SMIF wafer cartridge uncovering module
By designing the automatic cover opening and closing mechanism of servo motor drive in the SMIF wafer loading and detection integration device, combined with the detection function of the in-situ sensor, the problems of low automation and detection difficulties in existing equipment are solved, and efficient automation is achieved and reliable equipment operation.
Patent Information
- Application Number
- CN202420500986.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-15
- Publication Date
- 2025-02-14
- Estimated Expiration
- 2034-03-15
AI Technical Summary
The existing SMIF wafer loading and detection integration devices are difficult to open and close the cover by themselves, and the degree of automation is low, and it is difficult to detect whether the wafer is successfully blanked and whether the cover is opened in place, reducing the practicality of the equipment.
A SMIF wafer cassette opening module is designed, using a servo motor to drive the rotating seat, installation pin and opening key to realize the automatic opening and closing of the material box, and the opening and closing of the cover is detected by the on-the-sea sensor. In place.
It improves the degree of automation of the equipment, improves work efficiency, and enhances the practicality and reliability of the equipment, and can automatically detect the correctness of the blanking and switch covers.
Smart Images
Figure CN222483316U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of SMIF wafer cover opening, in particular to a SMIF wafer cassette cover opening module. Background Art
[0002] Wafer refers to the silicon chip used to make silicon semiconductor circuits. Its original material is silicon. High-purity polycrystalline silicon is dissolved and then mixed with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. SMIF is an integrated device for wafer loading and detection. However, in the process of loading and detecting integration of existing wafers, it is difficult for existing equipment to open and close the cover by itself, and the degree of automation is low, which reduces work efficiency. Moreover, after the existing wafer is dropped, it is difficult to detect whether the wafer is dropped successfully, and it is difficult to automatically detect whether the cover is opened, which reduces the practicality of the equipment. Utility Model Content
[0003] The utility model aims to provide a SMIF wafer cassette cover opening module, which is used to solve the problems that the existing equipment is difficult to automatically open and close the cover, has a low degree of automation, and is difficult to detect falling materials and open and close the cover.
[0004] In order to solve the above technical problems, the utility model provides the following technical solutions: a SMIF wafer cassette cover opening module, comprising a material box, a bottom plate is installed at the bottom of the material box, and a mounting groove is opened at the center of the bottom of the bottom plate, two fixed ear plates are symmetrically installed at the center of the bottom of the mounting groove, and a mounting plate is installed at the bottom of the two fixed ear plates, and a servo motor is installed at the center of the bottom of the mounting plate.
[0005] Furthermore, four positioning grooves are symmetrically provided at the four corners of the top of the material box, and a first positioning block is installed at the bottom of one side of the material box.
[0006] Furthermore, a fixing sleeve is sleeved on the periphery of the bottom plate, and four fixing grooves are symmetrically installed on four sides of the fixing sleeve.
[0007] Furthermore, four positioning holes are symmetrically provided at the four corners of the top of the base plate, and a first presence sensor is installed on one side of the center of the top of the base plate, four positioning pins are symmetrically provided at the four corners of the top of the base plate, and two arc-shaped limit holes are provided at the center of the top of the base plate.
[0008] Furthermore, the servo motor output end moves through the top center of the mounting plate, and a rotating seat is installed on the top of the servo motor output end, two mounting pins are symmetrically installed on both sides of the top of the rotating seat, and two cover opening keys are installed at the top center of the two mounting pins.
[0009] Furthermore, two limit sensors are symmetrically installed on both sides of the top of the mounting plate, and two mounting blocks are installed on the top of the two limit sensors.
[0010] Furthermore, two limit blocks are symmetrically installed at two corners of the top of the mounting plate, and two second positioning blocks are installed on the top of the two limit blocks.
[0011] Furthermore, a second presence sensor is installed on one side of the installation plate, and a sensing head is installed on the top of the second presence sensor.
