Driving module, Fourier filtering device and optical detection equipment

Abstract

The utility model belongs to the technical field of optical equipment, and particularly relates to a driving module, a Fourier filtering device and optical detection equipment. The Fourier filtering device comprises a plurality of light barriers and a driving module, the driving module comprises a linear motion module and a plug-in structure, and the plug-in structure is connected to the linear motion module and is arranged to linearly move along a first direction under the driving of the linear motion module; the inserting structure is used for inserting the light barriers so that the light barriers can linearly move in the first direction along with the inserting structure. Each light barrier is provided with an interface to be connected with the corresponding plug-in structure in a matched mode, when the plug-in structure is connected with the corresponding light barrier, the corresponding light barrier can be driven to move in the first direction, in this way, the multi-split driving scheme is achieved through the plug-in structures, the number of driving function modules is reduced, space is saved, and cost is relatively low.

Description

Technical Field

[0001] The present application belongs to the technical field of optical equipment, and in particular, relates to a driving module, a Fourier filter device and an optical detection device. Background Art

[0002] Fourier filter is a commonly used device in the field of optics and is widely used in optical defect detection, optical communication, imaging systems, optical sensors, etc. Fourier filter uses the Fourier transform principle to analyze, filter and enhance optical signals to meet different application requirements.

[0003] In optical defect detection applications, multiple sets of light shields are required to achieve complex Fourier filtering operations. Currently, multiple sets of light shields are generally driven by multiple servo motors to coordinate actions, that is, a multi-drag driving solution, which will result in a large device size and high cost. Utility Model Content

[0004] The present application provides a driving module, a Fourier filter device and an optical detection device to solve the technical problem that the existing Fourier filter device adopts a multi-drive-multi driving solution, resulting in large size and high cost.

[0005] According to one aspect of the present application, a driving module is provided, including a linear motion module and a plug-in structure, wherein the plug-in structure is connected to the linear motion module and is configured to move linearly along a first direction under the drive of the linear motion module; the plug-in structure is used to plug in multiple light shielding plates so that each light shielding plate can move linearly in the first direction with the plug-in structure.

[0006] In an optional solution of the present application, the plug-in structure includes a plurality of telescopic rod mechanisms, each of which is used to plug in a corresponding light-blocking plate; the plurality of telescopic rod mechanisms are staggered in a third direction, and the third direction is perpendicular to the first direction.

[0007] In an optional solution of the present application, the plurality of telescopic rod mechanisms form at least one telescopic rod mechanism column, and the plurality of telescopic rod mechanisms in each telescopic rod mechanism column are arranged side by side along the third direction.

[0008] In an optional solution of the present application, there are multiple telescopic rod mechanism columns, and the multiple telescopic rod mechanism columns are arranged side by side in the first direction; and the telescopic rod mechanisms in the multiple telescopic rod mechanism columns are staggered in the third direction.

[0009] In an optional solution of the present application, each telescopic rod mechanism can switch between an extended state and a retracted state and includes a telescopic rod, which can be extended and retracted along a second direction; in the extended state, the telescopic rod is plugged into the light blocking plate; in the retracted state, the telescopic rod is disconnected from the light blocking plate; the second direction is perpendicular to the plane defined by the first direction and the third direction.

[0010] In an optional solution of the present application, the linear motion module includes a driving member, a movable block and a driving rod; the driving rod is arranged to extend along a first direction, and the driving member is used to drive the driving rod to rotate; the plug-in structure is arranged on the movable block, the movable block is movably connected to the driving rod and is arranged to drive the plug-in structure to move linearly along the first direction under the rotation of the driving rod.

[0011] In an optional solution of the present application, the linear motion module further includes a guide rod, which is parallel to the driving rod and passes through the movable block.

[0012] In an optional solution of the present application, the linear motion module also includes a first mounting plate and a second mounting plate; the driving member is arranged on the first mounting plate, and the two ends of the guide rod are respectively connected to the first mounting plate and the second mounting plate; one end of the driving rod passes through the first mounting plate to be connected to the driving member, and the other end of the driving rod is rotatably connected to the second mounting plate.

