Feeding device and single crystal furnace

Abstract

The utility model discloses a feeding device and a single crystal furnace, and relates to the technical field of monocrystalline silicon production and manufacturing. The feeding device comprises a feeding body and a material blocking assembly, the feeding body is provided with a containing cavity, and the containing cavity is used for containing silicon materials; the material blocking assembly is arranged on the feeding body in a sleeving mode and comprises a blocking piece, and the blocking piece is used for blocking silicon powder or silicon liquid. The silicon powder can be prevented from flying, and the growth quality of the silicon single crystal rod is improved.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal silicon production and manufacturing, and in particular to a feeding device and a single crystal furnace. Background Art

[0002] The production of single crystal silicon in the photovoltaic industry generally adopts the direct pulling method. In order to reduce costs, the continuous re-feeding crystal pulling process is gradually adopted.

[0003] At present, for the feeder used for re-feeding, if the crucible is placed too far away or the size of the material blocks is uneven, the silicon material will fall into the silicon liquid and cause the silicon liquid to surge or splash, and the splashed silicon points will adhere to the surface of the water-cooled heat shield and the guide tube. In addition, since the silicon materials rub against each other during packaging and transportation to produce powder, the silicon powder produced in the process of the silicon material falling quickly into the crucible will rise up and fall on the furnace neck, the upper edge of the guide tube, the surface of the water-cooled heat shield and other places.

[0004] In the process of single crystal growth, these silicon dots and silicon powder are at risk of falling off, which will cause the atomic arrangement structure of single crystal silicon to change, resulting in crystal breakage. At the same time, the silicon dots formed by silicon sputtering adhere to the surface of graphite parts such as guide tubes, and their carbon powder and other impurities will also fall into the silicon solution, thereby increasing the carbon content of the single crystal silicon rod and affecting the quality of the single crystal silicon rod. Utility Model Content

[0005] In view of this, the purpose of the present application is to provide a feeding device and a single crystal furnace, aiming to solve the technical problems in the prior art.

[0006] To achieve the above objectives, the technical solutions adopted in this application are as follows:

[0007] In a first aspect, an embodiment of the present application provides a feeding device, comprising:

[0008] A feeding body, wherein the feeding body has a containing cavity, and the containing cavity is used to place silicon material;

[0009] A material blocking component is sleeved on the feeding body, and the material blocking component includes a blocking piece, and the blocking piece is used to block silicon powder or silicon liquid.

[0010] In one embodiment of the first aspect, the feeding body further comprises:

[0011] A cylinder having the accommodating cavity;

[0012] A first flange, wherein the first flange is arranged at one end of the cylinder, the cylinder is fixedly connected to the first flange, and the first flange is used to support the cylinder on the furnace neck of the single crystal furnace;

[0013] A chassis is arranged at one end of the cylinder away from the first flange, and the chassis is used to open or close the accommodating cavity.

[0014] In one embodiment of the first aspect, the feeding body further includes a second flange, the second flange is arranged around the cylinder, and the second flange is located at an end of the cylinder away from the first flange.

[0015] In one embodiment of the first aspect, the material blocking assembly includes:

[0016] A support portion, the support portion is arranged on a side of the first flange away from the cylinder, and the support portion is supported on the first flange;

[0017] A material blocking portion, the material blocking portion is sleeved on the cylinder, the material blocking portion is located between the first flange and the second flange, and the material blocking portion includes the blocking sheet;

[0018] A connecting portion, wherein the connecting portion is disposed through the supporting portion, the connecting portion is located between the supporting portion and the material-blocking portion, and the connecting portion is used to connect the supporting portion and the material-blocking portion.

[0019] In one embodiment of the first aspect, the support portion includes a transverse plate, the transverse plate is arranged on a side of the first flange away from the cylinder, and the connecting portion passes through the transverse plate;

[0020] The transverse plate has a first air passage, and a first air outlet is arranged on a side of the transverse plate close to the cylinder. The first air passage is used for blowing air into the cylinder.

