Trinocular camera calibration device used on observation port of monocrystalline silicon crystal growth furnace
By designing a tri-eye camera calibration device for the observation port of a single crystal silicon long crystal furnace, the problems of complex calibration and large error in the prior art are solved, and more efficient and accurate image processing is achieved.
Patent Information
- Application Number
- CN202420388472.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-29
- Publication Date
- 2025-02-18
- Estimated Expiration
- 2034-02-28
AI Technical Summary
The existing single-crystal silicon crystal growth furnace lacks effective three-eye camera calibration device during the production process, resulting in incomplete acquisition of depth information, large system errors, and complex calibration.
A tri-eye camera calibration device for single crystal silicon long crystal furnace observation port is designed, including a triangle bracket, assembly base, CMOS industrial camera and display screen, and real-time image display and calibration functions are realized through the Gigabit network port and SPI interface.
The calibration process of the triple-eye camera is simplified, the angle accuracy is improved, the accuracy and stability of image processing is significantly improved, and the system error is reduced.
Smart Images
Figure CN222506925U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal silicon growth furnace production, in particular to a three-eye camera calibration device used for an observation port of a single crystal silicon growth furnace. Background Art
[0002] Silicon materials have excellent properties such as unidirectional conductivity, thermal sensitivity, optoelectronic properties, and doping properties. They can be grown into large-sized, high-purity single crystals at a moderate price, making them an important basic material for integrated circuits that are widely used around the world. Semiconductor silicon materials are mainly single-crystal silicon materials. According to the application scenarios, semiconductor silicon materials can be divided into single-crystal silicon materials for chips and silicon materials for etching. Among them, single-crystal silicon materials for chips are the basic raw materials for manufacturing semiconductor devices. Single-crystal silicon materials for chips undergo a series of wafer manufacturing processes to form extremely small circuit structures, and then go through cutting, packaging, testing and other links to become chips, and are widely used in the downstream market of integrated circuits. Semiconductor-grade single-crystal silicon growth furnaces mainly produce single-crystal silicon materials for chips.
[0003] At present, during the production and processing of single crystal silicon growth furnaces, it is necessary to keep abreast of the production status of the growth furnace. The existing growth furnace body only provides monocular or binocular vision observation ports. In the production process, in order to meet the process needs of the enterprise, three-eye machine vision is used to obtain the depth information of the crystal column. The depth information can be used to calculate the length of the crystal column, the roundness of the bird's-eye view, and the angle relationship corresponding to the crystal rotation. Therefore, the position of the three-eye vision observation port provided in the lower furnace body is parallel and equidistant, which helps to ensure the consistency of the geometric relationship and viewing angle between the cameras, thereby simplifying the calculation and processing of depth information, simplifying the calculation and calibration process of depth information, and reducing system errors. The inclination angle of the observation port is 45 degrees relative to the horizontal relationship of the furnace body, so that the picture taken by each camera covers one-third of the size of the bird's-eye view, which can increase the range of obtaining depth information and achieve full coverage of depth information.
[0004] However, during use, the three groups of industrial cameras need to be calibrated uniformly in advance in conjunction with the trinocular vision observation port so that they can adapt to production needs. Therefore, a trinocular camera calibration device for the observation port of a single crystal silicon growth furnace is urgently needed.
[0005] Currently, no effective solution has been proposed for the problems in the related technologies. Utility Model Content
[0006] In view of the problems in the related art, the purpose of the utility model is to propose a trinocular camera calibration device for the observation port of a single crystal silicon growth furnace, so as to overcome the above-mentioned technical problems existing in the existing related art.
