Temperature detection device used in high-precision plasma cavity

Abstract

The utility model relates to a temperature detection device used in a high-precision plasma cavity, which belongs to the technical field of plasma temperature detection and comprises a thermocouple instrument main body, a protective sleeve is fixed at the lower end of the outer surface of the thermocouple instrument main body, and a dismounting sleeve is arranged on the outer surface of the thermocouple instrument main body. A connecting block is fixed to the outer surface of the protective sleeve, an inserting block is fixed to the outer surface of the disassembling and assembling sleeve, a T-shaped groove is formed in the lower end of the connecting block, a disassembling and assembling assembly used for being fixedly connected with the connecting block is arranged in the inserting block, and the disassembling and assembling assembly comprises two limiting blocks slidably connected with the interior of the inserting block. According to the temperature detection device used in the high-precision plasma cavity, through the protection sleeve, the dismounting sleeve, the connection block, the insertion block and the dismounting assembly, when a thermocouple measures the temperature of plasma, the dismounting sleeve and the protection sleeve can be dismounted, so that a thermocouple wire of the thermocouple can directly measure the temperature in the plasma cavity; and the accuracy of temperature detection in the plasma cavity can be ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma temperature detection, in particular to a temperature detection device used in a high-precision plasma cavity. Background Art

[0002] Plasma, also known as plasma, is an ionized gaseous substance composed of positive and negative ions produced by the ionization of atoms and atomic groups after some of their electrons have been deprived. It is a macroscopic electrically neutral ionized gas with a scale larger than the Debye length. Plasma is the fourth state of matter different from solid, liquid and gas. Matter is composed of molecules, molecules are composed of atoms, and atoms are composed of positively charged nuclei and negatively charged electrons surrounding them.

[0003] When it is necessary to detect the temperature in the plasma chamber, a thermocouple sensor is usually used to detect the temperature of the plasma gas. At present, a protective cover is usually fixed to the outside of the galvanic wire of the thermocouple instrument on the market to protect the galvanic wire, and a detection hole is opened at the lower end of the protective cover to facilitate the galvanic wire to measure the temperature of the plasma. However, because the protective cover and the thermocouple sensor are usually fixed, when the thermocouple is inserted into a storage device that stores plasma, the protective cover will also be plugged into the plasma storage device. When the galvanic wire measures the temperature in the plasma chamber, the protective cover will isolate a certain temperature, resulting in poor accuracy of the temperature measured by the thermocouple. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a temperature detection device for use in a high-precision plasma chamber, which has the advantages of accurate detection and solves the problem of inaccurate detection.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a temperature detection device for a high-precision plasma chamber, comprising a thermocouple instrument body, a protective sleeve is fixed at the lower end of the outer surface of the thermocouple instrument body, a disassembly sleeve is provided on the outer surface of the thermocouple instrument body, a connecting block is fixed on the outer surface of the protective sleeve, an insert block is fixed on the outer surface of the disassembly sleeve, a T-shaped slot is provided at the lower end of the connecting block, and a disassembly assembly for connecting and fixing the insert block with the connecting block is provided inside the insert block;

[0006] The disassembly and assembly component includes two limit blocks that are slidably connected to the inside of the plug-in block, and a stop block is fixed to the opposite ends of the left and right limit blocks. A support plate is slidably connected to the outer surface of the limit block, and a vertical rod is fixed to the lower end of the limit block. The disassembly and assembly component also includes a pressing structure arranged at the lower ends of the two vertical rods for driving them to move.

[0007] Furthermore, the plug block is plugged into the inner side of the T-slot, and both left and right walls of the inner cavity of the T-slot are provided with limiting holes, and the limiting block is located inside the plug block and on the inner side of the limiting hole.

[0008] Furthermore, circular holes are provided at both left and right ends of the insert block, and the limit block is slidably connected to the inner side of the circular hole.

[0009] Furthermore, a through hole is opened on one side opposite to the two support plates, the limit block is slidably connected to the inner side of the through hole, and the two support plates are fixed to the top of the inner cavity of the insert block.

[0010] Furthermore, the pressing structure includes a pressing block fixed to the lower ends of the two vertical poles, a blocking block is fixed to the outer surface of the pressing block, a support rod is slidably connected to the inside of the pressing block, a first spring is sleeved on the outer surface of the support rod, and the pressing structure also includes a second spring fixed to the side opposite to the support plate and the vertical pole.

[0011] Furthermore, pressing holes are provided at both left and right ends of the insert block, and the pressing block is slidably connected to the inner side of the pressing hole.

[0012] Furthermore, a slot hole is provided on one side of the two pressing blocks facing away from each other, the support rod is slidably connected to the inner side of the slot hole, and the support rod is fixed inside the insert block.