[0013] According to another aspect of the present application, a Fourier filter device is provided, comprising a plurality of light shielding plates and the above-mentioned driving module; each light shielding plate is provided with an interface for connecting with a plug-in structure.

[0014] According to another aspect of the present application, an optical detection device is provided, characterized in that it includes the above-mentioned Fourier filter device.

[0015] In summary, the driving module, Fourier filter device and optical detection equipment provided by the present application have at least the following features:

[0016] Beneficial effects:

[0017] The Fourier filter device comprises a driving module and a plurality of light shielding plates. The driving module comprises a linear motion module and a plug-in structure. The plug-in structure can move along a first direction under the action of the linear motion module.

[0018] Each light blocking plate is provided with an interface to cooperate with the plug-in structure. When the plug-in structure and the corresponding light blocking plate are in a connected state, the corresponding light blocking plate can be driven to move in the first direction. In this way, a one-to-many driving solution is realized through the plug-in structure, the number of driving functional modules is reduced, space is saved, and the cost is relatively low. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific implementation or the prior art description. Obviously, the drawings described below are some implementations of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1A schematic diagram of a driving module provided according to one embodiment of the present application;

[0021] Figure 2 for Figure 1 A schematic diagram of the drive module in another perspective;

[0022] Figure 3 for Figure 1 Schematic diagram of the drive module in another perspective.

[0023] The reference numerals are as follows:

[0024] 100. Drive module;

[0025] 110. Linear motion module; 111. Driving member; 112. Movable block; 113. Driving rod; 114. Guide rod; 115. First mounting plate; 116. Second mounting plate; 117. Rotating bearing.

[0026] 120. plug-in structure; 121. telescopic rod mechanism; 1211. telescopic rod;

[0027] L, telescopic rod mechanism array; L1, first telescopic rod mechanism array; L2, second telescopic rod mechanism array. DETAILED DESCRIPTION

[0028] In the description of the present application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like appear to indicate the orientation or position relationship, unless otherwise specified, they are understood to be based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application.

[0029] In addition, if there is a feature defined as "first" or "second", it is only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Features defined as "first" or "second" may explicitly or implicitly include at least one of the defined features. If there is a description of "plurality", the general meaning is to include at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0030] In this application, unless otherwise clearly specified and limited, the terms such as "installed", "connected", "connected", "fixed" and so on should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection, it can be a direct connection, or it can be an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0031] In the description of this specification, if the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" appear, it means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0032] A Fourier filter is a signal processing device that can be applied to optical defect detection, such as wafer defect detection. During the imaging process, noise in the image is removed or certain features in the image are enhanced to improve the clarity of the image.

[0033] The Fourier filter device includes a light blocking structure, through which light signals within a specific frequency range can be selectively blocked or transmitted, thereby controlling the frequency components of the output signal.

[0034] In the existing Fourier filter device, the light blocking structure includes a plurality of light blocking plates, and the plurality of light blocking plates in the light blocking structure are driven and coordinated by a plurality of linear motion modules. In other words, the existing Fourier filter device adopts a multi-drive-multi-drive solution.

[0035] In order to ensure the matching accuracy of each light baffle, a servo motor is generally used as a power source in the linear motion module. The cost of the servo motor is relatively high, and multiple linear motion modules occupy a large space, resulting in a large size and high cost of the entire Fourier filter device.

[0036] To this end, the present application provides a Fourier filter device, which includes a plurality of light blocking plates and a driving module 100 .

[0037] Figure 1 FIG. 1 is a schematic diagram of a driving module 100 provided according to one embodiment of the present application. Figure 1The driving module 100 includes a linear motion module 110 and a plug-in structure 120, wherein the plug-in structure 120 is connected to the linear motion module 110 and is configured to move linearly along a first direction under the drive of the linear motion module 110. The plug-in structure 120 is used to plug in a plurality of light shielding plates, so that each light shielding plate can move linearly in the first direction with the plug-in structure 120.

