Silicon wafer cleaning basket

Abstract

The utility model discloses a silicon wafer cleaning flower basket which comprises two flower basket side plates, two connecting plates are fixedly assembled between the two flower basket side plates, the flower basket side plates and the connecting plates form a stable frame structure to form an outer frame of the cleaning flower basket, and a plurality of symmetrical flower basket clamping plates are assembled to form a complete cleaning flower basket structure. One silicon wafer can be clamped between every two adjacent flower basket clamping plates and between every two opposite flower basket clamping plates, the clamping effect is guaranteed, meanwhile, the stability during cleaning is guaranteed, when the silicon wafers are thin, it is avoided that the silicon wafers are attached to the side walls of the flower basket clamping plates and the two adjacent sets of silicon wafers are attached together through the effect of the anti-sticking piece structures, and the service life of the silicon wafers is prolonged. The silicon wafers are convenient to take, the effect of supporting and separating the adjacent silicon wafers is achieved, the silicon wafers are prevented from being adhered, the silicon wafers can be lifted out upwards through the anti-adhesion structures, the silicon wafers are convenient to take out and high in practicability, and the top beam can better guarantee the stability of the basket frame.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer cleaning, in particular to a silicon wafer cleaning basket. Background Art

[0002] Silicon wafers are the basic materials in semiconductor manufacturing. They are thin slices cut from high-purity silicon materials and used to manufacture integrated circuits, solar cells and other electronic devices. Silicon wafer cleaning is a key step in the semiconductor manufacturing process. It is essential to ensure the purity of the silicon wafer surface and the success of subsequent processes. The cleaning process is designed to remove pollutants on the surface of silicon wafers, including organic matter, inorganic salts, metal ions, particles and other impurities. Regardless of the method used to clean silicon wafers, the silicon wafers need to be inserted into a basket that is resistant to deformation and chemical corrosion. This basket can evenly separate the individual silicon wafers for cleaning. As the thickness of silicon wafers on the market gradually becomes thinner, sticking will occur when the thickness of the silicon wafers is small, which seriously affects production efficiency and product quality. Utility Model Content

[0003] The utility model aims to provide a silicon wafer cleaning basket to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a silicon wafer cleaning basket, comprising two basket side panels, two connecting plates are fixedly installed between the two basket side panels, the two basket side panels and the two connecting plates form a frame, two top beams are fixedly installed at the upper ends between the two basket side panels, a plurality of basket clamps are fixedly installed on the inner side walls of the two connecting plates, and the outer walls of the basket clamps are connected to the top beams through an anti-sticking sheet structure.

[0005] Preferably, the anti-sticking film structure includes a support tube, which is fixedly mounted on the side wall of the top beam, and the inner wall of the support tube is slidably mounted with a connecting rod, which is L-shaped, and the side wall of the connecting rod is fixedly mounted with a handle, and the lower side of the inner end of the connecting rod is fixedly mounted with a protrusion, which fits with the side wall of the flower basket splint.

[0006] Preferably, two auxiliary support rods are fixedly mounted on the upper ends between the two flower basket side panels.

[0007] Compared with the prior art, the beneficial effects of the utility model are as follows: a stable frame structure is formed by the flower basket side panels and the connecting panels to form the outer frame of the cleaning flower basket, and a complete cleaning flower basket structure is formed by assembling a plurality of symmetrical flower basket clamps. A silicon wafer can be clamped between two adjacent flower basket clamps and two oppositely arranged flower basket clamps to ensure the clamping effect and the stability during cleaning. Through the effect of the anti-sticking sheet structure, when the silicon wafer is thin, it is avoided to adhere to the side wall of the flower basket clamp and the two adjacent groups of silicon wafers are adhered together, ensuring that the silicon wafer is easy to take out, and at the same time plays a role in supporting and separating adjacent silicon wafers to reduce the generation of sticky wafers. At the same time, the anti-sticking sheet structure can lift the silicon wafer upward, making it more convenient to take out the silicon wafer, and it is highly practical. The top beam can better ensure the stability of the flower basket frame. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 It is a three-dimensional schematic diagram of the structure of the utility model;

[0009] Figure 2 for Figure 1 A schematic diagram of the enlarged structure in the middle.