[0013] Furthermore, a fixing hole is provided on one side opposite to the two blocking blocks, and the pressing block is fixed to the inner side of the fixing hole.

[0014] Compared with the prior art, the technical solution of this application has the following beneficial effects:

[0015] The temperature detection device for a high-precision plasma chamber is provided with a protective cover, a disassembly cover, a connecting block, an insert block and a disassembly assembly. When a thermocouple measures the temperature of plasma, the disassembly cover and the protective cover can be separated, so that the thermocouple wire can directly measure the temperature in the plasma chamber, thereby ensuring the accuracy of the temperature detection in the plasma chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the structure of the connection between the plug block and the connecting block of the utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the connecting block and the T-shaped slot of the utility model;

[0019] Figure 4 It is a structural schematic diagram of the disassembly and assembly components of the utility model.

[0020] In the figure: 1 thermocouple instrument body, 2 protective cover, 3 disassembly cover, 4 connecting block, 5 insert block, 6 T-slot, 61 limit block, 62 stop block, 63 support plate, 64 vertical rod, 65 pressing block, 66 blocking block, 67 first spring, 68 support rod, 69 second spring. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] See also Figure 1-4 In this embodiment, a temperature detection device for a high-precision plasma chamber includes a thermocouple instrument body 1, a protective sleeve 2 is fixed to the lower end of the outer surface of the thermocouple instrument body 1, a disassembly sleeve 3 is provided on the outer surface of the thermocouple instrument body 1, a connecting block 4 is fixed to the outer surface of the protective sleeve 2, an insert block 5 is fixed to the outer surface of the disassembly sleeve 3, and the insert block 5 is an annular block with a hollow interior, a T-shaped slot 6 is provided at the lower end of the connecting block 4, and the protective sleeve 2 is fixed to the top end of the inner cavity of the T-shaped slot 6, so that the connecting block 4 can be fixed to the outside of the protective sleeve 2, and a disassembly assembly component for connecting and fixing it to the connecting block 4 is provided inside the insert block 5.

[0023] See also Figure 1 , Figure 3 and Figure 4 The disassembly and assembly components in this embodiment include two limit blocks 61 slidably connected to the inside of the plug block 5, and a stopper 62 is fixed to the opposite ends of the left and right limit blocks 61. A support plate 63 is slidably connected to the outer surface of the limit block 61, and a vertical rod 64 is fixed to the lower end of the limit block 61. The disassembly and assembly components also include a pressing structure arranged at the lower ends of the two vertical rods 64 for driving them to move.

[0024] Among them, the plug-in block 5 is inserted into the inner side of the T-slot 6 so that the plug-in block 5 can be inserted into the T-slot 6 of the connecting block 4. The left and right walls of the inner cavity of the T-slot 6 are provided with limiting holes. The limiting blocks 61 are located inside the plug-in and on the inner side of the limiting holes. The two limiting blocks 61 are moved to the inner side of the limiting holes, so that the plug-in block 5 can be fixed in the T-slot 6 of the connecting block 4, so that the protective cover 2 and the disassembly cover 3 can be installed and fixed.

[0025] Moreover, round holes are formed at both left and right ends of the insert block 5 , and the limit block 61 is slidably connected to the inner side of the round hole, so that the limit block 61 can move into or out of the inner side of the insert block 5 through the round hole.

[0026] In addition, through holes are provided on opposite sides of the two support plates 63, and the limit blocks 61 are slidably connected to the inner sides of the through holes. The two support plates 63 are fixed to the top of the inner cavity of the plug block 5, so that the limit blocks 61 can slide inside the support plates 63, so that the support plates 63 can support the limit blocks 61, so that the limit blocks 61 can be accurately moved out of the interior of the plug block 5, and the limit blocks 61 can be prevented from falling off from the support plates 63 by the stoppers 62 and the vertical rods 64.

[0027] See also Figure 4 The pressing structure in this embodiment includes a pressing block 65 fixed to the lower ends of the two vertical rods 64, a blocking block 66 is fixed to the outer surface of the pressing block 65, a support rod 68 is slidably connected to the inside of the pressing block 65, and a first spring 67 is sleeved on the outer surface of the support rod 68. The pressing structure also includes a second spring 69 fixed to the side opposite to the support plate 63 and the vertical rod 64.

[0028] Secondly, pressing holes are provided at both left and right ends of the inserting block 5 , and the pressing block 65 is slidably connected to the inner side of the pressing holes so that the pressing block 65 can move into the inner side of the inserting block 5 .

