Special composite rotating rack for ion sputtering coating machine

Abstract

The utility model discloses a special composite rotating rack for an ion sputtering coating machine, which comprises a rack, three groups of rotatable rotating rods are circumferentially and equidistantly mounted in an inner cavity of the rack, the rotating rods are tubular structural members with hollow interiors, the rotating rods can rotate through a driving component, and a plurality of groups of mounting members are equidistantly mounted on the outer walls of the rotating rods. The hanging piece comprises a hook and a tray, the tray is arranged below the hook, a through hole is formed in the position, attached to the upper surface of the tray, of the outer wall of a shaft rod of the rotating rod in a penetrating mode, an auger is arranged in an inner cavity of the rotating rod, and the auger is connected with a supporting piece at the top end of the machine frame. The raw materials flow to the bottom of the rack through the spiral blades of the auger to be uniformly collected, the auger blades can play a certain role in guiding flowing of the raw materials and prevent the raw materials from directly flowing to the lower tray to cause splashing, the hanging pieces are not prone to being influenced, the driving assembly can drive the rotating rod to rotate, and therefore coating can be more uniform.

Description

Technical Field

[0001] The utility model relates to the technical field of frames, in particular to a special composite rotating frame for an ion sputtering coating machine. Background Art

[0002] Ion sputtering coating machine is an advanced surface treatment technology equipment. It uses ion beam to bombard the target material, so that the target atoms or molecules are separated and attached to the substrate to form a uniform and dense film. This technology is widely used in the surface treatment of various materials, such as optical lenses, semiconductor materials, metal parts, etc., to improve the performance and service life of the materials.

[0003] In traditional ion sputtering coating machines, products are usually placed on a rotating rack inside the equipment. However, this rotating rack can usually only rotate around its axis, and the product itself cannot rotate. This leads to uneven distribution of raw materials on the product surface during the coating process, affecting the product qualification rate. In addition, the raw materials dripping from the surface of the upper product may also contaminate the surface of the lower product, resulting in inconsistent thickness of the surface coating of products at different levels. For this reason, we propose a composite rotating rack dedicated to ion sputtering coating machines. Utility Model Content

[0004] The purpose of the utility model is to provide a composite rotating frame dedicated to an ion sputtering coating machine to solve the problems raised by the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a composite rotating frame dedicated to an ion sputtering coating machine, comprising a frame, an inner cavity of the frame having three groups of rotatable rotating rods equidistantly installed in a circle, the rotating rods being specifically tubular structures with hollow interiors, the rotating rods being rotatable by a driving assembly, a plurality of groups of mounting parts being equidistantly installed on the outer wall of the rotating rod, the mounting parts comprising hooks and trays, the tray being arranged below the hooks, a through hole being provided through the outer wall of the rotating rod shaft at a position where the upper surface of the tray is fitted, an auger being provided in the inner cavity of the rotating rod, and the auger being connected to the support member at the top of the frame.

[0006] Preferably, the driving assembly includes a first gear, a second gear, a first pulley, a belt, a second pulley and a first motor, a group of the first gears is installed at the top of each group of the rotating rods, three groups of the first gears are meshed with the second gears, the second gear is sleeved on the outside of the frame shaft, the top of the second gear is rotatably connected to the top of the inner cavity of the ion sputtering coating machine, and the first pulley is sleeved on the upper end thereof, the first pulley is connected to the second pulley through the belt, and the second pulley is connected to the output end of the first motor.

[0007] Preferably, the shaft of the frame is rotatably connected to the top of the inner cavity of the ion sputtering coating machine, and the top of the shaft is connected to the output end of the second motor.

[0008] Preferably, a collection box is placed at the lower end of the inner cavity of the ion sputtering coating machine.

[0009] Preferably, a rotatable and sealed hatch is provided on the outside of the ion sputtering coating machine.

