Automatic switching liquid supply system for polishing machine

Abstract

The utility model provides an automatic switching liquid supply system for a polishing machine, which comprises a first liquid supply branch and a second liquid supply branch, the two ends of the first liquid supply branch and the two ends of the second liquid supply branch are respectively connected and communicated with the polishing machine and a polishing liquid storage device, and the first liquid supply branch and the second liquid supply branch can selectively switch liquid supply; the first liquid supply branch is connected with a first circulation branch, and the first circulation branch is connected with the polishing liquid storage device, so that the polishing liquid in the first liquid supply branch is internally circulated and enters the polishing liquid storage device; the second liquid supply branch is connected with a second circulation branch, the second circulation branch is connected with the polishing solution storage device, so that the polishing solution in the second liquid supply branch is internally circulated and enters the polishing solution storage device, when any one liquid supply branch breaks down, the other liquid supply branch supplies the solution, no personnel participation is needed, and the working efficiency is improved. And the liquid supply branches are automatically switched, so that the faulty liquid supply branch is overhauled without shutdown, and the waste of working hours is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafer production, in particular to an automatic switching liquid supply system for a polishing machine. Background Art

[0002] During the process of processing products with the polishing liquid used by the polishing machine, since the polishing machine will run uninterruptedly for a long time and the pump head of the magnetic pump for supplying the polishing liquid is a consumable, the pump head will wear during use (the wear detection degree is low and difficult to identify), resulting in a low polishing liquid flow alarm, which will cause the platen to be interrupted during the polishing process. The traditional solution is to stop the polishing machine first, and then replace or repair the circulating pump head. The traditional shutdown and maintenance method not only wastes man-hours and affects production capacity, but also the products pressed on the plate during the polishing process need to be reworked, increasing processing costs. At the same time, shutdown and maintenance will cause equipment cooling, affecting the taper and geometric parameters of multiple vehicle products, and seriously affecting product quality. Utility Model Content

[0003] In view of the above problems, the utility model provides an automatic switching liquid supply system for a polishing machine to solve the above or other former problems existing in the prior art.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: an automatic switching liquid supply system for a polishing machine, comprising a first liquid supply branch and a second liquid supply branch, both ends of which are respectively connected to the polishing machine and the polishing liquid storage device and are connected, the first liquid supply branch and the second liquid supply branch can selectively switch liquid supply; the first liquid supply branch is connected to a first circulation branch, and the first circulation branch is connected to the polishing liquid storage device, so that the polishing liquid in the first liquid supply branch is internally circulated and enters the polishing liquid storage device; the second liquid supply branch is connected to a second circulation branch, and the second circulation branch is connected to the polishing liquid storage device, so that the polishing liquid in the second liquid supply branch is internally circulated and enters the polishing liquid storage device.

[0005] Furthermore, the first liquid supply branch includes a first control valve, a first power member and a second control valve arranged in sequence along the direction of polishing liquid delivery. The first control valve controls whether the pipeline between the first power member and the polishing liquid storage device is connected, and the second control valve controls whether the pipeline between the first power member and the polishing machine is connected.

[0006] Furthermore, the first circulation branch includes a third control valve, which is arranged between the output end of the first power member and the polishing liquid storage device, so that the polishing liquid output from the first power member can enter the polishing liquid storage device.

[0007] Furthermore, the second liquid supply branch includes a fourth control valve, a second power member and a fifth control valve which are arranged in sequence along the direction of polishing liquid delivery. The fourth control valve controls whether the pipeline between the second power member and the polishing liquid storage device is connected, and the fifth control valve controls whether the pipeline between the second power member and the polishing machine is connected.

[0008] Furthermore, the first circulation branch includes a sixth control valve, which is arranged between the output end of the second power member and the polishing liquid storage device, so that the polishing liquid output from the second power member can enter the polishing liquid storage device.

