Graphite boat piece loading and unloading equipment and photovoltaic cell piece preparation system

Abstract

The utility model discloses graphite boat sheet loading and unloading equipment and a photovoltaic cell preparation system. The graphite boat sheet loading and unloading equipment comprises a sheet loading and unloading main body, a sheet loading and unloading robot, a first conveying mechanism, a second conveying mechanism, a third conveying mechanism, a first transverse moving mechanism and a second transverse moving mechanism. According to the utility model, the graphite boat can be transferred by the first transverse moving mechanism and the second transverse moving mechanism to be conveyed to the sheet loading and unloading station for sheet loading and unloading, is conveyed by the second conveying mechanism and the third conveying mechanism to enter the caching position for caching after sheet loading and unloading are completed, then enters the second transferring station, and flows out from the inlet and outlet; the occupied space of the wafer loading and unloading main body is small, the wafer loading and unloading robot can alternately load and unload substrates on the graphite boats located at the first wafer loading and unloading station and the second wafer loading and unloading station, the waiting time of the wafer loading and unloading robot is shortened, the wafer loading and unloading rhythm is more compact, and the wafer loading and unloading efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell manufacturing, in particular to a graphite boat sheet loading and unloading device and a photovoltaic cell sheet preparation system. Background Art

[0002] Before and after the PECVD (plasma enhanced chemical vapor deposition) process, solar cell wafers (such as silicon wafers) need to be loaded into a graphite boat, or the silicon wafers in the graphite boat need to be loaded into a wafer basket. By automating the loading and unloading of silicon wafers, the contact pollution between human beings and silicon wafers can be reduced, the stability of wafer loading and unloading can be increased, and the production efficiency can be improved. In the related art, the graphite boat flows from the upstream into the wafer loading and unloading equipment through the docking equipment, and the wafers are loaded and unloaded to the graphite boat by a robot equipped with an adsorption component. When the graphite boat is circulating in the wafer loading and unloading equipment, the robot is in a waiting state, and the loading and unloading rhythm is not tight, which affects the loading and unloading efficiency. Summary of the invention

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a graphite boat loading and unloading device, which can improve the loading and unloading efficiency.

[0004] The utility model also provides a photovoltaic cell sheet preparation system with the graphite boat sheet loading and unloading device.

[0005] According to the first aspect of the present invention, the graphite boat loading and unloading device is used for circulating a graphite boat group, each of which includes two graphite boats arranged in a direction, and the graphite boat loading and unloading device is used for loading and unloading substrates into the graphite boat, and the graphite boat loading and unloading device includes:

[0006] A loading and unloading sheet body, provided with a loading and unloading sheet space and an inlet and outlet connected to the loading and unloading sheet space, the inlet and outlet are used for the graphite boat group to enter and exit the loading and unloading sheet space, the loading and unloading sheet space is provided with a conveying position group, a loading and unloading position group and a buffer position group, the conveying position group includes a first transfer station, a first conveying station, a second conveying station and a second transfer station arranged in sequence along a first direction, the loading and unloading position group includes a first loading and unloading sheet station and a second loading and unloading sheet station arranged along a second direction, the buffer position group includes a first buffer position and a second buffer position arranged along the second direction, the first conveying station and the buffer position group are arranged along the second direction, the second conveying station and the loading and unloading position group are arranged along the second direction, the first loading and unloading sheet station is located on one side of the first buffer position in the first direction, the second loading and unloading sheet station is located on one side of the second buffer position in the first direction, the first direction is perpendicular to the second direction, and the first direction is the direction in which the graphite boat group enters the loading and unloading sheet space;

[0007] A sheet loading and unloading robot, located between the first sheet loading and unloading station and the second sheet loading and unloading station, used for loading and unloading sheets from the graphite boat located at the first sheet loading and unloading station or the second sheet loading and unloading station;

[0008] a first conveying mechanism, used for switching the graphite boat within the conveying position group along the first direction;

[0009] A second conveying mechanism, used for transferring the graphite boat from the first loading and unloading station to the first buffering station;

[0010] a third conveying mechanism, used for transferring the graphite boat from the second sheet loading and unloading station to the second buffering station;

[0011] a first transverse movement mechanism, located on the opposite side of the first conveying mechanism in the first direction, and used to transfer the graphite boat located at the first buffer station or the second buffer station to the first conveying station along the second direction;

[0012] The second transverse movement mechanism is located at one side of the first conveying mechanism in the first direction and is used to transfer the graphite boat located at the second conveying station to the first loading and unloading station or the second loading and unloading station along the second direction.

[0013] The graphite boat loading and unloading equipment according to the embodiment of the utility model has at least the following beneficial effects:

[0014] In the utility model, the graphite boat group entering the sheet loading and unloading space from the inlet and outlet is received by the first conveying mechanism, and there is no need to set up an additional docking device. The sheet loading and unloading body only needs to set up the first transfer station, the first conveying station, the second conveying station and the second transfer station in the first direction to realize the transfer of the graphite boat between the conveying station and the transfer station, and the graphite boat can be transferred by the first transverse movement mechanism and the second transverse movement mechanism to the sheet loading and unloading station for sheet loading and unloading, and after the sheet loading and unloading is completed, it is conveyed to the cache position for cache by the second conveying mechanism and the third conveying mechanism, and then enters the second transfer station and flows out from the inlet and outlet to complete the circulation of the graphite boat in the sheet loading and unloading space and the sheet loading and unloading, the sheet loading and unloading body occupies a small space, and the sheet loading and unloading robot can alternately load and unload substrates to the graphite boat located at the first sheet loading and unloading station and the second sheet loading and unloading station, thereby shortening the waiting time of the sheet loading and unloading robot, making the sheet loading and unloading cycle more compact, and improving the sheet loading and unloading efficiency.

