Quartz boat polishing, measuring and positioning mechanism

Abstract

The utility model discloses a quartz boat polishing measuring and positioning mechanism which comprises a measuring and positioning unit, the measuring and positioning unit comprises a measuring assembly used for measuring the height of a welding spot of a quartz boat to be polished, and the measuring assembly is installed on a machine tool through a driving mechanism and comprises a measuring seat. The two sides of the bottom of the measuring base are each provided with a measuring plate in a bent forming mode, a supporting plate is fixedly installed on one side of the measuring base and is in an L shape, an ultrasonic thickness measuring sensor is fixedly installed at the lower end of the supporting plate, and the ultrasonic thickness measuring sensor is electrically connected with a controller on a machine tool. According to the utility model, the height of the welding spot of the quartz boat to be polished can be accurately measured by matching the measuring assembly with the driving mechanism, and then the height of the polishing head can be quickly adjusted to be the same as the height of the welding spot of the quartz boat to be polished through the controller on the machine tool, so that accurate polishing is carried out, and the polishing efficiency is effectively improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of quartz boat grinding auxiliary equipment, in particular to a quartz boat grinding measurement and positioning mechanism. Background Art

[0002] Quartz is the first choice for making this silicon wafer carrier because of its high purity, high temperature resistance, acid resistance and alkali resistance. The silicon wafer carrier made of quartz material is called a quartz boat.

[0003] During the production process of quartz boats, protruding solder joints will be formed on the surface of the quartz plates after welding. In order to ensure quality, the solder joints need to be polished.

[0004] Currently, most machine tools with a single spindle head are used for grinding operations. During the grinding process, due to the different heights of the protruding welds, the grinding head is adjusted to a higher position (exceeding the higher distance of the weld) during grinding, and grinding is performed gradually and reciprocatingly. The grinding height cannot be controlled during this process, and is only controlled by the operator's experience, resulting in low grinding efficiency and a long time consumption. Utility Model Content

[0005] In order to solve the above technical problems, the purpose of the utility model is to provide a quartz boat grinding measurement and positioning mechanism to solve the technical defects that the grinding height of the solder joints on the surface of the existing quartz plate only relies on manual experience, the grinding efficiency is low, and the grinding quality is uncontrollable.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] The quartz boat polishing measurement and positioning mechanism comprises a measurement and positioning unit, wherein the measurement and positioning unit comprises a measurement component for measuring the height of the solder joint of the quartz boat to be polished, and the measurement component is mounted on a machine tool through a driving mechanism.

[0008] The measuring assembly includes a measuring seat, both sides of the bottom of the measuring seat are bent and provided with measuring plates, a support plate is fixedly installed on the front side of the measuring seat, and the support plate is L-shaped, and an ultrasonic thickness sensor is fixedly installed on the upper side of the support plate for measuring the thickness between the top of the measuring plate and the bottom of the quartz plate at the upper end of the quartz boat when the bottom of the measuring plate is pressed on the top of the welding point of the quartz boat to be polished, and the ultrasonic thickness sensor is electrically connected to the controller on the machine tool.

[0009] As a further solution of the utility model, the driving mechanism includes a mounting plate, which is fixedly mounted on the machine tool, and vertical plates are fixedly mounted on the upper and lower ends of the mounting plate. A lead screw is rotatably connected between the two vertical plates, and a nut is rotatably mounted on the lead screw, and the measuring seat is connected to the nut.

[0010] As a further solution of the utility model, the driving mechanism further comprises a slide rail, the slide rail is fixedly mounted on the mounting plate, a slider is slidably arranged on the slide rail, and the slider is fixedly connected to the measuring seat via a connecting rod.

[0011] As a further solution of the utility model, one end of the connecting rod is fixedly connected to one side of the measuring seat by a bolt.

[0012] Compared with the prior art, the quartz boat grinding, measuring and positioning mechanism of the utility model has the following beneficial effects: the height of the solder joints of the quartz boat to be grinded can be accurately measured by cooperating with the driving mechanism through the set measuring component, and then the height of the grinding head can be quickly adjusted to the same height as the solder joints of the quartz boat to be grinded through the controller on the machine tool, so as to perform precise grinding and effectively improve the grinding efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solution of the embodiment of the utility model, the drawings required for use in the embodiment will be briefly introduced below. Obviously, the drawings described below are only examples of the embodiment of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0014] Figure 1 The structure of the embodiment of the utility model is shown in FIG. Figure 1 ;

[0015] Figure 2 The structure of the embodiment of the utility model is shown in FIG. Figure 2 ;

[0016] Figure 3 This is a schematic diagram of the structure of an embodiment of the utility model installed on a machine tool.

[0017] Reference numerals:

[0018] 1. Machine tools;

[0019] 2. Measuring and positioning unit structure; 201. Mounting plate; 202. Slide rail; 203. Vertical plate; 204. Motor; 205. Lead screw; 206. Nut; 207. Sliding block; 208. Measuring seat; 2081. Measuring plate; 209. Connecting rod; 210. Support plate; 211. Ultrasonic thickness sensor. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solution and advantages of the embodiment of the utility model more clear, the embodiment of the utility model is further described in detail below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0021] In the description of the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limitations on the embodiments of the present invention.

