Test needle seat

Abstract

A test needle seat relates to the technical field of test devices and comprises a movable base, a first movable part, a second movable part, a third movable part and a mounting seat. The first moving part comprises a first moving block, a first sliding rod and a first driver, the first sliding rod and the first driver are installed on the moving base, and the first moving block can be pushed by the first driver to move on the first sliding rod; the second moving part comprises a second moving block, a second sliding rod and a second driver, the second sliding rod and the second driver are installed on the first moving block, the second sliding rod is perpendicular to the first sliding rod, and the second moving block can be pushed by the second driver to move on the second sliding rod; the third moving part comprises a third moving block, a third sliding rod and a third driver, the third sliding rod and the third driver are installed on the second moving block, and the third sliding rod is perpendicular to the first sliding rod and the second sliding rod; the mounting base is connected with the third moving block and used for mounting a to-be-tested piece.

Description

Technical Field

[0001] The present application relates to the technical field of testing devices, and in particular to a testing needle holder. Background Art

[0002] In the semiconductor manufacturing and packaging process, it is very important to accurately test different parts of a chip or wafer. Traditional testing methods often use a single needle or a few test needles to test one by one. This method is not only inefficient, but also easily limited by the test position and angle, resulting in insufficient test accuracy.

[0003] Utility model patent announcement number CN213240273U discloses a test electric probe mount, including a drive motor, an adjustable connecting plate, a pulley, a transmission belt, a drive micrometer, a manual knob, a bearing seat, a ball screw, a driven end pulley, a screw nut, a probe fixing plate, a linear guide, a probe connecting plate and a probe; the utility model reduces manual labor and improves the efficiency of operation and testing; it greatly reduces production and procurement costs; the overall design scheme takes into account the convenience of installation and the reliability of use; while achieving high-speed and high-precision electric, it also maintains the function of the original manual probe mount. However, the efficiency of adjusting the probe direction by the knob is low, which leads to reduced detection efficiency. Summary of the invention

[0004] In order to solve the problem of low efficiency in adjusting the direction of a probe mounting seat, the present application provides a testing needle seat.

[0005] In the first aspect, the present application provides a test needle holder adopting the following technical solution:

[0006] A testing needle seat comprises a moving base, a first moving part, a second moving part, a third moving part and a mounting seat; the first moving part comprises a first moving block, a first sliding rod and a first driver, the first sliding rod and the first driver are mounted on the moving base, and the first moving block can move on the first sliding rod under the push of the first driver; the second moving part comprises a second moving block, a second sliding rod and a second driver, the second sliding rod and the second driver are mounted on the first moving block, the second sliding rod is perpendicular to the first sliding rod, and the second moving block can move on the second sliding rod under the push of the second driver; the third moving part comprises a third moving block, a third sliding rod and a third driver, the third sliding rod and the third driver are mounted on the second moving block, the third sliding rod is perpendicular to the first sliding rod and the second sliding rod respectively, and the third moving block can move on the third sliding rod under the push of the third driver; the mounting seat is connected to the third moving block for mounting a piece to be tested.

[0007] By adopting the above technical solution, since the first sliding bar, the second sliding bar and the third sliding bar are perpendicular to each other, the mounting seat can move in different directions along different sliding bars under the push of each driver, thereby realizing accurate and efficient movement in any direction in the three-dimensional space. The moving block is connected by the driver, so that the driver's control over the movement is more direct and accurate, and responds quickly, avoiding the need to adjust the moving direction before each movement, so that the mounting seat can move the sample to be tested during the probe test, and move quickly in multiple directions without moving the detection probe, making the movement process more efficient.

[0008] Optionally, the movable base includes a second adjustment portion, the second adjustment portion includes a second adjustment handle and a second adjustment slide rail, the second adjustment slide rail is parallel to the second slide rod, and the second adjustment slide rail is connected to the first movable block.

[0009] Optionally, the mobile base includes a first adjustment portion, the first adjustment portion includes a first adjustment handle and a first adjustment slide rail, the first adjustment slide rail is parallel to the first slide rod, and the first adjustment slide rail is connected to the first adjustment slide rail.

[0010] Optionally, the mounting seat includes a third adjustment portion, the third adjustment portion includes a third adjustment handle and a third adjustment slide rail, the third adjustment slide rail is parallel to the third slide rod, and the third adjustment slide rail is connected to the third moving block.

[0011] By adopting the above technical scheme, since the movement instructions of the driver are pre-designed, but slight differences may occur in actual operation, the actual position of the mounting seat is fine-tuned by providing an adjustment part, and since the movement of the driver is relatively stable, that is, after the initial position is accurate, each subsequent movement will remain stable, it is only necessary to use the adjustment part to perform fine-tuning according to actual conditions at the beginning to complete the calibration of the test process. The first adjustment rail is parallel to the first slide bar, the second adjustment rail is parallel to the second slide bar, and the third adjustment rail is parallel to the third slide bar, so that the adjustment part can also adjust the actual position in three-dimensional space. The first adjustment part and the second adjustment part are included in the mobile base, and the third adjustment part is included in the mounting seat, which can optimize the installation space of each adjustment part, avoid the inconvenience of operating the adjustment handle, and facilitate the convenient operation of each adjustment part.

