Target gun and magnetron sputtering equipment

Abstract

The target gun comprises a base, a cover body, a first magnetic part, a first insulating part and a cooling structure, the cover body is provided with a containing cavity, the cover body is provided with a first end and a second end in the first direction, the first end is provided with an opening, the opening communicates with the containing cavity, and the second end is connected with the base; the first magnetic piece is located in the containing cavity and connected with the base. In the first direction, the first insulating part sleeves the peripheral wall of the first magnetic part; the cooling structure surrounds the peripheral wall of the first insulating part and is used for heat exchange in the accommodating cavity; the first insulating part blocks electric conduction between the first magnetic part and the cooling structure. According to the target gun, internal short circuit can be effectively blocked, and normal use of the target gun is guaranteed. The magnetron sputtering equipment comprises an equipment main body and the target gun, the equipment main body is provided with a vacuum cavity, and the target gun is arranged in the vacuum cavity, so that continuous magnetron sputtering operation is guaranteed, and the vacuum coating efficiency is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a target gun and a magnetron sputtering device. Background Art

[0002] The magnetron target gun includes a magnet for generating a magnetic field and a cooling component for providing cooling. The high-voltage power supply is electrically connected to the cooling component to ensure the cooling effect of the cooling component. The problem is that the space inside the magnetron target gun is limited, the various structures are installed relatively compactly, the magnet and the cooling component are relatively close, and the magnet and the cooling component are easily affected by factors such as conductive impurities and electrically connected, thereby causing the magnetron target gun to short-circuit, affecting the normal progress of the magnetron sputtering operation. Utility Model Content

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a target gun that can effectively prevent the magnetron target gun from short-circuiting and improve the coating efficiency.

[0004] The present application also proposes a magnetron sputtering device having the target gun.

[0005] According to the first aspect of the present application, a target gun includes a base, a cover, a first magnetic member, a first insulating member, and a cooling structure. The cover is provided with a receiving cavity. The cover has a first end and a second end along a first direction. The first end is provided with an opening, the opening is connected to the receiving cavity, and the second end is connected to the base. The first magnetic member is located in the receiving cavity, and the first magnetic member is connected to the base.

[0006] A first insulating member is sleeved on the outer wall of the first magnetic member along a first direction; a cooling structure surrounds the outer wall of the first insulating member, and the cooling structure is used for heat exchange in the accommodating cavity; wherein the first insulating member blocks the electrical conduction between the first magnetic member and the cooling structure.

[0007] The target gun according to the embodiment of the present application has at least the following beneficial effects: the cooling structure is used to connect high voltage electricity, the first magnetic part is used to provide the magnetic field environment required for magnetron sputtering in the accommodating chamber, the first insulating part is sleeved on the outer peripheral wall of the first magnetic part, the cooling structure surrounds the outer peripheral wall of the first insulating part, the first insulating part blocks the electrical conduction between the first magnetic part and the cooling structure, and can ensure that the first magnetic part emits a magnetic field into the accommodating chamber through the first insulating part, thereby solving the problem of the target gun being prone to short circuit while ensuring the normal operation of the target gun, which is beneficial to improving the efficiency of the magnetron sputtering coating operation.

[0008] According to some embodiments of the present application, the target gun further includes a second insulating member, which is accommodated in the accommodating cavity. Along the first direction, the second insulating member is located between the cooling structure and the base.

[0009] According to some embodiments of the present application, the base is provided with a boss, along the first direction, the second insulating member abuts the boss, the cooling structure abuts the second insulating member, the boss, the second insulating member and the cooling structure together enclose an installation cavity, and the first magnetic member and the first insulating member are both located in the installation cavity.

[0010] According to some embodiments of the present application, the target gun further includes a second magnetic component, which is accommodated in the accommodating cavity, connected to the base, distributed around the cooling structure, and spaced apart from the cooling structure.

[0011] According to some embodiments of the present application, the target gun further includes a third insulating member, which is sleeved on the second magnetic member and is used to block electrical conduction between the second magnetic member and the cooling structure.

[0012] According to some embodiments of the present application, the cooling structure is provided with a cooling channel, and the cooling channel is distributed around the first insulating member.

