Disilane cooling treatment device

Abstract

The utility model discloses a disilane cooling treatment device which comprises a main gas cylinder, a gas storage cylinder and a cooling assembly, the gas storage cylinder is arranged on one side of the main gas cylinder, the cooling assembly is fixedly installed between the main gas cylinder and the gas storage cylinder, gas storage is carried out on disilane through the main gas cylinder, the disilane is cooled through the cooling assembly, and the cooling effect of the disilane is improved. The cooling assembly comprises a cooling bottle, a cooler, a cooling pipe, an air inlet pump and a temperature detector, and the cooling bottle is fixedly mounted between the main gas cylinder and the gas storage cylinder; according to the disilane cooling device, the temperature of disilane gas can be rapidly and effectively reduced, the cooling efficiency is improved, the flammable and explosive characteristics of disilane are considered in the design of the device, the operation safety is ensured through accurate temperature control of the temperature detector, impurities in the gas can be removed through the filter in the device, and the disilane cooling device is convenient to use. The cooling system is prevented from being blocked and damaged, and the service life of the device is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of disilane equipment, in particular to a disilane cooling treatment device. Background Art

[0002] In the semiconductor manufacturing industry, disilane (Si2H6) is an important gas raw material used in processes such as epitaxial growth. Disilane is an inorganic compound that is a colorless, transparent gas at room temperature and pressure with a pungent odor. It spontaneously ignites in the air. When the concentration is above 0.2%, it will emit flames. When the concentration is below 0.2%, it will undergo an oxidation reaction to produce white silicon dioxide. Disilane explodes when in contact with sulfur hexafluoride. Disilane is highly flammable and explosive, so special care must be taken when handling and discharging it.

[0003] In the semiconductor manufacturing process, disilane is a commonly used gas raw material, but its processing and discharge require special attention to safety and environmental protection issues. In 202223242886.X, the existing disilane processing device is not equipped with a cooling device, which may have problems such as low cooling efficiency and high safety risks. Therefore, the utility model proposes a disilane cooling processing device to solve the problems existing in the prior art. Utility Model Content

[0004] In view of the above problems, the purpose of the utility model is to propose a disilane cooling treatment device, which can quickly and effectively reduce the temperature of disilane gas and improve the cooling efficiency. The design of the device takes into account the flammable and explosive properties of disilane, and ensures the safety of operation through precise temperature control and temperature detectors. The filter in the device can remove impurities in the gas, prevent blockage and damage to the cooling system, and extend the service life of the device.

[0005] To achieve the purpose of the utility model, the utility model is implemented through the following technical solutions: a disilane cooling treatment device, comprising a main gas cylinder, a gas storage cylinder and a cooling assembly, a gas storage cylinder is arranged on one side of the main gas cylinder, a cooling assembly is fixedly installed between the main gas cylinder and the gas storage cylinder, disilane is stored by the main gas cylinder, the disilane is cooled by the cooling assembly, and the cooled disilane is stored and used by the arrangement of the gas storage cylinder, the cooling assembly comprises a cooling bottle, a cooler, a cooling pipe, an air intake pump and a temperature detector, a cooling bottle is fixedly installed between the main gas cylinder and the gas storage cylinder, a cooler is fixedly installed on the outside of the cooling bottle, an output unit of the cooler is connected to a cooling pipe, the cooling pipe is arranged inside the cooling bottle, an air intake pump is fixedly installed between the main gas cylinder and the cooling bottle, a temperature detector is fixedly installed on the front of the cooling bottle, a temperature probe is arranged at the output end of the temperature detector and the temperature probe is arranged inside the cooling bottle.

[0006] A further improvement is that a filter is fixedly installed inside the main gas cylinder, an air guide port is provided at the bottom of the filter, and a filter element is installed inside the filter.

[0007] A further improvement is that an air intake pipe is fixedly mounted on one side of the main gas cylinder, and the air intake pipe is connected to the inside of the main gas cylinder.

[0008] A further improvement is that an air pump is fixedly installed on one side of the cooling bottle, and a connecting pipe is installed between the cooling bottle and the gas storage bottle.

[0009] A further improvement is that a regulating valve is fixedly mounted on the surface of the connecting pipe, and a rotating shaft is arranged below the connecting pipe.

[0010] A further improvement is that a fixing seat is fixedly mounted on one side of the cooling bottle, and a plurality of gas storage bottles are mounted above the fixing seat.