[0015] According to some embodiments of the utility model, the first conveying mechanism includes a first conveying line and a second conveying line, the first conveying line is located at the first conveying station, and the second conveying line is located at the second conveying station; the first conveying mechanism also includes a first driving structure and a second driving structure, the first driving structure is connected to the first conveying line, and is used to transfer the graphite boat from the first conveying line to the second conveying line and the first transverse movement mechanism, and the second driving structure is connected to the second conveying line, and is used to transfer the graphite boat from the second conveying line to the second transverse movement mechanism.

[0016] According to some embodiments of the utility model, the first conveying station is located on the side of the first cache station facing away from the second cache station, and the first conveying mechanism includes a first lifting drive structure, which is connected to the second conveying line and is used to drive the second conveying line to lift and lower so that the second conveying line can dock with the second conveying mechanism, and the second conveying line can transfer the graphite boat to the first loading and unloading station.

[0017] According to some embodiments of the utility model, a plurality of the loading and unloading position groups arranged along the second direction and a plurality of the cache position groups arranged along the second direction are provided in the loading and unloading space, and a loading and unloading robot is provided between the first loading and unloading station and the second loading and unloading station in each of the loading and unloading position groups.

[0018] According to some embodiments of the utility model, the first conveying station is located on the side of the first cache station facing away from the second cache station, and the second conveying mechanism includes a third conveying line and a second lifting drive mechanism, and the third lifting drive mechanism is used to drive the third conveying line to rise and fall so that the third conveying line can dock with the first conveying line and transfer the graphite boat to the first conveying station.

[0019] According to some embodiments of the present invention, the first transverse movement mechanism includes a first transverse movement line and a first guide rail, the first guide rail extends along the second direction, the first transverse line transports the graphite boat along the first direction and in the opposite direction of the first direction, and the first transverse line is slidably connected to the first guide rail; the third conveying mechanism includes a second transverse movement line and a second guide rail, the second guide rail extends along the second direction, the second transverse line transports the graphite boat along the first direction and in the opposite direction of the first direction, and the second transverse line is slidably connected to the second guide rail.

[0020] According to some embodiments of the present invention, the first transverse movement mechanism includes at least two first transverse movement lines arranged along the second direction; and / or the second transverse movement mechanism includes at least two second transverse movement lines arranged along the second direction.

[0021] According to some embodiments of the utility model, the sheet loading and unloading robot includes a mechanical arm and a sheet picking and placing mechanism, the sheet picking and placing mechanism is connected to one end of the mechanical arm, and the second conveying mechanism and the third conveying mechanism are not higher than the other end of the mechanical arm.

[0022] According to some embodiments of the present invention, the first direction is parallel to the length direction of the graphite boat.

[0023] According to the second aspect of the present invention, a photovoltaic cell preparation system includes:

[0024] The graphite boat loading and unloading equipment of the first embodiment;

[0025] The graphite boat conveying device is used for conveying the empty or fully loaded graphite boat group to the inlet and outlet, and receiving the empty or fully loaded graphite boat group outputted from the inlet and outlet.

[0026] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0028] Figure 1 It is a workstation distribution diagram in one embodiment of the loading and unloading sheet body;

[0029] Figure 2 It is a schematic diagram of an embodiment of the graphite boat loading and unloading equipment of the utility model;

[0030] Figure 3 for Figure 2 Schematic diagram of the other direction of the film loading and unloading equipment of the Zhongmo boat;

[0031] Figure 4 It is a schematic diagram of the partial circulation process of the graphite boat;

[0032] Figure 5 Schematic diagram of the flow process of the graphite boat (with Figure 4 (e) connected);

[0033] Figure 6 Schematic diagram of the flow process of the graphite boat (with Figure 5 (j) connected).

[0034] Reference numerals:

[0035] The sheet loading and unloading body 100, the sheet loading and unloading space 110, the import and export 120, the conveying position group 130, the first transfer station 131, the first conveying station 132, the second conveying station 133, the second transfer station 134, the loading and unloading position group 140, the first sheet loading and unloading station 141, the second sheet loading and unloading station 142, the cache position group 150, the first cache station 151, the second cache station 152; the sheet loading and unloading robot 200, the robotic arm 210, the sheet picking and placing mechanism 220; the first conveying mechanism 300, the first conveying line 310, the second conveying line 320; the second conveying mechanism 400, the third conveying line 410; the third conveying mechanism 500; the first transverse movement mechanism 600, the first transverse movement line 610, the first guide rail 620; the second transverse movement mechanism 700, the second transverse movement line 710, the second guide rail 720. DETAILED DESCRIPTION

[0036] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0037] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0038] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0039] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0040] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0041] Reference Figures 1 to 3 In an embodiment of the utility model, a graphite boat loading and unloading device (hereinafter referred to as the loading and unloading device) is provided, which is used to circulate a graphite boat group and load and unload substrates into the graphite boat when the graphite boat is circulated to a corresponding workstation. Each graphite boat group includes two directionally arranged graphite boats, and the two graphite boats synchronously enter the loading and unloading device for circulation and loading and unloading of substrates, and synchronously flow out of the loading and unloading device after completing the loading and unloading of substrates, that is, the two graphite boats synchronously enter and exit the loading and unloading device in the form of a graphite boat group.

