Single crystal silicon rod defect detection device

Abstract

The utility model relates to a single crystal silicon rod defect detection device which comprises a water tank, a clamping and rotating assembly arranged in the water tank and used for clamping and rotating a single crystal silicon rod, an ultrasonic probe used for detecting internal defects of the single crystal silicon rod, and a probe moving unit for driving the ultrasonic probe to move, and the clamping and rotating assembly comprises two moving parts which are clamped at the two ends of the silicon single crystal rod. The single crystal silicon rod defect detection device provided by the utility model has the advantages of simple structure, convenience in operation, high detection precision, comprehensive detection and the like, and can effectively improve the detection efficiency and quality of the single crystal silicon rod.

Description

Technical Field

[0001] The utility model relates to the field of single crystal silicon rods, and in particular to a single crystal silicon rod defect detection device. Background Art

[0002] Existing single crystal silicon rod defect detection methods are usually based on CCD visual defect detection and infrared sensing technology. However, these methods have some challenges when detecting internal defects of single crystal silicon rods with larger diameters. Due to the complex internal structure of large-diameter single crystal silicon rods, traditional detection methods often have difficulty in accurately identifying and locating defects. These methods may also be affected by environmental factors such as temperature and humidity, which will affect the accuracy and reliability of the detection results and need to be improved urgently. Utility Model Content

[0003] In view of this, the utility model provides a single crystal silicon rod defect detection device, which has the advantages of simple structure, convenient operation, high detection accuracy, comprehensive detection, etc., and can effectively improve the detection efficiency and quality of single crystal silicon rods.

[0004] The purpose of the utility model is achieved through the following technical solutions:

[0005] A single crystal silicon rod defect detection device comprises a water tank, a clamping and rotating assembly arranged in the water tank and used to clamp and rotate the single crystal silicon rod, an ultrasonic probe for detecting internal defects of the single crystal silicon rod, and a probe moving unit for driving the ultrasonic probe to move, wherein the clamping and rotating assembly comprises two moving parts clamped at both ends of the single crystal silicon rod.

[0006] This single crystal silicon rod defect detection device has the advantages of simple structure, convenient operation, high detection accuracy, and comprehensive detection, which can effectively improve the detection efficiency and quality of single crystal silicon rods. First, its structure is simple and easy to operate, and it can quickly detect single crystal silicon rods. Secondly, the device uses an ultrasonic probe for detection, which can effectively detect defects such as cracks and voids inside the single crystal silicon rod with high detection accuracy. In addition, the device can rotate the single crystal silicon rod, and the ultrasonic probe can move along the single crystal silicon rod, which can perform a comprehensive detection of the single crystal silicon rod without leaving any dead angles. Finally, the device uses a clamping and rotating assembly, which can stably clamp and rotate the single crystal silicon rod to ensure the stability and accuracy of the detection.

[0007] During the inspection, one of the two moving parts clamps one end of the single crystal silicon rod, and the clamping rotating assembly drives the single crystal silicon rod to rotate 360 ​​degrees. During this process, the ultrasonic probe is used to perform inspection operations. After that, the ultrasonic probe moves 100 mm axially along the single crystal silicon rod, and the single crystal silicon rod rotates again. The ultrasonic probe starts the inspection operation synchronously until the ultrasonic probe scans the unclamped part of the clamping rotating assembly; then the moving part is released and moves away from the single crystal silicon rod, and the single crystal silicon rod is clamped by another moving part, and the remaining part of the single crystal silicon rod is inspected in the same way, thereby completing the inspection of the entire single crystal silicon rod.

[0008] Preferably, the moving part includes a seat body, a pressing clamping unit installed on the seat body, and a rotating sleeve driven to rise and fall by the pressing clamping unit.

[0009] The design of the moving part includes the base, the clamping unit, the rotating sleeve and other parts, making the process of clamping and rotating the single crystal silicon rod more stable and accurate. The clamping unit can accurately control the clamping force to ensure that the single crystal silicon rod will not slide or move during the inspection process.

[0010] Preferably, the rotating sleeve includes a rotating frame driven to rise and fall by a downward pressing clamping unit, a rotating power unit installed on the rotating frame, an active roller driven to rotate by the rotating power unit, and a transmission belt that transmits power from the rotating power unit to the active roller.

