Fine adjustment structure for illumination light spot position of DMD lens

Abstract

The utility model relates to the technical field of optical process design, and specifically relates to a DMD lens illumination light spot position fine tuning structure. The fine adjustment structure comprises a shell formed through buckling, and the shell comprises a lens cone assembly, a mounting base and a mounting base. A dodging device, a relay lens group and a reflector are sequentially arranged in the shell; the reflecting mirror is fixed on the mounting base; the mounting base is connected with the mounting base through an adjusting part; the inclination angle of the reflecting mirror is finely adjusted through the adjusting component. According to the fine adjustment structure provided by the utility model, the inclination angle of the reflecting mirror is finely adjusted by screwing the adjusting part, so that the position of a light spot is finely adjusted, the operation is very convenient, the operation can be easily carried out even in a narrow operation space, and the problems of very narrow lens spacing, narrow operation space and inconvenient operation in the prior art are solved. And the adjustment operation is not convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of optical process design, in particular to a DMD lens illumination spot position fine-tuning structure. Background Art

[0002] With the development of integrated circuits and optical devices, lithography technology is also developing rapidly. Modern lithography machines can achieve sub-micron resolution and high-precision imaging. Among them, projection lithography machines are one of the most core equipment in microelectronics manufacturing and are widely used in semiconductors, optoelectronics, nanotechnology and other fields.

[0003] Projection lithography machines are widely used in the field of semiconductor process technology. Their working principle is to place a light source above the lithography machine, use a projection imaging system to project the chip pattern onto the silicon wafer, and then use chemical corrosion, electron beam imaging and other technologies for etching and imaging, and finally form a chip circuit. The projection imaging system uses a light source to illuminate the digital micromirror array (DMD). After the illumination beam passes through the illumination system, it is incident on a spot adjustment reflector. The spot position is adjusted by adjusting the angle of the reflector so that the illumination spot completely covers the effective area of ​​the DMD device. However, in order to increase production capacity, the lithography equipment is often equipped with multiple DMD lenses, which are arranged in one or more rows, resulting in a very narrow lens spacing; in this way, after replacing the DMD device or when the illumination spot position on the DMD device needs to be fine-tuned, the operation will be very inconvenient due to the small space. Sometimes the lens needs to be removed from the machine before adjustment, which is complicated.

[0004] The utility model provides a DMD lens illumination spot position fine-tuning structure to solve the problems in the prior art of very narrow lens spacing, narrow operating space and inconvenient operation. Utility Model Content

[0005] The utility model aims to provide a DMD lens illumination spot position fine-tuning structure to solve the problems of very narrow lens spacing, narrow operating space and inconvenient operation in the prior art.

[0006] The technical solution of the utility model is: a DMD lens illumination spot position fine-tuning structure, comprising a shell formed by snapping, wherein the shell comprises a lens barrel assembly, a mounting base, and a mounting base; a light homogenizing device, a relay lens group and a reflector are sequentially arranged in the shell; the reflector is fixed on the mounting base; the mounting base is connected to the mounting base through an adjusting component; the reflector fine-tunes the tilt angle through the adjusting component.

[0007] Preferably, the adjusting component includes an adjusting screw and an elastic element.

[0008] Preferably, the mounting base is provided with a through hole for the adjusting screw to pass through; the mounting base is provided with a threaded hole for the adjusting screw to pass through; the elastic element is sleeved on the adjusting screw, and the mounting base or the mounting base is provided with a receiving groove for receiving the elastic element, and the two ends of the elastic element along the axial direction are respectively against the mounting base and the mounting base;

[0009] Preferably, the adjusting screw passes through the through hole and is screwed into the threaded hole, and can move relatively axially in the threaded hole.

[0010] Preferably, the accommodating groove is arranged on the mounting base and on the upper end surface along the axial direction of the threaded hole; the diameter of the threaded hole is smaller than the diameter of the accommodating groove.

[0011] Preferably, the accommodating groove is arranged on the mounting base and on the lower end surface along the axial direction of the through hole; the diameter of the through hole is smaller than the diameter of the accommodating groove.