[0009] Furthermore, it also includes a filtering device, the output end of the first liquid supply branch and the output end of the second liquid supply branch are respectively connected to the input end of the filtering device, and the output end of the filtering device is connected to the polishing machine to filter the polishing liquid entering the polishing machine.

[0010] Furthermore, it also includes a discharge branch, which includes a connected conversion device and a discharge channel. The conversion device is respectively connected to the polishing machine and the polishing liquid storage device. The polishing liquid output from the polishing machine can selectively enter the polishing liquid storage device or be discharged from the discharge channel under the action of the conversion device.

[0011] Furthermore, the first control valve and the third control valve are both manual valves, the second control valve is a pneumatic valve, and the first power component is a liquid supply pump.

[0012] Furthermore, the fourth control valve and the sixth control valve are both manual valves, the fifth control valve is a pneumatic valve, and the second power component is a circulation pump.

[0013] Due to the adoption of the above technical solution, the automatic switching liquid supply system for the polishing machine has a first liquid supply branch and a second liquid supply branch. During the operation of the polishing machine, when one of the two liquid supply branches fails, the other liquid supply branch supplies liquid to the polishing machine without the participation of personnel, and the liquid supply branches are automatically switched, so that the faulty liquid supply branch can be repaired without stopping the machine, without affecting the normal production of the polishing machine, thereby improving the working efficiency of the polishing machine, reducing processing costs, and avoiding waste of working hours.

[0014] Each liquid supply branch has a pump (power component), and the output end of each pump (power component) is provided with a pneumatic valve, and each liquid supply branch is connected to a circulation branch, so that each pump (power component) can perform independent liquid supply and internal circulation functions. At the same time, the input end of each pump (power component) is provided with a valve, so that during the processing of the polishing machine, each pump (power component) can be individually isolated for maintenance, realizing non-stop maintenance without affecting the normal operation of the polishing machine, with a high degree of automation to ensure product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of an embodiment of the utility model.

[0016] In the figure:

[0017] 1. Polishing machine 2. Filter device 3. Fifth control valve

[0018] 4. Second power element 5. Fourth control valve 6. First control valve

[0019] 7. Sixth control valve 8. Polishing liquid storage device 9. Third control valve

[0020] 10. First power element 11. Second control valve 12. Conversion device

[0021] 13. Discharge channel DETAILED DESCRIPTION

[0022] The utility model is further described below in conjunction with the accompanying drawings and specific embodiments.

[0023] Figure 1 A structural schematic diagram of an embodiment of the utility model is shown. This embodiment relates to an automatic switching liquid supply system for a polishing machine, which is used for conveying polishing liquid during the polishing process of the polishing machine. It has at least two liquid supply branches. When any liquid supply branch fails, it can automatically switch to another liquid supply branch for polishing liquid supply, so that the failed liquid supply branch can be independently repaired, and the polishing liquid can be circulated through a circulation branch connected to the liquid supply branch after the repair, without affecting the normal production of the machine, thereby improving work efficiency.

[0024] An automatic switching liquid supply system for a polishing machine, such as Figure 1 As shown, it includes a first liquid supply branch and a second liquid supply branch, both ends of which are respectively connected and communicated with the polishing machine 1 and the polishing liquid storage device 8. The first liquid supply branch and the second liquid supply branch can selectively transport the polishing liquid in the polishing liquid storage device 8 to the polishing machine 1. The polishing liquid storage device 8 stores polishing liquid. Under the action of the first liquid supply branch or the second liquid supply branch, the polishing liquid in the polishing liquid storage device 8 can enter the polishing machine 1, and the polishing liquid is continuously supplied to the polishing machine 1 during the operation of the polishing machine 1; the first liquid supply branch and the second liquid supply branch are set, so that when one of the liquid supply branches (such as the first liquid supply branch) fails during the operation of the polishing machine 1, the other liquid supply branch (such as the second liquid supply branch) can immediately supply the polishing liquid, so as to realize the switching use of the liquid supply branches, so that the polishing machine 1 can repair the corresponding faulty liquid supply branch without stopping the machine, which does not affect the normal production of the polishing machine 1 and improves the working efficiency of the polishing machine 1;

