Air inlet assembly for reaction cavity

Abstract

The utility model relates to the technical field of reaction chamber air inlet assemblies, and discloses an air inlet assembly for a reaction chamber, which comprises a reaction chamber wall and an air inlet pipe, an installation assembly is arranged at the top of the reaction chamber wall, and the installation assembly comprises an installation block fixedly installed at the top of the reaction chamber wall. A mounting round hole penetrating to the bottom of the mounting block is formed in the top of the mounting block, the air inlet pipe is slidably connected to the interior of the mounting round hole, the bottom of the air inlet pipe penetrates and extends to the bottom of the reaction cavity wall, and two connecting grooves are formed in the inner side wall of the mounting round hole. According to the gas inlet assembly for the reaction cavity, the gas inlet pipe can be stably mounted by arranging the mounting assembly, and when the reaction cavity is used for a period of time and the inner wall of the gas inlet pipe is corroded, the gas inlet pipe can be quickly replaced through the mounting assembly, so that the gas inlet stability of the gas inlet pipe can be ensured; meanwhile, the stability of the reaction in the reaction cavity can be ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of reaction chamber air intake components, in particular to an air intake component used in a reaction chamber. Background Art

[0002] During the semiconductor epitaxial process, a reaction chamber is required to carry out process reactions. During the process reactions, the side walls of the chamber need to be purged using a purge gas device to form a protective film on the side walls of the reaction chamber. The process gas is allowed to flow inside the protective film to prevent the process gas from reacting on the side walls, thereby keeping the side walls clean.

[0003] However, during actual operation, although a purge gas device can be used to protect the interior of the reaction chamber, for the air intake pipe connected to the interior of the reaction chamber, during the reaction, some process gases will react on the inner wall of the air intake pipe, and the purge gas device cannot protect the inner wall of the air intake pipe, so the process gas will react on the inner wall of the air intake pipe, causing corrosion of the inner wall of the air intake pipe. Therefore, an air intake assembly for a reaction chamber is proposed to solve the above problem. Utility Model Content

[0004] 1. Technical issues to be resolved

[0005] In view of the deficiencies in the prior art, the utility model provides an air intake assembly for a reaction chamber, which has the advantages of being able to quickly replace the air intake pipe, and solves the problem that the existing air intake assembly for the reaction chamber causes the process gas to react on the inner wall of the air intake pipe, resulting in corrosion of the inner wall of the air intake pipe.

[0006] (II) Technical solution

[0007] In order to achieve the above-mentioned purpose of being able to quickly replace the air intake pipe, the utility model provides the following technical solution: an air intake assembly for a reaction chamber, comprising a reaction chamber wall and an air intake pipe, wherein a mounting assembly is arranged on the top of the reaction chamber wall.

[0008] The cam is an angular channel that is fixedly connected to the top of the chamber wall, and the cam is provided with a circular mounting hole that penetrates to the bottom thereof, the air inlet pipe is slidably connected to the inside of the circular mounting hole, and the bottom of the air inlet pipe penetrates and extends to the bottom of the chamber wall. The inner wall of the circular mounting hole is provided with two connecting grooves, and the outer side of the air inlet pipe is fixedly installed with two connecting blocks that are respectively slidably connected to the inside of the two connecting grooves. The opposite side walls of the inner cavities of the two connecting grooves are provided with fixed grooves, and the opposite side walls of the inner cavities of the two fixing grooves are rotatably connected with threaded sleeves. A driving assembly that drives the threaded sleeve to rotate is installed on the top of the mounting block, and the interiors of the two fixing grooves are provided with support assemblies that ensure the rotation stability of the threaded sleeves. The interiors of the two threaded sleeves are threadedly connected with threaded rods, and movable plates are fixedly installed on the opposite sides of the two threaded rods. The tops and bottoms of the two movable plates are provided with limit assemblies to prevent them from rotating, and the opposite sides of the two movable plates are provided with positioning assemblies for limiting the connecting blocks.

[0009] Furthermore, the driving assembly includes two rotating rods rotatably connected to the top of the mounting block and respectively extending into the two fixing grooves, knobs are fixedly mounted on the tops of the two rotating rods, and wheel rod assemblies are arranged on the outer sides of the two rotating rods.

[0010] Furthermore, the positioning assembly includes a positioning block fixedly mounted on one side opposite to the two movable plates, and the two connecting blocks are each provided with a positioning groove slidably connected to the positioning block on one side opposite to the other.

