Dust filter and tail gas treatment system

Abstract

The utility model discloses a dust filter and tail gas treatment system.The dust filter comprises a shell and a polyamide fiber filtering piece, the shell is provided with an inlet and an outlet, the outer side wall of the polyamide fiber filtering piece and the inner side wall of the shell define a first containing cavity, and the first containing cavity is communicated with the inlet; a second containing cavity is defined by the inner side wall of the polyamide fiber filtering part and the inner side wall of the shell and communicates with the outlet, the tail gas sequentially passes through the inlet, the first containing cavity and the second containing cavity and then is conveyed to the outlet, and the polyamide fiber filtering part is used for filtering dust in the tail gas. The inlet of the dust filter is communicated with the reaction chamber, the outlet of the dust filter is communicated with the tail gas treatment device, and the polyamide fiber filter part filters dust in tail gas, so that the dust is prevented from entering the tail gas treatment device, and the dust is prevented from being accumulated in an exhaust pipeline of the tail gas treatment device.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a dust filter and an exhaust gas treatment system. Background Art

[0002] In various production processes in the semiconductor industry, a large amount of exhaust gas is often generated, and some of the exhaust gas is toxic. Therefore, an exhaust gas treatment device is required to treat the toxic and harmful substances in the exhaust gas. The existing exhaust gas treatment system includes a reaction chamber, a dry pump, and an exhaust gas treatment device. The dry pump transports the exhaust gas in the reaction chamber to the exhaust gas treatment device, and the exhaust gas treatment device is used to treat the exhaust gas. However, the exhaust gas also contains a large amount of dust particles. The dust will enter the exhaust gas treatment device with the exhaust gas and accumulate in the exhaust pipe of the exhaust gas treatment device. When there is too much dust or the treatment time is too long, the dust may block the exhaust pipe, resulting in reduced working efficiency of the exhaust gas treatment device. Utility Model Content

[0003] In view of this, the utility model provides a dust filter and an exhaust gas treatment system to solve the existing problem that when there is too much dust or the treatment time is too long, the dust may block the exhaust pipe, resulting in reduced working efficiency of the exhaust gas treatment device.

[0004] In a first aspect, the utility model provides a dust filter, comprising:

[0005] a housing having an inlet and an outlet;

[0006] A polyamide fiber filter element, wherein the outer side wall of the polyamide fiber filter element and the inner side wall of the shell are enclosed to form a first accommodating cavity, the first accommodating cavity is communicated with the inlet, the inner side wall of the polyamide fiber filter element and the inner side wall of the shell are enclosed to form a second accommodating cavity, and the second accommodating cavity is communicated with the outlet;

[0007] The tail gas is transported to the outlet after passing through the inlet, the first accommodating chamber, and the second accommodating chamber in sequence, and the polyamide fiber filter element is used to filter dust in the tail gas.

[0008] Optionally, in the above-mentioned dust filter, the polyamide fiber filter element has a plurality of pores, and the maximum cross-sectional area of ​​the pores is smaller than the maximum cross-sectional area of ​​the dust.

[0009] Optionally, in the above-mentioned dust filter, the polyamide fiber is cylindrical.

[0010] Optionally, the dust filter further includes a mounting frame, wherein the mounting frame is fixedly connected to the outer side wall of the filter.

[0011] The utility model also provides an exhaust gas treatment system, comprising the above-mentioned dust filter, and further comprising:

[0012] a chamber, the chamber being in communication with the inlet;

[0013] An exhaust gas treatment device is connected to the outlet.

[0014] Optionally, the above exhaust gas treatment system further includes:

[0015] a first pipeline, wherein two ends of the first pipeline are respectively connected to the chamber and the inlet;

[0016] A second pipeline, two ends of which are respectively connected to the outlet and the exhaust gas treatment device.

[0017] Optionally, the above-mentioned exhaust gas treatment system also includes a dry pump, and the second pipeline includes a first pipe section and a second pipe section, the two ends of the first pipe section are respectively connected to the outlet and the dry pump air inlet, and the two ends of the second pipe section are respectively connected to the dry pump outlet and the exhaust gas treatment device.

[0018] Optionally, in the above-mentioned exhaust gas treatment system, a plurality of dust filters connected in series are arranged between the chamber and the dry pump.

[0019] Optionally, in the above-mentioned exhaust gas treatment system, the dust filter is arranged between the dry pump and the exhaust gas treatment device.

