Multi-thimble chip stripping device

Abstract

The utility model discloses a multi-thimble chip stripping device, which relates to the technical field of chip processing and comprises a thimble mechanism and a first driving assembly used for driving the thimble mechanism to move. The ejector pin mechanism comprises a sleeve shell, an ejector rod arranged in the sleeve shell, a plurality of ejector pins arranged at the top end of the ejector rod and penetrating through the top end of the sleeve shell, and a second driving assembly used for driving the ejector rod to do lifting motion in the sleeve shell. According to the utility model, the plurality of ejector pins are arranged at the top end of the ejector rod, during processing, a large and thin chip is ejected by the plurality of ejector pins, the stress on the chip is small, the chip is not easy to break, and when the plurality of ejector pins eject the chip, the chip can be kept in a horizontal state, so that the blue film and the chip can be thoroughly separated.

Description

Technical Field

[0001] The utility model relates to the technical field of chip processing, in particular to a multi-ejector chip stripping device. Background Art

[0002] Due to the development and progress of science and technology, the size of memory chips and power semiconductor chips is getting larger and thinner. Most of the ejector pins on the packaging equipment on the market are single-pin ejector pin systems. In the prior art, since the chip size exceeds 10x10mm, using a single ejector pin system to eject the chip will cause a series of problems: 1. The stress of using a single ejector pin to eject a large and thin chip is large, which can easily cause the chip to break. 2. When using an ejector pin to eject the chip, vacuum treatment is required to separate the blue film from the chip. When the vacuum absorbs the blue film, the chip cannot remain horizontal, and the blue film cannot be completely separated from the chip.

[0003] In view of this, a multi-ejector chip peeling device is urgently needed to solve the above problems. Utility Model Content

[0004] In view of the problems existing in the prior art, the utility model solves the problems with the following technical structure.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A multi-ejector chip stripping device comprises: an ejector mechanism and a first driving component for driving the ejector mechanism to move;

[0007] The ejector mechanism comprises a casing, an ejector rod arranged in the casing, a plurality of ejectors arranged at the top of the ejector rod and penetrating the top of the casing, and a second driving component for driving the ejector rod to perform lifting motion in the casing.

[0008] Its further characteristic is that

[0009] An ejector pin plate is arranged at the top end of the ejector rod, a plurality of mounting holes are opened on the ejector pin plate, and a plurality of ejectors are respectively placed in corresponding mounting holes.

[0010] The top end of the ejector rod is provided with a groove, and the tail of the ejector pin is placed in the groove.

[0011] The plurality of ejector rods are connected to the ejector plate by magnetic attraction.

[0012] A plurality of ejector pins are all clamped on the ejector pin plate.

[0013] The sleeve shell comprises a sleeve and an ejector cap arranged at the top end of the sleeve, and the ejector cap is provided with a plurality of ejector holes adapted to the ejector pins.

[0014] The sleeve is connected to the ejector cap by magnetic attraction.

[0015] The first driving component includes an XY-axis two-dimensional mobile platform and a Z-axis mobile platform arranged on the XY-axis two-dimensional mobile platform. The shell is arranged on the Z-axis mobile platform. The Z-axis mobile platform is used to drive the shell to perform lifting movement, and the XY-axis two-dimensional mobile platform is used to drive the Z-axis mobile platform to move in the horizontal direction.

[0016] An air pipe is arranged on the ring side of the sleeve, an air passage is arranged between the sleeve and the ejector rod, an air hole is arranged on the ejector cap, and the air passage extends from the end of the air pipe to the ejector cap.

[0017] The second driving component includes a motor, a cam arranged at the output end of the motor, and a mounting seat, wherein the mounting seat is placed at the bottom end of the sleeve, the mounting seat is arranged on the Z-axis moving platform, the motor is placed on the mounting seat, the motor is used to drive the cam to rotate, and the bottom end of the push rod is arranged on the cam.

[0018] The above structure of the utility model can achieve the following beneficial effects:

[0019] By setting multiple ejector pins at the top of the ejector pin, during processing, a large and thin chip can be lifted up by multiple ejector pins, which reduces the stress on the chip and is not easy to cause the chip to break. When multiple ejector pins lift the chip, the chip can be kept in a horizontal state, which is convenient for completely separating the blue film from the chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a schematic diagram of the three-dimensional structure of this embodiment;

[0021] Figure 2 is a schematic structural diagram of the first driving assembly in this embodiment;

[0022] Figure 3 2 is a structural cross-sectional view of the ejector mechanism in this embodiment.