[0025] The first liquid supply branch is connected to a first circulation branch, and the first circulation branch is connected to the polishing liquid storage device 8, so that the polishing liquid in the first liquid supply branch is internally circulated and enters the polishing liquid storage device 8 again. The setting of the first circulation branch can realize the internal circulation of the polishing liquid after the first liquid supply branch is repaired, maintain the uniformity of the polishing liquid, and realize the independent supply and internal circulation of the polishing liquid during the operation of the polishing machine 1;

[0026] The second liquid supply branch is connected to the second circulation branch, and the second circulation branch is connected to the polishing liquid storage device 8, so that the polishing liquid in the second liquid supply branch is internally circulated and enters the polishing liquid storage device 8 again. The setting of the second circulation branch can realize the internal circulation of the polishing liquid after the second liquid supply branch is repaired, maintain the uniformity of the polishing liquid, and realize the independent supply and internal circulation of the polishing liquid during the operation of the polishing machine 1.

[0027] Here, the internal circulation refers to that the polishing liquid in the polishing liquid storage device 8 re-enters the polishing liquid storage device 8 through part of the liquid supply branch and the corresponding circulation branch to maintain the uniformity of the polishing liquid in the polishing liquid storage device 8.

[0028] Specifically, the above-mentioned first liquid supply branch includes a first control valve 6, a first power member 10 and a second control valve 11 which are arranged in sequence along the direction of polishing liquid delivery. The first control valve 6 controls whether the pipeline between the first power member 10 and the polishing liquid storage device 8 is connected, and the second control valve 11 controls whether the pipeline between the first power member 10 and the polishing machine 1 is connected. The input end of the first power member 10 is connected to the polishing liquid storage device 8 by a pipeline, and the output end of the first power member 10 is connected to the polishing machine 1 by a pipeline. The first control valve 6 is installed on the pipeline between the input end of the first power member 10 and the polishing liquid storage device 8 to control the opening and closing of the pipeline. The second control valve 11 is installed on the pipeline between the output end of the first power member 10 and the polishing machine 1 to control the opening and closing of the pipeline. The setting of the first power member 10 provides power for the flow of polishing liquid, so that the polishing liquid in the polishing liquid storage device 8 flows along the pipeline and enters the polishing machine 1, thereby realizing the supply of polishing liquid to the polishing machine.

[0029] In some feasible embodiments, the above-mentioned first control valve 6 is a valve, preferably a manual valve, the above-mentioned second control valve 11 is a valve, preferably a pneumatic valve, the pneumatic valve is connected to a solenoid valve, and the action of the pneumatic valve is controlled by the solenoid valve, and the above-mentioned first power component 10 is a pump, preferably a liquid supply pump.

[0030] The first circulation branch includes a third control valve 9, which is disposed between the output end of the first power member 10 and the polishing liquid storage device 8, so that the polishing liquid output from the first power member 10 can enter the polishing liquid storage device 8 to achieve internal circulation of the polishing liquid. The output end of the first power member 10 is connected to the polishing liquid storage device 8 through a pipeline, and the third control valve 9 is disposed on the pipeline. At the same time, the end of the pipeline away from the connection with the polishing liquid storage device 8 is disposed between the first power member 10 and the second control valve 11, and the pipeline is connected and communicated with the pipeline between the first power member 10 and the second control valve 11 through a tee, so as to divert the flow of the polishing liquid.

[0031] In some feasible embodiments, the third control valve 9 is a valve, preferably a manual valve, which is kept in a normally open state.

