Rotating mechanism for loading wafer box

Abstract

The utility model discloses a rotating mechanism for loading a wafer box, and relates to the technical field of semiconductor wafer loading. The Casset wafer box supporting device comprises a side support, a fixed door frame, a supporting arm, a hinge structure, a box supporting plate used for bearing a Casset wafer box, a wafer box backrest and a pushing air cylinder. The Casset wafer box is arranged in a right-angle storage groove formed by the box supporting plate and the wafer box backrest, and the Casset wafer box is clamped between the side support and the wafer box backrest after the pushing air cylinder shrinks. The situation that the wafer slips and protrudes in the box due to non-uniform manual placement speed and inertia, so that the equipment is suspended is avoided; and through the formed cover-shaped structure, the wafer box can be well protected and cannot be overturned by a manipulator, so that the safety is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor wafer loading, in particular to a rotating mechanism for loading a wafer box. Background Art

[0002] Wafer boxes are mainly used to place and transport wafers in semiconductor production. In order to simplify transportation and minimize the risk of contamination, chip manufacturers use wafer boxes to carry and store wafers. Common wafer boxes for wafer loading in the semiconductor industry include FOUP, SMIF Pod, Open Cassette, etc. Different types of wafer boxes use different loading systems. According to the wafer loading device, they are divided into wafer loading ports Loadport, SMIF, open wafer box loading platform OCS and special loading ports.

[0003] For loading and unloading an open wafer box Open Cassette at a wafer loading port, the specific steps are: manually carry the wafer box to the loading platform → the sensor detects whether it is placed in place and whether it is sliding, etc. → robot mapping → robot grabbing → repeating this process; currently, the above-mentioned Loadport is generally manually placed flat, which has the following disadvantages: (1) The uneven speed of manual placement of the Open Cassette and the existence of inertia can easily cause the wafer to slip and protrude in the box, thereby causing the equipment to pause; (2) Because the placement requires the naked eye to align the position and the naked eye to check the level, it is easy to cause the placement to be inadequate, and the equipment to pause and unable to proceed to the next step; (3) If the flat box is not placed in place, the robot will flip the Cassette wafer box, causing the wafers in the entire box to fall or even break. Therefore, in response to the above problems, the present technical solution provides a rotating mechanism for loading a wafer box. Utility Model Content

[0004] The utility model provides a rotating mechanism for loading a wafer box, which is composed of a side bracket, a fixed door frame, a support arm, a hinged structure, a box support plate, a wafer box backrest, and a pushing cylinder to lift and flip the Cassette wafer box, so that the wafer box can be well accommodated in a cover-like structure composed of the box support plate, the wafer box backrest, the movable door frame, the fixed door frame, etc., and will not cause the wafer to slip and protrude in the box. Moreover, there is no need to check the level with the naked eye, and the initial inclined state can be kept in an efficient horizontal state by flipping. The formed cover-like structure can well protect the wafer box and will not be flipped over by a robot, thereby improving safety. In summary, the problems in the background technology are solved.

[0005] In order to solve the above technical problems, the utility model is achieved through the following technical solutions:

[0006] The utility model discloses a rotating mechanism for loading a wafer box, comprising a side bracket, a fixed door frame symmetrically arranged on both sides of the upper part of the side bracket, a support arm installed at the lower part of the side bracket, a hinged structure arranged at the front end of the support arm, a box support plate hinged on the hinged structure for carrying the Cassette wafer box, a wafer box backrest vertically arranged at the front side of the box support plate, and a pushing cylinder hinged between the lower part of the side bracket and the bottom of the box support plate; the Cassette wafer box is placed in a right-angle storage groove formed by the box support plate and the wafer box backrest, and the Cassette wafer box is clamped and placed between the side bracket and the wafer box backrest after the pushing cylinder is contracted.

[0007] Furthermore, the support arm and the pushing cylinder are located between the lower parts of the two fixed door frames.

[0008] Furthermore, the box support plate and the wafer box backrest have the same width, and after being extended and flipped by the pushing cylinder, the side walls are gap-matched with the inner walls of the two fixed door frames.

[0009] Furthermore, movable door frames are arranged on both sides of the wafer box backrest. After the movable door frames are flipped over with the wafer box backrest, the outer contours of the movable door frames match the outer contours of the fixed door frames to form a cover-shaped overall structure.

[0010] Furthermore, the outer side surface of the movable door frame is flush with the outer side surface of the fixed door frame.

[0011] Compared with the prior art, the utility model has the following beneficial effects:

[0012] (1) This technical solution uses a structure that can lift and flip the Cassette wafer box, which is composed of a side bracket, a fixed door frame, a support arm, a hinged structure, a box support plate, a wafer box backrest, and a push cylinder. The wafer box can be well accommodated in the cover-like structure composed of the box support plate, the wafer box backrest, the movable door frame, the fixed door frame, etc. The initial tilted state can be kept in an efficient horizontal state by flipping, and the wafer will not slip or protrude in the box due to uneven manual placement speed and inertia, causing the equipment to pause;

[0013] (2) In addition, due to the existence of the flipping structure and the cover-like structure, the wafer will not slip or protrude in the box due to manual placement speed being too fast or inertia problems. There is no need to check the level with the naked eye. The cover-like structure can well protect the wafer box and will not be overturned by the robot, thereby improving safety.