[0023] In the figure: 1. second drive assembly; 11. motor; 12. cam; 13. mounting seat; 2. ejector rod; 21. groove; 3. ejector pin; 4. airway; 5. sleeve; 51. air pipe; 6. ejector pin cap; 61. air hole; 7. XY axis two-dimensional moving platform; 8. Z axis moving platform; 9. ejector pin plate; 91. mounting hole. DETAILED DESCRIPTION

[0024] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0025] It should be noted that the terms "including" and "having" and any variations thereof in the specification and claims of the present invention and the above-mentioned drawings are intended to cover non-exclusive inclusions. For example, a process, method, apparatus, product or equipment comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or equipment.

[0026] The following is combined with Figure 1-3 This application is described in further detail.

[0027] like Figure 1-3 As shown, a multi-ejector chip stripping device includes: an ejector mechanism and a first driving component for driving the ejector mechanism to move;

[0028] The ejector mechanism comprises a casing, an ejector rod 2 disposed in the casing, a plurality of ejector pins 3 disposed at the top of the ejector rod 2 and penetrating the top of the casing, and a second driving assembly 1 for driving the ejector rod 2 to move up and down in the casing.

[0029] Based on the above structure, a plurality of ejector pins 3 are arranged at the top of the ejector pin 2. During processing, a large and thin chip is lifted up by the plurality of ejector pins 3, which reduces the stress on the chip and is not likely to cause the chip to break. Moreover, when the plurality of ejector pins lift up the chip, the chip can be kept in a horizontal state, which facilitates the complete separation of the blue film and the chip.

[0030] like Figure 3 As shown, a pin plate 9 is provided at the top of the ejector rod 2, a plurality of mounting holes 91 are provided on the pin plate 9, and a plurality of ejector pins 3 are respectively placed in the corresponding mounting holes 91, a groove 21 is provided at the top of the ejector rod 2, and the tail of the ejector pin 3 is placed in the groove 21, and the plurality of ejector rods 2 are connected to the pin plate 9 by magnetic attraction, and the plurality of ejector pins 3 are all clamped on the pin plate 9 (the tail of the ejector pin has a larger diameter and is clamped at the bottom of the ejector plate 9).

[0031] In actual use, the ejector pin is clamped on the top of the ejector rod 2 through the ejector pin plate 9, and the ejector pin plate 9 is fixed to the ejector rod 2 by magnetic attraction, so as to facilitate the disassembly and assembly of the ejector pin. When in use, different numbers of ejector pins 3 are set on the ejector pin plate 9 according to the size of the chip to be processed, and multiple ejector pins 3 are combined into corresponding shapes according to the shape of the chip to process different chips.

[0032] like Figure 2 and 3 The sleeve shell includes a sleeve 5 and an ejector cap 6 arranged at the top of the sleeve 5. The ejector cap 6 is provided with a plurality of ejector holes adapted to the ejector 3. The sleeve 5 and the ejector cap 6 are connected by magnetic attraction.

[0033] In actual use, the thimble cap 6 is fixed to the sleeve 5 by magnetic attraction, which facilitates the disassembly and assembly of the thimble cap 6, further improving the work efficiency of the staff.

[0034] like Figure 1 As shown, the first driving component includes an XY-axis two-dimensional mobile platform 7 and a Z-axis mobile platform 8 arranged on the XY-axis two-dimensional mobile platform 7, the casing is arranged on the Z-axis mobile platform 8, the Z-axis mobile platform 8 is used to drive the casing to perform lifting movement, and the XY-axis two-dimensional mobile platform 7 is used to drive the Z-axis mobile platform 8 to move in the horizontal direction.

[0035] In actual use, the ejector mechanism is moved by setting an XY axis two-dimensional moving platform 7 and a Z axis moving platform 8 .

[0036] Among them, Figure 3 As shown, an air pipe 51 is provided on the ring side of the sleeve 5, an air channel 4 is provided between the sleeve 5 and the ejector rod 2, an air hole 61 is provided on the ejector cap 6, and the air channel 4 extends from the end of the air pipe 51 to the ejector cap 6.

[0037] In actual use, the air pipe 51 is vacuumed by an external vacuum machine, so that the blue film on the chip is adsorbed on the upper surface of the ejector cap 6, thereby completing the separation of the chip and the blue film.

