Movable concentration detection device

Abstract

The utility model provides a movable concentration detection device, which relates to the technical field of semiconductor cleaning devices and comprises a movable main body, at least a concentration meter host is arranged on the movable main body, an optical fiber tube is connected onto the concentration meter host, a concentration meter sampling head is arranged at the end part of the optical fiber tube, and the concentration meter sampling head is connected with a concentration sampling tube on a liquid medicine tank. The optical fiber tube is sleeved with a main protection structure, the two ends of the optical fiber tube extend out of the two ends of the main protection structure, the optical fiber tube and the main protection structure are connected through a protection connector, at least a first protection layer and a second protection layer are arranged between the protection connector and the optical fiber tube, and the first protection layer is located between the second protection layer and the optical fiber tube. The concentration detection device has the beneficial effect that the optical fiber tube is prevented from being damaged on the premise that the concentration detection device is movable.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor cleaning devices, in particular to a mobile concentration detection device. Background Art

[0002] In the semiconductor industry, cleaning is a very important process in the silicon wafer processing. After the silicon wafer is polished, there are a lot of contaminants on the surface, most of which are particles from the polishing process. The polishing process is a chemical / mechanical process that concentrates a large number of particles. In order to inspect the silicon wafer, it is necessary to clean it to remove most of the particles. During cleaning, chemical agents (mainly liquid chemical reagents that can react with silicon or silicon process-related compounds) are combined with the use of ultrasonic vibration plates in the cleaning tank to remove particles, organic contamination, metal contamination, surface roughness, natural oxide layer and other unwanted excess compounds to obtain a clean wafer surface process.

[0003] It is very important to ensure the stability of the concentration of the drug solution during the cleaning process. The existing method for ensuring the stability of the drug solution concentration is to install a concentration meter on the drug solution tank to monitor the drug solution concentration.

[0004] Generally, each cleaning equipment is equipped with 3-4 chemical tanks. If each chemical tank is equipped with a concentration meter, the cost of the concentration meter alone is 1.2-2.4 million yuan, assuming that each concentration meter costs 400,000-600,000 yuan. During normal production, the concentration of each chemical tank is monitored regularly every 1-3 months and compared with the database. If the concentration trend is the same as that in the database, it is determined that there is no abnormality. If the data is abnormal, the concentration is determined to be abnormal. When an equipment produces abnormal products, the concentration meter is installed in the corresponding chemical tank to monitor the concentration of the chemical solution and compare it with the database.

[0005] However, since the optical fiber tube of the currently used optical fiber concentration meter is a vulnerable component, the concentration meter detection device is not easy to move and install, and the fixed installation is costly, so a mobile concentration detection device is needed to solve the above problems. Utility Model Content

[0006] The purpose of the utility model is to provide a mobile concentration detection device to solve the technical problem that the optical fiber concentration meter currently used in the prior art has a vulnerable component, which makes the concentration meter detection device inconvenient to move and install, and the fixed installation is costly. The preferred technical solution among the many technical solutions provided by the utility model can produce many technical effects as described below.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] The utility model provides a mobile concentration detection device, comprising a mobile body, on which at least a concentration meter host is arranged, an optical fiber tube is connected to the concentration meter host, a concentration meter sampling head is arranged at the end of the optical fiber tube, and the concentration meter sampling head is connected to a concentration sampling tube on a liquid medicine tank, wherein:

[0009] A main protective structure is sleeved on the outside of the optical fiber tube, and two ends of the optical fiber tube extend out from two ends of the main protective structure. The optical fiber tube and the main protective structure are connected via a protective joint, and at least a first protective layer and a second protective layer are arranged between the protective joint and the optical fiber tube, and the first protective layer is located between the second protective layer and the optical fiber tube.

[0010] Preferably, the main protection structure comprises a plurality of protection pipes and pipe joints, wherein:

[0011] Every two of the protection pipes are connected via a pipe joint;

[0012] The pipeline joint and the protection pipe are connected via a protection joint.

[0013] Preferably, a dewdrop-shaped limiting structure with openings at both ends is provided in the pipe joint / the protective joint.

[0014] Preferably, it further comprises a hook structure, wherein the hook structure is arranged between the pipe joint and the protective joint, and at least one hook structure is arranged.

[0015] Preferably, the first protective layer is made of silicone material, and the first protective layer is wrapped around the outside of the protective tube; the second protective layer is made of thermoplastic material, and the second protective layer is wrapped around the outside of the first protective layer.