[0029] In addition, slots are formed on opposite sides of the two pressing blocks 65 , and the support rods 68 are slidably connected to the inner sides of the slots. The support rods 68 are fixed inside the inserting block 5 , so that the pressing blocks 65 can slide outside the support rods 68 .

[0030] In addition, fixing holes are formed on opposite sides of the two blocking blocks 66 , and the pressing block 65 is fixed inside the fixing holes, so that the blocking block 66 can be fixed outside the pressing block 65 to prevent the pressing block 65 from being completely moved into the inside of the inserting block 5 .

[0031] The working principle of the above embodiment is:

[0032] During use, when it is necessary to detect the temperature in the plasma chamber, the two pressing blocks 65 are pressed to move relative to each other, so that the two pressing blocks 65 can gradually move into the interior of the insert block 5, and the support rod 68 can gradually move into the interior of the pressing block 65, so that the pressing block 65 can squeeze the first spring 67. While the two pressing blocks 65 move relative to each other, the pressing block 65 drives the two limiting blocks 61 to move relative to each other through the vertical rod 64, so that the two limiting blocks 61 can move out of the two limiting holes of the T-shaped groove 6 of the connecting block 4 and move into the interior of the insert block 5, so that the vertical rod 64 and the support plate 63 can squeeze the second spring 69, so that the insert block 5 can be pulled out from the T-shaped groove 6 of the connecting block 4, that is, the protective cover 2 and the disassembly cover 3 can be disassembled, so that the electric wire of the thermocouple instrument main body 1 can directly detect the temperature in the plasma chamber, thereby enhancing the accuracy of the temperature measurement of the thermocouple instrument main body 1.

[0033] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0034] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A temperature detection device for a high-precision plasma chamber, comprising a thermocouple instrument body (1), characterized in that: A protective sleeve (2) is fixed to the lower end of the outer surface of the thermocouple instrument body (1), a disassembly sleeve (3) is provided on the outer surface of the thermocouple instrument body (1), a connecting block (4) is fixed to the outer surface of the protective sleeve (2), an inserting block (5) is fixed to the outer surface of the disassembly sleeve (3), a T-shaped groove (6) is provided at the lower end of the connecting block (4), and a disassembly assembly for connecting and fixing the inserting block (5) with the connecting block (4) is provided inside the inserting block (5); The disassembly assembly comprises two limit blocks (61) slidably connected to the inside of the insert block (5), a stop block (62) is fixed to the opposite ends of the left and right limit blocks (61), a support plate (63) is slidably connected to the outer surface of the limit block (61), a vertical rod (64) is fixed to the lower end of the limit block (61), and the disassembly assembly also comprises a pressing structure arranged at the lower ends of the two vertical rods (64) for driving them to move.

2. A high-precision temperature detection device for a plasma chamber according to claim 1, characterized in that: The insert block (5) is inserted into the inner side of the T-shaped slot (6), and both left and right walls of the inner cavity of the T-shaped slot (6) are provided with limiting holes, and the limiting block (61) is located inside the insert block and on the inner side of the limiting hole.

3. The temperature detection device for high-precision plasma chamber according to claim 1, characterized in that: The left and right ends of the insert block (5) are both provided with round holes, and the limit block (61) is slidably connected to the inner side of the round hole.

4. The temperature detection device for high-precision plasma chamber according to claim 1, characterized in that: A through hole is provided on one side opposite to the two support plates (63), the limit block (61) is slidably connected to the inner side of the through hole, and the two support plates (63) are fixed to the top of the inner cavity of the insert block (5).

5. The temperature detection device for high-precision plasma chamber according to claim 1, characterized in that: The pressing structure comprises a pressing block (65) fixed to the lower ends of the two vertical rods (64), a blocking block (66) being fixed to the outer surface of the pressing block (65), a supporting rod (68) being slidably connected inside the pressing block (65), a first spring (67) being sleeved on the outer surface of the supporting rod (68), and the pressing structure further comprises a second spring (69) fixed to the side opposite to the supporting plate (63) and the vertical rod (64).

6. A high-precision temperature detection device for a plasma chamber according to claim 5, characterized in that: The left and right ends of the insert block (5) are both provided with pressing holes, and the pressing block (65) is slidably connected to the inner side of the pressing hole.

7. The temperature detection device for high-precision plasma chamber according to claim 5, characterized in that: A slot hole is provided on the opposite side of the two pressing blocks (65), and the support rod (68) is slidably connected to the inner side of the slot hole. The support rod (68) is fixed inside the inserting block (5).

8. The temperature detection device for high-precision plasma chamber according to claim 5, characterized in that: The two blocking blocks (66) are each provided with a fixing hole on one side opposite to the other, and the pressing block (65) is fixed to the inner side of the fixing hole.

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