Wafer limiting device

Abstract

The utility model discloses a wafer limiting device, and relates to the technical field of limiting devices. Comprising a base, first supporting plates are fixedly connected to the two sides of the bottom of the base, second supporting plates are fixedly connected to the two ends of the bottom of the base, a linkage assembly is arranged between the first supporting plates and comprises a self-locking motor, and the self-locking motor is fixed to one side of each first supporting plate; the output end of the self-locking motor is fixedly connected with a first two-way lead screw, the center of the first two-way lead screw is fixedly connected with a worm, and the bottom of the worm is meshed with a worm gear. According to the utility model, the self-locking motor is started to drive the first bidirectional lead screw and the worm to rotate, the worm synchronously drives the worm gear and the second bidirectional lead screw to rotate, the first bidirectional lead screw and the second bidirectional lead screw drive the limiting plate and the limiting cushion to gradually approach, and the limiting cushion gradually completes the clamping and limiting operation of wafers with different sizes. And the applicability of the device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of limiting devices, in particular to a wafer limiting device. Background Art

[0002] The wafer limiter is a key component in semiconductor manufacturing equipment, used to locate and limit the position of the wafer during processing. The existing wafer limiter (Announcement No.: CN219497758U) has at least the following defects in use:

[0003] Since the distance between the limiting plates of the device cannot be flexibly adjusted, the device can only limit wafers of fixed size when in use. When the wafer size is larger or smaller than the distance between the limiting plates, effective limiting cannot be performed, which reduces the applicability of the device. Utility Model Content

[0004] The main purpose of the utility model is to provide a wafer limiting device, which can effectively solve the problems in the background technology.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] The wafer limiting device includes a base, with first support plates fixedly connected to both sides of the bottom of the base, second support plates fixedly connected to both ends of the bottom of the base, a linkage component is arranged between the first support plates, and the linkage component includes a self-locking motor, the self-locking motor is fixed to one side of the first support plate, a first bidirectional lead screw is fixedly connected to the output end of the self-locking motor, a worm is fixedly connected to the center of the first bidirectional lead screw, a worm gear is meshed with the bottom of the worm gear, and a second bidirectional lead screw is passed through the center of the worm gear and fixedly connected.

[0007] Preferably, the first bidirectional screw rod passes through the first support plate and is rotatably connected thereto, and the second bidirectional screw rod passes through the second support plate and is rotatably connected thereto.

[0008] Preferably, a wafer placement table is fixedly connected to the top center of the base, and adjustment openings are provided at both ends and both sides of the base.

[0009] Preferably, the outer wall end points of the first bidirectional screw rod and the second bidirectional screw rod are both threadedly connected to a limit plate, and the limit plate is arranged inside the adjustment port and slidably connected thereto.

[0010] Preferably, the tops of the limiting plates in adjacent directions are fixedly connected with limiting pads, and the setting height of the limiting pads is greater than that of the wafer placement table.

[0011] Compared with the prior art, the utility model has the following beneficial effects:

[0012] The utility model starts a self-locking motor to drive the first bidirectional lead screw and the worm to rotate, and synchronously, the worm drives the worm wheel and the second bidirectional lead screw to rotate. At the same time, the first bidirectional lead screw and the second bidirectional lead screw drive the limit plate and the limit cushion to gradually approach each other, and the limit cushion gradually completes the clamping and limiting operation of wafers of different sizes, thereby improving the applicability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is an axial view of the utility model;

[0014] Figure 2 It is a partial axial view of the utility model;

[0015] Figure 3 It is a partial bottom view of the utility model;

[0016] Figure 4 This is a structural diagram of the linkage assembly of the utility model.

[0017] In the figure: 1. base; 2. wafer placement table; 3. adjustment port; 4. first support plate; 5. second support plate; 6. linkage assembly; 601. self-locking motor; 602. first bidirectional lead screw; 603. worm; 604. worm wheel; 605. second bidirectional lead screw; 7. limit plate; 8. limit cushion. DETAILED DESCRIPTION

[0018] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0019] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0020] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0021] In the process of limiting the position of the wafer, a limiting device is required. The wafer limiting device provided by the utility model is specially used for the limiting operation of the wafer.