[0016] Preferably, the mobile body further comprises a frame and a mobile assembly, wherein:

[0017] The frame includes a bottom structure, at least one middle structure and a top structure, the bottom structure is provided with a control device, the middle structure is provided with the concentration meter host, the top structure is provided with a display screen, and the display screen and the concentration meter host are both electrically connected to the control device;

[0018] The moving component is arranged at the bottom of the frame.

[0019] Preferably, the mobile body further includes a handle, and the handle is arranged on the frame.

[0020] Preferably, the protective tube is a corrugated tube, and the length of the corrugated tube is not more than two meters.

[0021] Preferably, the bellows is made of PFA material.

[0022] Preferably, the concentration sampling tube is made of PFA material, and the diameter of the concentration sampling tube is 3 / 4 inch.

[0023] The utility model provides a mobile concentration detection device, including a mobile main body, a concentration meter host is arranged on the mobile main body, an optical fiber tube is connected to the concentration meter host, a concentration meter sampling head is arranged at the end of the optical fiber tube, and the concentration meter sampling head is connected to the concentration sampling tube on the medicine liquid tank. The concentration detection device can be moved to the vicinity of the medicine liquid tank where the concentration needs to be detected according to the use needs, and can be installed on the concentration sampling tube connected to the medicine liquid tank for use according to the use needs. A main protective structure is sleeved on the outer side of the optical fiber tube, and the main protective structure effectively protects the optical fiber tube disposed therein to prevent damage to the optical fiber tube during transportation and monitoring. A protective joint is arranged between the optical fiber tube and the main protective structure to ensure relative fixation of the joint, and can effectively prevent the optical fiber tube from being broken due to pulling during movement. A first protective layer and a second protective layer are arranged between the protective joint and the optical fiber tube, and a multi-layer protection is adopted to protect the optical fiber tube, so as to prevent damage to the optical fiber tube while ensuring mobility. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 It is a structural schematic diagram of the mobile concentration detection device of the utility model when it is in use;

[0026] Figure 2 It is a structural schematic diagram of the mobile concentration detection device of the utility model;

[0027] Figure 3 yes Figure 2 A schematic diagram of the enlarged structure at A in the middle;

[0028] Figure 4 yes Figure 2 A schematic diagram of the enlarged structure at B in the middle;

[0029] Figure 5 yes Figure 2 Schematic diagram of the enlarged structure at point C in the middle.

[0030] In the figure: 1, mobile body; 10, frame; 101, bottom structure; 102, middle structure; 103, top structure; 11, concentration meter host; 12, mobile component; 13, control device; 14, display screen; 15, handle;

[0031] 2. Optical fiber tube; 20. Protective tube; 21. First protective layer; 22. Second protective layer; 23. Protective joint; 24. Pipe joint; 25. Limiting structure; 26. Hooking structure;

[0032] 3. Concentration meter sampling head;

[0033] 4. Liquid tank; 41. Concentration sampling tube; 42. Circulating liquid outlet tube; 43. Circulating liquid return tube;

[0034] 51. Circulation pump; 52. Filter element; 53. Online heater. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described in detail below. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other implementation methods obtained by ordinary technicians in this field without creative work belong to the scope of protection of the utility model.

[0036] like Figure 1 As shown, the utility model provides a mobile concentration detection device, including a mobile body 1, on which at least a concentration meter host 11 is arranged, to which an optical fiber tube 2 is connected, at the end of which a concentration meter sampling head 3 is arranged, and the concentration meter sampling head 3 is connected to a concentration sampling tube 41 on a medicine solution tank 4.

[0037] Specifically, when in use, the medicine tank 4 is also connected with a circulating liquid outlet pipe 42 and a circulating liquid return pipe 43, the concentration sampling pipe 41 is connected with the circulating liquid outlet pipe 42, and the medicine tank 4, the circulating liquid outlet pipe 42, the concentration sampling pipe 41, and the circulating liquid return pipe 43 are sequentially arranged to form a circulation loop. Among them, the circulating liquid outlet pipe 42 is also provided with a circulation pump 51 and a filter element 52, the filter element 52 is arranged between the medicine tank 4 and the circulating pump 51, the concentration meter sampling head 3 is connected with the concentration sampling pipe 41, and the online heater 53 is connected with the circulating liquid return pipe 43, and is located between the concentration meter sampling head 3 and the medicine tank 4.