[0022] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly stipulated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, an integral connection, or a detachable connection; it can be the internal connection of two components; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0023] See attached Figure 1-3 As shown, the quartz boat polishing measuring and positioning mechanism of the utility model embodiment includes a measuring and positioning unit 2, and the measuring and positioning unit 2 includes a measuring component for measuring the height of the solder joints of the quartz boat to be polished, and the measuring component is installed on the machine tool 1 through a driving mechanism.

[0024] Among them, the driving mechanism includes a mounting plate 201, which is fixedly installed on the machine tool 1. Vertical plates 203 are fixedly installed at the upper and lower ends of the mounting plate 201. A lead screw 205 is rotatably connected between the two vertical plates 203. A nut 206 is rotatably installed on the lead screw 205. The measuring seat 208 is fixedly connected to the nut 206.

[0025] In order to ensure that the measuring seat 208 can move up and down stably, the driving mechanism also includes a slide rail 202, which is fixedly installed on the mounting plate 201. A slider 207 is slidably arranged on the slide rail 202, and the slider 207 is fixedly connected to the measuring seat 208 through a connecting rod 209.

[0026] Specifically, in order to facilitate the disassembly and assembly between the measuring seat 208 and the sliding block 207 , one end of the connecting rod 209 is fixedly connected to one side of the measuring seat 208 by a bolt.

[0027] The measuring assembly includes a measuring seat 208, and both sides of the bottom of the measuring seat 208 are bent and formed with measuring plates 2081. A support plate 210 is fixedly installed on one side of the measuring seat 208, and the support plate 210 is set in an L shape. The lower end of the support plate 210 is fixedly installed with an ultrasonic thickness sensor 211 for measuring the thickness between the top of the measuring plate 2081 and the bottom of the quartz plate at the upper end of the quartz boat when the bottom of the measuring plate 2081 is pressed on the top of the welding point of the quartz boat to be polished. The ultrasonic thickness sensor 211 is electrically connected to the controller on the machine tool 1.

[0028] When the embodiment of the utility model is used, the quartz boat to be polished is placed directly below the measuring plate 2081, and then the motor 204 is controlled to drive the measuring seat 208 to move downward, so that the measuring plate 2081 is pressed to the top of the welding point of the quartz boat, and the motor 204 is controlled to stop running. At this time, the ultrasonic thickness sensor 211 measures the total thickness H of the measuring plate 2081 and the quartz plate at the upper end of the quartz. Since the thickness of the measuring plate 2081 is known and set to A, that is, the height position of the welding point = HA, the controller on the machine tool 1 can control the polishing head to polish to measure the height of the welding point.

[0029] The above shows and describes the basic principle of the invention of the utility model. The above is only a preferred embodiment of the invention of the utility model and is not intended to limit the invention of the utility model. The above embodiments and descriptions in the specification are only to illustrate the principle of the invention of the utility model. Without departing from the scope of the invention of the utility model, any modifications, equivalent substitutions and improvements made within the spirit and scope of the invention of the utility model should be included in the protection scope of the invention of the utility model.

Claims

1. Quartz boat grinding, measuring and positioning mechanism, characterized by: It comprises a measuring and positioning unit (2), the measuring and positioning unit (2) comprising a measuring component for measuring the height of a soldering point of a quartz boat to be polished, the measuring component being mounted on a machine tool via a driving mechanism; The measuring assembly comprises a measuring seat (208), both sides of the bottom of the measuring seat (208) are bent and provided with measuring plates (2081), a support plate (210) is fixedly mounted on the front side of the measuring seat (208), the support plate (210) is arranged in an L shape, an ultrasonic thickness sensor (211) is fixedly mounted on the top of the support plate (210) for measuring the thickness between the top of the measuring plate (2081) and the bottom of the quartz plate at the upper end of the quartz boat when the bottom of the measuring plate (2081) is pressed on the top of the welding point of the quartz boat to be polished, and the ultrasonic thickness sensor (211) is electrically connected to a controller on the machine tool.

2. The quartz boat grinding, measuring and positioning mechanism according to claim 1, characterized in that: The driving mechanism comprises a mounting plate (201), the mounting plate (201) being fixedly mounted on the machine tool, and vertical plates (203) being fixedly mounted on both the upper and lower ends of the mounting plate (201), a lead screw (205) being rotatably connected between the two vertical plates (203), a nut (206) being rotatably mounted on the lead screw (205), and the measuring seat (208) being connected to the nut (206).

3. The quartz boat grinding, measuring and positioning mechanism according to claim 2, characterized in that: The driving mechanism further comprises a slide rail (202), wherein the slide rail (202) is fixedly mounted on the mounting plate (201), a slider (207) is slidably disposed on the slide rail (202), and the slider (207) is fixedly connected to the measuring seat (208) via a connecting rod (209).

4. The quartz boat grinding, measuring and positioning mechanism according to claim 3, characterized in that: One end of the connecting rod (209) is fixedly connected to one side of the measuring seat (208) via a bolt.

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