Control system of wafer box opener

Abstract

The utility model discloses a control system of a wafer box opener, comprising a loading unit used for loading a wafer box at a loading position and driving the wafer box to move between the loading position and a working position; the door opening unit is used for opening and closing the wafer box door plate; the detection unit is used for detecting the state of the wafer in the wafer box; the control unit is used for controlling the loading unit, the door opening unit and the detection unit, and the control unit is electrically connected with the loading unit, the door opening unit and the detection unit. According to the wafer box opener, the loading unit, the door opening unit and the detection unit can be automatically controlled through the control unit, and the automation degree of the wafer box opener is effectively improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductors, and in particular relates to a control system for a wafer box opener. Background Art

[0002] A wafer box is a container used in the semiconductor manufacturing process to protect, transport and store wafers. Currently, 12-inch and 8-inch wafer boxes are commonly used.

[0003] The wafer box opener in the prior art has a low degree of automation, and many processes require manual operation, which affects accuracy and efficiency.

[0004] Therefore, a control system for a wafer box opener is needed, which can meet the requirements of automatic control of the wafer box opener. Utility Model Content

[0005] To achieve the above object, the utility model provides a control system for a wafer box opener, comprising:

[0006] A loading unit, used for loading a wafer box at a loading position and driving the wafer box to move between the loading position and a working position;

[0007] A door opening unit, used to open and close the wafer box door panel;

[0008] A detection unit, used for detecting the status of wafers in a wafer box;

[0009] The control unit is used to control the loading unit, the door opening unit and the detection unit, and the control unit is electrically connected to the loading unit, the door opening unit and the detection unit respectively.

[0010] Preferably, the loading unit comprises:

[0011] A platform driving device, used to drive the mobile platform to move between the loading position and the working position;

[0012] Wafer box positioning unit, used to detect whether the wafer box is accurately positioned;

[0013] The control unit is electrically connected to the platform driving device and the wafer box positioning unit respectively.

[0014] Preferably, the loading unit further comprises:

[0015] A locking mechanism driving device, used to drive the locking mechanism to lock with the wafer box;

[0016] The control unit is electrically connected to the locking mechanism driving device.

[0017] Preferably, the wafer box positioning unit includes a downward pressure detection device, and the control unit is electrically connected to the downward pressure detection device.

[0018] Preferably, the door opening unit comprises:

[0019] Wafer box unlocking unit, used to open and close the wafer box door panel;

[0020] The door opening mechanism horizontal driving device is used to drive the wafer box unlocking unit to move in the horizontal direction;

[0021] A vertical drive device of the door opening mechanism, used for driving the wafer box unlocking unit to move in the vertical direction;

[0022] The control unit is respectively connected with the horizontal driving device of the door opening mechanism, the vertical driving device of the door opening mechanism, and the wafer box unlocking unit.

[0023] Preferably, the wafer box unlocking unit comprises:

[0024] An unlocking device for opening and closing the wafer box door panel;

[0025] Vacuum suction cup, used to hold the wafer box door panel;

[0026] A vacuum sensor is used to detect whether the vacuum suction cup is sucking the wafer box door panel;

[0027] The control unit is electrically connected to the unlocking device, the vacuum suction cup, and the vacuum sensor respectively.

[0028] Preferably, the detection unit comprises:

[0029] A wafer status detection unit, used to detect the status of wafers in a wafer box;

[0030] A horizontal driving device of the detection mechanism, used for driving the wafer state detection unit to move in the horizontal direction;

[0031] A detection mechanism vertical driving device, used to drive the wafer state detection unit to move in the vertical direction;

[0032] The control unit is electrically connected to the wafer state detection unit, the detection mechanism horizontal drive device, and the detection mechanism vertical drive device respectively.

[0033] Preferably, the wafer status detection unit includes:

[0034] Wafer thickness detection device, used to detect the number of wafers by thickness;

[0035] A wafer placement status detection device, used to detect whether the wafer placement status is normal;

[0036] The control unit is electrically connected to the wafer thickness detection device and the wafer placement state detection device respectively.

[0037] Preferably, the detection unit further comprises:

[0038] A human operation detection unit, used to detect whether there is human operation intervention;

[0039] The control unit is electrically connected to the human operation detection unit.

[0040] Preferably, the human operation detection unit includes a photoelectric gate, and the control unit is electrically connected to the photoelectric gate.