[0021] In one embodiment of the first aspect, the connecting portion comprises:

[0022] A first connecting rod, the first connecting rod is sequentially inserted into the supporting portion and the cylinder, the first connecting rod is connected to the supporting portion, and one end of the first connecting rod away from the supporting portion is connected to the chassis;

[0023] A second connecting rod, the second connecting rod is passed through the supporting portion, the second connecting rod is located on the outer surface of the cylinder, one end of the second connecting rod away from the supporting portion is connected to the material blocking portion, the second connecting rod has a second air channel in it, the second air channel is connected to the first air channel, and the second air channel is used to pass gas into the first air channel;

[0024] The third connecting rod is passed through the supporting part, the third connecting rod is located on the outer surface of the cylinder, one end of the third connecting rod away from the supporting part is connected to the material blocking part, and a third air channel is arranged in the third connecting rod.

[0025] In one embodiment of the first aspect, the material blocking portion further comprises:

[0026] A third flange, the third flange is sleeved on the cylinder, the third flange is located between the first flange and the second flange, and the third flange can slide on the cylinder;

[0027] The blocking piece is arranged between the third flange and the second flange, and the blocking piece is rotatably connected to the third flange.

[0028] In one embodiment of the first aspect, the third flange has a fourth air channel, the third air channel is in communication with the fourth air channel, and the third air channel is used to introduce gas into the fourth air channel;

[0029] A second air outlet is provided on a side of the third flange away from the cylinder, and the gas in the fourth air channel can be blown out from the second air outlet. The second air outlet is used to blow air toward a side of the baffle away from the second flange.

[0030] In one embodiment of the first aspect, a surface of the third flange close to the baffle is an inclined surface, and the third flange is used to unfold the baffle.

[0031] In a second aspect, an embodiment of the present application provides a single crystal furnace, comprising the feeding device described in any of the above embodiments.

[0032] Compared with the prior art, the beneficial effects of the present application are as follows: the present application proposes a feeding device and a single crystal furnace. The feeding device includes a feeding body and a material blocking assembly, the feeding body has a containing cavity, and the containing cavity is used to place silicon material; the material blocking assembly is sleeved on the feeding body, and the material blocking assembly includes a blocking plate. The present application uses the blocking plate to block the flying silicon powder and splashing silicon liquid when the feeding body feeds silicon material into the main furnace chamber, thereby preventing the silicon powder in the silicon material from being lifted up and falling on the furnace neck, the upper edge of the guide tube or the surface of the water-cooled heat shield of the single crystal furnace, thereby preventing the silicon dots and silicon powder on the furnace neck, the upper edge of the guide tube or the surface of the water-cooled heat shield of the single crystal furnace from falling during the equal diameter process of the single crystal silicon growth, thereby improving the growth quality of the single crystal silicon rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0034] Figure 1A schematic diagram of the structure of the feeding device in the present application from one perspective is shown;

[0035] Figure 2 Another perspective structural schematic diagram of the feeding device in the present application is shown;

[0036] Figure 3 Another perspective structural schematic diagram of the feeding device in the present application is shown;

[0037] Figure 4 The schematic diagram of the structure of the feeding device in the present application is shown;

[0038] Figure 5 A partial structural schematic diagram of the feeding device in the present application is shown;

[0039] Figure 6 Another partial structural schematic diagram of the feeding device in the present application is shown;

[0040] Figure 7 Another partial structural schematic diagram of the feeding device in the present application is shown;

[0041] Figure 8 The schematic diagram of the structure of the horizontal plate in the present application is shown;

[0042] Fig. 9 Another structural schematic diagram of the horizontal plate in the present application is shown;

[0043] Fig.10 A partial structural schematic diagram of the material blocking portion in the present application is shown;

[0044] Fig.11 The schematic diagram of the structure of the single crystal furnace in this application is shown.

[0045] Description of main component symbols:

[0046] 100-feeding device; 110-feeding body; 111-cylinder; 1111-accommodating chamber; 112-first flange; 113-chassis; 114-second flange; 120-blocking assembly; 121-supporting part; 1211-cross plate; 1211a-first airway; 1211b-first air outlet; 1211c-first through hole; 1211d-second through hole; 1211e-third through hole; 122-connecting part; 1221-first connecting rod; 1222-second connecting rod; 1222a-second airway; 1223- The third connecting rod; 1223a-the third air channel; 123-the material blocking part; 1231-the third flange; 1231a-the fourth air channel; 1231b-the second air outlet; 1232-the baffle; 1232a-the first sub-baffle; 1232b-the second sub-baffle; 1233-the connecting rod; 101-the main furnace chamber; 1011-the quartz crucible; 102-the furnace neck; 103-the auxiliary chamber; 1031-the first air inlet; 1032-the second air inlet; 1033-the third air inlet; 1034-the third air outlet; 1035-the heavy hammer system. DETAILED DESCRIPTION

[0047] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0048] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0049] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0050] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0051] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0052] like Figure 1 and Fig.11 As shown, an embodiment of the present application provides a feeding device 100. The feeding device 100 includes a feeding body 110 and a material blocking assembly 120.

