Seed crystal bar clamping device and single crystal furnace

Abstract

The utility model relates to a seed crystal bar clamping device and a single crystal furnace, the seed crystal bar clamping device comprises a main body and a limiting piece, the main body is provided with a cavity with an opening, the cavity is used for buckling one end of a seed crystal bar, the limiting piece is arranged on the cavity wall of the cavity in a penetrating manner, and the limiting piece is used for being matched with the seed crystal bar in an inserting manner and used for preventing the seed crystal bar from being separated from the cavity. According to the technical scheme, the cavity wall of the cavity is enclosed outside the seed crystal bar to limit the seed crystal bar, so that the seed crystal bar is prevented from moving in the horizontal direction. The limiting piece can abut against the seed crystal bar and limit the seed crystal bar in the horizontal direction, so that the seed crystal bar is further prevented from moving, and meanwhile, the seed crystal bar can be prevented from being separated from the cavity and falling off. Therefore, in the crystal preparation process, the main body and the limiting piece can prevent the seed crystal bar from shifting, the limiting piece prevents the seed crystal bar from falling off, the main body and the limiting piece ensure the continuity of crystal growth in the crystal preparation process, and shutdown caused by falling off of the seed crystal bar is also reduced, so that the crystal preparation efficiency is improved.

Description

Technical Field

[0001] The present disclosure relates to the field of crystal preparation, and in particular to a seed crystal rod clamping device and a single crystal furnace. Background Art

[0002] In the process of crystal preparation, seed crystals are needed as the basis for guiding crystal growth. Taking sapphire crystal growth as an example, in the process of sapphire crystal preparation, a clamping mechanism is needed to fix the seed crystals and suspend the seed crystals above the crucible in the single crystal furnace. In the related art, the clamping structure is usually composed of a clamp body and a metal wire. The clamp body is constructed as a semi-cylinder with a plurality of slots on it. The seed crystals are semi-nested in the slots of the clamp body, and the seed crystals and the clamp body are bound and fixed together with metal wires. As crystals are continuously generated on the seed crystals, the weight of the seed crystals continues to increase, and the seed crystals bound by metal wires are easily displaced, causing the seed crystals to detach from the slots and fall off. Utility Model Content

[0003] The purpose of the present disclosure is to provide a seed crystal rod clamping device and a single crystal furnace to solve the problem that the seed crystal is easily displaced and dropped in the related art.

[0004] In order to achieve the above-mentioned purpose, the present disclosure provides a seed crystal rod clamping device, including a main body and a limit piece, wherein the main body is provided with a chamber with an opening, the chamber is used to be buckled on one end of the seed crystal rod, the limit piece passes through the cavity wall of the chamber, and the limit piece is used to be plugged into and cooperate with the seed crystal rod to prevent the seed crystal rod from escaping from the cavity.

[0005] Optionally, the main body is columnar in structure, the limiting members are in an even number, and the limiting members are symmetrically arranged in the radial direction of the main body.

[0006] Optionally, the seed crystal rod clamping device also includes an insertion groove opened on the outer circumference of the seed crystal rod, and the main body is provided with an insertion hole for the limiting member to pass through, and the limiting member includes a first insertion part and a second insertion part, the second insertion part is used to be plugged and matched with the insertion groove, and the first insertion part is used to be plugged and matched with the insertion hole.

[0007] Optionally, a first slope is provided on the surface of the first plug-in portion facing the hole wall of the plug-in hole, and a second slope that can abut against the first slope is provided on the hole wall of the plug-in hole, and the first slope and the second slope are used to prevent the first plug-in portion from entering the cavity.

[0008] Optionally, a first step is provided on the surface of the first plug-in portion facing the hole wall of the plug-in hole, and a second step capable of abutting against the first step is provided on the hole wall of the plug-in hole, and the first step and the second step are used to prevent the first plug-in portion from entering the cavity.

[0009] Optionally, the seed crystal rod clamping device includes a fixing piece, which is sleeved on the main body and presses against the limiting piece inwardly along the radial direction of the main body.

[0010] Optionally, a flange is further provided on the outside of the main body, and the flange is provided below the fixing member to support the fixing member.

[0011] Optionally, the cavity wall of the cavity is a polished surface.

[0012] Optionally, the main body and the limiting member are made of tungsten or molybdenum.

[0013] A second object of the present disclosure is to provide a single crystal furnace, comprising the seed crystal rod clamping device described in any one of the above.