[0038] In this embodiment, the linear motion module 110 can drive the plug-in structure 120 to move linearly in the first direction. The plug-in structure 120 can cooperate with a plurality of light shielding plates and drive the light shielding plates to move linearly along with the plug-in structure 120 in the first direction.

[0039] Compared with the multi-to-many driving solution adopted in the prior art, the Fourier filtering device provided in the present application realizes a one-to-many driving solution through the driving module 100, thereby reducing the use of driving function modules, saving space, and having relatively low costs.

[0040] Furthermore, each light shielding plate is provided with an interface for connecting with the plug-in structure 120. In other words, the plug-in structure 120 can be plugged into the interface of each light shielding plate. It should be understood that the interfaces on light shielding plates of different specifications and sizes can be set as standardized interfaces to improve universality.

[0041] Figure 2 for Figure 1 Schematic diagram of the driving module 100 in another perspective. Figure 2 In some optional embodiments, the plug-in structure 120 includes a plurality of telescopic rod mechanisms 121, each of which is used to plug in a corresponding light shielding plate. The plurality of telescopic rod mechanisms 121 are staggered in a third direction, and the third direction is perpendicular to the first direction.

[0042] In this embodiment, the positions of the multiple telescopic rod mechanisms 121 in the third direction are different, and the positions of the multiple light blocking plates in the third direction are also different, and are aligned one by one with the positions of the multiple telescopic rod mechanisms 121 in the third direction. In this way, each telescopic rod mechanism 121 can be matched and connected with the corresponding light blocking plate one by one to avoid disorder.

[0043] Figure 3 for Figure 1 Schematic diagram of the driving module 100 in another viewing angle. Figure 3 In some optional embodiments, each telescopic rod mechanism 121 can be switched between an extended state and a retracted state and includes a telescopic rod 1211, and the telescopic rod 1211 can be extended and retracted along the second direction.

[0044] In the extended state, the telescopic rod 1211 is plugged into the light shielding plate. In the retracted state, the telescopic rod 1211 is disconnected from the light shielding plate. The second direction is perpendicular to the plane defined by the first direction and the third direction.

[0045] In this embodiment, the plug-in structure 120 includes a plurality of telescopic rod mechanisms 121 , and each telescopic rod mechanism 121 includes a telescopic rod 1211 capable of performing telescopic movement in the second direction.

[0046] It should be understood that when the telescopic rod mechanism 121 is in the extended state, the telescopic rod 1211 in the telescopic rod mechanism 121 extends in the second direction to be inserted into the interface of the corresponding light shielding plate. When the telescopic rod mechanism 121 is in the retracted state, the telescopic rod 1211 in the telescopic rod mechanism 121 retracts in the second direction to be out of the interface of the corresponding light shielding plate.

[0047] In other words, when a telescopic rod mechanism 121 in the plug-in structure 120 is in an extended state, it can be connected to the corresponding light shielding plate and drive the light shielding plate to move linearly in the first direction. When the telescopic rod mechanism 121 is in a retracted state, it is disconnected from the corresponding light shielding plate and cannot drive the light shielding plate. It can be seen that by switching the state of the telescopic rod mechanism 121 and cooperating with the linear motion module 110, the position of the light shielding plate in the first direction can be changed.

[0048] In some optional embodiments, the linear motion module 110 includes a driving member 111, a movable block 112, and a driving rod 113. The driving rod 113 is extended along a first direction, and the driving member 111 is used to drive the driving rod 113 to rotate.

[0049] The plug-in structure 120 is disposed on the movable block 112 , and the movable block 112 is movably connected to the driving rod 113 and is configured to drive the plug-in structure 120 to move linearly along a first direction under the rotation of the driving rod 113 .