[0053] In this embodiment, one end of the charging body 110 is mounted on the furnace neck 102 of the single crystal furnace, and one end of the charging body 110 away from the furnace neck 102 is placed in the main furnace chamber 101 of the single crystal furnace.

[0054] The feeding body 110 has a containing cavity 1111, and the containing cavity 1111 is used for placing silicon material.

[0055] In addition, the material blocking assembly 120 is sleeved on the feeding body 110 , and the material blocking assembly 120 includes a blocking piece 1232 . In this embodiment, the blocking piece 1232 is used to block the flying silicon powder and the splashing silicon liquid.

[0056] In the related art, the feeder used for re-feeding usually directly feeds the crucible through a pipe. During the re-feeding process, if the crucible is placed too far away or the size of the material blocks is uneven, the silicon material will fall into the silicon liquid, causing the silicon liquid to surge or splash, and the splashed silicon points will adhere to the surface of the water-cooled heat shield and the guide tube. In addition, since the silicon materials rub against each other during packaging and transportation to produce powder, the silicon powder produced during the rapid drop of the silicon material into the crucible will rise and fall on the furnace neck, the upper edge of the guide tube, the surface of the water-cooled heat shield, etc. In the equal diameter process of single crystal growth, these silicon points and silicon powder are at risk of falling. After the silicon points and silicon powder fall, the atomic arrangement structure of the single crystal silicon will change, resulting in crystal breakage. At the same time, the silicon points formed by silicon splashing adhere to the surface of graphite parts such as the guide tube, and their impurities such as carbon powder will also fall into the silicon solution, thereby increasing the carbon content of the single crystal silicon rod and affecting the quality of the single crystal silicon rod.

[0057] In this embodiment, the feeding device 100 includes a feeding body 110 and a material blocking assembly 120, wherein this embodiment uses the blocking plate 1232 in the material blocking assembly 120 to block the silicon powder raised by the feeding body 110 when feeding silicon material into the main furnace chamber 101 of the single crystal furnace, thereby preventing the raised silicon powder from falling and adhering to the furnace neck 102 of the single crystal furnace, the upper edge of the guide tube or the surface of the water-cooled heat screen, thereby improving the growth quality of the single crystal silicon rod.

[0058] Alternatively, if Figure 2 As shown, the feeding body 110 further includes a cylinder 111 , a first flange 112 and a bottom plate 113 .

[0059] The barrel 111 has the accommodating cavity 1111. In this embodiment, the barrel 111 is placed in the main furnace chamber 101. Optionally, the barrel 111 is, for example, a quartz barrel.

[0060] Specifically, the first flange 112 is disposed at one end of the cylinder 111 , and the cylinder 111 is fixedly connected to the first flange 112 , and the fixed connection method is, for example, welding.

[0061] In this embodiment, the cylinder 111 is mounted on the furnace neck 102 of the single crystal furnace through the first flange 112. Specifically, in this embodiment, the first flange 112 is mounted on the furnace neck 102 of the single crystal furnace in a circular shape, thereby mounting the cylinder 111 on the furnace neck 102 of the single crystal furnace.

[0062] Furthermore, after the cylinder 111 is placed on the furnace neck 102 , one end of the cylinder 111 away from the first flange 112 is placed toward the main furnace chamber 101 , and one end of the cylinder 111 away from the first flange 112 is placed close to the quartz crucible 1011 of the main furnace chamber 101 .

[0063] In addition, the bottom plate 113 is disposed at one end of the cylinder 111 away from the first flange 112 , and the bottom plate 113 is used to open or close the accommodating cavity 1111 .

[0064] Among them, Fig.11 As shown, the chassis 113 is connected to the weight system 1035 in the single crystal furnace, that is, in this embodiment, the rise and fall of the chassis 113 can be controlled by the rise and fall of the weight system 1035 respectively.

