. The human-machine interactive display screen is hingedly arranged on an adapter mounting frame arranged on the interferometer body and placed above the interference microscope.

[0012] Further: the mounting frame is slidably arranged on the interferometer body and is provided with a locking member.

[0013] Furthermore: a lamp group is also arranged on the mounting frame, and the lamp group is fixed on the mounting frame through an adaptable rotating seat arranged on the mounting frame.

[0014] Compared with the prior art, the utility model has the following advantages and effects:

[0015] The utility model is a multi-angle detection device for the roughness of a precision ceramic surface. The interference microscope placed above the stage and mounted on a second movable frame can be moved at different angles and orientations driven by the second movable frame and a first movable frame hinged thereunder. The interference microscope and stage structure of the interferometer are designed to perform multi-angle surface roughness detection for a specific shape structure of a workpiece to be measured placed on the stage, so that it is not affected by the porous structure or irregular surface structure of the part to be measured, and is convenient for adjustment at different angles and directions while reducing limitations in the use process. The accuracy and authenticity of the measurement results can be ensured while further improving flexibility and convenience in the use process, facilitating operation and further improving detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of a multi-angle detection device for the roughness of a precision ceramic surface according to an embodiment of the utility model.

[0017] Figure 2-4 It is a partial enlarged view of a multi-angle detection device for the roughness of a precision ceramic surface according to an embodiment of the utility model.

[0018] Figure numbers: interferometer body 100, first adjusting member 101, second adjusting member 102, third adjusting member 103, gear set 110, interference microscope 1, stage 2, fixed seat 3, rotating shaft 31, movable frame 4, first movable frame 41, second movable frame 42, mounting seat 421, snap member 4211, mounting frame 5, rotating seat 51, thermal machine interactive display screen 6, locking member 7, light group 8. DETAILED DESCRIPTION

[0019] The present invention will be further described in detail below with reference to the accompanying drawings and through examples. The following examples are provided to explain the present invention, but the present invention is not limited to the following examples.

[0020] See also Figure 1-3 The present embodiment relates to a multi-angle detection device for the roughness of a precision ceramic surface, comprising an interferometer body 100 and an interference microscope 1 and a stage 2 arranged thereon, wherein the stage 2 is placed on the top of a fixed seat 3 arranged on the interferometer body 100, and a movable frame 4 is arranged around the outer periphery of the stage 2 on the top of the fixed seat 3, and the movable frame 4 comprises a first movable frame 41 and a second movable frame 42, wherein the first movable frame 41 is hingedly arranged on the fixed seat 3 through a first adjusting member 101 arranged thereon, and the second movable frame 42 is hingedly arranged on the first movable frame 41 through a second adjusting member 102 arranged thereon and rotates at different angles, and the interference microscope 1 is mounted on the second movable frame 42 through a mounting seat 421 arranged on the second movable frame 42 and is placed above the stage 2.

[0021] Specifically in the present embodiment, when such detection equipment is used to measure the surface roughness, the precision ceramic workpiece to be measured can be placed on the stage 2 on top of the fixed seat 3. After the placement is completed, the first adjustment member 101 and the second adjustment member 102 provided on the first movable frame 41 and the second movable frame 42 can be rotated respectively. The interference microscope 1 placed above the stage 2 and mounted on the second movable frame 42 can be driven by the second movable frame 42 and the first movable frame 41 hinged thereunder to move at different angles and orientations. The design of the interference microscope 1 and the stage 2 structure of such an interferometer can perform multi-angle surface roughness detection for the specific shape structure of the workpiece to be measured placed on the stage 2, so as not to be affected by the porous structure or irregular surface structure of the part to be measured, facilitate adjustment at different angles and directions, and reduce the limitations in the use process, ensure the accuracy and authenticity of the measurement results, and further improve the flexibility and convenience in the use process, facilitate operation, and further improve the detection efficiency.