[0042] The graphite boat loading and unloading equipment includes a loading and unloading sheet body 100, in which a loading and unloading sheet space 110 is provided, and the loading and unloading sheet body 100 has an inlet and outlet 120, which is connected to the loading and unloading sheet space 110, and the inlet and outlet 120 is used for allowing the graphite boat group to enter and exit the loading and unloading sheet space 110. A conveying position group 130, a loading and unloading position group 140, and a buffer position group 150 are provided in the loading and unloading sheet space 110, and the conveying position group 130 includes a first transfer station 131, a first conveying station 132, a second conveying station 133, and a second transfer station 134 arranged in sequence along a first direction, the loading and unloading position group 140 includes a first loading and unloading sheet station 141 and a second loading and unloading sheet station 142 arranged along a second direction, and the buffer position group 150 includes a first buffer position 151 and a second buffer position 152 arranged along a second direction. The second cache station 152, and the first conveying station 132 and the cache station group 150 are arranged along the second direction, the second conveying station 133 and the loading and unloading station group 140 are arranged along the second direction, the first loading and unloading station 141 is located on one side of the first cache station 151 in the first direction, and the second loading and unloading station 142 is located on one side of the second cache station 152 in the first direction; the above-mentioned first direction is perpendicular to the second direction, and the first direction is the direction in which the graphite boat group enters the loading and unloading space 110.

[0043] The sheet loading and unloading equipment also includes a sheet loading and unloading robot 200, which is located between the first sheet loading and unloading station 141 and the second sheet loading and unloading station 142, and is used for loading and unloading substrates from the graphite boat located at the first sheet loading and unloading station 141 or the second sheet loading and unloading station 142. Since the first sheet loading and unloading station 141 and the second sheet loading and unloading station 142 are respectively arranged on both sides of the sheet loading and unloading robot 200, the sheet loading and unloading robot 200 can take into account the loading and unloading of substrates from the graphite boats at the two loading and unloading stations, and the sheet loading and unloading robot 200 has a higher utilization rate.

[0044] The sheet loading and unloading equipment further includes a first conveying mechanism 300, a second conveying mechanism 400 and a third conveying mechanism 500. The first conveying mechanism 300 is used to switch the graphite boat in the conveying position group 130 along the first direction, including sequentially transferring the graphite boat from the first transfer station 131 to the first conveying station 132, the second conveying station 133 and the second transfer station 134 along the positive direction of the first direction, or transferring the graphite boat from the first conveying station 132 to the first transfer station 131 along the reverse direction of the first direction. The second conveying mechanism 400 is used to transfer the graphite boat from the first sheet loading and unloading station 141 to the first buffer station 151, so that the graphite boat that has completed sheet loading and unloading at the first sheet loading and unloading station 141 is transferred to the first buffer station 151 for buffering; the second conveying mechanism 400 is used to transfer the graphite boat from the second sheet loading and unloading station 142 to the second buffer station 152, so that the graphite boat that has completed sheet loading and unloading at the second sheet loading and unloading station 142 is transferred to the second buffer station 152 for buffering.

[0045] The sheet loading and unloading equipment also includes a first transverse movement mechanism 600 and a second transverse movement mechanism 700. Both the first transverse movement mechanism 600 and the second transverse movement mechanism 700 are used to transfer the graphite boat in the second direction. The first transverse movement mechanism 600 is located on the side of the first conveying mechanism 300 opposite to the first direction, and is used to transfer the graphite boat located at the first cache station 151 or the second cache station 152 to the first conveying station 132 along the second direction, so that the graphite boat that has completed the sheet loading and unloading and is in a cache state is moved to the first conveying station 132, ready to flow out from the sheet loading and unloading space 110. The second transverse movement mechanism 700 is located on one side of the first conveying mechanism 300 in the first direction, and is used to transfer the graphite boat located at the second conveying station 133 to the first loading and unloading station 141 or the second loading and unloading station 142 along the second direction, so that the graphite boat flowing into the loading and unloading space 110 is transferred to the first loading and unloading station 141 or the second loading and unloading station 142 through the second transverse movement mechanism 700 to load and unload the substrate.

[0046] In the present invention, the first conveying mechanism 300 receives the graphite boat group entering the loading and unloading space 110 from the inlet and outlet 120, and no additional docking device is required. The loading and unloading body 100 only needs to set the first transfer station 131, the first conveying station 132, the second conveying station 133 and the second transfer station 134 in the first direction to realize the transfer of the graphite boat between the conveying station and the transfer station, and the graphite boat can be transferred by the first transverse movement mechanism 600 and the second transverse movement mechanism 700 to be transported to the loading and unloading station for loading and unloading ... After the sheet is completed, it is transported into the cache through the second conveying mechanism 400 and the third conveying mechanism 500, and then enters the second transfer station 134, and flows out from the inlet and outlet 120, completing the circulation and loading and unloading of the graphite boat in the sheet loading and unloading space 110. The sheet loading and unloading body 100 occupies a small space, and the sheet loading and unloading robot 200 can alternately load and unload substrates on the graphite boat located at the first sheet loading and unloading station 141 and the second sheet loading and unloading station 142, shortening the waiting time of the sheet loading and unloading robot 200, making the sheet loading and unloading rhythm more compact, and improving the sheet loading and unloading efficiency.