[0011] Furthermore, a sliding hole is provided on the top of the reaction chamber wall and extends to the bottom thereof, the position of the sliding hole corresponds to the position of the mounting circular hole, and the air inlet pipe is slidably connected to the inside of the sliding hole.

[0012] Furthermore, the support assembly includes a support vertical plate fixedly installed between the top wall and the inner bottom wall of the fixing groove, and the two threaded sleeves are respectively slidably connected to the inside of the two support vertical plates.

[0013] Furthermore, the limiting assembly includes limiting blocks fixedly mounted on the top and bottom of the movable plate, and the inner top wall and the inner bottom wall of the fixed groove are both provided with limiting grooves slidably connected to the limiting blocks.

[0014] Furthermore, the bottoms of the two rotating rods are rotatably connected to the inner bottom walls of the two fixing grooves respectively.

[0015] Furthermore, the wheel-rod assembly includes a worm fixedly mounted on the outer sides of the two rotating rods, and a worm wheel meshing with the worm is fixedly mounted on the outer sides of the two threaded sleeves.

[0016] (III) Beneficial effects

[0017] Compared with the prior art, the utility model provides an air intake assembly for a reaction chamber, which has the following beneficial effects:

[0018] The air intake assembly for the reaction chamber can stably install the air intake pipe by setting the installation assembly. When the inner wall of the air intake pipe is corroded after the reaction chamber has been used for a period of time, the air intake pipe can be quickly replaced by the installation assembly, thereby ensuring the stability of air intake of the air intake pipe and the stability of the reaction inside the reaction chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of the utility model;

[0020] Figure 2 The utility model structure Figure 1 A magnified view of middle;

[0021] Figure 3 In the utility model structure Figure 1 Schematic diagram of the three-dimensional structure.

[0022] In the figure: 1. reaction chamber wall; 2. mounting assembly; 201. mounting block; 202. mounting circular hole; 203. connecting groove; 204. connecting block; 205. fixing groove; 206. threaded sleeve; 207. driving assembly; 2071. rotating rod; 2072. knob; 2073. wheel rod assembly; 208. supporting assembly; 209. threaded rod; 210. movable plate; 211. limiting assembly; 212. positioning assembly; 2121. positioning block; 2122. positioning groove; 3. air inlet pipe. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Example 1: Please refer to Figure 1-3 In this embodiment, an air intake assembly for a reaction chamber includes a reaction chamber wall 1 and an air intake pipe 3, and a mounting assembly 2 is arranged on the top of the reaction chamber wall 1.

[0025] Example 2: Please refer to Figure 1-3On the basis of the first embodiment, the mounting assembly 2 comprises a mounting block 201 fixedly mounted on the top of the reaction chamber wall 1, a mounting circular hole 202 penetrating to the bottom of the mounting block 201 is provided on the top, the air inlet pipe 3 is slidably connected to the inside of the mounting circular hole 202, and the bottom of the air inlet pipe 3 penetrates and extends to the bottom of the reaction chamber wall 1, two connecting grooves 203 are provided on the inner side wall of the mounting circular hole 202, two connecting blocks 204 respectively slidably connected to the inside of the two connecting grooves 203 are fixedly mounted on the outer side of the air inlet pipe 3, and the opposite side walls of the inner cavities of the two connecting grooves 203 are provided with fixing grooves 205, and the opposite side walls of the inner cavities of the two fixing grooves 205 are provided with fixing grooves 205. The side walls are rotatably connected with threaded sleeves 206, and a driving assembly 207 for driving the threaded sleeve 206 to rotate is installed on the top of the mounting block 201. The interiors of the two fixed grooves 205 are provided with support assemblies 208 for ensuring the rotation stability of the threaded sleeve 206. The interiors of the two threaded sleeves 206 are threadedly connected with threaded rods 209, and movable plates 210 are fixedly installed on opposite sides of the two threaded rods 209. Limiting assemblies 211 are provided on the top and bottom of the two movable plates 210 to prevent them from rotating, and positioning assemblies 212 for limiting the connecting block 204 are installed on opposite sides of the two movable plates 210.

[0026] Among them, a sliding hole is opened on the top of the reaction chamber wall 1 and penetrates to its bottom. The position of the sliding hole corresponds to the position of the mounting circular hole 202. The air inlet pipe 3 is slidably connected to the inside of the sliding hole. The installation of the air inlet pipe 3 can be ensured by mounting the circular hole 202 and the sliding hole. At the same time, the reaction gas can be delivered into the reaction chamber through the air inlet pipe 3.