[0050] In this embodiment, the driving member 111 serves as a power source, providing a driving force to drive the driving rod 113 to rotate, and the movable block 112 is movably connected to the driving rod 113 and can convert the rotation of the driving rod 113 into a linear motion. The plug-in structure 120 is disposed on the movable block 112, so that the position can be adjusted in the first direction along with the movable block 112.

[0051] It should be understood that the plurality of telescopic rod mechanisms 121 are all disposed on the movable block 112 to form a plug-in structure 120 .

[0052] In the illustrated embodiment, the driving member 111 may be a motor, and the driving rod 113 and the movable block 112 cooperate to form a ball screw transmission mechanism, but are certainly not limited thereto, and may also cooperate to form a spiral transmission mechanism, for example.

[0053] It should be noted that the linear motion module 110 is not limited to the illustrated embodiment, and may also be, for example, a slider guide transmission mechanism, or the movable block 112 may be directly driven by an electric push rod.

[0054] In a further optional embodiment, the plurality of telescopic rod mechanisms 121 form at least one telescopic rod mechanism column L, and the plurality of telescopic rod mechanisms 121 in each telescopic rod mechanism column L are arranged side by side along the third direction.

[0055] In this embodiment, the plurality of telescopic rod mechanisms 121 may be arranged in a row to form a telescopic rod mechanism column L, and the plurality of telescopic rod mechanisms 121 in the telescopic rod mechanism column L are arranged side by side in the third direction, so that the structural layout is more compact.

[0056] It should be noted that when the multiple telescopic rod mechanisms 121 are arranged side by side in the third direction, although the multiple telescopic rod mechanisms 121 are aligned in the first direction, the multiple telescopic rod mechanisms 121 are still staggered in the third direction.

[0057] In a further optional embodiment, there are multiple telescopic rod mechanism columns L, and the multiple telescopic rod mechanism columns L are arranged side by side in the first direction. The telescopic rod mechanisms 121 in the multiple telescopic rod mechanism columns L are staggered in the third direction.

[0058] In this embodiment, the plurality of telescopic rod mechanisms 121 may be arranged in an array to form a plurality of telescopic rod mechanism columns L arranged side by side in the first direction.

[0059] For any two telescopic rod mechanism columns L, any telescopic rod mechanism 121 in one of them cannot be aligned with any telescopic rod mechanism 121 in the other in the third direction, so that the multiple telescopic rod mechanisms 121 can be staggered in the third direction.

[0060] In the illustrated embodiment, the movable block 112 is in a rectangular shape, and a plurality of telescopic rod mechanisms 121 are arranged in an array at one end of the movable block 112 in the second direction, and form a first telescopic rod mechanism column L1 and a second telescopic rod mechanism column L2. The first telescopic rod mechanism column L1 and the second telescopic rod mechanism column L2 are arranged side by side in the first direction.

[0061] The first telescopic rod mechanism array L1 and the second telescopic rod mechanism array L2 each include two telescopic rod mechanisms 121 , and each telescopic rod mechanism 121 in the first telescopic rod mechanism array L1 and each telescopic rod mechanism 121 in the second telescopic rod mechanism array L2 are staggered in the third direction.

[0062] It should be noted that a corresponding light shielding plate can be transported by any telescopic rod mechanism 121 in the telescopic rod mechanism array L, and multiple telescopic rod mechanisms 121 in the telescopic rod mechanism array L can also be used to simultaneously transport multiple corresponding light shielding plates.

[0063] exist Figure 3In the illustrated embodiment, one telescopic rod mechanism 121 in the first telescopic rod mechanism array L1 is in an extended state, and the telescopic rod 1211 protrudes from the movable block 112 in the second direction to ensure that it can be inserted into the interface of the light shielding plate. It should be understood that in the illustrated embodiment, although the telescopic rod 1211 also protrudes from the movable block 112 in the second direction when the telescopic rod mechanism 121 is in a retracted state, it is only necessary to ensure that the telescopic rod 1211 does not interfere with the light shielding plate.