[0041] Compared with the prior art, the beneficial effects of the utility model are:

[0042] The utility model can realize automatic control of the loading unit, the door opening unit and the detection unit through the control unit, and effectively improves the automation degree of the wafer box opener. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0044] Figure 1 A system block diagram of a control system of a wafer box opener disclosed in an embodiment of the utility model;

[0045] Figure 2 A system block diagram of a loading unit of a control system of a wafer box opener disclosed in an embodiment of the utility model;

[0046] Figure 3 A system block diagram of a loading unit of a control system of a wafer box opener disclosed in another embodiment of the utility model;

[0047] Figure 4 A system block diagram of a loading unit of a control system of a wafer box opener disclosed in another embodiment of the utility model;

[0048] Figure 5 A system block diagram of a door opening unit of a control system of a wafer box opener disclosed in an embodiment of the utility model;

[0049] Figure 6 A system block diagram of a wafer box unlocking unit of a control system of a wafer box opener disclosed in an embodiment of the utility model;

[0050] Figure 7 A system block diagram of a detection unit of a control system of a wafer box opener disclosed in an embodiment of the utility model;

[0051] Figure 8 A system block diagram of a detection unit of a control system of a wafer box opener disclosed in another embodiment of the utility model;

[0052] Fig. 9 A system block diagram of a wafer status detection unit of a control system of a wafer box opener disclosed in an embodiment of the utility model;

[0053] Fig.10 The present invention is a system block diagram of a human operation detection unit of a control system of a wafer box opener disclosed in an embodiment of the present invention. DETAILED DESCRIPTION

[0054] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0055] Figure 1 The system block diagram of a control system of a wafer box opener disclosed in an embodiment of the utility model is shown, including:

[0056] A loading unit, used for loading a wafer box at a loading position and driving the wafer box to move between the loading position and a working position;

[0057] A door opening unit, used to open and close the wafer box door panel;

[0058] A detection unit, used for detecting the status of wafers in a wafer box;

[0059] The control unit is used to control the loading unit, the door opening unit and the detection unit. The control unit is electrically connected to the loading unit, the door opening unit and the detection unit respectively. The control unit controls the loading unit to complete the loading and conveying of the wafer box. When the wafer box arrives at the working position, the control unit controls the door opening unit to complete the opening of the wafer box door. Then, the control unit controls the detection unit to complete the detection of the wafer status in the wafer box. When the wafer box needs to be returned, the control unit controls the door opening unit to complete the closing of the wafer box door. The control unit controls the loading unit to convey the wafer box back to the loading position.

[0060] Figure 2 The system block diagram of the loading unit disclosed in one embodiment of the utility model is shown, and the loading unit includes:

[0061] A platform driving device, used to drive the mobile platform to move between the loading position and the working position;

[0062] Wafer box positioning unit, used to detect whether the wafer box is accurately positioned;

[0063] The control unit is electrically connected to the platform drive device and the wafer box positioning unit. When the wafer box is loaded on the mobile platform, the wafer box positioning unit detects whether the wafer box is accurately positioned and feeds back the positioning signal to the control device. After accurate positioning, the control device controls the platform drive device, and the platform drive device drives the mobile platform to transport the wafer box to the working position; when the wafer box needs to return, the control device controls the platform drive device, and the platform drive device drives the mobile platform to transport the wafer box to the loading position.

[0064] Preferably, if Figure 3 As shown, the wafer box positioning unit includes a downward pressure detection device, the control unit is electrically connected to the downward pressure detection device, and the downward pressure detection device feeds back the wafer box positioning signal to the control unit.

[0065] Figure 4 The system block diagram of the loading unit disclosed in another embodiment of the utility model is shown. In this embodiment, the wafer box opener adopts an electrically driven locking mechanism. In this embodiment, the loading unit also includes a locking mechanism driving device, the locking mechanism driving device is used to drive the locking mechanism to lock with the wafer box, the control unit is electrically connected to the locking mechanism driving device, the control unit controls the locking mechanism driving device, and the locking mechanism driving device drives the locking mechanism to lock with the wafer box.