[0013] According to some embodiments of the present application, the cooling structure includes a first cooling member and a second cooling member, the first cooling member is provided with a cooling groove, the first cooling member and the second cooling member are detachably connected, the second cooling member closes the cooling groove to form a cooling channel, and along the first direction, the first cooling member is located on the side of the second cooling member away from the base.

[0014] According to some embodiments of the present application, the target gun further includes a connecting member, which is connected to the first magnetic member and is also connected to the base, and the connecting member fixes the first magnetic member on the base.

[0015] According to some embodiments of the present application, the target gun further includes a target material, which is accommodated in the accommodating cavity. Along the first direction, the target material is located on a side of the cooling structure close to the opening, and the target material abuts against the cooling structure.

[0016] The magnetron sputtering device according to the second aspect of the present application comprises a device body and a target gun in any of the above embodiments, the device body is provided with a vacuum chamber, and the target gun is located in the vacuum chamber.

[0017] The magnetron sputtering equipment according to the embodiment of the present application has at least the following beneficial effects: using the above-mentioned target gun for magnetron sputtering operation can effectively block the short circuit inside the target gun, thereby reducing the downtime during magnetron sputtering, ensuring the continuity of the magnetron sputtering operation, and improving the efficiency of magnetron sputtering.

[0018] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:

[0020] Figure 1 This is a schematic diagram of the structure of the target gun in the embodiment of the present application;

[0021] Figure 2 A side view of a target gun according to an embodiment of the present application;

[0022] Figure 3 for Figure 2 Sectional view at AA in the middle;

[0023] Figure 4 for Figure 3 A local enlarged schematic diagram of the middle A;

[0024] Figure 5 A cross-sectional view of a target gun according to another embodiment of the present application;

[0025] Figure 6 for Figure 5 A local enlarged schematic diagram of point B in the middle.

[0026] Reference numerals: base 100, boss 110;

[0027] Cover body 200, accommodating cavity 210, mounting cavity 211, opening 220;

[0028] Cooling structure 300, first cooling member 310, second cooling member 320, cooling channel 330;

[0029] A first magnetic member 410, a second magnetic member 420, a first insulating member 430, a second insulating member 440, a third insulating member 450, and a connecting member 460;

[0030] Target 500. DETAILED DESCRIPTION

[0031] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0032] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0033] In the description of this application, "several" means more than one, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0034] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0035] In the description of the present application, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0036] The following is an introduction to the embodiments of the present application in conjunction with the accompanying drawings:

[0037] refer to Figures 1 to 4 According to the target gun of the embodiment of the present application, the target gun includes a base 100, a cover 200, a first magnetic member 410, a first insulating member 430 and a cooling structure 300. The cover 200 is provided with a receiving cavity 210. The cover 200 has a first end and a second end along a first direction. The first end is provided with an opening 220, the opening 220 is connected to the receiving cavity 210, and the second end is connected to the base 100. The opening 220 is used to avoid the coating atoms or ions. The first magnetic member 410 is located in the receiving cavity 210, and the first magnetic member 410 and the base 100 are connected. The first insulating member 430 is connected to provide a magnetic field in the accommodating chamber 210. Along the first direction, the first insulating member 430 is sleeved on the outer peripheral wall of the first magnetic member 410 to cover the first magnetic member 410. The cooling structure 300 surrounds the outer peripheral wall of the first insulating member 430 and is used for heat exchange in the accommodating chamber 210, thereby taking away the heat generated in the accommodating chamber 210 when the target gun is working. The first insulating member 430 blocks the electrical conduction between the first magnetic member 410 and the cooling structure 300 to avoid a short circuit in the target gun, which is beneficial to ensure the continuity of the target gun operation.

[0038] Specifically, the first insulating component 430 is sleeved on the outer peripheral wall of the first magnetic component 410. The first insulating component 430 and the base 100 together enclose the first magnetic component 410 in a cavity. The cooling structure 300 surrounds the outer peripheral wall of the first insulating component 430. The first insulating component 430 blocks the electrical conduction between the cooling structure 300 and the first magnetic component 410 to prevent the target gun from short-circuiting. The magnetic field generated by the first magnetic component 410 can diffuse into the accommodating cavity 210 through the first insulating component 430, thereby providing the magnetic field environment required for the target gun to work.