[0010] In the figure: 1-flower basket side plate, 2-connecting plate, 3-top beam, 4-flower basket splint, 5-anti-sticking sheet structure, 51-bump, 52-connecting rod, 53-support tube, 54-handle bar, 6-auxiliary support rod. DETAILED DESCRIPTION

[0011] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0012] See also Figure 1-2 The utility model provides a silicon wafer cleaning flower basket, comprising two flower basket side plates 1, two connecting plates 2 are fixedly installed between the two flower basket side plates 1, the two flower basket side plates 1 and the two connecting plates 2 form a frame, two top beams 3 are fixedly installed at the upper ends between the two flower basket side plates 1, a plurality of flower basket clamping plates 4 are fixedly installed on the inner side walls of the two connecting plates 2, and the outer walls of the flower basket clamping plates 4 are connected to the top beams 3 through an anti-sticking sheet structure 5.

[0013] A stable frame structure is formed by the flower basket side plates 1 and the connecting plates 2 to form the outer frame of the cleaning flower basket, and a complete cleaning flower basket structure is formed by assembling a plurality of symmetrical flower basket clamps 4. A silicon wafer can be clamped between two adjacent flower basket clamps 4 and two oppositely arranged flower basket clamps 4 to ensure the clamping effect and the stability during cleaning. Through the effect of the anti-sticking sheet structure 5, when the silicon wafer is thin, it is prevented from sticking to the side wall of the flower basket clamp 4 and the two adjacent groups of silicon wafers sticking together, ensuring that the silicon wafer is easy to take out and supporting and separating adjacent silicon wafers to reduce the generation of sticky wafers. At the same time, the anti-sticking sheet structure 5 can lift the silicon wafer upward, making it more convenient to take out the silicon wafer, and it is highly practical. The top beam 3 can better ensure the stability of the flower basket frame.

[0014] The anti-sticking sheet structure 5 includes a support tube 53, which is fixedly mounted on the side wall of the top beam 3. A connecting rod 52 is slidably mounted on the inner wall of the support tube 53. The connecting rod 52 is L-shaped. A handle 54 is fixedly mounted on the side wall of the connecting rod 52. A protrusion 51 is fixedly mounted on the lower side of the inner end of the connecting rod 52. The protrusion 51 fits against the side wall of the flower basket splint 4.

[0015] When the anti-sticking sheet structure 5 is needed, when the silicon wafer is placed in two sets of adjacent basket clamps 4, it will be clamped in the middle by two symmetrical protrusions 51, and the contact area between itself and the equipment is reduced. At the same time, the distance between the two adjacent silicon wafers is increased, and the problem of sticking will not occur. At the same time, when the silicon wafer needs to be taken out, the two adjacent handles 54 are lifted, and the connecting rod 52 is driven to fit the inner wall of the support tube 53 to maintain a fixed trajectory displacement. At the same time, the connecting rod 52 drives the protrusion 51 to lift the adhered silicon wafer, making it convenient to take out the silicon wafer.

[0016] Two auxiliary support rods 6 are fixedly mounted on the upper ends between the two flower basket side panels 1 .

[0017] The duplicate support rod 6 also plays a role in ensuring the stability of the flower basket frame.

[0018] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A silicon wafer cleaning basket, characterized in that: The invention comprises two flower basket side panels (1), two connecting panels (2) are fixedly mounted between the two flower basket side panels (1), the two flower basket side panels (1) and the two connecting panels (2) form a frame, two top beams (3) are fixedly mounted at the upper ends between the two flower basket side panels (1), a plurality of flower basket clamping panels (4) are fixedly mounted on the inner side walls of the two connecting panels (2), and the outer walls of the flower basket clamping panels (4) are connected to the top beams (3) via an anti-adhesive sheet structure (5).

2. The silicon wafer cleaning basket according to claim 1, characterized in that: The anti-adhesive sheet structure (5) comprises a support tube (53), the support tube (53) is fixedly mounted on the side wall of the top beam (3), a connecting rod (52) is slidably mounted on the inner wall of the support tube (53), the connecting rod (52) is L-shaped, a handle (54) is fixedly mounted on the side wall of the connecting rod (52), a convex block (51) is fixedly mounted on the lower side of the inner end of the connecting rod (52), and the convex block (51) is in contact with the side wall of the basket clamp (4).

3. The silicon wafer cleaning basket according to claim 1, characterized in that: Two auxiliary support rods (6) are fixedly mounted on the upper ends between the two flower basket side panels (1).

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