[0020] The technical solution provided by the utility model has the following advantages:

[0021] 1. The dust filter provided by the utility model comprises a shell and a polyamide fiber filter element, the shell has an inlet and an outlet, the outer wall of the polyamide fiber filter element and the inner wall of the shell are enclosed to form a first accommodating chamber, the first accommodating chamber is connected to the inlet, the inner wall of the polyamide fiber filter element and the inner wall of the shell are enclosed to form a second accommodating chamber, and the second accommodating chamber is connected to the outlet, the exhaust gas is sequentially transported to the outlet after passing through the inlet, the first accommodating chamber, and the second accommodating chamber, and the polyamide fiber filter element is used to filter dust in the exhaust gas. The inlet of the dust filter is connected to the reaction chamber, and the outlet is connected to the exhaust gas treatment device, the exhaust gas generated by the reaction chamber is transported to the first accommodating chamber after passing through the inlet, the exhaust gas in the first accommodating chamber passes through the polyamide fiber filter element and enters the second accommodating chamber, at this time, the dust in the exhaust gas is filtered out by the polyamide fiber filter element, the filtered exhaust gas is transported to the exhaust gas treatment device after passing through the outlet, and the exhaust gas treatment device treats the filtered exhaust gas. Since there is no dust in the filtered exhaust gas, dust is prevented from entering the exhaust gas treatment device, and dust is also prevented from accumulating in the exhaust pipe of the exhaust gas treatment device, thereby improving the working efficiency of the exhaust gas treatment device.

[0022] 2. The exhaust gas treatment system provided by the utility model prevents dust from entering the exhaust gas treatment device, thereby increasing the service life of the exhaust gas treatment device and saving the cost of replacing the exhaust gas treatment device.

[0023] 3. The exhaust gas treatment system provided by the utility model can reduce the maintenance work of the exhaust gas treatment device by regularly replacing the polyamide fiber filter element.

[0024] 4. The exhaust gas treatment system provided by the utility model arranges the dust filter between the chamber and the dry pump to avoid malfunctions caused by dust entering the dry pump, thereby increasing the service life of the dry pump and thus improving the exhaust gas treatment efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 is a cross-sectional view of a dust filter element according to an embodiment of the utility model;

[0027] Figure 2 Schematic diagram of an exhaust gas treatment system according to an embodiment of the present utility model.

[0028] Description of reference numerals:

[0029] 1. Shell; 11. Inlet; 12. Outlet;

[0030] 2. Polyamide fiber filter element;

[0031] 31. first accommodating chamber; 32. second accommodating chamber;

[0032] 4. Chamber;

[0033] 5. Exhaust gas treatment device;

[0034] 6. The first pipeline;

[0035] 7. second pipeline; 71. first pipe section; 72. second pipe section;

[0036] 8. Dry pump. DETAILED DESCRIPTION

[0037] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0038] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0039] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0041] Example 1

[0042] The dust filter provided in this embodiment is as follows: Figure 1As shown, it includes a shell 1 and a polyamide fiber filter element 2, the shell 1 has an inlet 11 and an outlet 12, the outer wall of the polyamide fiber filter element 2 and the inner wall of the shell 1 enclose a first accommodating chamber 31, the first accommodating chamber 31 is connected to the inlet 11, the inner wall of the polyamide fiber filter element 2 and the inner wall of the shell 1 enclose a second accommodating chamber 32, and the second accommodating chamber 32 is connected to the outlet 12, the exhaust gas passes through the inlet 11, the first accommodating chamber 31, and the second accommodating chamber 32 in sequence and is transported to the outlet 12, and the polyamide fiber filter element 2 is used to filter dust in the exhaust gas. The inlet 11 of the dust filter is connected to the reaction chamber 4, and the outlet 12 is connected to the exhaust gas treatment device 5. The exhaust gas generated by the reaction chamber 4 is transported to the first accommodating chamber 31 through the inlet 11. The exhaust gas in the first accommodating chamber 31 passes through the polyamide fiber filter element 2 and enters the second accommodating chamber 32. At this time, the polyamide fiber filter element 2 filters out the dust in the exhaust gas. The filtered exhaust gas is transported to the exhaust gas treatment device 5 through the outlet 12. The exhaust gas treatment device 5 processes the filtered exhaust gas. Since there is no dust in the filtered exhaust gas, dust is prevented from entering the exhaust gas treatment device 5, and dust is also prevented from accumulating in the exhaust pipe of the exhaust gas treatment device 5, thereby improving the working efficiency of the exhaust gas treatment device 5.