[0027] It should be noted that the driving assembly 207 includes two rotating rods 2071 which are rotatably connected to the top of the mounting block 201 and respectively extend into the two fixed grooves 205 . Knobs 2072 are fixedly installed on the tops of the two rotating rods 2071 , and wheel rod assemblies 2073 are provided on the outer sides of the two rotating rods 2071 .

[0028] The bottoms of the two rotating rods 2071 are rotatably connected to the inner bottom walls of the two fixing grooves 205 to ensure the stability of the rotation of the two rotating rods 2071. When the two knobs 2072 are rotated, the two knobs 2072 will drive the two rotating rods 2071 to rotate respectively.

[0029] In addition, the wheel-rod assembly 2073 includes a worm fixedly mounted on the outside of the two rotating rods 2071, and a worm wheel meshing with the worm is fixedly mounted on the outside of the two threaded sleeves 206. When the two rotating rods 2071 rotate, the two rotating rods 2071 will respectively drive the two worms to rotate, and the two worms will respectively drive the two worm wheels meshing with them to rotate, and the two worm wheels will respectively drive the two threaded sleeves 206 to rotate.

[0030] It should be noted that the support assembly 208 includes a support vertical plate fixedly installed between the inner top wall and the inner bottom wall of the fixing groove 205, and the two threaded sleeves 206 are respectively slidably connected to the inside of the two support vertical plates. The two threaded sleeves 206 are stably supported by the two support vertical plates to ensure the stability of the rotation of the two threaded sleeves 206 and prevent the two threaded sleeves 206 from offset.

[0031] In addition, the limit assembly 211 includes limit blocks fixedly installed on the top and bottom of the movable plate 210, and the inner top wall and the inner bottom wall of the fixed groove 205 are provided with limit grooves slidably connected to the limit blocks. The movable plate 210 can be limited and guided by the limit blocks and the limit grooves. While ensuring the movement stability of the movable plate 210, the movable plate 210 can also be prevented from rotating. The movable plate 210 can further prevent the threaded rod 209 from rotating. When the two threaded sleeves 206 rotate, under the action of the thread thrust, the two threaded sleeves 206 will respectively drive the two threaded rods 209 to move to the opposite side or the opposite side, and the two threaded rods 209 will respectively drive the two movable plates 210 to move to the opposite side or the opposite side.

[0032] It should be noted that the positioning assembly 212 includes a positioning block 2121 fixedly installed on the opposite side of the two movable plates 210, and the opposite sides of the two connecting blocks 204 are provided with a positioning groove 2122 that is slidably connected to the positioning block 2121. When the two movable plates 210 move toward the opposite side or the opposite side, the two movable plates 210 will respectively drive the two positioning blocks 2121 to move toward the opposite side or the opposite side.

[0033] Specifically, when the two positioning blocks 2121 move toward opposite sides and the two positioning blocks 2121 are respectively disengaged from the two positioning grooves 2122, the intake pipe 3 can be taken out from the mounting circular hole 202 and the sliding hole; when the two positioning blocks 2121 move toward opposite sides and the two positioning blocks 2121 are respectively slidably connected to the two positioning grooves 2122, the two connecting blocks 204 can be fixed, thereby fixing the intake pipe 3 and ensuring the stability of the intake pipe 3.

[0034] It should be noted that after the reaction chamber has been used for a period of time, the inside of the air intake pipe 3 will be corroded by the reaction gas, and the air intake pipe 3 can be quickly replaced by installing the assembly 2 to ensure the stability of the air intake of the air intake pipe 3.

[0035] The working principle of the above embodiment is:

[0036] After the reaction chamber has been used for a period of time, the two knobs 2072 can be rotated, and the two knobs 2072 will respectively drive the two rotating rods 2071 to rotate, and the two rotating rods 2071 will respectively drive the two worms to rotate, and the two worms will respectively drive the two worm wheels meshing therewith to rotate, and the two worm wheels will respectively drive the two threaded sleeves 206 to rotate, and under the action of the thread thrust, the two threaded sleeves 206 will respectively drive the two threaded rods 209 to move to the opposite side, and the two threaded rods 209 will respectively drive the two movable plates 210 to move to the opposite side, and the two movable plates 210 will respectively drive the two positioning blocks 2121 to move to the opposite side. When the blocks 2121 are respectively disengaged from the two positioning grooves 2122, the intake pipe 3 can be taken out from the mounting circular hole 202 and the sliding hole, and then the new intake pipe 3 can be installed. When installing the intake pipe 3, first slide the intake pipe 3 to the inside of the mounting circular hole 202 and the sliding hole, and make the two connecting blocks 204 slide to the inside of the two connecting grooves 203, and then rotate the two knobs 2072 in opposite directions. According to the above principle, the two positioning blocks 2121 can be moved to the opposite side. When the two positioning blocks 2121 are respectively slide to the inside of the two positioning grooves 2122, the two connecting blocks 204 can be fixed, thereby fixing the intake pipe 3 to ensure the stability of the intake pipe 3.