[0007] The technical solution of the utility model is achieved in this way:
[0008] A three-eye camera calibration device for the observation port of a single crystal silicon growth furnace comprises: a triangular bracket, the ends of the triangular bracket are respectively provided with mounting seats, the tops of the mounting seats are respectively movably connected with CMOS industrial cameras to be calibrated, the optical axes of the CMOS industrial cameras intersect at one point, the tops of the triangular brackets are respectively adapted to the CMOS industrial cameras and are provided with a first display screen, and one side of the triangular bracket is provided with a second display screen, wherein;
[0009] The CMOS industrial camera is electrically connected to the GigE interface of the second display screen through a gigabit network port, so that the acquired image is displayed in real time on the second display screen. The second display screen is electrically connected to the first display screen through an SPI interface, so as to select the image required for calibration and present it to the first display screen to cooperate with the calibration work of the CMOS industrial camera.
[0010] Furthermore, the triangular bracket includes: a connecting portion and the end portion, wherein the end portion is located at the connection between adjacent connecting portions, and the connecting portion and the end portion are combined to present a triangular structure.
[0011] Furthermore, the end portions are in three groups, and the assembly seats are in three groups.
[0012] Furthermore, the three groups of CMOS industrial cameras are on the same horizontal plane.
[0013] Furthermore, a limiting frame is provided at the bottom end of each of the first display screens, both ends of each of the limiting frames are fixedly connected to the connecting portion, and the limiting frames are combined to form a triangular structure.
[0014] Furthermore, the second display screen is located on the connecting portion, and the second display screen is connected to a switch via a wire.
[0015] Beneficial effects of the utility model:
[0016] The utility model places three groups of CMOS industrial cameras to be calibrated in an assembly seat in advance, and intersects the optical axes of the CMOS industrial cameras at one point, selects images required for calibration by operating the second display screen to present them to the first display screen to cooperate with the calibration work of the CMOS industrial cameras respectively, and displays the images collected by the CMOS industrial cameras on the second display screen in real time, so that the three groups of CMOS industrial cameras to be calibrated can be adjusted in real time in various aspects without being assembled in the observation port of the trinocular vision. After use and debugging, the CMOS industrial cameras can be directly assembled on the lower furnace body for use, which simply reduces the complexity of calibrating the CMOS industrial cameras, makes the calibration process more convenient and efficient, and improves the angle accuracy of the calibration of the three groups of CMOS industrial cameras, and significantly improves the accuracy and stability of image processing.
[0017] Other features and advantages of the utility model will be described in the following description, and partly become apparent from the description, or understood by practicing the utility model. The purpose and other advantages of the utility model are realized and obtained by the structures particularly pointed out in the description and the drawings.
[0018] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0020] Figure 1 It is a structural schematic diagram of a trinocular camera calibration device for an observation port of a single crystal silicon growth furnace according to an embodiment of the utility model;
[0021] Figure 2 The calibration scene diagram of the three-eye camera calibration device for the observation port of a single crystal silicon growth furnace according to the embodiment of the utility model is shown in FIG. Figure 1 ;
[0022] Figure 3 The calibration scene diagram of the three-eye camera calibration device for the observation port of a single crystal silicon growth furnace according to the embodiment of the utility model is shown in FIG. Figure 2 .
[0023] In the figure:
[0024] 1. Triangle bracket; 2. Assembly seat; 3. CMOS industrial camera; 4. First display screen; 5. Second display screen; 6. Connecting part; 7. End part; 8. Limiting frame; 9. Switch. DETAILED DESCRIPTION
[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.
[0026] According to an embodiment of the utility model, a device for calibrating a trinocular camera on an observation port of a single crystal silicon growth furnace is provided.
[0027] like Figure 1 As shown, a three-eye camera calibration device for the observation port of a single crystal silicon growth furnace comprises: a tripod bracket 1, the ends 7 of the tripod bracket 1 are respectively provided with an assembly seat 2, the top of the assembly seat 2 is respectively movably connected with a CMOS industrial camera 3 to be calibrated, the optical axes of the CMOS industrial camera 3 intersect at one point, the top of the tripod bracket 1 is respectively adapted to be provided with a first display screen 4 of the CMOS industrial camera 3, and one side of the tripod bracket 1 is provided with a second display screen 5, wherein;
[0028] The CMOS industrial camera 3 is electrically connected to the GigE interface of the second display screen 5 through the Gigabit network port, and the collected image is displayed in real time on the second display screen 5. The second display screen 5 is electrically connected to the first display screen 4 through the SPI interface, and is used to select the image required for calibration and present it to the first display screen 4 to cooperate with the calibration work of the CMOS industrial camera 3.