[0012] The utility model provides a SMIF wafer cassette cover opening module, which has the following advantages: the utility model drives the rotation of the rotating seat through the servo motor, which in turn drives the rotation of the mounting pin, and then drives the rotation of the cover opening key, thereby realizing the opening and closing of the cover of the material box, which is conducive to automatic opening and closing of the cover, improves the automation level of the equipment, improves work efficiency, and utilizes the installation of the on-site sensor to facilitate the detection of whether the cover is opened and closed in place, thereby improving the practicality and reliability of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0014] Figure 1 It is a three-dimensional diagram of the overall structure of the utility model;
[0015] Figure 2 It is a front view of the overall structure of the utility model;
[0016] Figure 3 This is a three-dimensional bottom view of the bottom plate of the utility model;
[0017] Figure 4 It is a three-dimensional top view of the bottom plate of the utility model;
[0018] Figure 5 It is a three-dimensional top view of the servo motor of the utility model;
[0019] In the figure: 1. material box; 2. first positioning block; 3. fixing groove; 4. bottom plate; 5. mounting groove; 6. servo motor; 7. fixing sleeve; 8. positioning groove; 9. mounting plate; 10. fixing ear plate; 11. mounting block; 12. limit block; 13. cover opening key; 14. first presence sensor; 15. positioning pin; 16. positioning hole; 17. arc-shaped limit hole; 18. rotating seat; 19. second presence sensor; 20. induction head; 21. mounting pin; 22. second positioning block; 23. limit sensor. DETAILED DESCRIPTION
[0020] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0021] See also Figure 1-5 , an embodiment provided by the utility model: a SMIF wafer cassette cover opening module, comprising a material box 1, four positioning grooves 8 are symmetrically opened at the four corners of the top of the material box 1, and a first positioning block 2 is installed at the bottom of one side of the material box 1, which is conducive to positioning and installation through the positioning groove 8 and the first positioning block 2, a bottom plate 4 is installed at the bottom of the material box 1, four positioning holes 16 are symmetrically opened at the four corners of the top of the bottom plate 4, and a first presence sensor 14 is installed on one side of the center of the top of the bottom plate 4, four positioning pins 15 are symmetrically installed at the four corners of the top of the bottom plate 4, and two arc-shaped limiting holes 17 are opened at the center of the top of the bottom plate 4, which is conducive to detecting whether the material is dropped by the first presence sensor 14, a fixing sleeve 7 is sleeved on the periphery of the bottom plate 4, and four fixing grooves 3 are symmetrically installed on the four sides of the fixing sleeve 7, which is conducive to positioning through the fixing sleeve 7 and the fixing groove 3, and an installation groove 5 is opened at the center of the bottom of the bottom plate 4, and two fixing ear plates 10 are symmetrically installed at the center of the bottom of the installation groove 5, and the bottom of the two fixing ear plates 10 A mounting plate 9 is installed on the top, two limit sensors 23 are symmetrically installed on both sides of the top of the mounting plate 9, and two mounting blocks 11 are installed on the top of the two limit sensors 23, two limit blocks 12 are symmetrically installed at the two corners of the top of the mounting plate 9, and two second positioning blocks 22 are installed on the top of the two limit blocks 12, a second presence sensor 19 is installed on one side of the mounting plate 9, and a sensing head 20 is installed on the top of the second presence sensor 19, which is beneficial to detect the conditions of falling and opening and closing the cover through the second presence sensor 19 and the sensing head 20, thereby improving the practicality of the equipment, a servo motor 6 is installed at the bottom center of the mounting plate 9, the output end of the servo motor 6 movably passes through the top center of the mounting plate 9, and a rotating seat 18 is installed on the top of the output end of the servo motor 6, two mounting pins 21 are symmetrically installed on both sides of the top of the rotating seat 18, and two cover opening keys 13 are installed in the top center of the two mounting pins 21, which is beneficial to drive the cover opening key 13 through the servo motor 6 to realize the opening and closing of the material box 1.