[0038] In actual production and use, the concentration sampling tube 41 is a 200mm PFA pipe installed between the circulating liquid outlet pipe 42 and the circulating liquid return pipe 43, and the pipe diameter is 3 / 4 inches. According to the detection needs, this mobile concentration detection device can be installed on the concentration sampling tube 41 of the corresponding drug liquid tank 4 to monitor the concentration of the drug liquid. By installing the concentration meter sampling head 3 on one side of the drug liquid tank 4, the concentration of the drug liquid can be effectively monitored. In normal production, the concentration of each drug liquid tank is regularly monitored every 1-3 months and compared with the database. If the concentration trend is the same as that of the database, there is no abnormality. If the data is abnormal, the concentration is abnormal.

[0039] When data abnormality is detected, the concentration meter sampling head 3 of the mobile concentration detection device can be installed on the medicine liquid tank 4 according to the use needs, and the concentration of the medicine liquid in the medicine liquid tank 4 can be monitored and compared with the database data, which can narrow the investigation scope and facilitate the investigation of abnormal concentration.

[0040] like Figure 2-Figure 5 As shown, a main protective structure is sleeved on the outer side of the optical fiber tube 2, and two ends of the optical fiber tube 2 extend from two ends of the main protective structure. The optical fiber tube 2 and the main protective structure are connected by a protective joint 23. At least a first protective layer 21 and a second protective layer 22 are arranged between the protective joint 23 and the optical fiber tube 2, and the first protective layer 21 is located between the second protective layer 22 and the optical fiber tube 2.

[0041] The optical fiber tube 2 in this embodiment is a glass optical fiber. By arranging a main protective structure on the outer side of the optical fiber tube 2, the main protective structure effectively protects the optical fiber tube 2 placed inside it to prevent the optical fiber tube 2 from being damaged during transportation and monitoring. A protective joint 23 is arranged between the optical fiber tube 2 and the main protective structure to ensure relative fixation of the joint, which can effectively prevent the optical fiber tube 2 from being broken due to pulling during movement. A first protective layer 21 and a second protective layer 22 are arranged between the protective joint 23 and the optical fiber tube 2. Multi-layer protection is adopted to protect the optical fiber tube 2 to prevent damage to the optical fiber tube 2 while ensuring that it can be moved.

[0042] As an optional embodiment, the main protection structure includes a plurality of protection tubes 20 and pipe joints 24. Among them, every two protection tubes 20 are connected by a pipe joint 24; the pipe joint 24 and the protection tube 20 are connected by a protection joint 23, ensuring that the connection between the pipe joint 24 and the protection tube 20 is relatively fixed to prevent disconnection during movement.

[0043] Specifically, in this embodiment, a dewdrop-shaped limiting structure 25 with openings at both ends is provided in the pipe joint 24 / protective joint 23 to further effectively protect the optical fiber tube 2 at the joint to increase the service life of the optical fiber tube 2.

[0044] As an optional embodiment, a hook structure 26 is further included, and the hook structure 26 is arranged between the pipe joint 24 and the protective joint 23, and at least one hook structure 26 is arranged. In this embodiment, a hook structure 26 is installed between each pipe joint 24 and the protective joint 23, and the main protective structure is hung by the hook structure 26 to make the overall line more neat.

[0045] As an optional implementation, the first protective layer 21 is made of silicone material and is wrapped around the outside of the protective tube 20 , and the second protective layer 22 is made of thermoplastic material and is wrapped around the outside of the first protective layer 21 .

[0046] Specifically, multiple protective tubes 20 are connected through a pipe joint 24, the optical fiber tube 2 is inserted into the protective tube 20, and the protective tube 20 and the optical fiber tube 2 are connected through the protective joint 23. When passing through the protective joint 23, the center position of the optical fiber tube 2 coincides with the center position of the protective joint 23, and a silicone sleeve is wrapped around the outer periphery of the optical fiber tube 2, and a thermoplastic tube is wrapped on the outer side of the silicone sleeve.

[0047] Since the optical fiber tube 2 is a vulnerable component, in order to prevent the optical fiber tube 2 from being damaged during the movement of the mobile body 1, a plurality of protective tubes 20 are provided to be connected via a pipe joint 24, and a silicone tube and a thermoplastic tube are provided between the pipe joint 24 and the optical fiber tube 2 to wrap the optical fiber tube 2. The optical fiber tube 2 is protected by the double-layer protection of the silicone tube and the thermoplastic tube, thereby preventing the optical fiber tube 2 from being damaged while ensuring that it can be moved.

[0048] In this embodiment, the protective tube 20 is a corrugated tube made of PFA material, which can prevent the optical fiber tube 2 located inside it from breaking. PFA material has the characteristics of wear resistance and corrosion resistance. The corrugated structure also has the characteristics of bending resistance, which is the preferred structure of the protective tube 20. The corrugated tube made of PFA material can ensure that the optical fiber tube 2 can move freely during installation, and prevent the optical fiber tube 2 from being damaged due to problems such as trampling.

