Silicon single crystal rod recovery device
By designing a silicon single crystal rod recovery device including a crushing mechanism and a flip mechanism, the problems of inconvenience in crushing silicon single crystal rods and difficulty in cleaning up scraps in the prior art are solved, and efficient recycling and cleaning of silicon single crystal rods are achieved. , improves the use effect of the recycling device.
Patent Information
- Application Number
- CN202421045904.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-14
- Publication Date
- 2025-02-18
- Estimated Expiration
- 2034-05-14
AI Technical Summary
The existing silicon single crystal rod recycling device is not convenient for better crushing of silicon single crystal rods, and it is impossible to effectively clean and place the residue on the plate, resulting in waste of silicon single crystal rod crushing material and reduced use effect of the recycling device. .
A silicon single crystal rod recovery device including a crushing mechanism and a flip mechanism is designed. The crushing mechanism drives the crushing plate downward through the motor-driven bevel gear system and screw, achieving effective crushing of the silicon single crystal rod. The flip mechanism drives the placement plate to flip through the cylinder-driven gear system and round rod to clean up the remaining debris.
This device can effectively crush the silicon single crystal rod, avoid impurities doping, and can clean up the slag on the plate, reduce the waste of silicon single crystal rod material, and improve the use effect of the recycling device.
Smart Images
Figure CN222490180U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a silicon single crystal rod recovery device. Background Art
[0002] Most semiconductor silicon single crystals are made using the Czochralski method. In this method, polycrystalline silicon is placed in a quartz pot, heated and melted, and then the molten silicon is slightly cooled to give a certain degree of supercooling. A silicon single crystal with a specific crystal orientation (called a seed crystal) is brought into contact with the molten silicon. By adjusting the temperature of the melt and the upward lifting speed of the seed crystal, when the seed crystal grows to the target diameter, the lifting speed is increased to make the single crystal grow with a nearly constant diameter. At the end of the growth process, the silicon melt in the pot has not completely disappeared. By increasing the lifting speed of the crystal and adjusting the heat supply to the pot, the crystal diameter is gradually reduced to form a tail-shaped cone. When the tip of the cone is small enough, the crystal will separate from the melt, thus completing the crystal growth process;
[0003] First, the existing silicon single crystal rod recovery structure generally uses an impact hammer to break and recycle the silicon single crystal rod. This method of crushing the silicon single crystal rod will cause impurities on the impact hammer to be mixed into the silicon single crystal rod fragments, thereby affecting the later use of the silicon single crystal rod fragments. It does not have a crushing mechanism, which makes it inconvenient to crush the silicon single crystal rod well; secondly, some debris after the silicon single crystal rod is crushed will remain on the placement plate. It does not have a flipping mechanism, which makes it inconvenient to clean up the debris remaining on the placement plate, resulting in waste of silicon single crystal rod fragments and reducing the use effect of the recovery device. Utility Model Content
[0004] In order to solve the problem that the existing recovery device is not convenient for crushing the silicon single crystal rod well and is not convenient for cleaning the debris remaining on the placement plate; the purpose of the utility model is to provide a silicon single crystal rod recovery device.
[0005] In order to solve the above technical problems, the utility model adopts the following technical scheme: a silicon single crystal rod recovery device comprises a box body, an inner wall of one side of the box body is rotatably connected with a placing plate, one end of the box body is provided with a turning mechanism used in conjunction with the placing plate, and a crushing mechanism is provided on the top side of the box body, and the crushing mechanism comprises a bracket, the bottom end of the bracket is fixedly connected to the top side of the box body, the upper part of one end of the bracket is fixedly connected to the supporting plate, the top of the supporting plate is fixedly connected to the first support, and the top of the first support is fixedly connected to the motor, the output end of the motor is fixedly connected to the first bevel gear, and the outer surface of the first bevel gear is meshedly connected to the second bevel gear, the bottom end of the second bevel gear is fixedly connected to the screw rod, one end of the bracket is provided with a long groove used in conjunction with the screw rod, and the bottom end of the screw rod is rotatably connected to the lower inner wall of the long groove, the outer surface of the screw rod is threadedly sleeved with a connecting block, and one end of the connecting block is fixedly connected to a connecting rod, and the bottom end of the connecting rod is fixedly connected to the crushing plate.