[0022] Working principle: During the use of the utility model, firstly, the material is manually loaded, and the wafer material box 1 is placed on the loading platform of the SMIF wafer loading module. At this time, the wafer falls and presses down the induction head 20 on the top of the second on-site sensor 19. At this time, the second on-site sensor 19 senses that the wafer is placed in place, and the servo motor 6 is turned on at this time. The output end of the servo motor 6 starts to rotate, and then drives the rotating seat 18 to rotate, and then drives the mounting pin 21 to rotate, and then drives the cover opening key 13 to rotate, so that the cover opening key 13 is used to open the cover of the material box 1. When the output end of the servo motor 6 is reversed, the rotating seat 18 is driven to rotate in the opposite direction, and then drives the mounting pin 21 to rotate. 21 rotates in the opposite direction, and then drives the cover opening key 13 to rotate in the opposite direction, thereby realizing the automatic cover closing of the material box 1, realizing the automatic cover opening and closing of the material box 1, and improving the working efficiency and automation degree of the equipment. At this time, the limit sensor 23 detects whether the cover opening and closing are in place, the first positioning block 2 and the positioning groove 8 are used as limiters, the bottom plate 4 is used to install the fixing sleeve 7, the fixing groove 3 is used for installation, the mounting groove 5 is used to install the fixing ear plate 10, the fixing ear plate 10 is used to fix the mounting plate 9, the mounting plate 9 is used to install the servo motor 6, the limit block 12 is used for limit installation, the limit block 12 is used to install the second positioning block 22, and the limit sensor 23 is used to fix the mounting block 11.
Claims
1. A SMIF wafer cassette cover opening module, comprising a material box (1), characterized in that: A bottom plate (4) is installed at the bottom of the material box (1), and a mounting groove (5) is opened at the center of the bottom of the bottom plate (4), two fixed ear plates (10) are symmetrically installed at the center of the bottom of the mounting groove (5), and a mounting plate (9) is installed at the bottom of the two fixed ear plates (10), and a servo motor (6) is installed at the center of the bottom of the mounting plate (9).
2. The SMIF wafer cassette cover opening module according to claim 1, characterized in that: Four positioning grooves (8) are symmetrically provided at the four corners of the top of the material box (1), and a first positioning block (2) is installed at the bottom of one side of the material box (1).
3. The SMIF wafer cassette cover opening module according to claim 1, characterized in that: A fixing sleeve (7) is sleeved on the periphery of the bottom plate (4), and four fixing grooves (3) are symmetrically mounted on four sides of the fixing sleeve (7).
4. The SMIF wafer cassette cover opening module according to claim 3, characterized in that: Four positioning holes (16) are symmetrically provided at the four corners of the top of the bottom plate (4), and a first presence sensor (14) is installed on one side of the center of the top of the bottom plate (4). Four positioning pins (15) are symmetrically provided at the four corners of the top of the bottom plate (4), and two arc-shaped limiting holes (17) are provided at the center of the top of the bottom plate (4).
5. The SMIF wafer cassette cover opening module according to claim 1, characterized in that: The output end of the servo motor (6) movably passes through the top center of the mounting plate (9), and a rotating seat (18) is installed on the top of the output end of the servo motor (6), two mounting pins (21) are symmetrically installed on both sides of the top of the rotating seat (18), and two cover opening keys (13) are installed at the top center of the two mounting pins (21).
6. The SMIF wafer cassette cover opening module according to claim 5, characterized in that: Two limit sensors (23) are symmetrically mounted on both sides of the top of the mounting plate (9), and two mounting blocks (11) are mounted on the tops of the two limit sensors (23).
7. The SMIF wafer cassette cover opening module according to claim 6, characterized in that: Two limit blocks (12) are symmetrically mounted at two corners of the top of the mounting plate (9), and two second positioning blocks (22) are mounted on the tops of the two limit blocks (12).
8. The SMIF wafer cassette cover opening module according to claim 7, characterized in that: A second presence sensor (19) is installed on one side of the installation plate (9), and a sensing head (20) is installed on the top of the second presence sensor (19).