Auxiliary air inlet device of chemical vapor deposition furnace

Abstract

The utility model relates to the technical field of chemical vapor deposition furnaces, in particular to an auxiliary gas inlet device of a chemical vapor deposition furnace, which comprises a chemical vapor deposition furnace component, and an auxiliary gas inlet component is arranged above the chemical vapor deposition furnace component. And the auxiliary air inlet assembly comprises a shell, bolts penetrate through the four corners of the lower portion of the shell, and a sealing piece is inserted into the lower portion of the shell in a penetrating mode. According to the auxiliary gas inlet device disclosed by the utility model, through the arrangement of the auxiliary gas inlet assembly, two gases can be stirred and mixed, so that the two gases are fully mixed, the gases can be fully reacted after entering the furnace body, and the influence on the product quality is avoided; the fully mixed gas directly enters the furnace body to react, and the gas in the mixing process is isolated, so that all the gas can be mixed, the unmixed gas is prevented from reacting in advance, and the product quality is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical vapor deposition furnaces, in particular to an auxiliary air intake device of a chemical vapor deposition furnace. Background Art

[0002] Chemical vapor deposition is a process in which a source gas containing raw material components is input into a chemical vapor deposition furnace, and a solid film is deposited on the prefabricated part through mechanisms such as diffusion and convection to generate a finished product.

[0003] However, in the existing chemical vapor deposition furnace, the gas can directly enter the furnace body after intake. Due to the lack of an auxiliary air intake device, the gas can directly react after entering the furnace body, and the gas is not completely mixed, resulting in a slow reaction process and affecting the quality of the final product. Utility Model Content

[0004] The utility model aims to provide an auxiliary gas inlet device for a chemical vapor deposition furnace, so as to solve the problem that the gas is not completely mixed as mentioned in the background technology.

[0005] To achieve the above purpose, the utility model provides the following technical solution: an auxiliary air intake device for a chemical vapor deposition furnace, comprising:

[0006] A chemical vapor deposition furnace assembly, wherein an auxiliary air intake assembly is arranged above the chemical vapor deposition furnace assembly;

[0007] An auxiliary air intake assembly comprises a shell, bolts penetrate the four lower corners of the shell, a seal is inserted into the lower interior of the shell, air intake pipes are arranged on both sides of the upper side of the shell, a check valve is installed above the air intake pipe, a servo motor is installed in the upper middle of the shell, a driving rod is connected to the lower output end of the servo motor, a fan is connected to the lower side of the driving rod, a connecting rod is connected to the lower side of the fan, a lead screw is connected to the lower side of the connecting rod, a nut pair is arranged on the outer wall of the lead screw, a baffle is connected to the outer wall of the nut pair, a limiting frame is arranged on the lower outer wall of the lead screw, and a guide plate is connected to the outer wall of the limiting frame.

[0008] Preferably, the chemical vapor deposition furnace assembly comprises a furnace body, a support frame is installed below the furnace body, and a furnace cover is arranged above the furnace body.

[0009] Preferably, the furnace cover is provided with a groove corresponding to the sealing member, and the shell is provided with a hole corresponding to the bolt.

[0010] Preferably, the sealing member is threadedly connected to the furnace cover, and the servo motor is fixedly connected to the housing.

[0011] Preferably, the shell is provided with a hole corresponding to the driving rod, and the fan is fixedly connected to the driving rod.

[0012] Preferably, the connecting rod is fixedly connected to the central axis of the fan, the nut pair is fixedly connected to the baffle, and the screw rod is rotatably connected to the limiting frame.

[0013] Preferably, the guide plate is fixedly connected to the furnace cover, the baffle plate is slidably connected to the guide plate, and the outer wall of the baffle plate is in contact with the inner wall of the shell and the guide plate.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] The novel auxiliary air intake device is provided with an auxiliary air intake component. When the two gases enter the shell through the air intake pipe, the baffle blocks the gas, and the gas temporarily does not enter the furnace body. The servo motor is started, and the servo motor drives the driving rod to rotate, and the driving rod drives the fan to rotate. The fan generates wind force, which can mix the two gases so that the two gases are fully mixed, ensuring that the two gases can fully react after entering the furnace body to avoid affecting the quality of the product. The fan continues to generate wind force, and the fan rotation drives the connecting rod and the screw rod to rotate, the screw rod drives the nut pair to move downward, and the nut pair drives the baffle plate to move downward. When the upper surface of the baffle plate is flush with the upper surface of the guide plate, the fully mixed gas directly enters the furnace body for reaction, and the gas in the mixing process is isolated to ensure that all gases can be mixed, avoid unmixed gas from reacting first, and ensure the quality of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a front view schematic diagram of the overall structure of the utility model;