[0022] The stage 2 is rotatably arranged on the top of the fixing seat 3 via a rotating shaft 31 arranged inside the fixing seat 3. The stage 2 can be adaptively rotated on the top of the fixing seat 3 via a rotating shaft 31 arranged inside the fixing seat 3. During the measurement process, the rotating stage 2 and the workpiece to be measured placed on the stage 2 can be rotated synchronously, thereby further improving the adjustability of this detection equipment to meet different usage requirements. At the same time, it can avoid direct contact of the operator when adjusting the workpiece to be measured during the measurement process, which affects the surface roughness detection and the errors caused to the measurement data, and facilitates the operation adjustment while further improving the accuracy of the measurement data.

[0023] One end of the rotating shaft 31 provided in the fixed seat 3 is connected to the top stage 2 thereof, and the other end passes through the interior of the fixed seat 3 and is connected to and driven to rotate by a third adjusting member 103 provided on the interferometer body 100 connected to the bottom. By rotating the third adjusting member 103 provided on the interferometer body 100, the rotating shaft 31 and the stage 2 on the top of its fixed seat 3 can be driven to rotate, thereby facilitating operational adjustments.

[0024] The first adjusting member 101 and the second adjusting member 102 are respectively rotated by the gear sets 110 that mesh with each other and are arranged in different sizes and are rotatably arranged at the connection between the first movable frame 41 and the second movable frame 42. The third adjusting member 103 is rotatably arranged on the interferometer body 100 and is connected to the rotating shaft 31 through the bottom of the fixing seat 3. The third adjusting member 103 in the interferometer body 100 and the gear sets 110 that mesh with each other and are arranged in different sizes and are arranged in different sizes are rotated. Figure 3 and Figure 4As shown, the first adjusting member 101, the second adjusting member 102 and the third adjusting member 103 can respectively drive the first movable frame 41, the second movable frame 42 and the sample stage 2 on the top of the fixed seat 3 to rotate in an adaptive position through a gear set 110 that is meshed with each other and arranged in different sizes. The gear set 110 has a certain transmission stability and can further improve the adjustment accuracy of the first adjusting member 101, the second adjusting member 102 and the third adjusting member 103, thereby further shortening the adjustment time required for such detection equipment during detection, and the interference microscope 1 can remain stationary after the position adjustment is completed during the measurement process, reducing the position deviation of the interference microscope 1 due to external factors, thereby ensuring the accuracy of the measurement.

[0025] The interference microscope 1 is mounted on the second movable frame 42 through a detachable structure of a fastener 4211 provided on the mounting seat 421. Figure 2 As shown in the figure, the detachable structure of the fastener 4211 facilitates the installation and disassembly of the interference microscope 1, and is convenient for daily inspection, cleaning, and later maintenance or replacement and other operational needs. At the same time, the adaptation structure of the mounting seat 421 and the fastener 4211 on the second movable frame 42 can be adapted and fixed according to the specific size of the interference microscope 1, further improving the applicability of this detection equipment.

[0026] The interferometer body 100 is arranged in an all-in-one structure, on which a human-machine interactive display screen is arranged. The human-machine interactive display screen is hingedly arranged on the adapter mounting frame 5 arranged on the interferometer body 100 and is placed above the interference microscope 1. The interferometer arranged in an all-in-one structure can observe and process specific measurement data or equipment status and other contents in the measurement process through the human-machine interactive display screen. At the same time, the human-machine interactive display screen hingedly arranged on the mounting frame 5 can be rotated at an appropriate angle according to the height of the specific operator, so as to facilitate operation and observation. The interferometer arranged in this all-in-one structure can be conveniently moved and adjusted to different positions, thereby improving convenience and flexibility during use. It can be placed in the best position according to specific measurement conditions and measurement environment to reduce unnecessary influence of the external environment on the measurement process and provide the best measurement effect and accurate measurement data.