[0012] Preferably, the light homogenizing device is solid or hollow.

[0013] Preferably, the reflector is a planar structure.

[0014] Preferably, the relay lens group includes a first relay lens group and a second relay lens group;

[0015] The first relay lens group includes one or more lenses, and the second relay lens group includes two or more lenses;

[0016] The first relay lens group and the second relay lens group are respectively arranged on two symmetrical optical paths of the reflector.

[0017] Preferably, the first relay lens group includes one lens, and the second relay lens group includes three lenses.

[0018] Compared with the prior art, the advantages of the utility model are:

[0019] (1) The utility model provides a DMD lens illumination spot position fine-tuning structure, which fine-tunes the inclination angle of the reflector by screwing an adjustment component, and then fine-tunes the position of the light spot. The operation is very convenient and can be easily performed even in a narrow operating space, avoiding the complicated operation process of removing the lens from the machine and then adjusting it. The utility model solves the problem in the prior art that the lens spacing is very narrow and the operating space is narrow, resulting in inconvenient adjustment operation.

[0020] (2) The utility model provides a DMD lens illumination spot position fine-tuning structure, the fine-tuning structure is provided with a light homogenizing device, which can make the distribution of light generated by the light source component more uniform, thereby making the energy distribution of the light spot more uniform; the fine-tuning structure is provided with a relay lens group, wherein the second relay lens group can capture the above-mentioned uniformly distributed light and focus the light onto the reflector; the first relay lens group can expand the light reflected by the reflector, thereby improving the anti-interference ability and clarity of the imaging system.

[0021] (3) The utility model provides a DMD lens illumination spot position fine-tuning structure, the adjustment components of which include an elastic element and an adjustment screw. The adjustment screw can not only move relatively along the axial direction of the threaded hole and has an adjustment function, but also serves as a connecting component to connect the mounting base with the mounting base; the elastic element is sleeved on the adjustment screw and cooperates with the adjustment screw to achieve the effect of fine-tuning the inclination angle of the reflector by screwing the adjustment screw; and the two ends of the elastic element along the axial direction are respectively against the mounting base and the mounting base, which can effectively support the mounting base and the mounting base, and prevent the mounting base or the mounting base from shaking after the adjustment is completed, which causes the reflector to be unstable and affects the propagation path of the light. Therefore, the fine-tuning structure can not only fine-tune the position of the light spot so that the light spot completely covers the effective area of ​​the DMD device, but also improve the stability of the light spot. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0023] Figure 1 A three-dimensional diagram of the DMD lens illumination spot position fine-tuning structure of the utility model;

[0024] Figure 2 This is a front view of the DMD lens illumination spot position fine-tuning structure of the utility model;

[0025] Figure 3 It is a right view of the DMD lens illumination spot position fine-tuning structure of the utility model;

[0026] Figure 4 It is a cross-sectional view of the DMD lens illumination spot position fine-tuning structure of the utility model along the right view AA direction;

[0027] Figure 5 It is a partial exploded view of the DMD lens illumination spot position fine-tuning structure of the utility model;

[0028] Figure 6 It is a partial exploded view of the DMD lens illumination spot position fine-tuning structure of the utility model;

[0029] Among them: 11, shell; 10, lens barrel assembly; 1, light homogenizing device; 2, relay lens group; 21, first relay lens group; 22, second relay lens group; 3, reflector; 31, reserved groove; 4, mounting base; 41, mounting base; 42, through hole; 43, threaded hole; 44, receiving groove; 5, adjustment component; 51, adjustment screw; 52, elastic element; 6, sealing ring; 61, sealing groove. DETAILED DESCRIPTION

[0030] The following is a further detailed description of the present invention in conjunction with specific embodiments:

[0031] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred parts must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0032] A DMD lens illumination spot position fine-tuning structure, such as Figure 1 As shown, it includes a housing 11 formed by snapping; wherein, as Figure 2 , Figure 3 As shown, the housing 11 includes a lens barrel assembly 10, a mounting base 4, and a mounting base 41; Figure 4 As shown, a light homogenizing device 1, a relay lens group 2 and a reflector 3 are sequentially arranged in the housing 11; the reflector 3 is fixed on a mounting base 4, and the mounting base 4 is connected to a mounting base 41 through an adjusting component 5; the reflector 3 fine-tunes the tilt angle through the adjusting component 5.