[0011] The active roller is driven to rotate by a rotating power unit, thereby realizing the rotation of the single crystal silicon rod.

[0012] Preferably, there are two active rollers, an auxiliary roller is provided between the two active rollers, and the transmission belt is sequentially connected to the rotary power unit, one of the two active rollers, the auxiliary roller, and the other of the two active rollers.

[0013] There are two active rollers, which are evenly distributed on both sides of the auxiliary roller, which further improves the accuracy and efficiency of detection. The rotation of the two active rollers can cover a larger area, thereby driving the single crystal silicon rod to rotate more stably and making the rotation of the single crystal silicon rod smoother.

[0014] Preferably, the clamping and rotating assembly further comprises a plurality of fixing parts, wherein the fixing parts comprise a fixing seat mounted on the bottom of the water tank, and a driven roller rotatably connected to the fixing seat.

[0015] The design of the fixing part includes a fixing seat and a driven roller. This structure can effectively improve the stability and accuracy of the device. The fixing seat is installed on the guide rail to ensure the stability and guidance of the entire device. The driven roller is rotatably connected to the fixing seat and can rotate with the rotation of the single crystal silicon rod, thereby ensuring the stable rotation of the single crystal silicon rod during the detection process.

[0016] Preferably, the clamping and rotating assembly further comprises a guide rail mounted on the water tank or the fixed seat, and the seat body slides along the guide rail.

[0017] The design of the guide rail enables the seat to slide along the guide rail, which increases the flexibility and adaptability of the device. Regardless of the length of the single crystal silicon rod, the position of the seat can be adjusted to accommodate single crystal silicon rods of different lengths.

[0018] Preferably, the fixing seat is provided with an arc-shaped groove, and each of the fixing seats is provided with a plurality of driven rollers, and the plurality of driven rollers are symmetrically distributed on both sides of the arc-shaped groove.

[0019] Each fixed seat is provided with an arc-shaped groove, the shape of which matches the shape of the single crystal silicon rod. The single crystal silicon rod is placed in the arc-shaped groove, and a number of driven rollers are arranged in each groove to further improve the stability and accuracy of the device. A number of driven rollers are symmetrically distributed on both sides of the arc-shaped groove to balance the torque generated by the rotation of the active roller, thereby preventing the single crystal silicon rod from deflecting or shaking during the detection process.

[0020] Preferably, the plurality of fixing portions are equidistantly distributed along the guide rail, and the position of the fixing seat on the guide rail is adjustable.

[0021] Multiple fixing parts are equidistantly distributed along the guide rail direction, which makes the force on each part of the single crystal silicon rod more uniform, and the single crystal silicon rod rotates more smoothly. The position of the fixing seat on the guide rail can be adjusted according to actual needs. By adjusting the position of the fixing part, it can adapt to single crystal silicon rods of different lengths, thereby improving the adaptability and convenience of the device.

[0022] Preferably, the probe moving unit drives the ultrasonic probe to perform a linear reciprocating motion along the length direction of the single crystal silicon rod.

[0023] The design of the probe moving unit enables the ultrasonic probe to move back and forth in a straight line along the length of the single crystal silicon rod, ensuring that the ultrasonic probe will not miss any possible defects during the detection process. At the same time, the precise control of the probe moving unit can also improve the accuracy and consistency of detection.

[0024] Preferably, a spray device is also provided next to the probe moving unit, and the spray device sprays the single crystal silicon rod.

[0025] Ultrasonic testing requires water as the medium for testing. This device performs ultrasonic testing in two ways:

[0026] Water is poured into the water tank, and the single crystal silicon rod is placed in the water tank; the ultrasonic probe is designed to extend into the water tank, which can effectively reduce the impact of external environmental factors on the test results, such as vibration or temperature changes in the air. In addition, the water in the water tank can also play a certain protective role, which can reduce the damage of the single crystal silicon rod during the test process.

[0027] A spray device is arranged next to the probe moving unit to spray the surface of the single crystal silicon rod, thereby realizing ultrasonic detection operation of the single crystal silicon rod.