[0011] A further improvement is that a control button is fixedly mounted on one side of the cooling bottle, and the control button is electrically connected to the refrigeration component for use.

[0012] The beneficial effects of the utility model are as follows: the utility model can quickly and effectively reduce the temperature of disilane gas and improve the cooling efficiency. The design of the device takes into account the flammable and explosive characteristics of disilane. The precise temperature control and of the temperature detector ensure the safety of operation. The filter in the device can remove impurities in the gas, prevent the blockage and damage of the cooling system, and extend the service life of the device. By optimizing the cooling process and improving the cooling efficiency, the device can reduce energy consumption, reduce operating costs, and reduce the impact on the environment. The regulating valve is used to pressurize the cooled gas. The increase in pressure will change the boiling points of different components in the gas, which can increase the difference in boiling points between different components, improve the subsequent separation and purification effect, and help improve the purity of the finished product. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0014] Figure 1 It is a front cross-sectional view of the utility model;

[0015] Figure 2 It is a schematic diagram of a gas storage cylinder of the present utility model.

[0016] Among them: 1. Main gas cylinder; 2. Gas storage cylinder; 3. Cooling bottle; 4. Cooler; 5. Cooling pipe; 6. Air intake pump; 7. Temperature detector; 8. Filter; 9. Air guide port; 10. Filter element; 11. Air intake pipe; 12. Air pump; 13. Connecting pipe; 14. Regulating valve; 15. Rotating shaft; 16. Fixed seat; 17. Control button. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the practical embodiment to clearly and completely describe the technical solution in the practical embodiment. Obviously, the described embodiment is only a part of the embodiment of the practical, not all of the embodiments. Based on the embodiment in the practical, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this practical.

[0018] In the description of this utility model, it should be noted that, unless otherwise clearly specified and limited, the terms installation, connection and connection should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0019] according to Figure 1 , Figure 2 As shown, this embodiment provides a disilane cooling treatment device, including a main gas cylinder 1, a gas storage cylinder 2 and a cooling assembly, the gas storage cylinder 2 is arranged on one side of the main gas cylinder 1, and the cooling assembly is fixedly installed between the main gas cylinder 1 and the gas storage cylinder 2, the disilane is stored by the main gas cylinder 1, the disilane is cooled by the cooling assembly, and the cooled disilane is stored and used by the gas storage cylinder 2, the cooling assembly includes a cooling bottle 3, a cooler 4, a cooling pipe 5, an air intake pump 6 and a temperature detector 7, the cooling bottle 3 is fixedly installed between the main gas cylinder 1 and the gas storage cylinder 2, and the cooler 4 is fixedly installed on the outside of the cooling bottle 3 The output of the cooler 4 is connected to the cooling tube 5, and the cooling tube 5 is arranged inside the cooling bottle 3. An air intake pump 6 is fixedly installed between the main gas bottle 1 and the cooling bottle 3. A temperature detector 7 is fixedly installed on the front of the cooling bottle 3. A temperature probe is arranged at the output end of the temperature detector 7 and the temperature probe is arranged inside the cooling bottle 3. By introducing the gas of the main gas bottle 1 into the cooling bottle 3, the cooler drives the cooling tube 5 to cool down the cooling bottle 3, and cools down the gas inside. The gas is introduced through the setting of the air intake pump 6, and the temperature of the gas introduced into the cooling bottle 3 is observed through the temperature detector 7.

[0020] A filter 8 is fixedly installed inside the main gas cylinder 1, and an air guide port 9 is provided at the bottom of the filter 8. A filter element 10 is installed inside the filter 8. The incoming gas is further filtered through the filter 8, and the gas is introduced through the air guide port 9. The gas is adsorbed by the filter element 10. The filter element 10 is made of filter paper and activated carbon. The filter paper can effectively filter out particulate matter in the gas, and the activated carbon can adsorb harmful gases.

[0021] An air intake pipe 11 is fixedly installed on one side of the main gas cylinder 1 . The air intake pipe 11 is connected to the inside of the main gas cylinder 1 . Gas is introduced through the setting of the air intake pipe 11 .

[0022] An air pump 12 is fixedly installed on one side of the cooling bottle 3, and a connecting pipe 13 is installed between the cooling bottle 3 and the gas storage bottle 2. The gas is introduced into the connecting pipe 13 through the air pump 12, and the cooled gas is introduced into the gas storage bottle 2 through the connecting pipe 13.