[0033] The light homogenizer 1 is a solid light homogenizer rod, which makes the distribution of light generated by the light source assembly more uniform, thereby making the energy distribution of the light spot more uniform. In other embodiments, the light homogenizer 1 can be one or more light homogenizer rods; the light homogenizer rods can also be hollow; the light homogenizer 1 can also be other forms of components with the same function.

[0034] The relay lens group 2 includes a first relay lens group 21 and a second relay lens group 22; the first relay lens group 21 includes one lens, and the second relay lens group 22 includes three lenses; the first relay lens group 21 is arranged on a plane perpendicular to the horizontal plane where the second relay lens group 22 is located. The reflector 3 is a planar structure; and is tilted, and its tilt angle is about 45°, so that the reflector 3 can turn the light passing through the second relay lens group 22 by 90°, and then reflect it to the first relay lens group 21. When the light emitted by the light source passes through the light homogenizing device 1 to form a uniformly distributed light, the uniformly distributed light of the second relay lens group 22 is focused on the tilted reflector 3, and the reflector 3 then reflects it to the first relay lens group 21, and the first relay lens group 21 expands and emits the uniformly distributed light to cover the effective area of ​​the DMD device.

[0035] In other embodiments, the first relay lens group 21 includes at least one lens, and the second relay lens group 22 includes at least two lenses; the first relay lens group 21 and the second relay lens group 22 are respectively arranged on two symmetrical optical paths of the reflector, so that the reflector 3 can reflect the light passing through the second relay lens group 22 to the first relay lens group 21.

[0036] like Figure 5 , Figure 6 As shown, the adjustment component 5 includes an adjustment screw 51 and a spring 52. The mounting base 4 is provided with a through hole 42 for the adjustment screw 51 to pass through; threaded holes 43 are respectively provided at positions corresponding to the through hole 42 on the mounting base 41; a receiving groove 44 for receiving the spring 52 is also provided on the mounting base 41, and the receiving groove 44 is provided on the upper end surface along the axial direction of the threaded hole 43; the diameter of the threaded hole 43 is smaller than the diameter of the receiving groove 44. The elastic element 52 is sleeved on the adjustment screw 51, and the two ends of the elastic element 52 along the axial direction are respectively against the mounting base 4 and the mounting base 41; the adjustment screw 51 passes through the through hole 42 and is screwed into the threaded hole 43, and the adjustment screw 51 can move relatively in the threaded hole 43 along the axial direction.

[0037] A reserved groove 31 is also provided on the inner side of the mounting base 4, and the shape and size of the reserved groove 31 match the shape and size of the reflector 3; the reflector 3 is set in the reserved groove 31, and then the mounting base 4 with the reflector 3 on the inner side is installed on the mounting base 41 through the adjusting screw 51; a sealing ring 6 is provided at the position where the mounting base 4 contacts the mounting base 41, and a sealing groove 61 for accommodating the sealing ring 6 is provided on the mounting base 41 at the position where the mounting base 4 contacts the mounting base 4; the sealing ring 6 can play a good sealing role and can effectively prevent dust from entering the optical path system.

[0038] The adjusting screw 51 cooperates with the spring 52 , and the pitch angle of the reflector 3 is fine-tuned by screwing the adjusting screw 51 , thereby fine-tuning the position of the light spot so that the light spot completely covers the effective area of ​​the DMD device.