[0066] Figure 5 The system block diagram of the door opening unit disclosed in one embodiment of the utility model is shown, and the door opening unit includes:

[0067] Wafer box unlocking unit, used to open and close the wafer box door panel;

[0068] The door opening mechanism horizontal driving device is used to drive the wafer box unlocking unit to move in the horizontal direction;

[0069] A vertical drive device of the door opening mechanism, used for driving the wafer box unlocking unit to move in the vertical direction;

[0070] The control unit is connected to the horizontal drive device of the door opening mechanism, the vertical drive device of the door opening mechanism, and the wafer box unlocking unit point. When the wafer box needs to be opened, the control unit first controls the wafer box unlocking unit to move horizontally to the working position through the horizontal drive device of the door opening mechanism, controls the wafer box unlocking unit to open and suck the wafer box door plate, and then controls the wafer box unlocking unit to move backward in the horizontal direction through the horizontal drive device of the door opening mechanism, and then controls the wafer box unlocking unit to move vertically to the avoidance position through the vertical drive device of the door opening mechanism; when the wafer box needs to be closed, the control unit controls the wafer box unlocking unit to move to the working position through the vertical drive device of the door opening mechanism and the horizontal drive device of the door opening mechanism, controls the wafer box unlocking unit to close and release the wafer box door plate, and then controls the wafer box unlocking unit to move horizontally back to the starting position through the horizontal drive device of the door opening mechanism.

[0071] Figure 6 The system block diagram of the wafer box unlocking unit disclosed in an embodiment of the utility model is shown, and the wafer box unlocking unit includes:

[0072] An unlocking device for opening and closing the wafer box door panel;

[0073] Vacuum suction cup, used to hold the wafer box door panel;

[0074] A vacuum sensor is used to detect whether the vacuum suction cup is sucking the wafer box door panel;

[0075] The control unit is electrically connected to the unlocking device, the vacuum suction cup, and the vacuum sensor, respectively. When the wafer box needs to be opened, the control device opens the wafer box door panel through the unlocking device, and controls the vacuum suction cup to suck the wafer box door panel. At this time, the vacuum sensor detects that the vacuum suction cup is in an adsorption state, and the vacuum sensor transmits the state signal to the control unit. The control unit controls the horizontal drive device of the door opening mechanism and the vertical drive device of the door opening mechanism according to the working process of the door opening unit of the previous embodiment, so that the wafer box unlocking unit moves to the avoidance position; when the wafer box needs to be closed, the control unit first controls the horizontal drive device of the door opening mechanism and the vertical drive device of the door opening mechanism according to the working process of the door opening unit of the previous embodiment, so that the wafer box unlocking unit moves to the working position, the control unit controls the unlocking device to close the wafer and the door panel, and controls the vacuum suction cup to release the wafer box door panel. At this time, the vacuum sensor detects that the vacuum suction cup is in a released state, and the vacuum sensor transmits the state signal to the control unit, and the control unit controls the wafer box unlocking unit to move back to the starting position in the horizontal direction through the horizontal drive device of the door opening mechanism.

[0076] Figure 7 The system block diagram of the loading unit disclosed in one embodiment of the utility model is shown, and the detection unit includes:

[0077] A wafer status detection unit, used to detect the status of wafers in a wafer box;

[0078] A horizontal driving device of the detection mechanism, used for driving the wafer state detection unit to move in the horizontal direction;

[0079] A detection mechanism vertical driving device, used to drive the wafer state detection unit to move in the vertical direction;

[0080] The control unit is electrically connected to the wafer state detection unit, the horizontal driving device of the detection mechanism, and the vertical driving device of the detection mechanism, respectively. When the wafer box is opened and the wafer box unlocking unit is located at the avoidance position, the control unit controls the wafer state detection unit to move horizontally to the working position through the horizontal driving device of the detection mechanism, and the wafer state detection unit detects the state of the wafer in the wafer box and transmits the data to the control unit, and then the control unit controls the wafer state detection unit to move backward in the horizontal direction through the horizontal driving device of the detection mechanism, and then the control unit controls the wafer state detection unit to move vertically to the avoidance position through the vertical driving device of the detection mechanism; after the work is completed, the control unit controls the wafer state detection unit to return to the starting position through the horizontal driving device of the detection mechanism and the vertical driving device of the detection mechanism.

[0081] Figure 8 The system block diagram of the detection unit disclosed in another embodiment of the utility model is shown. In this embodiment, the detection unit also includes a human operation detection unit, which is used to detect whether there is human operation intervention. The control unit is electrically connected to the human operation detection unit, and the human operation detection unit feeds back the detection signal to the control unit. When human intervention is detected, the control unit stops the ongoing work.

[0082] Fig. 9 The system block diagram of a wafer status detection unit disclosed in an embodiment of the utility model is shown. The wafer status detection unit includes:

[0083] Wafer thickness detection device, used to detect the number of wafers by thickness;

[0084] A wafer placement status detection device, used to detect whether the wafer placement status is normal;

[0085] The control unit is electrically connected to the wafer thickness detection device and the wafer placement status detection device respectively. The wafer thickness detection device detects the number of wafers by thickness and transmits the data to the control unit. The wafer placement status detection device detects whether the wafer placement status is normal and transmits the data to the control unit.