[0032] The above-mentioned second liquid supply branch includes a fourth control valve 5, a second power member 4 and a fifth control valve 3 which are arranged in sequence along the direction of polishing liquid delivery. The fourth control valve 5 controls whether the pipeline between the second power member 4 and the polishing liquid storage device 8 is connected. The fifth control valve 3 controls whether the pipeline between the second power member 4 and the polishing machine 1 is connected. The input end of the second power member 4 is connected to the polishing liquid storage device 8 by a pipeline, and the output end of the second power member 4 is connected to the polishing machine 1 by a pipeline. The fourth control valve 5 is installed on the pipeline between the second power member 4 and the polishing liquid storage device 8 to control the opening and closing of the pipeline. The fifth control valve 3 is installed on the pipeline between the second power member 4 and the polishing machine 1 to control the opening and closing of the pipeline. The setting of the second power member 4 provides power for the flow of polishing liquid, so that the polishing liquid in the polishing liquid storage device 8 flows along the pipeline and enters the polishing machine 1, thereby realizing the supply of polishing liquid to the polishing machine 1.

[0033] In some feasible embodiments, the fourth control valve 5 is a valve, preferably a manual valve, the fifth control valve 3 is a valve, preferably a pneumatic valve, the pneumatic valve is connected to a solenoid valve, and the action of the pneumatic valve is controlled by the solenoid valve, and the second power component 4 is a pump, preferably a circulating pump.

[0034] The second circulation branch includes the sixth control valve 7, which is arranged between the output end of the second power member 4 and the polishing liquid storage device 8, so that the polishing liquid output from the second power member 4 can enter the polishing liquid storage device. The output end of the second power member 4 is connected to the polishing liquid storage device 8 through a pipeline, and the sixth control valve 7 is arranged on the pipeline. At the same time, the end of the pipeline away from the connection with the polishing liquid storage device 8 is arranged between the second power member 4 and the fifth control valve 3. The pipeline is connected and communicated with the pipeline between the second power member 4 and the fifth control valve 3 through a three-way, so as to divert the flow of the polishing liquid.

[0035] In some feasible embodiments, the third control valve 9 is a valve, preferably a manual valve, which is kept in a normally open state.

[0036] The first liquid supply branch and the second liquid supply branch are selectively operated, and the corresponding second circulation branch or first circulation branch is selected according to whether the first liquid supply branch or the second liquid supply branch is in operation, so that the polishing machine 1 can both supply liquid and perform internal circulation during operation. For example, if the first liquid supply branch is supplying liquid, the second circulation branch performs internal circulation of the polishing liquid; if the second liquid supply branch is supplying liquid, the first circulation branch performs internal circulation of the polishing liquid.

[0037] Further optimization scheme, the automatic switching liquid supply system for the polishing machine also includes a filter device 2, the output end of the first liquid supply branch and the output end of the second liquid supply branch are respectively connected to the input end of the filter device 2, the output end of the filter device 2 is connected to the polishing machine 1, and the polishing liquid entering the polishing machine 1 is filtered. The filter device 2 is provided with a filter element to filter impurities in the polishing liquid to maintain the cleanliness of the polishing liquid entering the polishing machine 1. The output end of the first liquid supply branch and the output end of the second liquid supply branch are connected and communicated with the filter device 2 through a tee to realize the circulation of the polishing liquid.

[0038] A further optimization scheme is that the automatic switching liquid supply system for the polishing machine also includes a discharge branch, which includes a connected conversion device 12 and a discharge channel 13. The conversion device 12 is respectively connected to the polishing machine 1 and the polishing liquid storage device 8. The polishing liquid output from the polishing machine 1 can be selectively entered into the polishing liquid storage device 8 or discharged from the discharge channel 13 under the action of the conversion device 12. The conversion device 12 is respectively connected and communicated with the polishing machine 1 and the polishing liquid storage device 8 through pipelines to realize the circulation of the polishing liquid. The setting of the conversion device 12 reverses the flow direction of the polishing liquid flowing out of the polishing machine 1, so that the polishing liquid can selectively enter the polishing liquid storage device 8 or be directly discharged.