[0047] For example, a group of conveying positions 130, loading and unloading positions 140 and buffer positions 150 are provided in the loading and unloading space 110, and three groups of graphite boat groups are circulated in the loading and unloading space 110. The first group of graphite boat groups entering the loading and unloading space 110 is defined as group A graphite boat group, wherein the graphite boat that enters the loading and unloading space 110 first is A1, and the graphite boat that enters the loading and unloading space 110 later is A2; the second group of graphite boat groups is defined as group A. The first group of graphite boats entering the loading and unloading space 110 is defined as group B graphite boat group, wherein the graphite boat that enters the loading and unloading space 110 first is B1, and the graphite boat that enters the loading and unloading space 110 later is B2; the third group of graphite boats entering the loading and unloading space 110 is defined as group C graphite boat group, wherein the graphite boat that enters the loading and unloading space 110 first is C1, and the graphite boat that enters the loading and unloading space 110 later is C2.

[0048] The flow process of the graphite boat in the loading and unloading space 110 is as follows: Figure 4 In FIG. (a), the graphite boats of group A first enter the loading and unloading space 110, wherein the graphite boat A1 is in front and the graphite boat A2 is in the back. The graphite boat group A is transported by the first transverse mechanism 600 and the first transport mechanism 300, and the graphite boat A1 is transferred to the first transport station 132, and the graphite boat A2 is transferred to the first transfer station 131; Figure 4In FIG. (b), the first conveying mechanism 300 and the second transverse mechanism 700 continue to convey the graphite boat group A, wherein the graphite boat A1 is first conveyed by the first conveying mechanism 300 and transferred to the second transfer station 134 via the second conveying station 133, and then transferred to the docking with the second conveying mechanism 400 via the second transverse mechanism 700, and further transferred to the first loading and unloading station 141, and the graphite boat A2 is conveyed by the first conveying mechanism 300 and transferred to the second conveying station 133 via the first conveying station 132; refer to FIG. Figure 4 In FIG. (c), the second transverse movement mechanism 700 retreats and docks with the first conveying mechanism 300, and the graphite boat A2 located at the second conveying station 133 is transferred to the second transfer station 134. The loading and unloading robot 200 loads and unloads the graphite boat A1 located at the first loading and unloading station 141. During this process, the graphite boat group B enters the loading and unloading space 110 through the inlet and outlet 120, wherein the graphite boat B1 is in front and the graphite boat B2 is in the back. The graphite boat group B is transported by the first transverse movement mechanism 600 and the first conveying mechanism 300, and the graphite boat B1 is transferred to the first conveying station 132, and the graphite boat B2 is transferred to the first transfer station 131; refer to FIG. Figure 4 In Figure (d), the loading and unloading robot 200 completes the loading and unloading of the graphite boat A1. The graphite boat A1 is transferred from the first loading and unloading station 141 to the first buffer station 151 for buffering under the conveyance of the second conveying mechanism 400. During the loading and unloading process of the graphite boat A1, the graphite boat A2 is transferred to the second loading and unloading station 142 through the conveyance of the second transverse movement mechanism 700. After completing the loading and unloading of the graphite boat A1, the loading and unloading robot 200 continues to load and unload the graphite boat A2. Meanwhile, during this process, the graphite boat group B is transferred to the second transfer station 134 through the conveyance of the first conveying mechanism 300, and the graphite boat B2 is transferred to the second conveying station 133; refer to Figure 4 As shown in Figure (e), the sheet loading and unloading robot 200 has completed the sheet loading and unloading of graphite boat A2 and is ready to be transferred to the second buffer station 152. The graphite boat B1 is transferred to the first sheet loading and unloading station 141 through the docking of the second transverse movement mechanism 700 and the second conveying mechanism 400. The sheet loading and unloading robot 200 starts to load and unload the graphite boat B1. At the same time, the graphite boat B2 is transferred to the second transfer station 134, waiting to enter the second loading and unloading station 142 for loading and unloading. The graphite boat group C enters the sheet loading and unloading space 110 through the inlet and outlet 120, with the graphite boat C1 in front and the graphite boat C2 in the back. The graphite boat group C is transported by the first transverse movement mechanism 600 and the first conveying mechanism 300, and the graphite boat C1 is transferred to the first conveying station 132, and the graphite boat C2 is transferred to the first transfer station 131.