[0049] By setting the length of each section of the protection tube 20 to be no more than two meters, the diameter of the corrugated tube is 3 / 4 inches. In this embodiment, the length of each section of the protection tube 20 is specifically set to 1.5 meters, a pipe joint 24 is set between each two adjacent sections of the protection tube 20, and a silicone tube and a thermoplastic tube are set in the pipe joint 24 to wrap the optical fiber tube 2. Under the premise of easy installation and use, the relative fixation of the protection tube 20 and the pipe joint 24 can be fully guaranteed, and the problem of pulling and breaking the optical fiber tube 2 caused by the movement of the protection tube 20 can be prevented, thereby improving the service life of this mobile concentration detection device.

[0050] As an optional embodiment, the mobile body 1 further includes a frame 10 and a moving component 12. The frame 10 includes a bottom structure 101, at least one middle structure 102 and a top structure 103, the bottom structure 101 is provided with a control device 13, the middle structure 102 is provided with a concentration meter host 11, and the top structure 103 is provided with a display screen 14, and the display screen 14 and the concentration meter host 11 are both electrically connected to the control device 13; the moving component 12 is arranged at the bottom of the frame 10.

[0051] In this embodiment, the mobile component 12 adopts a universal wheel structure. To ensure that the mobile concentration detection device can be used in a clean room, the frame 10 is made of stainless steel, and four universal wheels are installed at the bottom of the frame 10 for easy movement.

[0052] Optionally, a containment structure is provided on the periphery of each layer of the frame 10 to avoid the risk of objects placed in the layer structure falling.

[0053] As an optional embodiment, the mobile body 1 further includes a handle 15, which is disposed on the frame 10. The handle 15 is also made of stainless steel, so that the operator can push or pull the mobile concentration detection device to the vicinity of the device to be used through the handle 15 when in use; or push or pull the mobile concentration detection device away from the device after detection when it is not needed.

[0054] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A mobile concentration detection device, characterized in that: It comprises a mobile body, on which at least a concentration meter host is arranged, on which an optical fiber tube is connected, a concentration meter sampling head is arranged at the end of the optical fiber tube, and the concentration meter sampling head is connected to a concentration sampling tube on a liquid medicine tank, wherein: A main protective structure is sleeved on the outside of the optical fiber tube, and two ends of the optical fiber tube extend out from two ends of the main protective structure. The optical fiber tube and the main protective structure are connected via a protective joint, and at least a first protective layer and a second protective layer are arranged between the protective joint and the optical fiber tube, and the first protective layer is located between the second protective layer and the optical fiber tube.

2. A mobile concentration detection device according to claim 1, characterized in that: The main protection structure includes a plurality of protection pipes and pipe joints, wherein: Every two of the protection pipes are connected via a pipe joint; The pipeline joint and the protection pipe are connected via a protection joint.

3. A mobile concentration detection device according to claim 2, characterized in that: A dewdrop-shaped limiting structure with openings at both ends is arranged in the pipeline joint / the protective joint.

4. A mobile concentration detection device according to claim 2 or 3, characterized in that: It also includes a hook structure, which is arranged between the pipe joint and the protective joint, and at least one hook structure is arranged.

5. A mobile concentration detection device according to claim 2 or 3, characterized in that: The first protective layer is made of silicone material, and the first protective layer is wrapped around the outside of the protective tube. The second protective layer is made of thermoplastic material, and the second protective layer is wrapped around the outside of the first protective layer.

6. A mobile concentration detection device according to any one of claims 1 to 3, characterized in that: The mobile body also includes a frame and a mobile assembly, wherein: The frame includes a bottom structure, at least one middle structure and a top structure, the bottom structure is provided with a control device, the middle structure is provided with the concentration meter host, the top structure is provided with a display screen, and the display screen and the concentration meter host are both electrically connected to the control device; The moving component is arranged at the bottom of the frame.

7. A mobile concentration detection device according to claim 6, characterized in that: The mobile body also includes a handle, and the handle is arranged on the frame.

8. A mobile concentration detection device according to claim 2 or 3, characterized in that: The protective tube is a corrugated tube, and the length of the corrugated tube is not more than two meters.

9. A mobile concentration detection device according to claim 8, characterized in that: The bellows is made of PFA material.

10. A mobile concentration detection device according to claim 9, characterized in that: The concentration sampling tube is made of PFA material, and the diameter of the concentration sampling tube is 3 / 4 inch.

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