[0014] Through the above technical solution, the cavity wall of the chamber is enclosed outside the seed crystal rod to limit the position of the seed crystal rod and prevent the seed crystal rod from shifting in the horizontal direction. When the limiter is plugged into the seed crystal rod, the limiter can abut the seed crystal rod and limit the position of the seed crystal rod in the horizontal direction, further preventing the seed crystal rod from shifting in the horizontal direction, and preventing the seed crystal rod from falling out of the chamber. In this way, during the crystal preparation process, the main body and the limiter can prevent the seed crystal rod from shifting in the horizontal direction, and the limiter prevents the seed crystal rod from falling. The main body and the limiter ensure the continuity of crystal growth during the crystal preparation process, and also reduce the downtime caused by the seed crystal rod falling, thereby improving the efficiency of crystal preparation.

[0015] Other features and advantages of the present disclosure will be described in detail in the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings are used to provide a further understanding of the present disclosure and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present disclosure but do not constitute a limitation of the present disclosure. In the accompanying drawings:

[0017] Figure 1 is a schematic diagram of the use of the seed crystal rod clamping device provided in an exemplary embodiment of the present disclosure;

[0018] Figure 2 is a cross-sectional view of a seed crystal rod clamping device provided in an exemplary embodiment of the present disclosure;

[0019] Figure 3 is a schematic structural diagram of a subject provided by an exemplary embodiment of the present disclosure;

[0020] Figure 4 is a schematic structural diagram of a position-limiting member provided in an exemplary embodiment of the present disclosure;

[0021] Figure 5 Schematic diagram of the structure of a seed crystal rod provided in an exemplary embodiment of the present disclosure.

[0022] Description of Reference Numerals

[0023] 1-seed crystal rod, 11-plug-in groove, 2-main body, 21-chamber, 22-plug-in hole, 23-second slope, 24-flange, 3-limiting member, 31-first plug-in part, 32-second plug-in part, 33-first slope, 4-fixing member. DETAILED DESCRIPTION

[0024] The specific implementation of the present disclosure is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described herein is only used to illustrate and explain the present disclosure, and is not used to limit the present disclosure.

[0025] In the present disclosure, unless otherwise stated, directional words such as "upper" and "lower" generally refer to the directional positions of the relevant components in actual use. Figure 2 The “inside” and “outside” refer to the inside and outside of the corresponding component outline. In addition, when the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The terms “first”, “second”, etc. used in this disclosure are to distinguish one element from another element and have no order or importance.

[0026] like Figures 1 to 5 As shown, the present disclosure provides a seed crystal rod clamping device, including a main body 2 and a limiter 3. The main body 2 is provided with a chamber 21 with an opening, the chamber 21 is used to be buckled on one end of the seed crystal rod 1, the limiter 3 passes through the cavity wall of the chamber 21, and the limiter 3 is used to be plugged and matched with the seed crystal rod 1 to prevent the seed crystal rod 1 from escaping from the chamber 21.

[0027] Through the above technical solution, the cavity wall of the chamber 21 is enclosed outside the seed crystal rod 1 to limit the seed crystal rod 1 and prevent the seed crystal rod 1 from shifting in the horizontal direction. When the limiter 3 is plugged into the seed crystal rod 1, the limiter 3 can abut the seed crystal rod 1 and limit the seed crystal rod 1 in the horizontal direction, further preventing the seed crystal rod 1 from shifting in the horizontal direction, and can also prevent the seed crystal rod 1 from falling out of the chamber 21. In this way, during the crystal preparation process, the main body 2 and the limiter 3 can prevent the seed crystal rod 1 from shifting in the horizontal direction, and the limiter 3 prevents the seed crystal rod 1 from falling. The main body 2 and the limiter 3 ensure the continuity of crystal growth during the crystal preparation process, and also reduce the downtime caused by the falling of the seed crystal rod 1, thereby improving the efficiency of crystal preparation.

[0028] Taking sapphire crystal growth as an example, the seed crystal rod 1 used for sapphire crystal growth is usually constructed in a square rod shape. Figure 5 In this case, the chamber 21 can also be correspondingly constructed as a square, and the wall of the chamber 21 fits the surface of the seed crystal rod 1 to limit the position of the seed crystal rod 1. In addition, there is also a seed crystal rod 1 constructed as a cylindrical shape, in which case the chamber 21 can also be correspondingly constructed as a cylindrical shape, and the contact area between the wall of the chamber 21 and the surface of the seed crystal rod 1 is increased as much as possible to ensure the limiting effect.