[0064] In the illustrated embodiment, the first direction is the axial direction of the driving rod 113, which is also the width direction of the movable block 112, the second direction is the length direction of the movable block 112, and the third direction is the thickness direction of the movable block 112. The first direction, the second direction and the third direction are perpendicular to each other.

[0065] In a specific application, the telescopic rod mechanism 121 is a telescopic electromagnet. The telescopic electromagnet has the advantages of fast response and low cost. Of course, the telescopic rod mechanism 121 is not limited to the telescopic electromagnet, and can also be, for example, a cylinder, an oil cylinder, an electric push rod, etc.

[0066] In some optional embodiments, the linear motion module 110 further includes a guide rod 114 , which is parallel to the driving rod 113 and passes through the movable block 112 .

[0067] In this embodiment, since the guide rod 114 is parallel to the driving rod 113 , the guide rod 114 also extends along the first direction and is spaced apart from the driving rod 113 .

[0068] The movable block 112 is provided with a through hole penetrating along the first direction and is loosely matched with the guide rod 114 , so that the movable block 112 can move along the driving rod 113 and the guide rod 114 .

[0069] It should be understood that the movement stability of the movable block 112 is ensured by adding the guide rod 114, so that the movable block 112 always moves in translation along the first direction.

[0070] In the illustrated embodiment, the driving rod 113 and the guide rod 114 are arranged in parallel and spaced apart in the second direction. It should be understood that the driving rod 113 and the guide rod 114 can also be arranged in parallel and spaced apart in the third direction to achieve the same effect, and it is sufficient to ensure that the driving rod 113 and the guide rod 114 are parallel.

[0071] In a further optional embodiment, the linear motion module 110 further includes a first mounting plate 115 and a second mounting plate 116. The driving member 111 is disposed on the first mounting plate 115, and two ends of the guide rod 114 are connected to the first mounting plate 115 and the second mounting plate 116 respectively.

[0072] One end of the driving rod 113 passes through the first mounting plate 115 to be connected to the driving member 111 , and the other end of the driving rod 113 is rotatably connected to the second mounting plate 116 .

[0073] In this embodiment, the first mounting plate 115 and the second mounting plate 116 are spaced apart in the first direction, and the driving rod 113 and the guide rod 114 are located between the first mounting plate 115 and the second mounting plate 116 .

[0074] The guide rod 114 cannot rotate, so both ends can be fixedly mounted on the first mounting plate 115 and the second mounting plate 116. One end of the driving rod 113 is rotatably connected to the second mounting plate 116, and the other end is connected to the driving member 111. Under the action of the driving member 111, the driving rod 113 can rotate, thereby allowing the movable block 112 to move along the first direction.

[0075] In a specific application, the driving member 111 is a motor, whose output shaft can be connected to one end of the driving rod 113 through a coupling, and the second mounting plate 116 is provided with a rotating bearing 117 to be connected to the other end of the driving rod 113 .

[0076] In the illustrated embodiment, the first mounting plate 115 and the second mounting plate 116 are both flat plates and are arranged parallel and spaced apart in the first direction. Of course, the first mounting plate 115 and the second mounting plate 116 can also be special-shaped plates, which can be adjusted according to design requirements.

[0077] In summary, the plug-in structure 120 in the driving module 100 can be composed of a plurality of telescopic rod mechanisms 121 staggered in the third direction, and driven by the linear motion module 110 to adjust the position in the first direction.

[0078] When it is necessary to drive a light shielding plate of a certain layer to a set working position, the corresponding telescopic rod mechanism 121 can be switched to an extended state and connected to the light shielding plate, and driven to the set working position under the action of the linear motion module 110. After the light shielding plate is in the set working position, the telescopic rod mechanism 121 can be switched to a retracted state. In this way, the cyclic control can realize the adjustment of the position of the light shielding plate of any layer.