[0065] Optionally, the rising of the bottom plate 113 is, for example, a movement away from the quartz crucible 1011 in the main furnace chamber 101 , and the descending of the bottom plate 113 is, for example, a movement close to the quartz crucible 1011 in the main furnace chamber 101 .

[0066] Optionally, the base 113 is, for example, a quartz cone, and the side surface of the cone is located near the accommodating chamber 1111, so that when the base 113 is lowered to feed the quartz crucible 1011, the silicon material in the accommodating chamber 1111 can slide smoothly along the side surface of the quartz cone into the quartz crucible 1011.

[0067] Alternatively, if Figure 2 and Figure 3 As shown, the feeding body 110 further includes a second flange 114 . The second flange 114 is disposed around the cylinder 111 . The second flange 114 is located at an end of the cylinder 111 away from the first flange 112 .

[0068] Alternatively, if Figure 2 As shown, the material blocking assembly 120 includes a supporting portion 121 , a material blocking portion 123 and a connecting portion 122 .

[0069] The support portion 121 is disposed on a side of the first flange 112 away from the cylinder 111 , and the support portion 121 is mounted on the first flange 112 .

[0070] In addition, the material stopper 123 is sleeved on the cylinder 111, and the material stopper 123 is located between the first flange 112 and the second flange 114. The material stopper 123 can slide on the cylinder 111. Optionally, the material stopper 123 includes the stopper 1232.

[0071] The connecting portion 122 is disposed through the supporting portion 121 , and the connecting portion 122 is located between the supporting portion 121 and the material blocking portion 123 .

[0072] One end of the connecting portion 122 is connected to the supporting portion 121 through a nut, and one end of the connecting portion 122 away from the supporting portion 121 is connected to the material blocking portion 123 through a nut.

[0073] In this embodiment, the supporting portion 121 and the material blocking portion 123 are connected via the connecting portion 122 .

[0074] Alternatively, if Figure 3 As shown, the support portion 121 includes a transverse plate 1211 , the transverse plate 1211 is disposed on a side of the first flange 112 away from the cylinder 111 , and the connecting portion 122 penetrates the transverse plate 1211 .

[0075] Alternatively, if Figure 4 and Figure 5 As shown, the transverse plate 1211 has a first air channel 1211a, and a first air outlet 1211b is provided on one side of the transverse plate 1211 close to the cylinder 111. The first air channel 1211a is used to blow air into the cylinder 111, wherein the gas is, for example, argon.

[0076] Optionally, the shape of the first gas outlet 1211b is, for example, a trumpet shape, that is, the diameter of the first gas outlet 1211b gradually increases along the direction of the horizontal plate 1211 toward the cylinder 111, thereby increasing the area of ​​argon gas blowing from the first gas outlet 1211b to the containing chamber 1111, further effectively blocking the silicon powder in the containing chamber 1111 from flying.

[0077] Alternatively, if Figure 8 and Fig. 9 As shown, in this embodiment, the shape of the horizontal plate 1211 is, for example, rectangular or circular.

[0078] When the shape of the horizontal plate 1211 is a rectangle, for example, the number of the first air outlets 1211b ranges from 2 to 40. Optionally, the number of the first air outlets 1211b ranges from 12 to 40. Alternatively, the number of the first air outlets 1211b ranges from 12 to 15 or 20, for example.

[0079] When the shape of the horizontal plate 1211 is circular, for example, the number of the first air outlets 1211 b ranges from 5 to 200. Optionally, the number of the first air outlets 1211 b ranges from 20, 35 or 60, for example.

[0080] It should be noted that the opening size of the first air outlet 1211b can be designed according to the number of the first air outlets 1211b, and the present embodiment does not limit the number of the first air outlets 1211b, which can be designed according to actual production requirements.

[0081] It should be noted that this embodiment does not limit the shape of the horizontal plate 1211, and the specific shape of the horizontal plate 1211 can be designed according to actual production conditions.

[0082] Alternatively, if Figure 8As shown, the transverse plate 1211 is further provided with a first through hole 1211c, a second through hole 1211d and a third through hole 1211e.

[0083] The first through hole 1211 c corresponds to the accommodating cavity 1111 , that is, the first through hole 1211 c corresponds to the interior of the cylinder 111 .