[0049] Reference Figure 5In Figure (f), the graphite boats C1 and C2 continue to be driven and moved by the first conveying mechanism 300, the graphite boat C1 is transferred to the second transfer station 134, the graphite boat C2 is transferred to the second conveying station 133, the first transverse movement mechanism 600 moves to dock with the second conveying mechanism 400, and transfers the graphite boat A1 at the first buffer station 151 to the first transfer station 131. During this process, the loading and unloading robot 200 completes the loading and unloading of the graphite boat B1, and the graphite boat B1 is ready to be transferred to the first buffer station 151. At the same time, the graphite boat B2 is transferred to the second loading and unloading station 142 under the transportation of the second transverse movement mechanism 700, and the loading and unloading robot 200 starts to load and unload the graphite boat B2; refer to Figure 5 In Figure (g), the graphite boat A2 is transported by the first transverse movement mechanism 600 and transferred from the second loading and unloading station 142 to the first transfer station 131. During this process, the graphite boat A1 is transferred from the first transfer station 131 to the first transport station 132, and the graphite boat group A flows out of the loading and unloading space 110, and the graphite boat A2 exits first, and the graphite boat A1 exits later. During this process, the loading and unloading robot 200 completes the loading and unloading of the graphite boat B2, and the graphite boat B2 is transported by the third transport mechanism 500 and transferred to the second buffer station 152. At the same time, the graphite boat C1 is transported by the second transverse movement mechanism 700 and transferred to the first loading and unloading station 141. The loading and unloading robot 200 starts to load and unload the graphite boat C1, and the second transverse movement mechanism 700 transports the graphite boat C2, and the graphite boat C2 is ready to enter the second loading and unloading station 142 for loading and unloading; refer to Figure 5 In FIG. (h), the graphite boat group A re-enters the sheet loading and unloading space 110, and under the transportation of the first transverse movement mechanism 600 and the first conveying mechanism 300, the graphite boat A1 is transferred to the first conveying station 132, and the graphite boat A2 is transferred to the first transfer station 131. During this process, the sheet loading and unloading robot 200 loads and unloads sheets to the graphite boat C2; refer to FIG. Figure 5 In FIG. (i), the graphite boat B1 is transferred from the first buffer station 151 to the first transfer station 131 by the first transverse movement mechanism 600, and at the same time, the graphite boat C1 is transferred from the first loading and unloading station 141 to the first buffer station 151, and the graphite boats A1 and A2 are transported by the first conveying mechanism 300 and the second transverse movement mechanism 700 and continue to move, and the graphite boat A1 begins to enter the first loading and unloading station 141 for loading and unloading; refer to Figure 5In Figure (j), the graphite boat B1 is transferred to the first conveying station 132, the graphite boat B2 is conveyed by the first transverse movement mechanism 600, and is transferred to the first transfer station 131 via the second buffer station 152, the graphite boat group B withdraws from the loading and unloading space 110, and the graphite boat B2 withdraws first, and the graphite boat B1 withdraws later. During this process, the loading and unloading robot 200 loads and unloads the graphite boat A1 at the first loading and unloading station 141, the graphite boat C2 is transferred from the second loading and unloading station 142 to the second buffer station 152, and the graphite boat A2 is conveyed by the second transverse movement mechanism 700, and is ready to enter the second loading and unloading station 142 to load and unload.

[0050] Reference Figure 6 In FIG. (k), the graphite boat group B re-enters the sheet loading and unloading space 110, and under the transportation of the first transverse movement mechanism 600 and the first conveying mechanism 300, the graphite boat B1 is transferred to the first conveying station 132, the graphite boat B2 is transferred to the first transfer station 131, and the sheet loading and unloading robot 200 loads and unloads the graphite boat A2 located at the second sheet loading and unloading station 142; Figure 6 In Figure (l), the graphite boat C1 is transferred from the first buffer station 151 to the first transfer station 131 via the first transverse movement mechanism 600, the graphite boat A1 completes the loading and unloading of sheets, and is transferred from the first loading and unloading station 141 to the first buffer station 151 via the second conveying mechanism 400, the graphite boat A2 is transferred via the second transverse movement mechanism 700 to the second loading and unloading station 142, the loading and unloading robot 200 loads and unloads sheets to the graphite boat A2, during this process, the graphite boats B1 and B2 continue to move under the conveyance of the first conveying mechanism 300, the graphite boat B1 is transferred to the first transfer station 131, and is ready to enter the first loading and unloading station 141 to load and unload sheets, and the graphite boat B2 is transferred to the second conveying station 133; refer to Figure 6 In the figure (m), the graphite boat C1 is transferred to the first conveying station 132, the graphite boat C2 is conveyed by the first transverse movement mechanism 600, and is transferred to the first transfer station 131 via the second buffer station 152, the graphite boat group C withdraws from the sheet loading and unloading space 110, and the graphite boat C2 withdraws first, and the graphite boat C1 withdraws later. During this process, the sheet loading and unloading robot 200 loads and unloads the graphite boat B1 of the first sheet loading and unloading station 141, the graphite boat B2 is transferred from the second sheet loading and unloading station 142 to the second buffer station 152, and the graphite boat A2 is conveyed by the second transverse movement mechanism 700, and is ready to enter the second sheet loading and unloading station 142 for loading and unloading; refer to Figure 6 The (n) graph in Figure 4In FIG. (e), the graphite boat group C re-enters the sheet loading and unloading space 110, and under the transportation of the first transverse movement mechanism 600 and the first conveying mechanism 300, the graphite boat C1 is transferred to the first conveying station 132, the graphite boat C2 is transferred to the first transfer station 131, the graphite boat A2 completes the sheet loading and unloading, and is transferred from the second sheet loading and unloading station 142 to the second buffer station 152 through the transportation of the third conveying mechanism 500, the graphite boat B1 is transferred to the first sheet loading and unloading station 141, and the sheet loading and unloading robot 200 loads and unloads the graphite boat B1, and the graphite boat B2 is transported by the second transverse movement mechanism 700 and is ready to be transferred to the second sheet loading and unloading station 142 for sheet loading and unloading; the further circulation and sheet loading and unloading of the graphite boats can be further referred to. Figure 6 According to Figure (f) and the description of this process above, the graphite boat can realize the rotation and flow of three groups of graphite boats in the loading and unloading space 110 and the loading and unloading of sheets through the above-mentioned circulation process, and the loading and unloading robot 200 can load and unload sheets to other graphite boats during the circulation of the graphite boat, thereby improving the loading and unloading efficiency.