[0037] The electrical components appearing in the article are all electrically connected to the main controller and the power supply. The main controller can be a conventional known device for control such as a computer, and the existing public power connection technology is not described in detail in the article.

[0038] It should be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0039] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An air intake assembly for a reaction chamber, comprising a reaction chamber wall (1) and an air intake pipe (3), characterized in that: A mounting assembly (2) is provided on the top of the reaction chamber wall (1); The mounting assembly (2) comprises a mounting block (201) fixedly mounted on the top of the reaction chamber wall (1); a mounting circular hole (202) extending from the top of the mounting block (201) to the bottom thereof; the air inlet pipe (3) is slidably connected to the inside of the mounting circular hole (202), and the bottom of the air inlet pipe (3) extends through and extends to the bottom of the reaction chamber wall (1); two connecting grooves (203) are provided on the inner side wall of the mounting circular hole (202); two connecting blocks (204) slidably connected to the inside of the two connecting grooves (203) are fixedly mounted on the outer side of the air inlet pipe (3); opposite side walls of the inner cavities of the two connecting grooves (203) are provided with fixing grooves (205); opposite side walls of the inner cavities of the two fixing grooves (205) are provided with fixing grooves (205). A threaded sleeve (206) is rotatably connected, a driving assembly (207) for driving the threaded sleeve (206) to rotate is installed on the top of the mounting block (201), a supporting assembly (208) for ensuring the rotation stability of the threaded sleeve (206) is arranged inside the two fixing grooves (205), a threaded rod (209) is threadedly connected inside the two threaded sleeves (206), a movable plate (210) is fixedly installed on the opposite side of the two threaded rods (209), a limiting assembly (211) for preventing the movable plates (210) from rotating is arranged on the top and bottom of the two movable plates (210), and a positioning assembly (212) for limiting the connection block (204) is installed on the opposite side of the two movable plates (210).

2. The gas inlet assembly for a reaction chamber according to claim 1, characterized in that: The driving assembly (207) comprises two rotating rods (2071) which are rotatably connected to the top of the mounting block (201) and respectively penetrate into the inside of the two fixing grooves (205); a knob (2072) is fixedly mounted on the top of the two rotating rods (2071); and a wheel rod assembly (2073) is arranged on the outer side of the two rotating rods (2071).

3. The gas inlet assembly for a reaction chamber according to claim 1, characterized in that: The positioning assembly (212) comprises a positioning block (2121) fixedly mounted on opposite sides of the two movable plates (210), and opposite sides of the two connecting blocks (204) are each provided with a positioning groove (2122) slidably connected to the positioning block (2121).

4. The gas inlet assembly for a reaction chamber according to claim 1, characterized in that: The top of the reaction chamber wall (1) is provided with a sliding hole extending through to the bottom thereof, the position of the sliding hole corresponds to the position of the mounting circular hole (202), and the air inlet pipe (3) is slidably connected to the inside of the sliding hole.

5. The gas inlet assembly for a reaction chamber according to claim 1, characterized in that: The support assembly (208) comprises a support vertical plate fixedly mounted between the inner top wall and the inner bottom wall of the fixing groove (205), and the two threaded sleeves (206) are respectively slidably connected to the inside of the two support vertical plates.

6. The gas inlet assembly for a reaction chamber according to claim 1, characterized in that: The limiting assembly (211) comprises limiting blocks fixedly mounted on the top and bottom of the movable plate (210), and the inner top wall and the inner bottom wall of the fixed groove (205) are both provided with limiting grooves slidably connected to the limiting blocks.

7. The gas inlet assembly for a reaction chamber according to claim 2, characterized in that: The bottoms of the two rotating rods (2071) are rotatably connected to the inner bottom walls of the two fixing grooves (205) respectively.

8. The gas inlet assembly for a reaction chamber according to claim 2, characterized in that: The wheel-rod assembly (2073) comprises a worm fixedly mounted on the outside of the two rotating rods (2071), and a worm wheel meshing with the worm is fixedly mounted on the outside of the two threaded sleeves (206).

Images