[0039] It should be noted that there is a gap between the cooling structure 300 and the base 100 to avoid electrical conduction between the cooling structure 300 and the base 100, thereby preventing the target gun from short-circuiting.

[0040] refer to Figures 1 to 4 In other embodiments, the first magnetic member 410 is connected to the center of the base 100 , and the center of the base 100 provides a magnetic field, so that the magnetic field is more evenly distributed in the accommodating cavity 210 .

[0041] refer to Figures 1 to 4 It should be noted that, in any of the above embodiments, there is an electric field in the accommodating chamber 210, and the first magnetic member 410 is used to provide a magnetic field. The magnetic field provided by the first magnetic member 410 can bind electrons, so that the motion trajectory of the electrons is approximately a cycloid under the action of the electric field and the magnetic field. The cooling structure 300 is powered by high voltage. During magnetron sputtering, a target material 500 is installed in the accommodating chamber 210, and a working medium impacts the target material 500. The working medium can be electrons, ions, and other media. The atoms or ions of the target material 500 fall off and move to the substrate to be coated for coating. The first insulating member 430 is sleeved on the first magnetic member 410, which solves the short circuit problem caused by the impurities or foreign impurities in the target material 500 moving between the first magnetic member 410 and the cooling structure 300 during the coating operation.

[0042] refer to Figures 1 to 4 In other embodiments, the first magnetic member 410 may also be a magnet with a symmetrical shape such as a cylindrical or annular shape. The symmetry of the magnet shape facilitates the generation of a more uniform magnetic field in the accommodating cavity 210, further improving the uniformity of the magnetic field distribution in the accommodating cavity 210.

[0043] refer to Figures 1 to 4 In some embodiments, the target gun further includes a second insulating member 440, which is received in the accommodating cavity 210. Along the first direction, the second insulating member 440 is located between the cooling structure 300 and the base 100, and is used to block the electrical connection between the cooling structure 300 and the base 100, further reducing the risk of short circuit of the target gun, thereby reducing the maintenance time of the target gun and improving work efficiency.

[0044] Specifically, the first magnetic member 410 is connected to the base 100, and the second insulating member 440 is located between the cooling structure 300 and the base 100, thereby blocking the electrical conduction between the cooling structure 300 and the base 100, thereby solving the problem of electrical conduction between the cooling structure 300 and the base 100, which causes the current to bypass the preset current path in the target gun and cause a short circuit.

[0045] refer to Figures 1 to 4 In other embodiments, the cooling structure 300 supports the target material 500 to charge the target material 500. Along the first direction, the target material 500 is located on the side of the cooling structure 300 close to the opening 220, and the second insulating member 440 is located on the side of the cooling structure 300 away from the opening 220. The second insulating member 440 is used to support and install the cooling structure 300, and the target gun is placed vertically during operation. The second insulating member 440 can be made of harder insulating materials such as ceramics and silicon carbide to avoid compression and improve the stability of the support.

[0046] refer to Figures 1 to 4 In other embodiments, the cooling structure 300 is annular, the first magnetic member 410 is located at the center of the cooling structure 300, and the cooling structure 300 is distributed around the first insulating member 430. Compared with other shapes, the cooling structure 300 can be more evenly distributed in the accommodating cavity 210 under the condition of unchanged volume, thereby improving the cooling efficiency of the cooling structure 300. Accordingly, the second insulating member 440 is annular and supports the cooling structure 300, which helps to increase the support area of ​​the second insulating member 440 on the cooling structure 300 and provide more stable support.

[0047] refer to Figure 3 and Figure 4 In some embodiments, the base 100 is provided with a boss 110, and along the first direction, the second insulating member 440 abuts against the boss 110, and the cooling structure 300 abuts against the second insulating member 440, that is, along the first direction, one side of the two opposite sides of the second insulating member 440 abuts against the boss 110, and the other side abuts against the cooling structure 300. The arrangement of the boss 110 facilitates the second insulating member 440 and the cooling structure 300 to determine the installation position in the accommodating cavity 210. Among them, the boss 110, the second insulating part 440 and the cooling structure 300 jointly enclose the installation cavity 211, the first magnetic part 410 and the first insulating part 430 are both located in the installation cavity 211, along the first direction, the target material 500 is located outside the installation cavity 211, and the cooling structure 300 supports the target material 500, so that the first magnetic part 410 and the first insulating part 430 are located in the installation cavity 211, further hindering the electrical conduction between the first magnetic part 410 and the target material 500, thereby reducing the risk of short circuit of the target gun.