[0084] In addition, the second through hole 1211 d and the third through hole 1211 e are respectively arranged on both sides of the first through hole 1211 c , and the second through hole 1211 d and the third through hole 1211 e are both arranged corresponding to the outside of the cylinder 111 .

[0085] Specifically, the axes of the first through hole 1211 c , the second through hole 1211 d , and the third through hole 1211 e are all parallel to the axis of the barrel 111 .

[0086] Alternatively, if Figure 3 and Figure 5 As shown, the connecting portion 122 includes a first connecting rod 1221 , a second connecting rod 1222 and a third connecting rod 1223 .

[0087] The first connecting rod 1221 is sequentially disposed through the supporting portion 121 and the cylinder 111 , the first connecting rod 1221 is connected to the supporting portion 121 , and one end of the first connecting rod 1221 away from the supporting portion 121 is connected to the chassis 113 .

[0088] Specifically, the first connecting rod 1221 passes through the first through hole 1211c and the cylinder 111 in sequence.

[0089] In this embodiment, the weight system 1035 and the chassis 113 are connected via the first connecting rod 1221 .

[0090] Specifically, one end of the first connecting rod 1221 away from the first flange 112 is connected to the chassis 113, and one end of the first connecting rod 1221 away from the chassis 113 is connected to the weight system 1035 of the single crystal furnace, thereby connecting the chassis 113 to the weight system 1035 of the single crystal furnace.

[0091] Optionally, the first connecting rod 1221 is connected to the chassis 113, for example, via a nut, and the first connecting rod 1221 is connected to the cross plate 1211, for example, via a nut.

[0092] In addition, the second connecting rod 1222 is inserted through the supporting portion 121 , that is, the second connecting rod 1222 is inserted through the second through hole 1211 d of the transverse plate 1211 , and the second connecting rod 1222 is located on the outer surface of the cylinder 111 .

[0093] Specifically, one end of the second connecting rod 1222 away from the supporting portion 121 is connected to the material blocking portion 123, and the connection method is, for example, a nut connection, and the second connecting rod 1222 is connected to the horizontal plate 1211, for example, by a nut. In this embodiment, the length of the second connecting rod 1222 placed in the main furnace chamber 101 can be adjusted by adjusting the nuts at the two locations.

[0094] Alternatively, if Figure 4 and Figure 5 As shown, the second connecting rod 1222 has a second air channel 1222a in it, and the second air channel 1222a is in communication with the first air channel 1211a. In this embodiment, the gas is introduced into the first air channel 1211a through the second air channel 1222a.

[0095] In this embodiment, one end of the second connecting rod 1222 away from the material blocking portion 123 is communicated with the first air inlet 1031 .

[0096] The first gas inlet 1031 is arranged on the auxiliary chamber 103 of the single crystal furnace, and the second connecting rod 1222 is connected to the first gas inlet 1031, for example, through a high temperature resistant connecting hose, that is, the second gas channel 1222a is connected to the first gas inlet 1031, and gas can be introduced into the second gas channel 1222a through the first gas inlet 1031. Optionally, the gas is, for example, argon.

[0097] It should be noted that the portion of the second connecting rod 1222 located on the side of the transverse plate 1211 close to the cylinder 111 is a solid body, that is, the second air channel 1222a is only provided on the portion of the second connecting rod 1222 located on the second through hole 1211d and the portion of the second connecting rod 1222 located on the side of the transverse plate 1211 away from the cylinder 111.

[0098] Alternatively, if Figure 5 , Figure 6 and Figure 7 As shown, the third connecting rod 1223 is penetrated through the support portion 121 , the third connecting rod 1223 is located on the outer surface of the cylinder 111 , one end of the third connecting rod 1223 away from the support portion 121 is connected to the material blocking portion 123 , and a third air channel 1223a is provided in the third connecting rod 1223 .

[0099] Specifically, one end of the third connecting rod 1223 away from the supporting portion 121 is connected to the material blocking portion 123, and the connection method is, for example, a nut connection, and the third connecting rod 1223 is connected to the cross plate 1211, for example, by a nut. In this embodiment, the length of the third connecting rod 1223 placed in the main furnace chamber 101 can be adjusted by adjusting the nuts at the two locations.