[0014] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0016] Figure 1 This is a schematic diagram of the structure of a rotating mechanism for loading a wafer box in the utility model in the state of opening the door and loading materials;

[0017] Figure 2 It is a structural schematic diagram of a rotating mechanism for loading a wafer box of the utility model in a state of closing the door and working normally;

[0018] Figure 3 It is a schematic diagram of the structure of the Cassette wafer box;

[0019] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0020] 1-Cassette wafer box, 2-hinge structure, 3-push cylinder, 4-fixed door frame, 5-movable door frame, 6-wafer box backrest, 7-box pallet, 8-side bracket. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] In the description of the present invention, it should be understood that terms such as "side", "upper", "both sides", "lower", "front", and "bottom" indicating orientation or positional relationship are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0023] See also Figure 1-3As shown, the utility model is a rotating mechanism for loading wafer boxes, including side brackets 8, fixed door frames 4 symmetrically arranged on both sides of the upper part of the side brackets 8, support arms installed at the lower part of the side brackets 8, hinged structures 2 arranged at the front ends of the support arms, box support plates 7 hinged on the hinged structures 2 for carrying Cassette wafer boxes 1, wafer box backrests 6 vertically arranged at the front side of the box support plates 7, and push cylinders 3 hinged between the lower part of the side brackets 8 and the bottom of the box support plates 7; the Cassette wafer box 1 is placed in a right-angle storage slot formed by the box support plates 7 and the wafer box backrests 6, and the Cassette wafer box 1 is clamped and placed between the side brackets 8 and the wafer box backrests 6 after the push cylinders 3 are contracted. Figure 3 As shown, the structure of the Cassette wafer box 1 is demonstrated.

[0024] The support arm and the push cylinder 3 are located between the lower parts of the two fixed door frames 4 .

[0025] Among them, the box support plate 7 and the wafer box backrest 6 have the same width, and after the push cylinder 3 is extended and turned over, the side wall and the inner wall of the two fixed door frames 4 are gap-matched.

[0026] Among them, movable door frames 5 are arranged on both sides of the wafer box backrest 6. After the movable door frames 5 are turned over with the wafer box backrest 6, the outer contour of the movable door frames 5 matches the outer contour of the fixed door frames 4 to form a cover-shaped overall structure.

[0027] The outer side surface of the movable door frame 5 is flush with the outer side surface of the fixed door frame 4 .

[0028] like Figure 1 As shown, it is a schematic diagram of the structure of a rotating mechanism for loading a wafer box of the present technical solution in the state of opening the door and loading materials; at this time, the push cylinder 3 is pushed to the longest position, and the wafer box backrest 6 and the box support plate 7 form a right-angle storage slot for stably placing the Cassette wafer box 1. Due to the setting of the right-angle storage slot, the corresponding opening slot of the Cassette wafer box 1 is inclined upward, which can maintain stability;

[0029] like Figure 2As shown, it is a schematic diagram of the structure of a rotating mechanism for loading wafer boxes of the present technical solution under the closed door and normal working conditions; at this time, the push cylinder 3 is pulled to the shortest, so that the box support plate 7 is just perpendicular to the side bracket 8, and the wafer box backrest 6 is just parallel to the side bracket 8, and the outer contour of the movable door frame 5 is matched with the outer contour of the fixed door frame 4, and a hood-like overall structure is formed, so that the Cassette wafer box 1 is well stored, and at this time, the opening grooves of the Cassette wafer box 1 are arranged in parallel under normal conditions, and the wafer will not slip and protrude in the box due to excessive manual placement speed or inertia problems. There is no need to check the level with the naked eye. The hood-like structure formed can well protect the wafer box and will not be overturned by the robot, thereby improving safety.

[0030] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A rotating mechanism for loading a wafer box, characterized in that: The invention comprises a side bracket (8), a fixed door frame (4) symmetrically arranged on both sides of the upper part of the side bracket (8), a support arm installed at the lower part of the side bracket (8), a hinged structure (2) arranged at the front end of the support arm, a box support plate (7) hinged on the hinged structure (2) for carrying a Cassette wafer box (1), a wafer box backrest (6) vertically arranged at the front side of the box support plate (7), and a driving cylinder (3) hinged between the lower part of the side bracket (8) and the bottom of the box support plate (7); the Cassette wafer box (1) is placed in a right-angle storage groove formed by the box support plate (7) and the wafer box backrest (6), and the Cassette wafer box (1) is clamped and placed between the side bracket (8) and the wafer box backrest (6) after the driving cylinder (3) is contracted.

2. A rotating mechanism for loading a wafer box according to claim 1, characterized in that: The support arm and the pushing cylinder (3) are located between the lower parts of the two fixed door frames (4).

3. The rotating mechanism for loading a wafer box according to claim 1, characterized in that: The box support plate (7) and the wafer box backrest (6) have the same width, and after the push cylinder (3) is extended and turned, the side walls are gap-matched with the inner walls of the two fixed door frames (4).

4. The rotating mechanism for loading a wafer box according to claim 1, characterized in that: Movable door frames (5) are arranged on both sides of the wafer box backrest (6); after the movable door frames (5) are turned over with the wafer box backrest (6), the outer contour of the movable door frames (5) matches the outer contour of the fixed door frames (4) to form a cover-shaped integral structure.

5. The rotating mechanism for loading a wafer box according to claim 4, characterized in that: The outer side surface of the movable door frame (5) is flush with the outer side surface of the fixed door frame (4).

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