[0048] refer to Figure 3 and Figure 4In other embodiments, the boss 110 is annular, and the first magnetic member 410 is installed at the center of the boss 110. The annular boss 110 facilitates the first magnetic member 410 to determine the installation position and limits the movement of the first magnetic member 410 in the accommodating chamber 210, thereby avoiding damage to the target gun due to the movement of the first magnetic member 410, which is beneficial to extending the service life of the target gun.

[0049] It should be noted that the installation cavity 211 is a part of the accommodating cavity 210 , and the boss 110 , the second insulating member 440 and the cooling structure 300 all allow the magnetic field to penetrate, thereby ensuring the normal operation of the target gun.

[0050] refer to Figure 3 and Figure 4 In some embodiments, the target gun further includes a second magnetic member 420, which is contained in the accommodating cavity 210, connected to the base 100, and distributed around the cooling structure 300, so that the cooling structure 300 can cool the second magnetic member 420. In addition, the second magnetic member 420 cooperates with the first magnetic member 410, so that the magnetic field can better cover the accommodating cavity 210, so that the working medium is affected by the magnetic field emitted by the first magnetic member 410 and the second magnetic member 420, and has a longer movement path in the accommodating cavity 210, thereby increasing the collision probability between the working medium and the gas molecules, thereby improving the sputtering efficiency.

[0051] It should be noted that the second magnetic member 420 surrounds the cooling structure 300, and the cooling structure 300 surrounds the first magnetic member 410, that is, the second magnetic member 420 is distributed around the first magnetic member 410, so as to form a more uniform magnetic field on the surface of the target material 500, so that the coating atoms or ions detached from different positions on the target material 500 are also more uniform, and then the coating atoms or ions are plated on the substrate to be coated more uniformly. In addition, there is a gap between the second magnetic member 420 and the cooling structure 300, and the gap is used to block the electrical conduction between the second magnetic member 420 and the cooling structure 300, which solves the short circuit problem caused by the electrical conduction between the second magnetic member 420 and the cooling structure 300, and ensures the continuity of the target gun coating operation.

[0052] refer to Figure 3 and Figure 4In other embodiments, along the first direction, the second insulating member 440 is disposed on the boss 110, the cooling structure 300 is disposed on the second insulating member 440, the second magnetic member 420 is annular, the second magnetic member 420 surrounds the cooling structure 300 and the boss 110, the second magnetic member 420 is located on the outside of the boss 110, and the boss 110 is used to prevent the second magnetic member 420 from approaching the cooling structure 300, so that the second magnetic member 420 can maintain a safe distance from the cooling structure 300 at all places, which is beneficial to ensure the stability of the target gun. In addition, the boss 110 is also convenient for providing an installation reference for the installation of the second magnetic member 420, ensuring the concentricity of the cooling structure 300 and the second magnetic member 420, and making the overall structure of the target gun more compact.

[0053] It should be noted that the safety distance is the shortest distance at which the second magnetic member 420 and the cooling structure 300 cannot be electrically connected, and is used to prevent the second magnetic member 420 and the cooling structure 300 from being electrically connected and causing a short circuit in the target gun.

[0054] refer to Figure 5 and Figure 6 In some embodiments, the target gun further includes a third insulating member 450, which is sleeved on the second magnetic member 420. The third insulating member 450 further blocks the electrical conduction between the second magnetic member 420 and the cooling structure 300, and the installation positions of the cooling structure 300 and the second magnetic member 420 can be closer without considering the safety distance, thereby improving the compactness of the target gun. In addition, shortening the installation distance between the second magnetic member 420 and the cooling structure 300 also facilitates heat exchange between the cooling structure 300 and the second magnetic member 420, which is beneficial to controlling the working temperature of the second magnetic member 420 and improving the working stability of the target gun.