[0027] The mounting frame 5 is slidably arranged on the interferometer body 100 and is provided with a locking piece 7. The slidably arranged mounting frame 5 can be adjusted to a certain height and can be locked by rotating the locking piece 7 on the interferometer body 100. The human-computer interaction display screen on the mounting frame 5 can be adjusted to a certain height and it is also convenient for the installation, disassembly, inspection and replacement of the interference microscope 1 on the second movable frame 42 below.

[0028] A lamp group 8 is also provided on the mounting frame 5, and the lamp group 8 is fixed on the mounting frame 5 by an adaptor rotating seat 51 provided on the mounting frame 5. The lamp group 8 can play a certain fill-in light effect on the workpiece to be measured placed on the stage 2 according to the specific measurement environment and use requirements, meet different use environments and use requirements, and facilitate the interference microscope 1 to be adjusted to the best measurement position. In addition, the lamp group 8 installed on the rotating seat 51 has a damping shaft 31 structure adopted in the rotating seat 51, which enables the lamp group 8 to rotate at a certain angle, which is convenient for adjusting the irradiation light source and also convenient for the installation and disassembly of the lamp group 8, thereby improving the flexibility during use.

[0029] The above contents described in this specification are merely examples of the present utility model. Those skilled in the art of the present utility model may make various modifications or additions to the specific embodiments described, or replace them in similar ways, as long as they do not deviate from the contents of the present utility model specification or exceed the scope defined in the claims, they shall all fall within the protection scope of the present utility model.

Claims

1. A precision ceramic surface roughness multi-angle detection device, comprising an interferometer body and an interference microscope and a stage arranged thereon, characterized in that: The stage is placed on the top of a fixed seat provided on the interferometer body, a movable frame is provided around the outer periphery of the stage on the top of the fixed seat, the movable frame includes a first movable frame and a second movable frame, the first movable frame is hingedly provided on the fixed seat via a first adjusting member provided thereon, the second movable frame is hingedly provided on the first movable frame via a second adjusting member provided thereon and can rotate at different angles, the interference microscope is mounted on the second movable frame via a mounting seat provided on the second movable frame and is placed above the stage.

2. The multi-angle detection device for rough surface of precision ceramics according to claim 1, characterized in that: The loading platform is rotatably arranged on the top of the fixing seat through a rotating shaft arranged inside the fixing seat.

3. The multi-angle detection device for rough surface of precision ceramics according to claim 2, characterized in that: One end of the rotating shaft arranged in the fixing seat is connected to the top stage thereof, and the other end thereof passes through the fixing seat and is connected to the bottom thereof, and is connected to and driven to rotate by a third adjusting member arranged on the interferometer body.

4. The multi-angle detection device for rough surface of precision ceramics according to claim 3 is characterized by: The first adjusting member and the second adjusting member are respectively rotated by means of gear sets that are meshed with each other and arranged in different sizes and are rotatably arranged at the connection between the first movable frame and the second movable frame; the third adjusting member is rotatably arranged on the interferometer body and is connected to the rotating shaft through the bottom of the fixed seat, and is rotated by means of the third adjusting member in the interferometer body and the gear sets that are meshed with each other and arranged in different sizes on the rotating shaft.

5. The multi-angle detection device for rough surface of precision ceramics according to claim 1, characterized in that: The interference microscope is installed on the second movable frame through a detachable structure of a snap-fit ​​piece arranged on the mounting seat.

6. The multi-angle detection device for rough surface of precision ceramics according to claim 1, characterized in that: The interferometer body adopts an integrated structure, on which a human-machine interactive display screen is arranged. The human-machine interactive display screen is hingedly arranged on an adaptor mounting frame arranged on the interferometer body and is placed above the interference microscope.

7. The multi-angle detection device for rough surface of precision ceramics according to claim 6, characterized in that: The mounting frame is slidably arranged on the interferometer body and is provided with a locking piece.

8. The multi-angle detection device for rough surface of precision ceramics according to claim 6, characterized in that: The mounting frame is also provided with a lamp group, and the lamp group is fixed on the mounting frame through an adaptable rotating seat provided on the mounting frame.

Images