[0028] Compared with the prior art, the utility model has the following beneficial effects:

[0029] The single crystal silicon rod defect detection device of the utility model has the advantages of simple structure, convenient operation, high detection accuracy, and comprehensive detection, and can effectively improve the detection efficiency and quality of single crystal silicon rods. First, its structure is simple, easy to operate, and can quickly detect single crystal silicon rods. Secondly, the device uses an ultrasonic probe for detection, which can effectively detect defects such as cracks and voids inside the single crystal silicon rod with high detection accuracy. In addition, the device can rotate the single crystal silicon rod, and the ultrasonic probe can move along the single crystal silicon rod, so that the single crystal silicon rod can be comprehensively detected without leaving blind spots. Finally, the device uses a clamping and rotating assembly, which can stably clamp and rotate the single crystal silicon rod to ensure the stability and accuracy of the detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0031] Figure 1 This is an operating status diagram of a single crystal silicon rod defect detection device according to an embodiment of the utility model.

[0032] Figure 2 This is a structural diagram of a moving part according to an embodiment of the present utility model.

[0033] Figure 3 This is a structural diagram of a single crystal silicon rod defect detection device according to an embodiment of the present utility model.

[0034] Figure 4 for Figure 3 Magnified view of area A.

[0035] Description of Figure Numbers:

[0036] Single crystal silicon rod 001.

[0037] Sink 100.

[0038] Clamping rotating assembly 200 , guide rail 210 , fixing portion 220 , fixing seat 221 , driven roller 222 , arc-shaped groove 223 .

[0039] Ultrasonic probe 300 , probe moving unit 310 .

[0040] The moving part 400 , the seat body 410 , the pressing clamping unit 420 , the rotating sleeve 430 , the rotating frame 431 , the rotating power unit 432 , the driving roller 433 , the transmission belt 434 , and the auxiliary roller 435 . DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0043] It should be noted that similar numbers and letters represent similar items in the following figures, so once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. In the description of the embodiments of the present application, it should be understood that the orientation or position relationship indicated by the terms "upper", "lower", "left", "right", "vertical", "horizontal", etc. is based on the orientation or position relationship shown in the drawings, or the orientation or position relationship in which the application product is usually placed when in use, or the orientation or position relationship commonly understood by those skilled in the art, which is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0044] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application may be combined with each other.

[0045] The technical solution in this application will be described below in conjunction with the accompanying drawings.

[0046] The present embodiment provides a single crystal silicon rod defect detection device, including a water tank 100, a clamping and rotating assembly 200 arranged in the water tank 100 and used to clamp and rotate the single crystal silicon rod 001, an ultrasonic probe 300 for detecting internal defects of the single crystal silicon rod, and a probe moving unit 310 for driving the ultrasonic probe 300 to move. The clamping and rotating assembly 200 includes two moving parts 400 clamped at both ends of the single crystal silicon rod.

[0047] This single crystal silicon rod defect detection device has the advantages of simple structure, convenient operation, high detection accuracy, and comprehensive detection, which can effectively improve the detection efficiency and quality of single crystal silicon rods. First, its structure is simple, easy to operate, and can quickly detect single crystal silicon rods. Secondly, the device uses an ultrasonic probe 300 for detection, which can effectively detect defects such as cracks and voids inside the single crystal silicon rod with high detection accuracy. In addition, the device can rotate the single crystal silicon rod, and the ultrasonic probe can move along the single crystal silicon rod, which can perform a comprehensive detection of the single crystal silicon rod without leaving any dead angles. Finally, the device uses a clamping and rotating assembly 200, which can stably clamp and rotate the single crystal silicon rod to ensure the stability and accuracy of the detection.

[0048] During the inspection, one of the two moving parts 400 clamps one side end of the single crystal silicon rod, and the clamping rotating assembly 200 drives the single crystal silicon rod to rotate 360 ​​degrees. During this process, the ultrasonic probe 300 performs the inspection operation. Thereafter, the ultrasonic probe 300 moves 100 mm axially along the single crystal silicon rod, and the single crystal silicon rod rotates again. The ultrasonic probe 300 starts the inspection operation synchronously until the ultrasonic probe 300 scans the unclamped part of the clamping rotating assembly 200; then the moving part 400 is released and moves away from the single crystal silicon rod, and the single crystal silicon rod is clamped by another moving part 400, and the remaining part of the single crystal silicon rod is inspected in the same way, thereby completing the inspection of the entire single crystal silicon rod.

[0049] In this embodiment, the moving part 400 includes a base body 410 , a pressing clamping unit 420 installed on the base body 410 , and a rotating sleeve 430 driven to rise and fall by the pressing clamping unit 420 .