[0006] Preferably, the flipping mechanism includes a protective shell, one end of the protective shell is fixedly connected to the lower end of one end of the box body, the lower inner wall of the protective shell is fixedly connected to a second support, the top of the second support is fixedly connected to a cylinder, and the output end of the cylinder is fixedly connected to a connecting plate, the top of the connecting plate is fixedly connected to a toothed plate, the top of the toothed plate is meshingly connected to a third gear, and one end of the third gear is fixedly connected to a round rod, the end of the round rod facing away from the third gear passes through one end of the box body and is rotatably connected to one side inner wall of the box body, and the placement plate is fixedly sleeved on the outer surface of the round rod.
[0007] Compared with the prior art, the beneficial effects of the utility model are:
[0008] 1. The crushing mechanism structure of the present application can facilitate the crushing of silicon single crystal rods, thereby avoiding the mixing of other impurities into the silicon single crystal rod fragments during the recycling process;
[0009] 2. The present application, through the setting of the flipping mechanism structure, can facilitate the cleaning of the debris remaining on the placement plate, avoid the waste of silicon single crystal rod fragments, and improve the use effect of the recovery device. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0011] Figure 1 It is a schematic diagram of the structure of the utility model.
[0012] Figure 2 It is a schematic diagram of the cross-sectional structure of the utility model.
[0013] Figure 3 This is a schematic diagram of the structure of the crushing mechanism of the utility model.
[0014] Figure 4 For this utility model Figure 3 A schematic diagram of the enlarged structure in the middle.
[0015] Figure 5 It is a schematic diagram of the cross-section structure of the turning mechanism of the utility model.
[0016] In the figure: 1. box body; 2. crushing mechanism; 21. screw; 22. connecting block; 23. bracket; 24. long groove; 25. crushing plate; 26. connecting rod; 27. guide strip; 28. first support; 29. support plate; 201. guide groove; 202. second bevel gear; 203. first bevel gear; 204. motor; 3. turning mechanism; 31. connecting plate; 32. protective shell; 33. cylinder; 34. second support; 35. guide rail; 36. limit rod; 37. round rod; 38. third gear; 39. tooth plate; 301. limit groove; 4. discharge hopper; 5. discharge port; 6. placement plate; 7. pointed cone rod. DETAILED DESCRIPTION
[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0018] Example: Figure 1-5As shown, the utility model provides a silicon single crystal rod recovery device, including a box body 1, an inner wall of one side of the box body 1 is rotatably connected to a placement plate 6, one end of the box body 1 is provided with a flip mechanism 3 used in conjunction with the placement plate 6, a top side of the box body 1 is provided with a crushing mechanism 2, the crushing mechanism 2 includes a bracket 23, the bottom end of the bracket 23 is fixedly connected to the top side of the box body 1, an upper part of one end of the bracket 23 is fixedly connected to a support plate 29, the top of the support plate 29 is fixedly connected to a first support 28, and the top of the first support 28 is fixedly connected to a motor 204, the output end of the motor 204 is fixedly connected to a first bevel gear 203, and the outer surface of the first bevel gear 203 is meshingly connected to a second bevel gear 202, the bottom end of the second bevel gear 202 is fixedly connected to a screw 21, and one end of the bracket 23 A long groove 24 is opened at the end for use with the screw rod 21, and the bottom end of the screw rod 21 is rotatably connected to the lower inner wall of the long groove 24, the outer surface of the screw rod 21 is threadedly sleeved with a connecting block 22, and one end of the connecting block 22 is fixedly connected to a connecting rod 26, and the bottom end of the connecting rod 26 is fixedly connected to a crushing plate 25. The silicon single crystal rods to be recycled are placed on the placement plate 6, and then the motor 204 is started through the crushing mechanism 2. The output end of the motor 204 drives the first bevel gear 203 to rotate, and the rotation of the first bevel gear 203 drives the second bevel gear 202 to rotate. The rotation of the second bevel gear 202 drives the screw rod 21 to rotate, and the rotation of the screw rod 21 drives the connecting block 22 to move downward. The movement of the connecting block 22 drives the crushing plate 25 to move downward through the connecting rod 26 to apply pressure to the silicon single crystal rods on the placement plate 6, thereby better crushing and recycling the silicon single crystal rods.