[0043] Specifically, the cross-section of the shell 1 can be circular, rectangular, elliptical or other common shapes. Preferably, in the present embodiment, the cross-section of the shell 1 is circular, an inlet 11 is provided at the top of the shell 1, and an outlet 12 is provided at the bottom of the shell 1. Of course, the inlet 11 and the outlet 12 can be respectively arranged at any part of the shell 1. The cross-section of the polyamide fiber filter element 2 can be circular, rectangular, elliptical or other common shapes. Preferably, in the present embodiment, the cross-section of the polyamide fiber filter element 2 is circular, and the inner groove of the polyamide filter element can be a cylindrical groove. The cross-sectional shape of the groove matches the shape of the polyamide filter element, so as to Figure 1 Taking the perspective of as an example, the polyamide fiber filter element 2 is upside down inside the shell 1, that is, the opening of the groove faces the inner bottom wall of the shell 1, and the polyamide fiber is fixedly connected to the inner bottom wall of the shell 1. The fixing method can be a snap-on or bonding method. The space between the outer wall of the polyamide fiber and the inner wall of the shell 1 is the first accommodating chamber 31, and the space enclosed by the inner wall of the groove and the inner bottom wall of the shell 1 is the second accommodating chamber 32.

[0044] like Figure 1 As shown, the dust filter provided in this embodiment has a polyamide fiber filter element 2 with a plurality of pores, and the minimum cross-sectional area of ​​any of the pores is smaller than the maximum cross-sectional area of ​​the dust. This allows the gas in the exhaust gas to pass through the pores, while the dust is isolated outside the pores. Of course, the pores do not have a cross-sectional area smaller than the maximum cross-sectional area of ​​the dust, but at least a portion of the pores have a cross-sectional area smaller than the maximum cross-sectional area of ​​the dust.

[0045] like Figure 1 As shown, in the dust filter provided in this embodiment, the polyamide fiber filter element 2 is cylindrical, which is convenient for installing the polyamide fiber in the housing 1 and avoids the side of the polyamide fiber filter from colliding with the inner wall of the housing 1 during the installation process.

[0046] In the dust filter provided in this embodiment, the material of the polyamide fiber filter element 2 may be polyamide fiber. As an alternative implementation, the material of the polyamide fiber filter element 2 is composed of olefin composite resin and polyamide fiber.

[0047] Example 2

[0048] The tail gas treatment system provided in this embodiment is as follows: Figure 2 As shown, it includes the dust filter, chamber 4, and tail gas treatment device 5 in embodiment 1. Chamber 4 is a reaction chamber 4 for preparing semiconductors. Reaction chamber 4 can be a reaction chamber 4 in an ion implantation process, a vapor deposition process, or a chemical etching process. Tail gas treatment device 5 can be a plasma spray cleaning device. Reaction chamber 4 is connected to inlet 11 of housing 1. Outlet 12 of housing 1 is connected to tail gas treatment device 5. Tail gas generated by reaction chamber 4 is transported to tail gas treatment device 5 through dust filter. Since dust is prevented from entering tail gas treatment device 5, the service life of tail gas treatment device 5 is increased, thereby saving the cost of replacing tail gas treatment device 5. By regularly replacing polyamide fiber filter 2, the maintenance work of tail gas treatment device 5 can be reduced.

[0049] like Figure 2 As shown, the exhaust gas treatment system provided in this embodiment also includes a first pipeline 6 and a second pipeline 7, one end of the first pipeline 6 is connected to the chamber 4, the other end of the first pipeline 6 is connected to the inlet 11 of the shell 1, one end of the second pipeline 7 is connected to the outlet 12 of the shell 1, and the other end of the second pipeline 7 is connected to the exhaust gas treatment device 5.

[0050] like Figure 2 As shown, the exhaust gas treatment system provided in this embodiment further includes a dry pump 8, and the second pipeline 7 includes a first pipe section 71 and a second pipe section 72, one end of the first pipe section 71 is connected to the outlet 12 of the housing 1, the other end of the first pipe section 71 is connected to the inlet of the dry pump 8, one end of the second pipe section 72 is connected to the outlet 12 of the dry pump 8, and the other end of the second pipe section 72 is connected to the exhaust gas treatment device 5. The dust filter is arranged between the chamber 4 and the dry pump 8 to avoid malfunctions caused by dust entering the dry pump 8, thereby increasing the service life of the dry pump 8 and improving the exhaust gas treatment efficiency.