[0050] The design of the moving part 400 includes a base 410, a pressing clamping unit 420, a rotating sleeve 430 and other components, so that the process of clamping and rotating the single crystal silicon rod is more stable and accurate. The pressing clamping unit 420 can accurately control the clamping force to ensure that the single crystal silicon rod does not slide or move during the inspection process.

[0051] In this embodiment, the rotating sleeve 430 includes a rotating frame 431 driven to rise and fall by the pressing clamping unit 420, a rotating power unit 432 installed on the rotating frame 431, an active roller 433 driven to rotate by the rotating power unit 432, and a transmission belt 434 that transmits power from the rotating power unit 432 to the active roller 433.

[0052] The active roller 433 is driven to rotate by the rotating power unit 432, thereby realizing the rotation of the single crystal silicon rod.

[0053] In this embodiment, there are two active rollers 433, and an auxiliary roller 435 is provided between the two active rollers 433. The transmission belt 434 is connected end to end to the rotating power unit, one of the two active rollers, the auxiliary roller 435, and the other of the two active rollers.

[0054] There are two active rollers 433, which are evenly distributed on both sides of the auxiliary roller 435, which further improves the accuracy and efficiency of the detection. The rotation of the two active rollers 433 can cover a larger area, thereby being able to drive the single crystal silicon rod to rotate more stably and making the rotation of the single crystal silicon rod smoother.

[0055] In this embodiment, the clamping and rotating assembly 200 further includes a guide rail 210 installed at the bottom of the water tank 100 , and the seat body 410 slides along the guide rail 210 .

[0056] The design of the guide rail 210 enables the seat body 410 to slide along the guide rail 210, which increases the flexibility and adaptability of the device. Regardless of the length of the single crystal silicon rod, the position of the seat body 410 can be adjusted to accommodate single crystal silicon rods of different lengths.

[0057] In this embodiment, the clamping rotating assembly 200 further includes a plurality of fixing parts 220 . The fixing parts 220 include a fixing seat 221 installed on the guide rail 210 , and a driven roller 222 rotatably connected to the fixing seat 221 .

[0058] The design of the fixing part 220 includes a fixing seat 221 and a driven roller 222. This structure can effectively improve the stability and accuracy of the device. The fixing seat 221 is installed on the guide rail 210 to ensure the stability and guidance of the entire device. The driven roller 222 is rotatably connected to the fixing seat 221 and can rotate with the rotation of the single crystal silicon rod, thereby ensuring the stable rotation of the single crystal silicon rod during the detection process.

[0059] In this embodiment, the fixing seat 221 is provided with an arc-shaped groove 223 , and each fixing seat 221 is provided with a plurality of driven rollers 222 , and the plurality of driven rollers 222 are symmetrically distributed on both sides of the arc-shaped groove 223 .

[0060] Each fixing seat 221 is provided with an arc-shaped groove 223, the shape of which matches the shape of the single crystal silicon rod. The single crystal silicon rod is placed in the arc-shaped groove 223, and each groove is provided with two or more driven rollers 222, which further improves the stability and accuracy of the device. A plurality of driven rollers 222 are symmetrically distributed on both sides of the arc-shaped groove 223, which can balance the torque generated by the rotation of the active roller 433, thereby preventing the single crystal silicon rod from deviating or shaking during the detection process.

[0061] In this embodiment, the plurality of fixing portions 220 are equidistantly distributed along the guide rail 210 , and the position of the fixing seat on the guide rail is adjustable.

[0062] Multiple fixing parts 220 are equidistantly distributed along the guide rail 210, which makes the force on each part of the single crystal silicon rod more uniform, and the single crystal silicon rod rotates more smoothly. The position of the fixing seat on the guide rail can be adjusted according to actual needs. By adjusting the position of the fixing part 220, it can adapt to single crystal silicon rods of different lengths, thereby improving the adaptability and convenience of the device.

[0063] In this embodiment, the probe moving unit 310 drives the ultrasonic probe 300 to perform a linear reciprocating motion along the length direction of the single crystal silicon rod.

[0064] The design of the probe moving unit 310 enables the ultrasonic probe 300 to move back and forth in a straight line along the length direction of the single crystal silicon rod, which can ensure that the ultrasonic probe 300 will not miss any possible defects during the detection process. At the same time, the precise control of the probe moving unit 310 can also improve the accuracy and consistency of the detection.