[0029] With the help of the above technical solution, by placing three groups of CMOS industrial cameras 3 to be calibrated in the assembly seat 2 in advance, and making the optical axes of the CMOS industrial cameras 3 intersect at one point, by operating the second display screen 5 to select the images required for calibration and present them to the first display screen 4 to cooperate with the calibration work of the CMOS industrial cameras 3 respectively, and the images collected by the CMOS industrial cameras 3 are displayed in real time on the second display screen 5, the three groups of CMOS industrial cameras 3 to be calibrated can be adjusted in real time without being installed in the observation port of the trinocular vision. After use and debugging, the CMOS industrial cameras 3 can be directly installed on the lower furnace body for use, which simply reduces the complexity of calibrating the CMOS industrial cameras 3, makes the calibration process more convenient and efficient, and improves the angle accuracy of the calibration of the three groups of CMOS industrial cameras 3, significantly improving the accuracy and stability of image processing.
[0030] In addition, the triangular bracket 1 includes: a connecting portion 6 and an end portion 7, wherein the end portion 7 is located at the connection between adjacent connecting portions 6, and the connecting portion 6 and the end portion 7 are combined to present a triangular structure.
[0031] There are three groups of ends 7 and three groups of mounting seats 2, and the three groups of CMOS industrial cameras 3 are on the same horizontal plane.
[0032] In addition, the bottom of the first display screen 4 is provided with a limit frame 8, both ends of which are fixedly connected to the connecting portion 6, and the limit frames 8 are combined to form a triangular structure. The second display screen 5 is located on the connecting portion 6, and the second display screen 5 is connected to a switch 9 through a wire.
[0033] In addition, when the present technical solution is applied, the switch 9 is pressed to turn on the power, and the items to be calibrated (including internal parameter calibration and timing correction) are selected on the second display screen 5. Since the three groups of CMOS industrial cameras 3 are on the same horizontal plane, there is no need to determine the plane positions of the three CMOS industrial cameras 3, and the internal parameter calibration can be directly performed.
[0034] like Figure 2 As shown, during the internal reference debugging process, the "internal reference calibration" function is selected through the second display screen 5. After the selection, two options "chessboard" and "striped screen" will pop up. After selecting "chessboard", the first display screen 4 will display the following field of view calibration screen made of black and white grids.
[0035] Among them, the black and white grid image captured by the CMOS industrial camera 3 will be displayed on the second display screen 5. By changing the lens of different focal lengths, the CMOS industrial camera 3 can capture images containing different numbers of black and white grids until the number of black and white grids in the captured image meets the production requirements.
[0036] In addition, if Figure 3 As shown, after the field of view calibration of the three CMOS industrial cameras 3 is completed, the "stripe screen" function is selected on the second display screen 5. After the selection is completed, the first display screen 4 will display the following picture made of color stripes.
[0037] Specifically, after the camera captures a color image, it will print out the image's HSV value, grayscale, brightness, contrast, and sharpness parameters on the second display screen 5. By rotating the focus knob and aperture knob of the CMOS industrial camera 3 lens, the HSV value, grayscale, brightness, contrast, and sharpness are within the same parameter range as the standard CMOS industrial camera 3 in production.
[0038] In addition, during the timing correction process, the "timing correction" function is selected through the second display screen 5. Since the three-eye machine vision has strict requirements on the timing of the three CMOS industrial cameras 3, some require fixed time differences and some do not allow time differences. In order to meet the production requirements, the images collected using the three-eye vision are not allowed to have huge errors, otherwise the depth estimation algorithm will be wrong, resulting in difficulties in stereo matching and errors in depth of field estimation. However, in the actual use of the CMOS industrial cameras 3, it will be found that when the three CMOS industrial cameras 3 are placed on the observation port of the furnace body to work, the production time exceeds a certain time (generally, the timing needs to be corrected once every seven days), and the acquisition frequency of the three CMOS industrial cameras 3 will have a time difference. At this time, timing correction is required. After starting the function, the three first display screens 4 will simultaneously play the corrected screen images in a loop.