[0039] In some feasible embodiments, the above-mentioned conversion device 12 is preferably a reversing valve.

[0040] The above-mentioned first power member 10, second power member 4, second control valve 11, fifth control valve 3 and conversion device 12 are respectively connected to the control device of the polishing machine 1. The control device controls the first power member 10, second power member 4, second control valve 11, fifth control valve 3 and conversion device 12 to operate according to the alarm signal, switches the first liquid supply branch and the second liquid supply branch, and controls the first liquid supply branch or the second liquid supply branch to supply liquid to the polishing machine 1.

[0041] The control device is preset with an edited program, and outputs a control signal according to the received alarm signal to control the action of the corresponding components. The control device can be a PLC or a CPU, which can be selected according to actual needs.

[0042] When the polishing machine uses an automatic switching liquid supply system, when the first liquid supply branch supplies liquid to the polishing machine 1, the first control valve 6 and the second control valve 11 are opened, the first power member 10 is actuated, and the polishing liquid in the polishing liquid storage device 8 flows along the pipeline, enters the first power member 10 through the first control valve 6, and flows out from the first power member 10, flows along the pipeline, enters the filter device 2 through the second control valve 11, and enters the polishing machine 1 after being filtered by the filter device 2;

[0043] When the first power member 10 is worn out, the polishing machine 1 sends out a low flow alarm signal, and the control device of the polishing machine 1 controls the second control valve 11 to close, and controls the first power member 10 to stop working, and the first liquid supply branch stops supplying liquid, and at the same time controls the fifth control valve 3 to open, and controls the second power member 4 to operate, and the second liquid supply branch supplies liquid to the polishing machine 1, so as to realize the switching of the two liquid supply branches;

[0044] The first control valve 6 is closed to isolate the first power component 10 so as to perform maintenance on the first power component 10;

[0045] After the first power member 10 is repaired, the first control valve 6 is closed, and the first power member 10 is activated (controlled by the control device of the polishing machine 1 or manually opened). At this time, the first power member 10 pumps the polishing liquid in the polishing liquid storage device 8 out and transports it to the polishing liquid storage device 8 through the third control valve 9 to perform internal circulation of the polishing liquid to maintain the uniformity of the polishing liquid;

[0046] During this process, the second liquid supply branch supplies polishing liquid to the polishing machine 1, and the first power member 10 operates to perform internal circulation of the polishing liquid;

[0047] When the second power member 4 is worn out, the polishing machine 1 sends out a low flow alarm signal, and the control device of the polishing machine 1 controls the fifth control valve 3 to close, and controls the second power member 4 to stop working, and controls the second control valve 11 to open, and controls the first power member 10 to operate, and the first liquid supply branch supplies polishing liquid to the polishing machine 1, realizing the switching of liquid supply between the two liquid supply branches;

[0048] Close the fourth control valve 5 to isolate the second power component 4 so as to perform maintenance on the second power component 4;

[0049] After the second power member 4 is repaired, the fourth control valve 5 is opened, and the second power member 4 is in motion (controlled by the control device of the polishing machine 1 or opened manually). At this time, the second power member 4 pumps out the polishing liquid in the polishing liquid storage device 8 and transports it to the polishing liquid storage device 8 through the sixth control valve 7 to perform internal circulation of the polishing liquid to maintain the uniformity of the polishing liquid.

[0050] During this process, the first liquid supply branch supplies polishing liquid to the polishing machine 1, and the second power member 4 operates to perform internal circulation of the polishing liquid;

[0051] When the first power member 10 fails, the above steps are repeated to achieve that during the operation of the polishing machine 1 , the first liquid supply branch and the second liquid supply branch switch to supply liquid to the polishing machine 1 .