[0017] Figure 2 It is a schematic cross-sectional diagram of the overall structure of the utility model;

[0018] Figure 3 For the utility model Figure 2 Schematic diagram of the structure of part A;

[0019] Figure 4 It is an exploded schematic diagram of the upper part of the auxiliary air intake assembly of the utility model;

[0020] Figure 5 It is an exploded schematic diagram of the lower half of the utility model.

[0021] In the figure: 01, chemical vapor deposition furnace assembly; 11, furnace body; 12, support frame; 13, furnace cover; 02, auxiliary air intake assembly; 21, shell; 22, bolts; 23, seal; 24, air intake pipe; 25, check valve; 26, servo motor; 27, drive rod; 28, fan; 29, connecting rod; 30, screw rod; 31, nut pair; 32, baffle; 33, limit frame; 34, guide plate. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 1-5 The utility model provides an embodiment: an auxiliary air intake device for a chemical vapor deposition furnace. The chemical vapor deposition furnace component 01, the check valve 25, the servo motor 26 and the nut pair 31 used in this application are all products that can be directly purchased on the market. Their principles and connection methods are existing technologies well known to those skilled in the art, so they will not be repeated here.

[0024] It comprises: a chemical vapor deposition furnace assembly 01, and an auxiliary air intake assembly 02 is arranged above the chemical vapor deposition furnace assembly 01;

[0025] Auxiliary air intake component 02, the auxiliary air intake component 02 includes a shell 21, the four corners of the lower part of the shell 21 are penetrated by bolts 22, the bolts 22 are passed through the holes of the shell 21 and screwed into the furnace cover 13, the shell 21 can be fixed in position, the lower interior of the shell 21 is interspersed with a seal 23, the seal 23 plays a sealing role to prevent gas leakage, the upper sides of the shell 21 are provided with an air intake pipe 24, the upper part of the air intake pipe 24 is installed with a check valve 25, and the upper middle part of the shell 21 is installed with a servo motor 26, the servo motor 26 provides power, the servo motor 26 can drive the drive rod 27 and the fan 28 to rotate, and the lower output end of the servo motor 26 is connected to the drive rod 2 7. The driving rod 27 can drive the fan 28 to rotate. The fan 28 generates wind force to stir the gas so that the gas is fully mixed. The fan 28 is connected to the bottom of the driving rod 27. The connecting rod 29 is connected to the bottom of the fan 28. The screw 30 is connected to the bottom of the connecting rod 29. The outer wall of the screw 30 is provided with a nut pair 31. The nut pair 31 can drive the baffle 32 to move. After the baffle 32 moves downward into the guide plate 34, the gas can enter the furnace body 11. The outer wall of the nut pair 31 is connected with the baffle 32. The outer wall below the screw 30 is provided with a limit frame 33. The limit frame 33 has a limit function for the screw 30. The outer wall of the limit frame 33 is connected with a guide plate 34.

[0026] Furthermore, the chemical vapor deposition furnace assembly 01 includes a furnace body 11 , a support frame 12 is installed below the furnace body 11 , the support frame 12 plays a supporting role, and a furnace cover 13 is arranged above the furnace body 11 .

[0027] Furthermore, the furnace cover 13 is provided with a groove corresponding to the seal 23, and the seal 23 plays a sealing role to prevent gas leakage. The shell 21 is provided with a hole corresponding to the bolt 22. The bolt 22 is screwed into the furnace cover 13 through the hole of the shell 21 to fix the position of the shell 21.

[0028] Furthermore, the seal 23 is threadedly connected to the furnace cover 13, and the bolt 22 is screwed into the furnace cover 13 through the hole of the shell 21 to fix the position of the shell 21. The servo motor 26 is fixedly connected to the shell 21 to ensure the stability of the servo motor 26. The servo motor 26 provides power, and the servo motor 26 can drive the drive rod 27 and the fan 28 to rotate.

[0029] Furthermore, a hole is opened in the shell 21 corresponding to the driving rod 27 to ensure that the shell 21 does not affect the rotation of the driving rod 27. The fan 28 is fixedly connected to the driving rod 27 to ensure that the driving rod 27 can drive the fan 28 to rotate. The fan 28 generates wind force to stir the gas so that the gas is fully mixed.