[0038] Among them, Figure 2 and 3 As shown, the second driving component 1 includes a motor 11, a cam 12 arranged at the output end of the motor 11, and a mounting seat 13. The mounting seat 13 is placed at the bottom end of the sleeve 5. The mounting seat 13 is arranged on the Z-axis moving platform 8. The motor 11 is placed on the mounting seat 13. The motor 11 is used to drive the cam 12 to rotate, and the bottom end of the push rod 2 is arranged on the cam 12.

[0039] In actual use, the cam 12 is driven to rotate by the motor 11, so that the ejector rod 2 arranged on the cam 12 can move up and down in the sleeve 5, so that the ejector pin 3 can be extended or retracted into the ejector cap 6. A cam follower can also be provided to reduce the wear of the cam and increase its service life.

[0040] In summary, by arranging multiple ejector pins 3 at the top of the ejector rod 2, during processing, a large and thin chip can be lifted up by the multiple ejector pins 3, which reduces the stress on the chip and is not likely to cause the chip to break. Moreover, when the multiple ejector pins lift up the chip, the chip can be kept in a horizontal state, which facilitates the complete separation of the blue film and the chip.

[0041] The present application uses the XY axis two-dimensional moving platform 7 and the Z axis moving platform 8 to complete the precise movement of the ejector mechanism and the center adjustment of the ejector rod.

[0042] The present application provides a cam 12 to make the push rod 2 move up and down. By designing the shape of the cam, the required movement pattern and amplitude of the push rod 2 can be designed.

[0043] The above are only preferred embodiments of the present application, and the present invention is not limited to the above embodiments. It is understood that other improvements and changes directly derived or associated by those skilled in the art without departing from the spirit and concept of the present invention should be considered to be included in the protection scope of the present invention.

Claims

1. A multi-pin chip stripping device, characterized in that: include: An ejector mechanism and a first driving assembly for driving the ejector mechanism to move; The ejector mechanism comprises a casing, an ejector rod (2) disposed in the casing, a plurality of ejector pins (3) disposed at the top of the ejector rod (2) and penetrating the top of the casing, and a second driving component (1) for driving the ejector rod (2) to perform lifting motion in the casing; A pin plate (9) is provided at the top end of the ejector rod (2), a plurality of mounting holes (91) are provided on the pin plate (9), and a plurality of ejector pins (3) are respectively placed in corresponding mounting holes (91); The housing comprises a sleeve (5) and a thimble cap (6) arranged at the top end of the sleeve (5), and the thimble cap (6) is provided with a plurality of thimble holes adapted to the thimbles (3); The first driving component comprises an XY-axis two-dimensional mobile platform (7) and a Z-axis mobile platform (8) arranged on the XY-axis two-dimensional mobile platform (7); the casing is arranged on the Z-axis mobile platform (8); the Z-axis mobile platform (8) is used to drive the casing to perform lifting movement; and the XY-axis two-dimensional mobile platform (7) is used to drive the Z-axis mobile platform (8) to move in a horizontal direction.

2. The multi-pin chip peeling device according to claim 1, characterized in that: A groove (21) is formed at the top end of the ejector rod (2), and the tail of the ejector pin (3) is placed in the groove (21).

3. The multi-pin chip stripping device according to claim 1, characterized in that: The plurality of ejector rods (2) are connected to the ejector plate (9) by magnetic attraction.

4. The multi-pin chip peeling device according to claim 1, characterized in that: The plurality of ejector pins (3) are all clamped on the ejector pin plate (9).

5. The multi-pin chip peeling device according to claim 1, characterized in that: The sleeve (5) is connected to the ejector cap (6) by magnetic attraction.

6. The multi-pin chip peeling device according to claim 1, characterized in that: An air pipe (51) is arranged on the ring side of the sleeve (5), an air channel (4) is arranged between the sleeve (5) and the ejector rod (2), an air hole (61) is arranged on the ejector cap (6), and the air channel (4) extends from the end of the air pipe (51) to the ejector cap (6).

7. The multi-pin chip peeling device according to claim 1, characterized in that: The second driving assembly (1) comprises a motor (11), a cam (12) arranged at the output end of the motor (11), and a mounting seat (13); the mounting seat (13) is placed at the bottom end of the sleeve (5); the mounting seat (13) is arranged on the Z-axis moving platform (8); the motor (11) is placed on the mounting seat (13); the motor (11) is used to drive the cam (12) to rotate; and the bottom end of the push rod (2) is arranged on the cam (12).

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