[0100] In this embodiment, if Figure 3 and Fig.11As shown, one end of the third connecting rod 1223 away from the material blocking portion 123 is connected to the second air inlet 1032 .

[0101] The second gas inlet 1032 is disposed on the auxiliary chamber 103 of the single crystal furnace, and the third connecting rod 1223 is connected to the second gas inlet 1032, for example, through a high temperature resistant connecting hose, that is, the third gas channel 1223a is connected to the second gas inlet 1032. In this embodiment, gas can be introduced into the third gas channel 1223a through the second gas inlet 1032. Optionally, the gas is, for example, argon.

[0102] Alternatively, if Figure 2 and Figure 3 As shown, the material blocking portion 123 further includes a third flange 1231 .

[0103] The third flange 1231 is sleeved on the cylinder 111, and the third flange 1231 is located between the first flange 112 and the second flange 114. It should be noted that the third flange 1231 can slide on the cylinder 111, that is, the third flange 1231 can move closer to or away from the second flange 114 on the cylinder 111.

[0104] Optionally, the third flange 1231 is connected to the second connecting rod 1222 via a nut, and the third flange 1231 is connected to the third connecting rod 1223 via a nut.

[0105] Optionally, the material of the third flange 1231 is, for example, quartz.

[0106] In addition, if Figure 3 , Figure 6 and Figure 7 As shown, the blocking piece 1232 is disposed between the third flange 1231 and the second flange 114, and the blocking piece 1232 is rotatably connected to the third flange 1231. The blocking piece 1232 is rotatably connected to the third flange 1231, for example, via a connecting rod 1233.

[0107] In this embodiment, if Fig.10 As shown, there may be a plurality of baffles 1232 , the plurality of baffles 1232 are arranged around the cylinder 111 , the plurality of baffles 1232 are radially arranged on the outer surface of the cylinder 111 , and the plurality of baffles 1232 are staggered with each other.

[0108] It should be noted that, through the rotatable connection between multiple baffles 1232 and the third flange 1231, the multiple baffles 1232 can be rotated around the connecting rod 1233 from the radial direction of the cylinder 111 toward the direction of the chassis 113, so that the baffles 1232 are folded from the unfolded state to the storage state close to the outer surface of the cylinder 111.

[0109] Alternatively, if Figure 3 and Figure 6 As shown, when the multiple baffles 1232 are folded to the storage state, the distance between the two baffles 1232 farthest apart is smaller than the inner diameter of the furnace neck 102 of the single crystal furnace, so that the material blocking portion 123 of this embodiment can pass through the furnace neck 102 of the single crystal furnace.

[0110] Among them, Figure 7 and Fig. 9 As shown, when the multiple baffles 1232 are in a fully expanded state, the maximum width of the ring formed by the multiple baffles 1232 is smaller than the inner diameter of the quartz crucible 1011, and the difference between the maximum width of the ring formed by the multiple baffles 1232 and the inner diameter of the quartz crucible 1011 is, for example, in the range of 10 to 100 mm. Optionally, the difference is 20 mm, 50 mm or 100 mm.

[0111] Specifically, Fig. 9 As shown, the blocking piece 1232 includes a first sub-blocking piece 1232a and a second sub-blocking piece 1232b, wherein the first sub-blocking piece 1232a and the second sub-blocking piece 1232b are arranged alternately, and the first sub-blocking piece 1232a is arranged on a side of the second sub-blocking piece 1232b away from the second flange 114, and each first sub-blocking piece 1232a is located between two adjacent second sub-blocking pieces 1232b.

[0112] Among them, the width of the second sub-blocking piece 1232b is greater than the width of the first sub-blocking piece 1232a, and the width of the first sub-blocking piece 1232a is greater than the distance between two adjacent second sub-blocking pieces 1232b, that is, the first sub-blocking piece 1232a and the second sub-blocking piece 1232b are partially overlapped, thereby ensuring that there is no gap between the first sub-blocking piece 1232a and the second sub-blocking piece 1232b, further improving the effect of blocking flying silicon powder and splashing silicon liquid.

[0113] Optionally, the number of the first sub-blocking pieces 1232a and the number of the second sub-blocking pieces 1232b are equal, and the number of the first sub-blocking pieces 1232a and the second sub-blocking pieces 1232b are both, for example, in the range of 3 to 18. Specifically, the number of the first sub-blocking pieces 1232a and the number of the second sub-blocking pieces 1232b are both, for example, 6, 9 or 18.