[0039] In this embodiment, the adjusting screw 51 in the adjusting component 5 not only has an adjusting function, but also serves as a connecting component to connect the mounting base 4 with the mounting base 41; the spring 52 in the adjusting component 5 not only cooperates with the adjusting screw 51 to achieve the function of fine-tuning the reflector 3, but also has a supporting function for the mounting base 4 and the mounting base 41, to prevent the mounting base 4 or the mounting base 41 from shaking during the adjustment process or after the adjustment is completed, thereby preventing the reflector 3 from being unstable, causing errors or interference to the propagation of light, and thus affecting the imaging effect.

[0040] In other embodiments, the spring 52 may be arranged at other positions; other elastic materials having the same function as the spring 52 may be selected to replace the spring 52 in this embodiment. The adjusting component 5 may be a component composed of multiple components having the functions of adjusting, supporting and connecting, or a single component having the above functions at the same time.

[0041] The mounting base 4 is mounted on the mounting base 41 by means of an adjusting screw 51, a connecting groove 71 is provided on the mounting base 41, a protruding connecting portion 7 is provided on the lens barrel assembly 10, and the mounting base 41 of the lens barrel assembly 10 is buckled with each other through the connecting portion 7 and the connecting groove to form a housing 11, thereby forming a DMD lens illumination spot position fine-tuning structure. In addition, the various components of the lens barrel assembly 10 are also buckled with each other through the connecting portion 7 and the connecting groove 71 to form a whole.

[0042] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with this technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description, so it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model.

Claims

1. A DMD lens illumination spot position fine-tuning structure, comprising a housing (11) formed by snapping, characterized in that: The housing (11) comprises a lens barrel assembly (10), a mounting base (4), and a mounting seat (41); a light homogenizing device (1), a relay lens group (2), and a reflector (3) are sequentially arranged in the housing (11); the reflector (3) is fixed on the mounting base (4); the mounting base (4) is connected to the mounting seat (41) via an adjusting component (5); and the reflector (3) can finely adjust its tilt angle via the adjusting component (5).

2. A DMD lens illumination spot position fine-tuning structure according to claim 1, characterized in that: The adjusting component (5) comprises an adjusting screw (51) and an elastic element (52).

3. A DMD lens illumination spot position fine-tuning structure according to claim 2, characterized in that: The mounting base (4) is provided with a through hole (42) for the adjusting screw (51) to pass through; the mounting base (41) is provided with a threaded hole (43) for the adjusting screw (51) to pass through; the elastic element (52) is sleeved on the adjusting screw (51), and the mounting base (4) or the mounting base (41) is provided with a receiving groove (44) for receiving the elastic element (52), and the two ends of the elastic element (52) along the axial direction are respectively against the mounting base (4) and the mounting base (41).

4. The DMD lens illumination spot position fine-tuning structure according to claim 3, characterized in that: The accommodating groove (44) is arranged on the mounting base (41) and on the upper end surface along the axial direction of the threaded hole (43); the diameter of the threaded hole (43) is smaller than the diameter of the accommodating groove (44).

5. The DMD lens illumination spot position fine-tuning structure according to claim 3, characterized in that: The accommodating groove (44) is arranged on the mounting base (4) and on the lower end surface along the axial direction of the through hole (42); the diameter of the through hole (42) is smaller than the diameter of the accommodating groove (44).

6. A DMD lens illumination spot position fine-tuning structure according to any one of claims 1 to 5, characterized in that: The light homogenizing device (1) is solid or hollow.

7. The DMD lens illumination spot position fine-tuning structure according to claim 6, characterized in that: The reflector (3) is a planar structure.

8. The DMD lens illumination spot position fine-tuning structure according to claim 7, characterized in that: The relay lens group (2) comprises a first relay lens group (21) and a second relay lens group (22); The first relay lens group (21) includes one or more lenses, and the second relay lens group (22) includes two or more lenses; The first relay lens group (21) and the second relay lens group (22) are respectively arranged on two symmetrical optical paths of the reflector (3).

9. The DMD lens illumination spot position fine-tuning structure according to claim 8, characterized in that: The first relay lens group (21) includes one lens, and the second relay lens group (22) includes three lenses.

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