[0055] refer to Figures 1 to 4 In some embodiments, the cooling structure 300 is provided with a cooling channel 330, which is distributed around the first insulating member 430. The cooling channel 330 is used to contain coolant. The cooling channel 330 includes a liquid inlet and a liquid outlet. The liquid inlet is used to inject coolant into the cooling channel 330, and the liquid outlet is used to discharge coolant out of the cooling channel 330. The coolant flows in the cooling channel 330 to take away the heat in the accommodating cavity 210, thereby preventing the target gun from affecting its working performance due to temperature rise.

[0056] It should be noted that the heat in the accommodating cavity 210 mainly comes from the working medium impacting the target material 500. The cooling structure 300 is installed close to and against the target material 500, which helps to improve the heat transfer efficiency between the cooling structure 300 and the target material 500. When the target gun is in operation, the cooling structure 300 is energized to increase the flow rate of the coolant in the cooling channel 330. The charged ions in the coolant are acted upon by the electric field, thereby promoting the coolant to flow faster, thereby further improving the heat exchange efficiency of the cooling structure 300.

[0057] refer to Figure 3 and Figure 4 In some embodiments, the cooling structure 300 includes a first cooling member 310 and a second cooling member 320. The cooling structure 300 is split into two parts. The first cooling member 310 and the second cooling member 320 are processed and manufactured separately, and then the first cooling member 310 and the second cooling member 320 are combined into the cooling structure 300, which reduces the manufacturing difficulty and is beneficial to saving production costs. Among them, the first cooling member 310 is provided with a cooling groove, the first cooling member 310 and the second cooling member 320 are detachably connected, and the second cooling member 320 closes the cooling groove to form a cooling channel 330. Along the first direction, the first cooling member 310 is located on the side of the second cooling member 320 away from the base 100, and the target 500 is installed on the side of the first cooling member 310 away from the second cooling member 320. When the target gun is operating, the base 100 is located above the second cooling member 320, the first cooling member 310 is located below the second cooling member 320, and the target material 500 is located below the first cooling member 310. The lower part of the cooling channel 330 needs to withstand greater water pressure than the upper part. The second cooling member 320 is connected to the upper part of the first cooling member 310. The cooling structure 300 can more stably limit the coolant to flow in the cooling channel 330, thereby improving the stability of the target gun operation.

[0058] It should be noted that the connection between the first cooling member 310 and the second cooling member 320 is a relatively weak point of the cooling channel 330, and the coolant flows in the cooling channel 330. By setting the second cooling member 320 on the side of the first cooling member 310 close to the base 100, when the target gun is operating, the second cooling member 320 is located above the first cooling member 310, and the relatively weak point of the cooling channel 330 is set at the upper position of the cooling channel 330, thereby improving the sealing of the cooling structure 300.

[0059] refer to Figure 3 and Figure 4In some embodiments, the target gun further includes a connecting member 460, which is connected to the first magnetic member 410, and the connecting member 460 is also connected to the base 100, and the connecting member 460 fixes the first magnetic member 410 on the base 100. When the target gun is in operation, the base 100 is located above the first magnetic member 410, and the target material 500 is located below the first magnetic member 410. The first magnetic member 410 is fixed by the connecting member 460, and keeps a certain distance from the target material 500, thereby reducing the heat transfer speed of the target material 500 to the first magnetic member 410, thereby ensuring the stability of the magnetic field generated by the first magnetic member 410.

[0060] It should be noted that the temperature increase will affect the performance of the first magnetic member 410 in generating a magnetic field, and thus affect the stability of the magnetic field in the accommodating chamber 210. When the target gun is operating, reducing the heat transfer rate from the target material 500 to the first magnetic member 410 can reduce the impact on the first magnetic member 410, and thus ensure the stability of the magnetic field. In addition, the first insulating member 430 is sleeved on the first magnetic member 410, and the insulation performance of the first insulating member 430 will also be affected by the temperature. Reducing the heat transfer rate from the target material 500 to the first magnetic member 410 can also reduce the impact on the insulation performance of the first insulating member 430, thereby avoiding the first magnetic member 410 and the target material 500 from being electrically conductive due to the failure of the first insulating member 430, and further preventing the target gun from short-circuiting.