[0086] Fig.10A system block diagram of a human operation detection unit disclosed in an embodiment of the utility model is shown. In this embodiment, the human operation detection unit includes a photoelectric gate, the control unit is electrically connected to the photoelectric gate, and the photoelectric gate feeds back a detection signal to the control unit.

[0087] It should be noted that the wafer box, wafer box door panel, platform drive device, etc. mentioned in the embodiments of the utility model are all common technical means used by those skilled in the art, and their specific structures and working principles will not be described in detail here.

[0088] The utility model can realize automatic control of the loading unit, the door opening unit and the detection unit through the control unit, and effectively improves the automation degree of the wafer box opener.

[0089] The control system of the wafer box opener disclosed in the embodiment of the utility model can provide movement space for the robot arm, and can be suitable for scenarios such as wafer cleaning machines where the overall space is compact and the wafer transfer box loading needs to be completed by the robot arm.

[0090] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0091] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A control system for a wafer box opener, characterized in that: include: A loading unit, used for loading a wafer box at a loading position and driving the wafer box to move between the loading position and a working position; A door opening unit, used to open and close the wafer box door panel; A detection unit, used for detecting the status of wafers in a wafer box; The control unit is used to control the loading unit, the door opening unit and the detection unit, and the control unit is electrically connected to the loading unit, the door opening unit and the detection unit respectively.

2. The control system of the wafer box opener according to claim 1, characterized in that: The loading unit comprises: A platform driving device, used to drive the mobile platform to move between the loading position and the working position; Wafer box positioning unit, used to detect whether the wafer box is accurately positioned; The control unit is electrically connected to the platform driving device and the wafer box positioning unit respectively.

3. The control system of the wafer box opener according to claim 2, characterized in that: The loading unit also includes: A locking mechanism driving device, used to drive the locking mechanism to lock with the wafer box; The control unit is electrically connected to the locking mechanism driving device.

4. The control system of the wafer box opener according to claim 2, characterized in that: The wafer box positioning unit includes a downward pressing detection device, and the control unit is electrically connected to the downward pressing detection device.

5. The control system of the wafer box opener according to claim 1, characterized in that: The door opening unit comprises: Wafer box unlocking unit, used to open and close the wafer box door panel; The door opening mechanism horizontal driving device is used to drive the wafer box unlocking unit to move in the horizontal direction; A vertical drive device of the door opening mechanism, used for driving the wafer box unlocking unit to move in the vertical direction; The control unit is respectively connected with the horizontal driving device of the door opening mechanism, the vertical driving device of the door opening mechanism, and the wafer box unlocking unit.

6. The control system of the wafer box opener according to claim 5, characterized in that: The wafer box unlocking unit comprises: An unlocking device for opening and closing the wafer box door panel; Vacuum suction cup, used to hold the wafer box door panel; A vacuum sensor is used to detect whether the vacuum suction cup is sucking the wafer box door panel; The control unit is electrically connected to the unlocking device, the vacuum suction cup, and the vacuum sensor respectively.

7. The control system of the wafer box opener according to claim 1, characterized in that: The detection unit comprises: A wafer status detection unit, used to detect the status of wafers in a wafer box; A horizontal driving device of the detection mechanism, used for driving the wafer state detection unit to move in the horizontal direction; A detection mechanism vertical driving device, used to drive the wafer state detection unit to move in the vertical direction; The control unit is electrically connected to the wafer state detection unit, the detection mechanism horizontal drive device, and the detection mechanism vertical drive device respectively.

8. The control system of the wafer box opener according to claim 7, characterized in that: The wafer status detection unit comprises: Wafer thickness detection device, used to detect the number of wafers by thickness; A wafer placement status detection device, used to detect whether the wafer placement status is normal; The control unit is electrically connected to the wafer thickness detection device and the wafer placement state detection device respectively.

9. The control system of the wafer box opener according to claim 7, characterized in that: The detection unit also includes: A human operation detection unit, used to detect whether there is human operation intervention; The control unit is electrically connected to the human operation detection unit.

10. The control system of the wafer box opener according to claim 9, characterized in that: The human operation detection unit includes a photoelectric gate, and the control unit is electrically connected to the photoelectric gate.

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