[0051] A plurality of loading and unloading position groups 140 arranged along the second direction and a plurality of buffer position groups 150 arranged along the second direction may also be provided in the loading and unloading space 110. A loading and unloading robot 200 is provided between the first loading and unloading station 141 and the second loading and unloading station 142 in each loading and unloading position group 140. The two graphite boats in each graphite boat group enter the first loading and unloading station 141 and the second loading and unloading station 142 in a loading and unloading position group 140 respectively. Each loading and unloading robot 200 can take care of the loading and unloading of the two graphite boats in the loading and unloading position group 140. By providing a plurality of loading and unloading position groups 140 and buffer position groups 150, the number of graphite boat groups circulating in the loading and unloading space 110 can be increased, and the utilization rate of the first conveying mechanism 300, the first transverse movement mechanism 600 and the second transverse movement mechanism 700 can be improved.

[0052] Furthermore, the first transverse movement mechanism 600 includes a first transverse movement line 610 for docking with the first conveying mechanism 300, the second conveying mechanism 400, and the third conveying mechanism 500. The first transverse movement line 610 transports the graphite boat along the first direction and the reverse direction of the first direction. Similarly, the second transverse movement mechanism 700 includes a second transverse movement line 710 for docking with the first conveying mechanism 300, the second conveying mechanism 400, and the third conveying mechanism 500. The second transverse line 710 transports the graphite boat along the first direction and the reverse direction of the first direction. Both the first transverse movement line 610 and the second transverse line 710 can adopt belt lines and guide rail slider structures for transmission. In this embodiment, the first transverse movement mechanism 600 includes at least two first transverse movement lines 610 arranged along the second direction; and / or, the second transverse movement mechanism 700 includes at least two second transverse movement lines 710 arranged along the second direction, so as to increase the number of graphite boats that can be transported by the first transverse movement mechanism 600 and the second transverse movement mechanism 700, and to increase cache positions for the graphite boats, thereby facilitating the flow of the graphite boats in the loading and unloading space 110.

[0053] In the utility model, the first direction is parallel to the length direction of the graphite boat, that is, the ends of the two graphite boats in each graphite boat group are connected. When the graphite boat flows to the first loading and unloading station 141 or the second loading and unloading station 142, the side of the graphite boat faces the loading and unloading robot 200, which can reduce the moving path of the loading and unloading robot 200 during the process of taking and placing the sheets, thereby improving the loading and unloading efficiency.

[0054] The first conveying mechanism 300, the second conveying mechanism 400 and the third conveying mechanism 500 all include a conveying line for conveying the graphite boat, and the conveying line can use a conveying structure such as a belt line, a guide rail slider, etc. Similarly, the first transverse mechanism 600 and the second transverse mechanism 700 both include a conveying line for conveying the graphite boat, and the conveying line can use a conveying structure such as a belt line, a guide rail slider, etc., and the conveying line is driven by the linear drive structure to move along the second direction.

[0055] The first conveying mechanism 300 includes a first conveying line 310 and a second conveying line 320, wherein the first conveying line 310 is located at the first conveying station 132, and the second conveying line 320 is located at the second conveying station 133; the first conveying mechanism 300 also includes a first driving structure and a second driving structure, wherein the first driving structure is connected to the first conveying line 310 and is used to transfer the graphite boat from the first conveying line 310 to the second conveying line 320 and the first transverse movement mechanism 600, and the second driving element is connected to the second conveying line 320 and is used to transfer the graphite boat from the second conveying line 320 to the second transverse movement mechanism 700; the first conveying line 310 can be driven by the first driving structure along the first direction As well as the reverse transfer of the graphite boat in the first direction, on the one hand, the graphite boat can flow to the second transverse movement mechanism 700 through the first conveying mechanism 300, so as to facilitate the graphite boat to enter the loading and unloading station for loading and unloading, and on the other hand, when the graphite boat that has completed the loading and unloading of the sheets returns to the first transfer station 131, the front graphite boat in the graphite boat group moves to the first conveying station 132, and the rear graphite boat moves to the first transfer station 131, and the first driving structure drives the graphite boat group to exit the loading and unloading space 110 in the reverse direction of the first reverse direction. The two graphite boats in the graphite boat group are arranged in the same direction when entering and exiting the loading and unloading space 110, so as to facilitate the flow of the graphite boat group between the loading and unloading equipment and other equipment.

[0056] Taking the first driving structure as an example, if the first conveyor line 310 is selected as a belt line, the first driving structure is configured as a motor capable of outputting rotational power, the motor drives the transmission wheel around which the belt is wound to rotate, drives the belt to move, and transports the graphite boat; or the first conveyor line 310 is configured as a guide rail slider structure, the first driving structure is configured as a motor capable of outputting linear power, the motor drives the slider to move, and the slider drives the graphite boat placed above it to move.