[0012] Optionally, the first moving part further includes a first stabilizing bar, and the first stabilizing bar connects the first driver and the first moving block.

[0013] Optionally, the second moving part further includes a second stabilizing bar, and the second stabilizing bar connects the second driver and the second moving block.

[0014] Optionally, the third moving part further includes a third stabilizing rod, and the third stabilizing rod connects the third driver and the third moving block.

[0015] By adopting the above technical solution, the stabilizing rod is connected to the driver and the moving block. During the driving process of the driver, the stability of the moving block needs to be ensured, but the sliding rod can generally only be installed at one end of the moving block. Maintaining stability only through the connection on one side will cause the moving block to impose a heavy load on the sliding rod during long-term use, resulting in inaccurate movement. Therefore, by adding a stabilizing rod to connect the driver and the moving block, since the driver and the sliding rod are connected to the same object, the stabilizing rod can work together with the sliding rod to keep the moving block stable during the movement, which is beneficial to maintaining stability during the sample detection process.

[0016] Optionally, the mounting base includes a mounting hole.

[0017] By adopting the above technical solution, the mounting hole can be used to fix the sample to be tested, so that the mounting seat can be adapted to fix different samples to be tested, thereby ensuring the stability of the sample to be tested during the measurement process.

[0018] In summary, the present application includes at least one of the following beneficial technical effects:

[0019] 1. The mounting seat can move in different directions along different slide bars under the push of each driver, thereby realizing accurate and efficient movement in any direction in the three-dimensional space. The driver is connected to the moving block, so that the driver can control the movement more directly and accurately, and respond quickly, so that the needle seat can quickly move the sample to be tested in multiple directions during the probe test without moving the detection probe, making the movement process more efficient;

[0020] 2. There will be slight differences in the mounting base in actual operation, so the actual position of the mounting base is fine-tuned by providing an adjustment portion. Since the movement of the driver is relatively stable, that is, after the initial position is accurate, each subsequent movement will remain stable. Therefore, it is only necessary to use the adjustment portion to perform fine adjustments according to the actual situation at the beginning to complete the calibration of the test process. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application;

[0022] Figure 2 is an overall side view of an embodiment of the present application;

[0023] Figure 3 It is an overall front view of the embodiment of the present application;

[0024] Figure 4 It is an overall top view of an embodiment of the present application.

[0025] Figure numerals: 1. movable base; 11. substrate; 12. first adjusting part; 12a. first adjusting handle; 12b. first adjusting slide rail; 13. second adjusting part; 13a. second adjusting handle; 13b. second adjusting slide rail; 2. first movable part; 21. first movable block; 22. first slide bar; 23. first driver; 24. first stabilizing bar; 3. second movable part; 31. second movable block; 32. second slide bar; 33. second driver; 34. second stabilizing bar; 4. third movable part; 41. third movable block; 42. third slide bar; 43. third driver; 44. third stabilizing bar; 5. mounting seat; 51. third adjusting part; 51a. third adjusting handle; 51b. third adjusting slide rail; 52. mounting hole. DETAILED DESCRIPTION

[0026] The following is combined with Figure 1 To Attachment Figure 4 , further details of this application are given.

[0027] A test needle holder, referring to Figures 1 to 4, including a moving base 1, a first moving part 2, a second moving part 3, a third moving part 4 and a mounting seat 5. The moving base 1 is a fixing device for the needle seat. By fixing the moving base 1, the needle seat can quickly and accurately move the sample to be tested under the drive of the moving part. The moving base 1 includes a substrate 11, a first adjusting part 12 and a second adjusting part 13. The substrate 11 is located on the bottom surface of the moving base 1, the first adjusting part 12 is fixed on the substrate 11, and the second adjusting part 13 is fixed on the first adjusting part 12. The first adjusting part 12 and the second adjusting part 13 can enable the operator to fine-tune the position of the moving part and the mounting seat 5, so that the mounting seat 5 can overcome the practical operation and the calculation design. The deviation caused by the deviation; the first moving part 2 is installed on the second adjusting part 13, and the first moving part 2 includes a first moving block 21, a first sliding rod 22, a first driver 23 and a first stabilizing rod 24, wherein the first sliding rod 22 and the first driver 23 are installed on the second adjusting part 13, and the first moving block 21 can slide on the first sliding rod 22 driven by the first driver 23, and a first stabilizing rod 24 is connected between the first driver 23 and the first moving block 21, and the first stabilizing rod 24 can extend from or be retracted into the first moving block 21; the second moving part 3 is installed on the first moving block 21, and the second moving part 3 includes a second moving block 31, a second sliding rod 32, The second driver 33 and the second stabilizing rod 34, wherein the second slide bar 32 and the second driver 33 are mounted on the first moving block 21, the second moving block 31 can slide on the second slide bar 32 under the drive of the second driver 33, the second stabilizing rod 34 is connected between the second driver 33 and the second moving block 31, and the second stabilizing rod 34 can extend from or be retracted into the second moving block 31; the third moving part 4 is mounted on the second moving block 31, the third moving part 4 includes a third moving block 41, a third slide bar 42, a third driver 43 and a third stabilizing rod 44, wherein the third slide bar 42 and the third driver 43 are mounted on the second moving block 31, the third moving block 4 The third actuator 43 can slide on the third slide bar 42. A third stabilizing bar 44 is connected between the third actuator 43 and the third moving block 41. The third stabilizing bar 44 can extend from or be retracted into the third moving block 41. The stabilizing bar provides additional support to the moving block, so that the moving block is more stable during the moving process. The mounting seat 5 includes a third adjusting portion 51 and a mounting hole 52. The third adjusting portion 51 can manually adjust the mounting seat 5 in a direction perpendicular to the first adjusting portion 12 and the second adjusting portion 13, thereby increasing the diversity of adjustment. The mounting hole 52 is arranged on the surface of the mounting seat 5, thereby providing different fixing positions for the sample to be tested, thereby ensuring the stability of the test process.