[0019] The flip mechanism 3 includes a protective shell 32, one end of which is fixedly connected to the lower part of one end of the box body 1, and the lower inner wall of the protective shell 32 is fixedly connected to a second support 34, the top of the second support 34 is fixedly connected to a cylinder 33, and the output end of the cylinder 33 is fixedly connected to a connecting plate 31, the top of the connecting plate 31 is fixedly connected to a toothed plate 39, the top of the toothed plate 39 is meshedly connected to a third gear 38, and one end of the third gear 38 is fixedly connected to a round rod 37, and the round rod 37 is fixedly connected to the third gear 38. 7 The end of the third gear 38 facing away from the box body 1 passes through one end of the box body 1 and is rotatably connected to the inner wall of one side of the box body 1. The placement plate 6 is fixedly sleeved on the outer surface of the round rod 37. The cylinder 33 is started, and the output end of the cylinder 33 drives the connecting plate 31 to move. The movement of the connecting plate 31 drives the tooth plate 39 to move. The movement of the tooth plate 39 drives the third gear 38 to rotate. The rotation of the third gear 38 drives the placement plate 6 to flip through the round rod 37, so that the silicon single crystal rod fragments remaining on the placement plate 6 are cleaned up, avoiding the waste of fragments during recycling.
[0020] The bottom end of the crushing plate 25 and the top end of the placement plate 6 are both fixedly connected with a plurality of pointed cone rods 7, and the corresponding plurality of pointed cone rods 7 are distributed in a rectangular array. The coordinated use of the plurality of pointed cone rods 7 is more conducive to the crushing of the silicon single crystal rod.
[0021] Both ends of the connecting block 22 are fixedly connected with guide bars 27, and the inner walls on both sides of the long groove 24 are provided with guide grooves 201 used in conjunction with the two guide bars 27, and the outer surfaces of the two guide bars 27 are respectively slidably connected to the inner walls of the two guide grooves 201, and the guide grooves 201 are used in conjunction with the guide bars 27 to facilitate the movement and guidance of the connecting block 22.
[0022] The upper and lower positions of the crushing plate 25 and the placement plate 6 correspond to each other, so that the placement plate 6 can be used in conjunction with the crushing plate 25 .
[0023] A through discharge port 5 is provided on the lower inner wall of the box body 1, and a discharge hopper 4 is fixedly connected to one inner wall of one side of the box body 1 and the inner wall of one side of the discharge port 5. The discharge hopper 4 cooperates with the discharge port 5 to discharge the crushed materials from the box body 1 in a unified manner for recycling.
[0024] A guide rail 35 for cooperating with the tooth plate 39 is fixedly connected to the lower part of one end of the box body 1, and the bottom end of the tooth plate 39 is slidably connected to the lower inner wall of the guide rail 35. The lower inner wall of the guide rail 35 is provided with a limiting groove 301 for cooperating with the connecting plate 31, and the top end of the connecting plate 31 passes through the limiting groove 301. The guide rail 35 serves to guide the movement of the tooth plate 39, and the limiting groove 301 serves to limit the moving position of the connecting plate 31.
[0025] The inner walls on both sides of the box body 1 are fixedly connected with a limit rod 36 used in conjunction with the placement plate 6. The limit rod 36 serves to limit the rotation position of the placement plate 6 to prevent the placement plate 6 from rotating excessively and affecting the use of the placement plate 6.
[0026] Working principle: First, the silicon single crystal rods to be recycled are placed on the placement plate 6, and then the motor 204 is started through the crushing mechanism 2. The output end of the motor 204 drives the first bevel gear 203 to rotate, and the rotation of the first bevel gear 203 drives the second bevel gear 202 to rotate. The rotation of the second bevel gear 202 drives the screw rod 21 to rotate, and the rotation of the screw rod 21 drives the connecting block 22 to move downward. The guide groove 201 cooperates with the guide bar 27 to facilitate the movement and guidance of the connecting block 22. The connecting block 22 moves through the connecting rod 26 to drive the crushing plate 25 to move downward to press and crush the silicon single crystal rods on the placement plate 6;
[0027] Then, the cylinder 33 is started through the flipping mechanism 3, and the output end of the cylinder 33 drives the connecting plate 31 to move. The limiting groove 301 serves to limit the moving position of the connecting plate 31. The movement of the connecting plate 31 drives the tooth plate 39 to move. The guide rail 35 serves to guide the movement of the tooth plate 39. The movement of the tooth plate 39 drives the third gear 38 to rotate. The rotation of the third gear 38 drives the placement plate 6 to flip through the round rod 37. At the same time, the limiting rod 36 serves to limit the rotation position of the placement plate 6, so as to avoid excessive rotation of the placement plate 6 affecting the use of the placement plate 6, so that the silicon single crystal rod fragments remaining on the placement plate 6 are cleaned up, so as to avoid waste of fragments during recycling;
[0028] Then, the discharge hopper 4 cooperates with the discharge port 5 to discharge the crushed materials from the box body 1 for recycling.