[0029] In the process of crystal preparation, while ensuring that the seed crystal rod 1 will not shift or fall, it is also necessary to ensure that the seed crystal rod 1 will not tilt. If the seed crystal rod 1 tilts, the crystal orientation of the grown crystal may deviate from the design requirements, affecting the electrical and optical properties of the material. It will also make it impossible for the crystal to be uniformly deposited on the seed crystal rod 1, affecting the quality of the prepared crystal. In order to prevent the seed crystal rod 1 from tilting, it is necessary to ensure that the suspended seed crystal rod clamping device will not tilt. In order to ensure that the suspended seed crystal rod clamping device will not tilt, the main body 2 can be constructed as a columnar shape, and the limiter 3 can have an even number of multiple limiters 3, and multiple limiters 3 are symmetrically arranged in the radial direction of the main body 2. The columnar main body 2 is less likely to tilt, and the even number of limiters 3 ensures that it can be symmetrically arranged in the radial direction of the main body 2. When the limiters 3 are symmetrically arranged in the radial direction of the main body 2, correspondingly, the plug holes 22 opened on the main body 2 mentioned below will also be symmetrically arranged. The symmetrically arranged limiters 3 and plug holes 22 make the seed crystal rod clamping device more stable and less likely to tilt.

[0030] In some embodiments, reference Figure 5The seed crystal rod clamping device may also include a plug-in slot 11 provided on the outer periphery of the seed crystal rod 1, and a plug-in hole 22 for the limiter 3 to pass through may be provided on the main body 2, and the limiter 3 may include a first plug-in portion 31 and a second plug-in portion 32, the second plug-in portion 32 is used for plugging and matching with the plug-in slot 11, and the first plug-in portion 31 is used for plugging and matching with the plug-in hole 22. In the process of preparing sapphire crystal, the seed crystal rod 1 may be first connected to the seed crystal rod clamping device, and then the seed crystal rod clamping device holding the seed crystal rod 1 may be suspended above the crucible in the single crystal furnace. At this time, the seed crystal rod 1 is suspended above the crucible. Under the action of gravity, the slot wall of the plug-in slot 11 located above the second plug-in portion 32 can abut against the surface of the second plug-in portion 32, and the second plug-in portion 32 supports the seed crystal rod 1 to prevent the seed crystal rod 1 from detaching from the chamber 21 and falling. When the weight of the seed crystal rod 1 increases due to the preparation of the crystal, the seed crystal rod 1 and the second plug-in portion 32 will abut more tightly, further ensuring the limiting effect of the second plug-in portion 32 on the seed crystal rod 1. At the same time, the end of the second plug-in portion 32 facing the seed crystal rod 1 will abut against the bottom of the plug-in slot 11, thereby further fixing the seed crystal rod 1 and preventing the seed crystal rod 1 from shifting. Taking the cylindrical seed crystal rod 1 mentioned above as an example, the surface of the second plug-in portion 32 can also fit with the slot wall of the plug-in slot 11 to prevent the displacement caused by the rotation of the cylindrical seed crystal rod 1. The hole wall of the plug hole 22 on the main body 2 can fix and limit the first plug-in portion 31 to ensure the stability of the first plug-in portion 31.

[0031] In some embodiments, a first slope 33 may be provided on the surface of the hole wall of the first plug-in portion 31 facing the plug-in hole 22, and a second slope 23 capable of abutting against the first slope 33 may be provided on the hole wall of the plug-in hole 22. The first slope 33 and the second slope 23 are used to prevent the first plug-in portion 31 from entering the chamber 21. For details, please refer to Figure 2 , Figure 3 and Figure 4 The first slope 33 and the second slope 23 can limit the first plug-in portion 31, preventing the first plug-in portion 31 from entering the chamber 21 and contacting the seed crystal rod 1 to damage the seed crystal rod 1. In other embodiments, a first step can be provided on the surface of the hole wall of the first plug-in portion 31 facing the plug-in hole 22, and a second step that can contact the first step is provided on the hole wall of the plug-in hole 22. The steps that contact each other can also limit the first plug-in portion 31, preventing the first plug-in portion 31 from entering the chamber 21 and contacting the seed crystal rod 1 to damage the seed crystal rod 1.

[0032] The seed crystal rod clamping device may include a fixing member 4, which is sleeved on the main body 2 and presses against the stopper 3 inwardly along the radial direction of the main body 2. Figure 1 and Figure 2The inner wall surface of the fixing member 4 can abut against the limit member 3, preventing the second plug-in portion 32 from being separated from the plug-in slot 11, and can also prevent the first plug-in portion 31 from being separated from the plug-in hole 22, preventing the limit member 3 from being separated from the seed crystal rod 1 and the main body 2. At the same time, the fixing member 4 abutting against the limit member 3 also makes the limit member 3 more stable, and the limit member 3 is not easy to shift. Taking the above-mentioned main body 2 as a columnar example, the fixing member 4 can be constructed in a circular ring shape, so that after the circular ring-shaped fixing member 4 is set on the main body 2, it is not easy to cause the seed crystal rod clamping device to tilt.