[0023] A regulating valve 14 is fixedly mounted on the surface of the connecting pipe 13 , a rotating shaft 15 is disposed below the connecting pipe 13 , the air intake volume is controlled by the regulating valve 14 , and the connecting pipe 13 is mounted on the gas storage cylinder 2 via the rotating shaft 15 .

[0024] A fixing seat 16 is fixedly mounted on one side of the cooling bottle 3 , and a plurality of gas storage cylinders 2 are mounted above the fixing seat 16 . The setting of the fixing seat 16 facilitates the storage and use of the plurality of gas storage cylinders 2 .

[0025] A control button 17 is fixedly mounted on one side of the cooling bottle 3 . The control button 17 and the refrigeration component are electrically connected to each other for use. The refrigeration component is controlled by the control button 17 .

[0026] When the disilane cooling treatment device is used, the disilane is stored through the main gas cylinder 1, the disilane is cooled through the cooling component, and the cooled disilane is stored and used through the setting of the gas storage cylinder 2, and the gas of the main gas cylinder 1 is introduced into the cooling bottle 3, and the cooler 4 drives the cooling pipe 5 to cool the cooling bottle 3, so as to cool the gas inside, and the gas is introduced through the setting of the air intake pump 6, and the temperature of the gas introduced into the cooling bottle 3 is observed through the temperature detector 7, and the gas is introduced through the air guide port 9, and the gas intake is set by the filter element 10. The adsorption treatment filter element 10 is made of filter paper and activated carbon. The filter paper can effectively filter out particulate matter in the gas, and the activated carbon can adsorb harmful gases. The gas is introduced through the setting of the air inlet pipe 11, and the gas is introduced into the connecting pipe 13 through the vacuum pump 12. The cooled gas is introduced into the gas cylinder 2 through the connecting pipe 13, and the air intake volume is controlled by the regulating valve 14. The connecting pipe 13 and the gas cylinder 2 are installed through the rotating shaft 15. The setting of the fixing seat 16 facilitates the storage and use of multiple groups of gas cylinders 2, and the refrigeration component is controlled by the control button 17.

[0027] The above shows and describes the basic principles, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A disilane cooling treatment device, comprising a main gas cylinder (1), a gas storage cylinder (2) and a cooling assembly, characterized in that: A gas storage bottle (2) is arranged on one side of the main gas bottle (1), and a cooling assembly is fixedly installed between the main gas bottle (1) and the gas storage bottle (2), and the cooling assembly comprises a cooling bottle (3), a cooler (4), a cooling pipe (5), an air intake pump (6) and a temperature detector (7). The cooling bottle (3) is fixedly installed between the main gas bottle (1) and the gas storage bottle (2), and the cooler (4) is fixedly installed on the outside of the cooling bottle (3), and the output of the cooler (4) is connected to the cooling pipe (5), and the cooling pipe (5) is arranged inside the cooling bottle (3). The air intake pump (6) is fixedly installed between the main gas bottle (1) and the cooling bottle (3), and the temperature detector (7) is fixedly installed on the front of the cooling bottle (3).

2. A disilane cooling treatment device according to claim 1, characterized in that: A filter (8) is fixedly installed inside the main gas cylinder (1), a gas guide port (9) is provided at the bottom of the filter (8), and a filter element (10) is installed inside the filter (8), and the incoming gas is further filtered by the filter (8) for use.

3. A disilane cooling treatment device according to claim 1, characterized in that: An air intake pipe (11) is fixedly mounted on one side of the main gas cylinder (1), and the air intake pipe (11) is connected to the interior of the main gas cylinder (1).

4. A disilane cooling treatment device according to claim 1, characterized in that: An air pump (12) is fixedly mounted on one side of the cooling bottle (3), and a connecting pipe (13) is mounted between the cooling bottle (3) and the gas storage bottle (2).

5. A disilane cooling treatment device according to claim 4, characterized in that: A regulating valve (14) is fixedly mounted on the surface of the connecting pipe (13), and a rotating shaft (15) is arranged below the connecting pipe (13).

6. A disilane cooling treatment device according to claim 1, characterized in that: A fixing seat (16) is fixedly mounted on one side of the cooling bottle (3), and a plurality of gas storage bottles (2) are mounted above the fixing seat (16).

7. A disilane cooling treatment device according to claim 1, characterized in that: A control button (17) is fixedly mounted on one side of the cooling bottle (3), and the control button (17) is electrically connected to the refrigeration component for use.

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