[0030] Furthermore, the connecting rod 29 is fixedly connected to the central axis position of the fan 28, ensuring the stability of the rotation of the connecting rod 29. The nut pair 31 is fixedly connected to the baffle 32, ensuring that the nut pair 31 can drive the baffle 32 to move. After the baffle 32 moves downward to the guide plate 34, the gas can enter the furnace body 11. The screw rod 30 is rotatably connected to the limit frame 33, and the limit frame 33 serves to limit the screw rod 30.

[0031] Furthermore, the guide plate 34 is fixedly connected to the furnace cover 13 to ensure the stability of the guide plate 34, and the baffle 32 is slidably connected to the guide plate 34. The outer wall of the baffle 32 fits with the inner wall of the shell 21 and the guide plate 34 to ensure that the baffle 32 can isolate the gas and prevent the gas from entering the furnace body 11 to react without being completely mixed, thereby ensuring the quality of the product.

[0032] Working principle: When in use, first let the two gases enter the housing 21 through the air inlet pipe 24, start the servo motor 26, the servo motor 26 drives the driving rod 27 to rotate, the driving rod 27 drives the fan 28 to rotate, the fan 28 generates wind force, and the two gases can be mixed. The rotation of the fan 28 drives the connecting rod 29 and the screw rod 30 to rotate, the screw rod 30 drives the nut pair 31 to move downward, and the nut pair 31 drives the baffle 32 to move downward. When the upper surface of the baffle 32 is flush with the upper surface of the guide plate 34, the fully mixed gas directly enters the furnace body 11 for reaction. The above is the entire working principle of the utility model.

[0033] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. An auxiliary air intake device for a chemical vapor deposition furnace, characterized in that: include: A chemical vapor deposition furnace assembly (01), wherein an auxiliary air intake assembly (02) is arranged above the chemical vapor deposition furnace assembly (01); The auxiliary air intake assembly (02) comprises a shell (21), bolts (22) penetrate through the four corners of the lower part of the shell (21), a sealing member (23) is inserted into the lower interior of the shell (21), an air intake pipe (24) is arranged on both sides of the upper part of the shell (21), a check valve (25) is installed above the air intake pipe (24), a servo motor (26) is installed in the middle of the upper part of the shell (21), and the lower output end of the servo motor (26) is connected to the output end of the servo motor (26). A driving rod (27) is connected, a fan (28) is connected below the driving rod (27), a connecting rod (29) is connected below the fan (28), a screw rod (30) is connected below the connecting rod (29), a nut pair (31) is provided on the outer wall of the screw rod (30), a baffle (32) is connected to the outer wall of the nut pair (31), a limiting frame (33) is provided on the outer wall below the screw rod (30), and a guide plate (34) is connected to the outer wall of the limiting frame (33).

2. The auxiliary air intake device of a chemical vapor deposition furnace according to claim 1, characterized in that: The chemical vapor deposition furnace assembly (01) comprises a furnace body (11), a support frame (12) is installed below the furnace body (11), and a furnace cover (13) is arranged above the furnace body (11).

3. The auxiliary air intake device of a chemical vapor deposition furnace according to claim 2, characterized in that: The furnace cover (13) is provided with a groove corresponding to the sealing member (23), and the shell (21) is provided with a hole corresponding to the bolt (22).

4. The auxiliary air intake device of a chemical vapor deposition furnace according to claim 1, characterized in that: The sealing member (23) is threadedly connected to the furnace cover (13), and the servo motor (26) is fixedly connected to the housing (21).

5. The auxiliary air intake device of a chemical vapor deposition furnace according to claim 1, characterized in that: The housing (21) is provided with a hole corresponding to the driving rod (27), and the fan (28) is fixedly connected to the driving rod (27).

6. The auxiliary gas inlet device of a chemical vapor deposition furnace according to claim 1, characterized in that: The connecting rod (29) is fixedly connected to the central axis of the fan (28), the nut pair (31) is fixedly connected to the baffle (32), and the screw rod (30) is rotatably connected to the limiting frame (33).

7. The auxiliary air intake device of a chemical vapor deposition furnace according to claim 2, characterized in that: The guide plate (34) is fixedly connected to the furnace cover (13), the baffle plate (32) is slidably connected to the guide plate (34), and the outer wall of the baffle plate (32) is in contact with the inner wall of the shell (21) and the guide plate (34).

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