[0022] It should be emphasized that, in the present application, the base 1 and the wafer placement table 2 are the prior art disclosed in announcement number: CN219497758U.

[0023] The self-locking motor 601 of the utility model is purchased on the market, and technicians in the industry only need to install and operate it according to the accompanying instruction manual.

[0024] Example

[0025] See also Figure 1-Figure 4 , the utility model provides a technical solution:

[0026] The wafer limiting device includes a base 1, a first support plate 4 is fixedly connected to both sides of the bottom of the base 1, a second support plate 5 is fixedly connected to both ends of the bottom of the base 1, a linkage assembly 6 is arranged between the first support plates 4, and the linkage assembly 6 includes a self-locking motor 601, the self-locking motor 601 is fixed to one side of the first support plate 4, the output end of the self-locking motor 601 is fixedly connected to a first bidirectional lead screw 602, the center of the first bidirectional lead screw 602 is fixedly connected to a worm 603, the bottom of the worm 603 is meshed with a worm wheel 604, and the center of the worm wheel 604 passes through and is fixedly connected to a second bidirectional lead screw 605, the first bidirectional screw rod 602 passes through the first support plate 4 and is rotatably connected thereto, the second bidirectional screw rod 605 passes through the second support plate 5 and is rotatably connected thereto, the top center of the base 1 is fixedly connected with a wafer placement table 2, and adjustment openings 3 are provided at both ends and both sides inside the base 1, the outer wall end points of the first bidirectional screw rod 602 and the second bidirectional screw rod 605 are both threadedly connected with a limit plate 7, the limit plate 7 is arranged inside the adjustment opening 3 and is slidably connected thereto, the tops of the adjacent directions between the limit plates 7 are fixedly connected with limit pads 8, and the setting height of the limit pads 8 is greater than the wafer placement table 2.

[0027] In this embodiment, wafers of different sizes are placed on the top of the wafer placement table 2, and then the self-locking motor 601 is started to drive the first bidirectional screw 602 and the worm 603 to rotate. Synchronously, the worm 603 drives the worm wheel 604 and the second bidirectional screw 605 to rotate. At the same time, the first bidirectional screw 602 and the second bidirectional screw 605 drive the limit plate 7 and the limit pad 8 to gradually approach, and the limit pad 8 gradually completes the clamping and limiting operations of wafers of different sizes, thereby improving the applicability of the device.

[0028] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A wafer limiting device, comprising a base (1), characterized in that: The two sides of the bottom of the base (1) are fixedly connected to a first support plate (4), the two ends of the bottom of the base (1) are fixedly connected to a second support plate (5), a linkage assembly (6) is arranged between the first support plates (4), and the linkage assembly (6) comprises a self-locking motor (601), the self-locking motor (601) is fixed to one side of the first support plate (4), the output end of the self-locking motor (601) is fixedly connected to a first bidirectional lead screw (602), the center of the first bidirectional lead screw (602) is fixedly connected to a worm (603), the bottom of the worm (603) is meshed with a worm wheel (604), and the center of the worm wheel (604) passes through and is fixedly connected to a second bidirectional lead screw (605).

2. The wafer limiting device according to claim 1, characterized in that: The first bidirectional screw rod (602) passes through the first support plate (4) and is rotatably connected thereto, and the second bidirectional screw rod (605) passes through the second support plate (5) and is rotatably connected thereto.

3. The wafer limiting device according to claim 1, characterized in that: A wafer placement platform (2) is fixedly connected to the top center of the base (1), and adjustment openings (3) are provided at both ends and both sides of the base (1).

4. The wafer limiting device according to claim 3, characterized in that: The outer wall end points of the first bidirectional screw rod (602) and the second bidirectional screw rod (605) are both threadedly connected to a limit plate (7), and the limit plate (7) is arranged inside the adjustment port (3) and is slidably connected thereto.

5. The wafer limiting device according to claim 4, characterized in that: The tops of the limiting plates (7) in adjacent directions are all fixedly connected to limiting soft pads (8), and the setting height of the limiting soft pads (8) is greater than that of the wafer placement table (2).

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