[0057] In one embodiment, the first conveying station 132 is located on the side of the first buffer station 151 facing away from the second buffer station 152, and the first conveying mechanism 300 includes a first lifting drive structure, which is connected to the second conveying line 320 and is used to drive the second conveying line 320 to rise and fall, so that the second conveying line 320 is docked with the second conveying mechanism 400. The graphite boat located at the second conveying station 133 can be directly transferred to the first loading and unloading station 141 through the docking of the second conveying line 320 with the second conveying mechanism 400, which can shorten the moving path of the graphite boat during the transfer from the conveying station to the loading and unloading station, thereby improving the circulation efficiency of the graphite boat. It can be understood that the first lifting drive structure has a support structure and a driving component that can support the graphite boat. The driving component drives the support structure to rise and fall. The driving component can be selected as a cylinder, an electric cylinder, etc. The support structure can be composed of a plurality of rollers arranged side by side. Similarly, the second conveyor line 320 also includes a plurality of rollers arranged side by side, and are arranged alternately with the rollers of the first lifting drive structure. After the support structure is driven to descend, it is in the same plane as the third conveyor line 410. When the support structure is driven to rise, the graphite boat is lifted and transferred to the second conveying mechanism 400 along the second direction, completing the transfer of the graphite boat from the second conveying station 133 to the second loading and unloading station 142.

[0058] The second conveying mechanism 400 includes a third conveying line 410 and a second lifting drive mechanism. The third lifting drive mechanism is used to drive the third conveying line 410 to rise and fall so that the third conveying line 410 can be docked with the first conveying line 310. Through the docking of the third conveying line 410 with the first conveying line 310, the graphite boat located at the first buffer station 151 can be directly transferred to the first conveying station 132, shortening the path of the graphite boat flowing out of the loading and unloading space 110 after completing the loading and unloading of the sheet, thereby improving the circulation efficiency of the graphite boat. It can be understood that the second lifting drive structure has a support structure and a driving component that can support the graphite boat. The driving component drives the support structure to rise and fall. The driving component can be selected as a cylinder, an electric cylinder, etc. The support structure can be composed of a plurality of rollers arranged side by side. Similarly, the third conveyor line 410 also includes a plurality of rollers arranged side by side, and are arranged alternately with the rollers of the second lifting drive structure. After the support structure is driven to descend, it is in the same plane as the third conveyor line 410. When the support structure is driven to rise, the graphite boat is lifted and transferred to the first conveying mechanism 300 along the second direction, thereby completing the transfer of the graphite boat from the first buffer station 151 to the first conveying station 132.

[0059] The first transverse mechanism 600 includes a first transverse line 610 and a first guide rail 620. The first guide rail 620 extends along the second direction. The first transverse line 610 transports the graphite boat along the first direction and in the reverse direction of the first direction. The first transverse line 610 is slidably connected to the first guide rail 620. The first guide rail 620 guides the movement of the first transverse line 610 to improve the stability of the graphite boat flow and facilitate the docking of the first transverse line 610 with the first conveying mechanism 300, the second conveying mechanism 400, and the third conveying mechanism 500. The second transverse line 710 includes a second transverse line 710 and a second guide rail 720. The second guide rail 720 extends along the second direction. The second transverse line 710 transports the graphite boat along the first direction and in the reverse direction of the first direction. The second transverse line 710 is slidably connected to the second guide rail 720. The second guide rail 720 guides the movement of the second transverse line 710 to improve the smoothness of the flow of the graphite boat and facilitate the docking of the second transverse line 710 with the first conveying mechanism 300, the second conveying mechanism 400, and the third conveying mechanism 500.

[0060] The wafer loading and unloading robot 200 includes a robotic arm 210 and a wafer picking and placing mechanism 220. The wafer picking and placing mechanism 220 can use vacuum adsorption and Bernoulli adsorption structures to reduce damage to the substrate during the wafer picking and placing process. The robotic arm 210 has multi-directional rotational freedom, so that the wafer loading and unloading robot 200 can take into account the wafer picking and placing of the graphite boat at different positions. The wafer picking and placing mechanism 220 is connected to one end of the robotic arm 210, such as the free end of the robotic arm 210. The second conveying mechanism 400 and the third conveying mechanism 500 are not higher than the other end of the robotic arm 210, which can reduce the moving path of the robotic arm 210 in the process of driving the wafer picking and placing mechanism 220 to move, thereby improving the wafer loading and unloading efficiency.

[0061] The utility model also provides a photovoltaic cell preparation system, including the above-mentioned graphite boat loading and unloading device, and also including a graphite boat conveying device, the graphite boat conveying device is used to convey an empty or fully loaded graphite boat group to the inlet and outlet 120 of the loading and unloading body 100, and receive an empty or fully loaded graphite boat group output from the inlet and outlet 120. Exemplarily, the graphite boat conveying device is arranged between the PECVD reactor and the loading and unloading device, and can convey the graphite boat group output from the PECVD reactor to the loading and unloading device, and convey the graphite boat group flowing out of the loading and unloading device to the PECVD reactor.