[0079] Furthermore, the plurality of telescopic rod mechanisms 121 may be arranged in an array, so that the plug-in structure 120 is more compact, and the plurality of light shielding plates aligned in the first direction may also be synchronously driven.

[0080] In summary, the Fourier filter device realizes a one-to-many driving mode through the driving module 100, which reduces the number of driving functional modules, reduces the volume of the entire device, and reduces costs.

[0081] Another aspect of the present application further provides an optical detection device, which includes the above-mentioned Fourier filter device, and thus obviously has all the advantages brought by the above-mentioned Fourier filter device, which will not be described one by one here. The optical detection device here may include, for example, an optical imaging system, an optical spectrometer, etc.

[0082] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Those skilled in the art can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A driving module, characterized in that: It comprises a linear motion module (110) and a plug-in structure (120), wherein the plug-in structure (120) is connected to the linear motion module (110) and is configured to move linearly along a first direction under the drive of the linear motion module (110); The plug-in structure (120) is used for plugging a plurality of light shielding plates, so that each of the light shielding plates can move linearly in the first direction along with the plug-in structure (120).

2. The driving module according to claim 1, characterized in that: The plug-in structure (120) comprises a plurality of telescopic rod mechanisms (121), each of the telescopic rod mechanisms (121) being used for plugging in a corresponding light-blocking plate; The plurality of telescopic rod mechanisms (121) are staggeredly arranged in a third direction, and the third direction is perpendicular to the first direction.

3. The driving module according to claim 2, characterized in that: The plurality of telescopic rod mechanisms (121) form at least one telescopic rod mechanism column (L), and the plurality of telescopic rod mechanisms (121) in each telescopic rod mechanism column (L) are arranged side by side along a third direction.

4. The driving module according to claim 3, characterized in that: The number of the telescopic rod mechanism arrays (L) is plural, and the plurality of telescopic rod mechanism arrays (L) are arranged side by side in the first direction; The telescopic rod mechanisms (121) in the plurality of telescopic rod mechanism columns (L) are arranged in a staggered manner in the third direction.

5. The driving module according to claim 2, characterized in that: Each telescopic rod mechanism (121) is switchable between an extended state and a retracted state and comprises a telescopic rod (1211), wherein the telescopic rod (1211) is capable of extending and retracting along a second direction; In the extended state, the telescopic rod (1211) is plugged into the light shielding plate; in the retracted state, the telescopic rod (1211) is disconnected from the light shielding plate; The second direction is perpendicular to a plane defined by the first direction and the third direction.

6. The driving module according to claim 1, characterized in that: The linear motion module (110) comprises a driving member (111), a movable block (112) and a driving rod (113); The driving rod (113) is arranged to extend along the first direction, and the driving member (111) is used to drive the driving rod (113) to rotate; The plug-in structure (120) is arranged on the movable block (112), and the movable block (112) is movably connected to the driving rod (113) and is arranged to drive the plug-in structure (120) to move linearly along the first direction under the rotation of the driving rod (113).

7. The driving module according to claim 6, characterized in that: The linear motion module (110) further comprises a guide rod (114), wherein the guide rod (114) is parallel to the driving rod (113) and passes through the movable block (112).

8. The driving module according to claim 7, characterized in that: The linear motion module (110) further comprises a first mounting plate (115) and a second mounting plate (116); The driving member (111) is arranged on the first mounting plate (115), and two ends of the guide rod (114) are respectively connected to the first mounting plate (115) and the second mounting plate (116); One end of the driving rod (113) passes through the first mounting plate (115) to be connected to the driving member (111), and the other end of the driving rod (113) is rotatably connected to the second mounting plate (116).

9. A Fourier filter device, characterized in that: A driving module (100) comprising a plurality of light shielding plates and any one of claims 1 to 8; Each of the light shielding plates is provided with an interface for connecting with the plug-in structure (120).

10. An optical detection device, characterized in that: Comprising the Fourier filtering device according to claim 9.

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