[0114] Optionally, the material of the baffle 1232 is, for example, quartz.

[0115] Alternatively, if Figure 4 , Figure 6 and Figure 7As shown, the third flange 1231 has a fourth gas channel 1231a, and the third gas channel 1223a is in communication with the fourth gas channel 1231a. In this embodiment, gas is introduced into the fourth gas channel 1231a through the third gas channel 1223a, and the gas is, for example, argon.

[0116] Optionally, a second air outlet 1231b is provided on a side of the third flange 1231 away from the cylinder 111 , and the gas in the fourth air channel 1231a can be blown out from the second air outlet 1231b , and the second air outlet 1231b is used to blow air toward a side of the baffle 1232 away from the second flange 114 .

[0117] Specifically, in this embodiment, the silicon powder dropped on the side of the baffle 1232 close to the third flange 1231 , that is, the silicon powder on the side of the baffle 1232 away from the second flange 114 , can be blown off through the fourth air channel 1231 a and the second air outlet 1231 b .

[0118] It should be noted that the second air outlets 1231 b correspond one-to-one to the baffles 1232 , and the present embodiment does not limit the number of the second air outlets 1231 b , and the specific number of the second air outlets 1231 b can be designed according to the number of the baffles 1232 .

[0119] Optionally, the shape of the second air outlet 1231 b is, for example, a rectangle, and the width of the second air outlet 1231 b can be designed according to the number of the blocking pieces 1232 .

[0120] Optionally, a side of the third flange 1231 close to the baffle 1232 is an inclined surface, and the third flange 1231 is used to unfold the baffle 1232. The angle between the inclined surface and the axis of the cylinder 111 is set to a first angle, and the size of the first angle ranges from 60 degrees to 90 degrees, for example, and the size of the first angle can be, for example, 60 degrees, 65 degrees, 75 degrees or 90 degrees.

[0121] In this embodiment, the first connecting rod 1221 is lowered by the heavy hammer system 1035, and the first connecting rod 1221 drives the chassis 113, the cross plate 1211, the second connecting rod 1222 and the third connecting rod 1223 to descend in the direction close to the quartz crucible 1011, thereby driving the third flange 1231 to move on the cylinder 111 in the direction close to the second flange 114.

[0122] When the third flange 1231 descends to be close to the side of the second flange 114 facing away from the chassis 113, the inclined surface of the second flange 114 opens and lifts up the multiple baffles 1232. At this time, the angle between the baffles 1232 and the axis of the cylinder 111 is set to a second angle, and the size of the second angle is equal to the size of the first angle.

[0123] When the bottom plate 113 descends, the bottom plate 113 is separated from the cylinder 111, and the silicon material in the accommodating chamber 1111 falls into the quartz crucible 1011. In addition, when the bottom plate 113 descends, the plurality of baffles 1232 are lifted and unfolded through the inclined surface of the second flange 114, thereby effectively blocking the silicon powder flying in the process of the silicon material falling into the quartz crucible 1011, and blocking the silicon liquid surging and splashing in the quartz crucible 1011, thereby reducing the risk of wire breakage during the growth of single crystal silicon, and reducing the risk of silicon points formed by silicon splashing adhering to the surface of graphite parts such as the guide tube, and the risk of impurities such as carbon powder falling into the silicon solution, resulting in an increase in the carbon content in the single crystal silicon rod, and further improving the quality of single crystal silicon growth.

[0124] It should be noted that if Figure 7 As shown, the angle between the direction of the second air outlet 1231b and the axis of the cylinder 111 is set to a third angle, and the size of the third angle is equal to the size of the first angle, thereby effectively blowing the silicon powder that falls on the side of the baffle 1232 away from the bottom plate 113 into the quartz crucible 1011 quickly, further improving the quality of single crystal silicon growth.

[0125] like Fig.11 As shown, a single crystal furnace provided in this embodiment has the feeding device 100 in any of the above embodiments, and thus has all the beneficial effects of the feeding device 100, which will not be described one by one here.

[0126] Optionally, in order to further improve the blocking effect of silicon powder, in this embodiment, a third gas inlet 1033 and a third gas outlet 1034 are provided on the sub-chamber 103 of the single crystal furnace.