[0010] Compared with the prior art, the beneficial effects of the utility model are:

[0011] 1. The hook of the utility model can be used for hanging parts, and the tray is used to receive the raw materials dripping from the upper layer. The raw materials flow into the inner cavity of the rotating rod through the through hole, and flow to the bottom of the frame through the spiral blades of the auger for unified collection. The auger blades can provide a certain guiding role for the flow of raw materials to prevent them from directly falling on the lower tray and causing splashing, and are not easy to affect the hanging parts. The driving assembly can drive the rotating rod to realize self-rotation. Compared with the existing technology, the rotating rod can drive the mounting part to rotate while the frame rotates, so that the coating can be more uniform.

[0012] 2. The utility model can drive the frame to rotate by starting the second motor, and drive the second pulley to rotate by starting the first motor. The first pulley is driven to rotate through the belt transmission, and then the second gear is rotated, and the first gear meshing therewith is rotated, and then the rotating rod is driven to rotate. While the frame rotates, the rotating rod rotates on itself, and the rotating rod passes through the frame. The dripping raw materials can flow into the collection box for collection. The hatch can be rotated for easy opening and closing, and it is convenient to hang and clean the dripping raw materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a cross-sectional view of the overall structure of the utility model;

[0014] Figure 2 It is an enlarged view of structure A of the utility model;

[0015] Figure 3 It is the internal schematic diagram of the ion sputtering coating machine of the utility model;

[0016] Figure 4 It is a schematic diagram of the overall structure of the utility model when the door is opened;

[0017] Figure 5 It is a schematic diagram of the overall structure of the utility model when the door is closed.

[0018] In the figure: 1, frame, 2, rotating rod, 3, hook, 4, tray, 5, through hole, 6, auger, 7, support, 8, first gear, 9, second gear, 10, first pulley, 11, belt, 12, second pulley, 13, first motor, 14, ion sputtering coating machine, 15, second motor, 16, collection box, 17, hatch. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] Embodiment 1

[0021] Please refer to Figure 1-5 As shown, the utility model provides a composite rotating frame dedicated to an ion sputtering coating machine, including a frame 1, an inner cavity of the frame 1 is circumferentially equidistantly installed with three groups of rotatable rotating rods 2, the rotating rod 2 is specifically a tubular structural member with a hollow interior, the rotating rod 2 can be rotated by a driving assembly, a plurality of groups of mounting parts are equidistantly installed on the outer wall of the rotating rod 2, the mounting parts include a hook 3 and a tray 4, the tray 4 is arranged below the hook 3, a through hole 5 is opened at a position where the outer wall of the shaft of the rotating rod 2 is in contact with the upper surface of the tray 4, an auger 6 is arranged in the inner cavity of the rotating rod 2, and the auger 6 is connected to the support member 7 at the top of the frame 1.

[0022] In this embodiment, the hook 3 can be used for hanging parts, and the tray 4 is used to receive the raw materials dripping from the upper layer. The raw materials flow into the inner cavity of the rotating rod 2 through the through hole 5, and flow to the bottom of the frame 1 through the spiral blades of the auger 6 for unified collection. The blades of the auger 6 can provide a certain guiding role for the flow of raw materials to prevent them from directly falling on the lower tray 4 and causing splashing, and are not easy to affect the hanging parts. The driving assembly can drive the rotating rod 2 to rotate. Compared with the existing technology, the rotating rod 2 can drive the mounting part to rotate while the frame 1 rotates, so that the coating can be more uniform.

[0023] Please refer to Figure 1-5As shown, the driving assembly includes a first gear 8, a second gear 9, a first pulley 10, a belt 11, a second pulley 12 and a first motor 13. A group of first gears 8 are installed at the top of each group of rotating rods 2. The three groups of first gears 8 are all meshed with the second gear 9. The second gear 9 is sleeved on the outside of the shaft of the frame 1. The top of the second gear 9 is rotatably connected to the top of the inner cavity of the ion sputtering coating machine 14, and the first pulley 10 is sleeved on the upper end thereof. The first pulley 10 is connected to the second pulley 12 through the belt 11. The second pulley 12 is connected to the output end of the first motor 13. The shaft of the frame 1 is rotatably connected to the top of the inner cavity of the ion sputtering coating machine 14, and the top of the shaft is connected to the output end of the second motor 15. A collecting box 16 is placed at the lower end of the inner cavity of the ion sputtering coating machine 14, and a rotatably sealed hatch 17 is arranged on the outside of the ion sputtering coating machine 14.