[0029] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.
Claims
1. A silicon single crystal rod recovery device, comprising a box (1), characterized in that: A placement plate (6) is rotatably connected to an inner wall of one side of the box body (1); a turning mechanism (3) used in conjunction with the placement plate (6) is provided at one end of the box body (1); and a crushing mechanism (2) is provided on one side of the top end of the box body (1); The crushing mechanism (2) comprises a bracket (23), the bottom end of the bracket (23) is fixedly connected to one side of the top end of the box body (1), the upper part of one end of the bracket (23) is fixedly connected to a support plate (29), the top end of the support plate (29) is fixedly connected to a first support (28), and the top end of the first support (28) is fixedly connected to a motor (204), the output end of the motor (204) is fixedly connected to a first bevel gear (203), and the outer surface of the first bevel gear (203) is meshingly connected to A second bevel gear (202) is provided, the bottom end of the second bevel gear (202) is fixedly connected to a screw rod (21), one end of the bracket (23) is provided with a long groove (24) used in conjunction with the screw rod (21), and the bottom end of the screw rod (21) is rotatably connected to the lower inner wall of the long groove (24), the outer surface of the screw rod (21) is threadedly sleeved with a connecting block (22), one end of the connecting block (22) is fixedly connected to a connecting rod (26), and the bottom end of the connecting rod (26) is fixedly connected to a crushing plate (25).
2. A silicon single crystal rod recovery device as claimed in claim 1, characterized in that: The flip mechanism (3) comprises a protective shell (32), one end of the protective shell (32) is fixedly connected to the lower part of one end of the box body (1), the lower inner wall of the protective shell (32) is fixedly connected to a second support (34), the top end of the second support (34) is fixedly connected to a cylinder (33), and the output end of the cylinder (33) is fixedly connected to a connecting plate (31), the top end of the connecting plate (31) is fixedly connected to a toothed plate (39), the top end of the toothed plate (39) is meshingly connected to a third gear (38), and one end of the third gear (38) is fixedly connected to a round rod (37), the end of the round rod (37) facing away from the third gear (38) passes through one end of the box body (1) and is rotatably connected to an inner wall of one side of the box body (1), and the placement plate (6) is fixedly sleeved on the outer surface of the round rod (37).
3. A silicon single crystal rod recovery device as claimed in claim 1, characterized in that: The bottom end of the crushing plate (25) and the top end of the placement plate (6) are both fixedly connected with a plurality of pointed cone rods (7), and the corresponding plurality of pointed cone rods (7) are distributed in a rectangular array.
4. A silicon single crystal rod recovery device as claimed in claim 1, characterized in that: Both ends of the connection block (22) are fixedly connected with guide bars (27), and the inner walls on both sides of the long slot (24) are provided with guide grooves (201) used in conjunction with the two guide bars (27), and the outer surfaces of the two guide bars (27) are respectively slidably connected with the inner walls of the two guide grooves (201).
5. The silicon single crystal rod recovery device according to claim 1, characterized in that: The crushing plate (25) and the placing plate (6) are located in corresponding upper and lower positions.
6. A silicon single crystal rod recovery device as claimed in claim 1, characterized in that: A through-type discharge port (5) is provided on the lower inner wall of the box body (1), and a discharge hopper (4) is fixedly connected to one side inner wall of the box body (1) and one side inner wall of the discharge port (5).
7. A silicon single crystal rod recovery device as claimed in claim 2, characterized in that: A guide rail (35) used in conjunction with a toothed plate (39) is fixedly connected to the lower portion of one end of the box body (1), and the bottom end of the toothed plate (39) is slidably connected to the lower inner wall of the guide rail (35). A limiting groove (301) used in conjunction with a connecting plate (31) is formed on the lower inner wall of the guide rail (35), and the top end of the connecting plate (31) passes through the limiting groove (301).
8. A silicon single crystal rod recovery device as claimed in claim 2, characterized in that: The inner walls on both sides of the box body (1) are fixedly connected with limiting rods (36) used in conjunction with the placement plate (6).