[0127] The third air inlet 1033 is disposed at an end of the auxiliary chamber 103 away from the furnace neck 102 , and the third air outlet 1034 is disposed at an end of the auxiliary chamber 103 close to the furnace neck 102 .

[0128] Specifically, when the feeding device 100 in this embodiment is feeding into the quartz crucible 1011, by introducing argon gas into the sub-chamber 103 from the third gas inlet 1033, and making the argon gas flow in the direction close to the furnace neck 102 and flow out from the third gas outlet 1034, it can further prevent silicon powder from flying upward, and further improve the growth quality of the single crystal silicon rod.

[0129] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0130] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A feeding device, characterized in that: include: A feeding body, wherein the feeding body has a containing cavity, and the containing cavity is used to place silicon material; A material blocking component is sleeved on the feeding body, and the material blocking component includes a blocking piece, and the blocking piece is used to block silicon powder or silicon liquid.

2. The feeding device according to claim 1, characterized in that: The feeding body also includes: A cylinder having the accommodating cavity; A first flange, wherein the first flange is arranged at one end of the cylinder, the cylinder is fixedly connected to the first flange, and the first flange is used to support the cylinder on the furnace neck of the single crystal furnace; A chassis is arranged at one end of the cylinder away from the first flange, and the chassis is used to open or close the accommodating cavity.

3. The feeding device according to claim 2, characterized in that: The feeding body further comprises a second flange, which is arranged around the cylinder and is located at an end of the cylinder away from the first flange.

4. The feeding device according to claim 3, characterized in that: The material blocking assembly comprises: A support portion, the support portion is arranged on a side of the first flange away from the cylinder, and the support portion is supported on the first flange; A material blocking portion, the material blocking portion is sleeved on the cylinder, the material blocking portion is located between the first flange and the second flange, and the material blocking portion includes the blocking sheet; A connecting portion, wherein the connecting portion is disposed through the supporting portion, the connecting portion is located between the supporting portion and the material-blocking portion, and the connecting portion is used to connect the supporting portion and the material-blocking portion.

5. The feeding device according to claim 4, characterized in that: The supporting portion comprises a horizontal plate, the horizontal plate is arranged on a side of the first flange away from the cylinder, and the connecting portion is passed through the horizontal plate; The transverse plate has a first air passage, and a first air outlet is arranged on a side of the transverse plate close to the cylinder. The first air passage is used for blowing air into the cylinder.

6. The feeding device according to claim 5, characterized in that: The connecting portion comprises: A first connecting rod, the first connecting rod is sequentially inserted into the supporting portion and the cylinder, the first connecting rod is connected to the supporting portion, and one end of the first connecting rod away from the supporting portion is connected to the chassis; A second connecting rod, the second connecting rod is passed through the supporting portion, the second connecting rod is located on the outer surface of the cylinder, one end of the second connecting rod away from the supporting portion is connected to the material blocking portion, the second connecting rod has a second air channel in it, the second air channel is connected to the first air channel, and the second air channel is used to pass gas into the first air channel; The third connecting rod is passed through the supporting part, the third connecting rod is located on the outer surface of the cylinder, one end of the third connecting rod away from the supporting part is connected to the material blocking part, and a third air channel is arranged in the third connecting rod.

7. The feeding device according to claim 6, characterized in that: The material blocking portion also includes: A third flange, the third flange is sleeved on the cylinder, the third flange is located between the first flange and the second flange, and the third flange can slide on the cylinder; The blocking piece is arranged between the third flange and the second flange, and the blocking piece is rotatably connected to the third flange.

8. The feeding device according to claim 7, characterized in that: The third flange has a fourth air passage, the third air passage is in communication with the fourth air passage, and the third air passage is used to introduce gas into the fourth air passage; A second air outlet is provided on a side of the third flange away from the cylinder, and the gas in the fourth air channel can be blown out from the second air outlet. The second air outlet is used to blow air toward a side of the baffle away from the second flange.

9. The feeding device according to claim 7, characterized in that: A surface of the third flange close to the baffle is an inclined surface, and the third flange is used to unfold the baffle.

10. A single crystal furnace, characterized in that: The invention comprises the feeding device according to any one of claims 1 to 9.

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