[0028] Reference Figures 2 to 4The first adjustment part 12 includes a first adjustment handle 12a and a first adjustment slide rail 12b, the second adjustment part 13 includes a second adjustment handle 13a and a second adjustment slide rail 13b, and the third adjustment part 51 includes a third adjustment handle 51a and a third adjustment slide rail 51b. By adjusting the position of the adjustment slide rail by the adjustment handle, the position of the sample to be tested on the mounting seat 5 can be adjusted according to the actual installation situation.

[0029] The implementation principle of the embodiment of the present application is: before detection, the driving process of the first driver 23, the second driver 33 and the third driver 43 are set according to the required detection sites of the sample to be tested and the detection order, and the sample to be tested is installed through the mounting seat 5. By comparing the actual position of the sample to be tested and the set position, the position of the sample to be tested is adjusted to the set position using the first adjustment handle 12a, the second adjustment handle 13a and the third adjustment handle 51a, so that the sample to be tested can be accurately detected.

[0030] The embodiments of this specific implementation are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. The same components are represented by the same figure marks. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A test needle holder, characterized in that: include: Mobile base (1); A first moving part (2), comprising a first moving block (21), a first sliding rod (22) and a first driver (23), wherein the first sliding rod (22) and the first driver (23) are mounted on the moving base (1), and the first moving block (21) is capable of moving on the first sliding rod (22) under the push of the first driver (23); a second moving part (3), comprising a second moving block (31), a second sliding rod (32) and a second driver (33); the second sliding rod (32) and the second driver (33) are mounted on the first moving block (21); the second sliding rod (32) is perpendicular to the first sliding rod (22); and the second moving block (31) can move on the second sliding rod (32) under the push of the second driver (33); a third moving part (4), comprising a third moving block (41), a third sliding rod (42) and a third driver (43); the third sliding rod (42) and the third driver (43) are mounted on the second moving block (31); the third sliding rod (42) is respectively perpendicular to the first sliding rod (22) and the second sliding rod (32); and the third moving block (41) is capable of moving on the third sliding rod (42) under the push of the third driver (43); The mounting seat (5) is connected to the third moving block (41) and is used for mounting the test piece.

2. A test needle holder according to claim 1, characterized in that: The movable base (1) comprises a second adjusting portion (13), the second adjusting portion (13) comprises a second adjusting handle (13a) and a second adjusting slide rail (13b), the second adjusting slide rail (13b) is parallel to the second slide rod (32), and the second adjusting slide rail (13b) is connected to the first movable block (21).

3. A test needle holder according to claim 2, characterized in that: The mobile base (1) comprises a first adjustment portion (12), the first adjustment portion (12) comprising a first adjustment handle (12a) and a first adjustment slide rail (12b), the first adjustment slide rail (12b) being parallel to the first slide rod (22), and the first adjustment slide rail (12b) being connected to the second adjustment slide rail (13b).

4. A test needle holder according to claim 3, characterized in that: The mounting seat (5) comprises a third adjustment portion (51), the third adjustment portion (51) comprises a third adjustment handle (51a) and a third adjustment slide rail (51b), the third adjustment slide rail (51b) is parallel to the third slide rod (42), and the third adjustment slide rail (51b) is connected to the third moving block (41).

5. A test needle holder according to claim 1, characterized in that: The first moving part (2) further comprises a first stabilizing rod (24), wherein the first stabilizing rod (24) connects the first driver (23) and the first moving block (21).

6. A test needle holder according to claim 1, characterized in that: The second moving part (3) further comprises a second stabilizing rod (34), wherein the second stabilizing rod (34) connects the second driver (33) and the second moving block (31).

7. A test needle holder according to claim 1, characterized in that: The third moving part (4) further comprises a third stabilizing rod (44), wherein the third stabilizing rod (44) connects the third driver (43) and the third moving block (41).

8. The test needle holder according to claim 1, characterized in that: The mounting seat (5) comprises a mounting hole (52).

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