[0033] When the seed crystal rod clamping device is used, the fixing part 4 also needs to be suspended above the crucible in the single crystal furnace. In order to prevent the fixing part 4 from falling, a flange 24 can be provided outside the main body 2. The flange 24 is provided below the fixing part 4 to support the fixing part 4. For details, please refer to Figure 1 and Figure 2 In this way, when the fixing member 4 is suspended above the crucible in the single crystal furnace, the fixing member 4 will not fall due to the presence of the flange 24.

[0034] The cavity wall of the chamber 21 may be a polished surface. The cavity wall of the chamber 21 may be polished to form a polished surface and be smoother, so as to prevent the surface of the seed crystal rod 1 from being scratched by the cavity wall of the chamber 21 when the seed crystal rod 1 extends from the opening into the chamber 21, and to prevent defects in the prepared crystal caused by scratches on the surface of the seed crystal rod 1.

[0035] The seed crystal rod clamping device needs to be able to maintain good mechanical properties in a high temperature environment while avoiding contamination of the crystal growth process. At this time, the main body 2 and the limiter 3 can be made of tungsten or molybdenum. Tungsten and molybdenum materials have a very high melting point, good thermal stability and strength. During the preparation of the crystal, the high melting point and good thermal stability enable the seed crystal rod clamping device to maintain its shape and mechanical strength in a high temperature environment, ensuring that the preparation of the crystal can be carried out stably. At the same time, the high melting point and good thermal stability prevent the tungsten and molybdenum materials from volatilizing due to high temperatures, and the seed crystal rod clamping device will not affect the purity of the crystal preparation. Good strength also ensures the service life of the seed crystal rod clamping device.

[0036] According to the second aspect of the present disclosure, a single crystal furnace is also provided, comprising a seed rod clamping device according to any one of the above-mentioned embodiments, and having all its beneficial effects, which will not be described in detail here.

[0037] The preferred embodiments of the present disclosure are described in detail above in conjunction with the accompanying drawings; however, the present disclosure is not limited to the specific details in the above embodiments. Within the technical concept of the present disclosure, a variety of simple modifications can be made to the technical solution of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.

[0038] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present disclosure will not further describe various possible combinations.

[0039] In addition, various embodiments of the present disclosure may be arbitrarily combined, and as long as they do not violate the concept of the present disclosure, they should also be regarded as the contents disclosed by the present disclosure.

Claims

1. A seed crystal rod clamping device, characterized in that: It includes a main body and a limiting piece, wherein the main body is provided with a chamber with an opening, the chamber is used to be buckled on one end of a seed crystal rod, the limiting piece passes through the cavity wall of the chamber, and the limiting piece is used to be plugged and matched with the seed crystal rod to prevent the seed crystal rod from leaving the chamber.

2. The seed crystal rod clamping device according to claim 1, characterized in that: The main body is columnar in structure, the limiting members are in an even number, and the limiting members are symmetrically arranged in the radial direction of the main body.

3. The seed crystal rod clamping device according to claim 1, characterized in that: The seed crystal rod clamping device also includes an insertion groove opened on the outer circumference of the seed crystal rod, and the main body is provided with an insertion hole for the limiting member to pass through, and the limiting member includes a first insertion part and a second insertion part, the second insertion part is used to be plugged and matched with the insertion groove, and the first insertion part is used to be plugged and matched with the insertion hole.

4. The seed crystal rod clamping device according to claim 3, characterized in that: A first slope is provided on the surface of the first plug-in portion facing the hole wall of the plug-in hole, and a second slope that can abut against the first slope is provided on the hole wall of the plug-in hole. The first slope and the second slope are used to prevent the first plug-in portion from entering the cavity.

5. The seed crystal rod clamping device according to claim 3, characterized in that: A first step is arranged on the surface of the hole wall of the first plug-in portion facing the plug-in hole, and a second step capable of abutting against the first step is arranged on the hole wall of the plug-in hole. The first step and the second step are used to prevent the first plug-in portion from entering the cavity.

6. The seed crystal rod clamping device according to claim 1, characterized in that: The seed crystal rod clamping device comprises a fixing piece, which is sleeved on the main body and presses against the limiting piece inwardly along the radial direction of the main body.

7. The seed crystal rod clamping device according to claim 6, characterized in that: A flange is also arranged outside the main body, and the flange is arranged below the fixing member to support the fixing member.

8. The seed crystal rod clamping device according to claim 1, characterized in that: The cavity wall of the cavity is a polished surface.

9. The seed crystal rod clamping device according to claim 1, characterized in that: The main body and the limiting member are made of tungsten or molybdenum.

10. A single crystal furnace, characterized in that: A seed crystal rod clamping device comprising any one of claims 1-9.

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