[0051] The exhaust gas treatment system provided in this embodiment has a plurality of dust filters connected in series, and the plurality of dust filters are arranged between the chamber 4 and the dry pump 8 to enhance the filtering effect.

[0052] The exhaust gas treatment system provided in this embodiment adds another dust filter between the dry pump 8 and the exhaust gas treatment device 5 to further enhance the filtering effect. Of course, the dust filter may also be composed of multiple dust filters connected in series.

[0053] In the exhaust gas treatment system provided in this embodiment, the dry pump 8 is working, and the exhaust gas generated in the chamber 4 is transported to the first chamber 4 after passing through the first pipeline 6 and the inlet 11 in sequence. The exhaust gas in the first chamber 4 passes through the polyamide fiber filter 2 and enters the second accommodating chamber 32, and the exhaust gas is filtered to filter out the dust in the exhaust gas. The filtered exhaust gas enters the second accommodating chamber 32, and the filtered exhaust gas in the second accommodating chamber 32 passes through the outlet 12, the first pipe section 71, the dry pump 8, and the second pipe section 72 in sequence and is transported to the exhaust gas treatment device 5 for treatment.

[0054] In the ion implantation process, the material of the polyamide fiber filter element 2 may be polyamide fiber, and the heat resistance temperature is below 120°C; in the vapor deposition process, the material of the polyamide fiber filter element 2 is composed of olefin composite resin and polyamide fiber, and the heat resistance temperature is below 120°C; in the chemical etching process, the material of the polyamide fiber filter element 2 is composed of olefin composite resin and polyamide fiber, and the heat resistance temperature is below 249°C.

[0055] Although the embodiments of the present invention are described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A dust filter, characterized in that: include: A housing (1), wherein the housing (1) has an inlet (11) and an outlet (12); A polyamide fiber filter element (2), wherein the outer side wall of the polyamide fiber filter element (2) and the inner side wall of the housing (1) enclose a first accommodating cavity (31), the first accommodating cavity (31) being in communication with the inlet (11), the inner side wall of the polyamide fiber filter element (2) and the inner side wall of the housing (1) being in communication with the second accommodating cavity (32), and the second accommodating cavity (32) being in communication with the outlet (12); The exhaust gas is transported to the outlet (12) after passing through the inlet (11), the first accommodating chamber (31), and the second accommodating chamber (32) in sequence, and the polyamide fiber filter element (2) is used to filter dust in the exhaust gas.

2. The dust filter according to claim 1, characterized in that: The polyamide fiber filter element (2) has a plurality of pores, and the maximum cross-sectional area of ​​any one of the pores is smaller than the maximum cross-sectional area of ​​the dust.

3. The dust filter according to claim 2, characterized in that: The polyamide fiber filter element (2) is cylindrical.

4. The dust filter according to claim 3, characterized in that: It also includes a mounting frame, which is fixedly connected to the outer side wall of the filter.

5. A tail gas treatment system, characterized in that: The dust filter according to any one of claims 1 to 4 further comprises: a chamber (4), the chamber (4) being in communication with the inlet (11); An exhaust gas treatment device (5), wherein the exhaust gas treatment device (5) is in communication with the outlet (12).

6. The exhaust gas treatment system according to claim 5, characterized in that: Also includes: a first pipeline (6), wherein two ends of the first pipeline (6) are respectively connected to the chamber (4) and the inlet (11); A second pipeline (7), wherein both ends of the second pipeline (7) are respectively connected to the outlet (12) and the exhaust gas treatment device (5).

7. The exhaust gas treatment system according to claim 6, characterized in that: It also includes a dry pump (8), and the second pipeline (7) includes a first pipe section (71) and a second pipe section (72), the two ends of the first pipe section (71) are respectively connected to the outlet (12) and the air inlet of the dry pump (8), and the two ends of the second pipe section (72) are respectively connected to the air outlet of the dry pump (8) and the exhaust gas treatment device (5).

8. The exhaust gas treatment system according to claim 7, characterized in that: A plurality of dust filters connected in series are arranged between the chamber (4) and the dry pump (8).

9. The exhaust gas treatment system according to claim 8, characterized in that: The dust filter is arranged between the dry pump (8) and the exhaust gas treatment device (5).

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