[0061] refer to Figure 3 and Figure 4 In other embodiments, when the target gun is operating, the cover body 200 is charged as the anode of the target gun, the base 100 is connected to the cover body 200, and the base 100 is also charged. The connecting piece 460 is made of an insulating material, which blocks the current from passing through the connecting piece 460, solves the problem of interfering magnetic field generated by the connecting piece 460 being energized, effectively avoids the interfering magnetic field from affecting the magnetic field generated by the first magnetic piece 410 and the second magnetic piece 420, and ensures the uniformity of the magnetic field distribution in the accommodating cavity 210.

[0062] refer to Figures 1 to 4 In some embodiments, the target gun further includes a target material 500. The target material 500 is used as a material source in the magnetron sputtering process. After being impacted by the working medium, the coating atoms or ions will fall off. The coating atoms or ions move through the opening 220 to the substrate to be coated to form a film layer. Along the first direction, the target material 500 is located on a side of the cooling structure 300 close to the opening 220 to prevent the coating atoms or ions from being disturbed by other factors during the movement.

[0063] refer to Figures 1 to 4According to the magnetron sputtering device of the embodiment of the present application, it includes a device body and a target gun in any of the above embodiments. The device body is provided with a vacuum chamber, which provides a vacuum environment for magnetron sputtering coating. The target gun is located in the vacuum chamber and provides a material source required for coating. The target gun in the above embodiment can effectively avoid short circuit of the target gun, reduce the downtime of the magnetron sputtering device, make the coating operation more continuous, and help improve work efficiency.

[0064] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A target gun, characterized in that: include: Pedestal; A cover body is provided with a receiving cavity, the cover body has a first end and a second end along a first direction, the first end is provided with an opening, the opening is connected to the receiving cavity, and the second end is connected to the base; A first magnetic member is located in the accommodating cavity and is connected to the base; A first insulating member, along the first direction, the first insulating member is sleeved on the outer peripheral wall of the first magnetic member; A cooling structure surrounding an outer peripheral wall of the first insulating member, the cooling structure being used for heat exchange in the accommodating cavity; Wherein, the first insulating component blocks the electrical conduction between the first magnetic component and the cooling structure.

2. The target gun according to claim 1, characterized in that: The target gun further includes a second insulating member, which is received in the accommodating cavity. Along the first direction, the second insulating member is located between the cooling structure and the base.

3. The target gun according to claim 2, characterized in that: The base is provided with a boss, and along the first direction, the second insulating member abuts the boss, and the cooling structure abuts the second insulating member. The boss, the second insulating member and the cooling structure together enclose an installation cavity, and the first magnetic member and the first insulating member are both located in the installation cavity.

4. The target gun according to claim 1, characterized in that: The target gun further includes a second magnetic component, which is received in the accommodating cavity, connected to the base, and distributed around the cooling structure with a gap between the second magnetic component and the cooling structure.

5. The target gun according to claim 4, characterized in that: The target gun further comprises a third insulating member, which is sleeved on the second magnetic member and is used to block electrical conduction between the second magnetic member and the cooling structure.

6. The target gun according to claim 1, characterized in that: The cooling structure is provided with a cooling channel, and the cooling channel is distributed around the first insulating member.

7. The target gun according to claim 6, characterized in that: The cooling structure includes a first cooling member and a second cooling member, the first cooling member is provided with a cooling groove, the first cooling member and the second cooling member are detachably connected, the second cooling member closes the cooling groove to form the cooling channel, and along the first direction, the first cooling member is located on the side of the second cooling member away from the base.

8. The target gun according to claim 1, characterized in that: The target gun further comprises a connecting member, wherein the connecting member is connected to the first magnetic member, and the connecting member is also connected to the base, and the connecting member fixes the first magnetic member on the base.

9. The target gun according to claim 1, characterized in that: The target gun further includes a target material, which is accommodated in the accommodating cavity. Along the first direction, the target material is located on a side of the cooling structure close to the opening, and the target material abuts against the cooling structure.

10. A magnetron sputtering device, characterized in that: include: The device body is provided with a vacuum chamber; The target gun according to any one of claims 1 to 9 is located in the vacuum chamber.

Images