[0065] In this embodiment, a spray device is further provided next to the probe moving unit, and the spray device sprays the single crystal silicon rod.

[0066] Ultrasonic testing requires water as the medium for testing. This device performs ultrasonic testing in two ways:

[0067] 1. Water is poured into the water tank, and the single crystal silicon rod is placed in the water tank; the ultrasonic probe is designed to extend into the water tank, which can effectively reduce the impact of external environmental factors on the test results, such as vibration or temperature changes in the air. In addition, the water in the water tank can also play a certain protective role, which can reduce the damage of the single crystal silicon rod during the test process.

[0068] 2. A spray device is arranged next to the probe moving unit to spray the surface of the single crystal silicon rod, thereby realizing ultrasonic detection of the single crystal silicon rod.

[0069] The process of using a spray device to perform ultrasonic testing on single crystal silicon rods is as follows: As the positioning of the single crystal silicon rod is completed, the spray device starts working; high-pressure water is sprayed evenly and continuously on the surface of the silicon rod through the nozzle, and the tiny particles in the water can also remove impurities and dust on the surface; while spraying, the ultrasonic probe emits high-frequency sound waves, which are acted on the surface of the single crystal silicon rod by the water flow and reflected back. The probe receives the reflected sound waves and converts them into electrical signals for analysis.

[0070] The received ultrasonic signal is amplified, filtered and analyzed by a special processing unit. By comparing it with the preset standard or reference data, the system can determine whether the monocrystalline silicon rod has defects, cracks or other abnormalities. The processed data is finally presented in the form of graphics or numbers on the operation interface, providing the operator with intuitive test results, based on which the operator can quickly determine the quality status of the monocrystalline silicon rod.

[0071] After the test is completed, the spray device automatically stops working and returns to the initial position together with the ultrasonic probe, ready for the next test.

[0072] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A single crystal silicon rod defect detection device, characterized in that: It includes a water tank, a clamping and rotating assembly arranged in the water tank and used for clamping and rotating a single crystal silicon rod, an ultrasonic probe for detecting internal defects of the single crystal silicon rod, and a probe moving unit for driving the ultrasonic probe to move. The clamping and rotating assembly includes two moving parts clamped at both ends of the single crystal silicon rod.

2. The single crystal silicon rod defect detection device according to claim 1, characterized in that: The moving part comprises a seat body, a pressing clamping unit installed on the seat body, and a rotating sleeve driven to rise and fall by the pressing clamping unit.

3. The single crystal silicon rod defect detection device according to claim 2, characterized in that: The rotating sleeve comprises a rotating frame driven to rise and fall by a pressing clamping unit, a rotating power unit installed on the rotating frame, an active roller driven to rotate by the rotating power unit, and a driving belt for transmitting power from the rotating power unit to the active roller.

4. The single crystal silicon rod defect detection device according to claim 3, characterized in that: There are two active rollers, and an auxiliary roller is arranged between the two active rollers.

5. The single crystal silicon rod defect detection device according to claim 2, characterized in that: The clamping and rotating assembly further comprises a plurality of fixing parts, wherein the fixing parts comprise a fixing seat installed at the bottom of the water tank, and a driven roller rotatably connected to the fixing seat.

6. The single crystal silicon rod defect detection device according to claim 5, characterized in that: The clamping and rotating assembly also includes a guide rail installed on the water tank or the fixed seat, and the seat body slides along the guide rail.

7. The single crystal silicon rod defect detection device according to claim 5, characterized in that: The fixing seat is provided with an arc-shaped groove, and each fixing seat is provided with a plurality of driven rollers, which are symmetrically distributed on both sides of the arc-shaped groove.

8. The single crystal silicon rod defect detection device according to claim 5, characterized in that: The plurality of fixing parts are equidistantly distributed along the guide rail, and the position of the fixing seat on the guide rail is adjustable.

9. The single crystal silicon rod defect detection device according to claim 1, characterized in that: The probe moving unit drives the ultrasonic probe to perform a linear reciprocating motion along the length direction of the single crystal silicon rod.

10. The single crystal silicon rod defect detection device according to claim 1, characterized in that: A spray device is also provided beside the probe moving unit, and the spray device sprays the single crystal silicon rod.

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