[0039] Specifically, the images captured by the three CMOS industrial cameras 3 will be transmitted to the second display screen 5. The shooting timing parameters are adjusted through the second display screen 5 so that the images captured by the three CMOS industrial cameras 3 can always be kept in the same picture, so that the shooting interval and exposure time of the three CMOS industrial cameras 3 are consistent.
[0040] In summary, with the help of the above-mentioned technical scheme of the utility model, the following effects can be achieved: by placing three groups of CMOS industrial cameras 3 to be calibrated in the assembly seat 2 in advance, and making the optical axes of the CMOS industrial cameras 3 intersect at one point, by operating the second display screen 5 to select the images required for calibration and present them to the first display screen 4 to cooperate with the calibration work of the CMOS industrial cameras 3 respectively, and displaying the images collected by the CMOS industrial cameras 3 in real time on the second display screen 5, the three groups of CMOS industrial cameras 3 to be calibrated can be adjusted in real time without being installed in the observation port of the trinocular vision. After use and debugging, the CMOS industrial cameras 3 can be directly installed on the lower furnace body for use, which can simplify the complexity of calibrating the CMOS industrial cameras 3, make the calibration process more convenient and efficient, and improve the angle accuracy of the calibration of the three groups of CMOS industrial cameras 3, significantly improving the accuracy and stability of image processing.
[0041] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A trinocular camera calibration device for the observation port of a single crystal silicon growth furnace, characterized in that: include: A tripod bracket (1), the ends (7) of the tripod bracket (1) are respectively provided with mounting seats (2), the top ends of the mounting seats (2) are respectively movably connected with CMOS industrial cameras (3) to be calibrated, the optical axes of the CMOS industrial cameras (3) intersect at one point, the top ends of the tripod bracket (1) are respectively adapted to be provided with a first display screen (4) of the CMOS industrial cameras (3), and one side of the tripod bracket (1) is provided with a second display screen (5), wherein; The CMOS industrial camera (3) is electrically connected to the GigE interface of the second display screen (5) via a gigabit network port, so that the acquired image is displayed on the second display screen (5) in real time; the second display screen (5) is electrically connected to the first display screen (4) via an SPI interface, so that the image required for calibration is selected and presented to the first display screen (4) to cooperate with the calibration work of the CMOS industrial camera (3).
2. The device for calibrating a trinocular camera on an observation port of a single crystal silicon growth furnace according to claim 1, characterized in that: The triangular bracket (1) comprises: a connecting portion (6) and an end portion (7), wherein the end portion (7) is located at the connection between adjacent connecting portions (6), and the connecting portion (6) and the end portion (7) are combined to present a triangular structure.
3. The device for calibrating a trinocular camera on an observation port of a single crystal silicon growth furnace according to claim 2, characterized in that: The end portions (7) are in three groups, and the assembly seats (2) are in three groups.
4. The device for calibrating a trinocular camera on an observation port of a single crystal silicon growth furnace according to claim 3, characterized in that: The three groups of CMOS industrial cameras (3) are located on the same horizontal plane.
5. The device for calibrating a trinocular camera on an observation port of a single crystal silicon growth furnace according to claim 4, characterized in that: A limiting frame (8) is provided at the bottom end of the first display screen (4), and both ends of the limiting frame (8) are fixedly connected to the connecting portion (6), and the limiting frame (8) is combined to form a triangular structure.
6. The device for calibrating a trinocular camera on an observation port of a single crystal silicon growth furnace according to claim 5, characterized in that: The second display screen (5) is located on the connecting portion (6), and the second display screen (5) is connected to a switch (9) via a wire.