[0024] In this embodiment, by starting the second motor 15, the frame 1 can be driven to rotate, and by starting the first motor 13, the second pulley 12 can be driven to rotate. Through the transmission of the belt 11, the first pulley 10 is driven to rotate, and then the second gear 9 is rotated, and the first gear 8 meshing therewith is rotated, and then the rotating rod 2 is driven to rotate. While the frame 1 rotates, the rotating rod 2 rotates on itself, and the rotating rod 2 passes through the frame 1. The dripping raw materials can flow into the collection box 16 for collection. The hatch 17 can be rotated for easy opening and closing, and it is convenient to hang and clean the dripping raw materials.

[0025] Working principle: First, by starting the second motor 15, the frame 1 can be driven to rotate, and by starting the first motor 13, the second pulley 12 is driven to rotate. Through the transmission of the belt 11, the first pulley 10 is driven to rotate, and then the second gear 9 is rotated, and the first gear 8 meshing therewith is rotated, and then the rotating rod 2 is driven to rotate. While the frame 1 rotates, the rotating rod 2 rotates on itself, and the rotating rod 2 passes through the frame 1. The dripping raw materials can flow into the collection box 16 for collection. The hatch 17 can be rotated for easy opening and closing, and it is convenient to hang and clean the dripping raw materials.

[0026] The contents not described in detail in this specification belong to the prior art known to professionals in this field.

[0027] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art may still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A composite rotating frame for an ion sputtering coating machine, comprising a frame (1), characterized in that: The inner cavity of the frame (1) is circumferentially equidistantly mounted with three groups of rotatable rotating rods (2), the rotating rods (2) being specifically hollow tubular structural members, the rotating rods (2) being rotatable by a driving assembly, the outer wall of the rotating rod (2) being equidistantly mounted with multiple groups of mounting members, the mounting members comprising hooks (3) and trays (4), the trays (4) being arranged below the hooks (3), the outer wall of the shaft of the rotating rod (2) being in contact with the upper surface of the tray (4) and being provided with a through hole (5), the inner cavity of the rotating rod (2) being provided with an auger (6), the auger (6) being connected to a support member (7) at the top end of the frame (1).

2. The composite rotating frame for ion sputtering coating machine according to claim 1, characterized in that: The driving assembly comprises a first gear (8), a second gear (9), a first pulley (10), a belt (11), a second pulley (12) and a first motor (13); a group of the first gears (8) is installed at the top of each group of the rotating rods (2); the three groups of the first gears (8) are meshed with the second gears (9); the second gear (9) is sleeved on the outside of the shaft of the frame (1); the top of the second gear (9) is rotatably connected to the top of the inner cavity of the ion sputtering coating machine (14); and the first pulley (10) is sleeved on the upper end thereof; the first pulley (10) is connected to the second pulley (12) through the belt (11); and the second pulley (12) is connected to the output end of the first motor (13).

3. The composite rotating frame for ion sputtering coating machine according to claim 2, characterized in that: The shaft of the frame (1) is rotatably connected to the top of the inner cavity of the ion sputtering coating machine (14), and its top is connected to the output end of the second motor (15).

4. The composite rotating frame for ion sputtering coating machine according to claim 2, characterized in that: A collecting box (16) is placed at the lower end of the inner cavity of the ion sputtering coating machine (14).

5. The composite rotating frame for ion sputtering coating machine according to claim 2, characterized in that: A rotatably sealed hatch (17) is arranged outside the ion sputtering coating machine (14).

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