Film coating cavity rapid cooling device for vacuum film coating machine

Abstract

The utility model provides a coating cavity quick cooling device for a vacuum coating machine, which comprises a vacuum coating machine body, a cooling air pipe is wound on the vacuum coating machine body, and a cooling water pipe is arranged in the cooling air pipe. The vacuum coating machine cooling device is novel in structure, a double-cooling-pipe structure is arranged, the cooling water pipe is arranged in the cooling air pipe, cooling air and cooling water flow in the cooling air pipe and the cooling water pipe at the same time, the cooling water can rapidly absorb and take away heat exchanged between the cooling air and the vacuum coating machine body, and the cooling efficiency and effect are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating machines, in particular to a coating cavity rapid cooling device for a vacuum coating machine. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum degree. There are many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, etc. The main idea is to divide it into evaporation and sputtering.

[0003] However, the existing vacuum coating machines generate a lot of heat when working. The traditional cooling method is to weld a single round tube on the outer surface of the coating equipment and pass cooling water through the round tube for cooling. Although this cooling method can cool the equipment, it is simple in structure and cannot efficiently cool down the equipment in a short time as needed, resulting in untimely temperature reduction and damage to the machine. Utility Model Content

[0004] The utility model aims to provide a device for rapidly cooling a coating chamber of a vacuum coating machine to solve the problems raised in the above-mentioned background technology.

[0005] In order to solve the above technical problems, the utility model provides the following technical solutions: a rapid cooling device for a coating cavity of a vacuum coating machine, comprising a vacuum coating machine body, a cooling air pipe wound on the vacuum coating machine body, and a cooling water pipe arranged in the cooling air pipe.

[0006] The cooling air pipe and the cooling water pipe are both elliptical structures.

[0007] One side of the cooling air pipe is embedded in the outer wall of the vacuum coating machine body.

[0008] Compared with the prior art, the beneficial effects achieved by the utility model are: the utility model has a novel structure, a double cooling pipe structure is arranged, a cooling water pipe is arranged in the cooling air pipe, and cooling gas and cooling water flow through the cooling air pipe and the cooling water pipe at the same time, and the cooling water can quickly absorb and take away the heat exchanged between the cooling gas and the vacuum coating machine body, thereby improving the cooling efficiency and effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. In the accompanying drawings:

[0010] Figure 1 It is a structural schematic diagram of the utility model;

[0011] In the figure: 1 vacuum coating machine body; 2 cooling air pipe; 3 cooling water pipe. DETAILED DESCRIPTION

[0012] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0013] See also Figure 1 The utility model provides a technical solution: a rapid cooling device for a coating cavity of a vacuum coating machine, comprising a vacuum coating machine body 1, a cooling air pipe 2 is wound around the vacuum coating machine body 1, and a cooling water pipe 3 is arranged in the cooling air pipe 2.

[0014] The cooling air pipe 2 and the cooling water pipe 3 are both elliptical structures.

[0015] One side of the cooling air pipe 2 is embedded in the outer wall of the vacuum coating machine body 1 .

[0016] The utility model has a novel structure and is equipped with a double cooling pipe structure. A cooling water pipe is arranged in the cooling air pipe, and cooling air and cooling water flow through the cooling air pipe and the cooling water pipe at the same time. The cooling water can quickly absorb and take away the heat exchanged between the cooling air and the vacuum coating machine body, thereby improving the cooling efficiency and effect. The cooling air pipe and the cooling water pipe are respectively connected to external refrigeration equipment and a power device, which can reduce the temperature of the air and water and ensure the smooth flow of the air and water.

[0017] It should be noted that relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises", or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device that includes a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also includes elements that are inherent to such process, method, article, or device.

[0018] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A rapid cooling device for a vacuum coating chamber of a vacuum coating machine, comprising a vacuum coating machine body (1), characterized in that: A cooling air pipe (2) is wound around the vacuum coating machine body (1), and a cooling water pipe (3) is arranged inside the cooling air pipe (2).

2. The device for rapidly cooling a coating chamber for a vacuum coating machine according to claim 1, characterized in that: The cooling air pipe (2) and the cooling water pipe (3) are both elliptical structures.

3. The device for rapidly cooling a coating chamber for a vacuum coating machine according to claim 1, characterized in that: One side of the cooling air pipe (2) is embedded in the outer wall of the vacuum coating machine body (1).

Images