[0062] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

Claims

1. Graphite boat loading and unloading equipment, characterized in that: Used for circulating graphite boat groups, each of which includes two graphite boats arranged in a direction, and the graphite boat loading and unloading device is used for loading and unloading substrates to the graphite boats, and the graphite boat loading and unloading device includes: A loading and unloading sheet body, provided with a loading and unloading sheet space and an inlet and outlet connected to the loading and unloading sheet space, the inlet and outlet are used for the graphite boat group to enter and exit the loading and unloading sheet space, the loading and unloading sheet space is provided with a conveying position group, a loading and unloading position group and a buffer position group, the conveying position group includes a first transfer station, a first conveying station, a second conveying station and a second transfer station arranged in sequence along a first direction, the loading and unloading position group includes a first loading and unloading sheet station and a second loading and unloading sheet station arranged along a second direction, the buffer position group includes a first buffer position and a second buffer position arranged along the second direction, the first conveying station and the buffer position group are arranged along the second direction, the second conveying station and the loading and unloading position group are arranged along the second direction, the first loading and unloading sheet station is located on one side of the first buffer position in the first direction, the second loading and unloading sheet station is located on one side of the second buffer position in the first direction, the first direction is perpendicular to the second direction, and the first direction is the direction in which the graphite boat group enters the loading and unloading sheet space; A sheet loading and unloading robot, located between the first sheet loading and unloading station and the second sheet loading and unloading station, used for loading and unloading sheets from the graphite boat located at the first sheet loading and unloading station or the second sheet loading and unloading station; A first conveying mechanism, used for switching the graphite boat within the conveying position group along the first direction; A second conveying mechanism, used for transferring the graphite boat from the first loading and unloading station to the first buffering station; a third conveying mechanism, used for transferring the graphite boat from the second loading and unloading station to the second buffering station; a first transverse movement mechanism, located on the opposite side of the first conveying mechanism in the first direction, and used to transfer the graphite boat located at the first buffer station or the second buffer station to the first conveying station along the second direction; The second transverse movement mechanism is located at one side of the first conveying mechanism in the first direction and is used to transfer the graphite boat located at the second conveying station to the first loading and unloading station or the second loading and unloading station along the second direction.

2. The graphite boat loading and unloading equipment according to claim 1, characterized in that: The first conveying mechanism includes a first conveying line and a second conveying line, the first conveying line is located at the first conveying station, and the second conveying line is located at the second conveying station; the first conveying mechanism also includes a first driving structure and a second driving structure, the first driving structure is connected to the first conveying line, and is used to transfer the graphite boat from the first conveying line to the second conveying line and the first transverse movement mechanism, the second driving structure is connected to the second conveying line, and is used to transfer the graphite boat from the second conveying line to the second transverse movement mechanism.

3. The graphite boat loading and unloading equipment according to claim 2, characterized in that: The first conveying station is located on the side of the first buffer station facing away from the second buffer station. The first conveying mechanism includes a first lifting drive structure. The first lifting drive structure is connected to the second conveying line and is used to drive the second conveying line to lift and lower so that the second conveying line can dock with the second conveying mechanism. The second conveying line can transfer the graphite boat to the first loading and unloading station.

4. The graphite boat loading and unloading equipment according to claim 1, characterized in that: The sheet loading and unloading space is provided with a plurality of the sheet loading and unloading position groups arranged along the second direction and a plurality of the cache position groups arranged along the second direction, and a sheet loading and unloading robot is provided between the first sheet loading and unloading station and the second sheet loading and unloading station in each of the sheet loading and unloading position groups.

5. The graphite boat loading and unloading equipment according to claim 2, characterized in that: The first conveying station is located on the side of the first buffer station facing away from the second buffer station. The second conveying mechanism includes a third conveying line and a second lifting drive mechanism. The second lifting drive mechanism is used to drive the third conveying line to rise and fall so that the third conveying line can dock with the first conveying line and transfer the graphite boat to the first conveying station.

6. The graphite boat loading and unloading equipment according to claim 1, characterized in that: The first transverse movement mechanism includes a first transverse movement line and a first guide rail, the first guide rail extends along the second direction, the first transverse line transports the graphite boat along the first direction and in the opposite direction of the first direction, and the first transverse line is slidably connected to the first guide rail; the third conveying mechanism includes a second transverse line and a second guide rail, the second guide rail extends along the second direction, the second transverse line transports the graphite boat along the first direction and in the opposite direction of the first direction, and the second transverse line is slidably connected to the second guide rail.

7. The graphite boat loading and unloading equipment according to claim 6, characterized in that: The first transverse movement mechanism includes at least two first transverse movement lines arranged along the second direction; and / or the second transverse movement mechanism includes at least two second transverse movement lines arranged along the second direction.

8. The graphite boat loading and unloading equipment according to claim 1, characterized in that: The wafer loading and unloading robot comprises a mechanical arm and a wafer picking and placing mechanism, wherein the wafer picking and placing mechanism is connected to one end of the mechanical arm, and the second conveying mechanism and the third conveying mechanism are not higher than the other end of the mechanical arm.

9. The graphite boat loading and unloading equipment according to claim 1, characterized in that: The first direction is parallel to the length direction of the graphite boat.

10. Photovoltaic cell preparation system, characterized in that: include: The graphite boat loading and unloading equipment according to any one of claims 1 to 9; The graphite boat conveying device is used for conveying the empty or fully loaded graphite boat group to the inlet and outlet, and receiving the empty or fully loaded graphite boat group outputted from the inlet and outlet.

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