[0052] A liquid supply method for an automatic switching liquid supply system for a polishing machine, such as Figure 1 As shown, when any liquid supply branch supplies liquid to the polishing machine 1, if the polishing machine 1 sends a signal of low polishing liquid flow, the liquid supply branch is closed and repaired, and another liquid supply branch is opened. For example, initially, the first liquid supply branch supplies polishing liquid to the polishing machine 1. When the first liquid supply branch fails, the first liquid supply branch is closed, and the second liquid supply branch is opened, and the second liquid supply branch supplies liquid to the polishing machine 1; wherein, when the liquid supply branch is closed, the control valve at the output end of the power part of the liquid supply branch is closed, and the control valve at the input end of the power part of the liquid supply branch is closed, and the liquid supply branch is repaired;

[0053] After the inspection is completed, the circulation branch connected to the liquid supply branch is activated to circulate the polishing liquid internally, wherein the control valve at the input end of the power part of the liquid supply branch is opened to circulate the polishing liquid internally;

[0054] When polishing machine 1 sends out a low polishing liquid flow signal again, the current liquid supply branch is closed and repaired, and another liquid supply branch is opened to supply liquid to polishing machine 1. The above steps are repeated, and the polishing liquid is circulated internally after the repair to realize the switching of the liquid supply branch.

[0055] The following is an explanation with a specific embodiment: when the polishing machine 1 is polishing the product, initially, the first liquid supply branch supplies liquid to the polishing machine 1, the first control valve 6 and the second control valve 11 are opened, the third control valve 9 is closed, the first power member 10 is actuated, and the polishing liquid in the polishing liquid storage device 8 flows along the pipeline, enters the first power member 10 through the first control valve 6, and flows out from the first power member 10, flows along the pipeline, enters the filter device 2 through the second control valve 11, and enters the polishing machine 1 after being filtered by the filter device 2; the fifth control valve 3 is closed, the second power member 4 is actuated, and the polishing liquid in the polishing liquid storage device 8 enters the polishing liquid storage device 8 again through the fourth control valve 5, the second power member 4 and the sixth control valve 7, and the polishing liquid is internally circulated;

[0056] When the first power member 10 is worn out, the polishing machine 1 sends out a low flow alarm signal, and the control device of the polishing machine 1 controls the second control valve 11 to close, and controls the first power member 10 to stop working, and controls the fifth control valve 3 to open, and controls the second power member 4 to operate, close the sixth control valve 7, so that the second liquid supply branch supplies liquid to the polishing machine 1, and realizes the switching of the two liquid supply branches;

[0057] The first control valve 6 is closed to isolate the first power component 10 so as to perform maintenance on the first power component 10;

[0058] After the first power member 10 is repaired, the first control valve 6 and the third control valve 9 are opened, and the first power member 10 is in motion (controlled by the control device of the polishing machine 1 or opened manually). At this time, the first power member 10 pumps out the polishing liquid in the polishing liquid storage device 8 and transports it to the polishing liquid storage device 8 through the third control valve 9, so as to perform internal circulation of the polishing liquid and maintain the uniformity of the polishing liquid.

[0059] During this process, the second liquid supply branch supplies polishing liquid to the polishing machine 1, and the first power member 10 operates to perform internal circulation of the polishing liquid;

[0060] When the second power member 4 is worn out, the polishing machine 1 sends out a low flow alarm signal, and the control device of the polishing machine 1 controls the fifth control valve 3 to close, and controls the second power member 4 to stop working, and controls the second control valve 11 to open, and controls the first power member 10 to act, so that the first liquid supply branch is closed to supply the polishing machine 1 with polishing liquid, and the liquid supply between the two liquid supply branches is switched;

[0061] Close the fourth control valve 5 to isolate the second power component 4 so as to perform maintenance on the second power component 4;

[0062] After the second power member 4 is repaired, the fourth control valve 5 is opened, and the second power member 4 is in motion (controlled by the control device of the polishing machine 1 or opened manually). At this time, the second power member 4 pumps out the polishing liquid in the polishing liquid storage device 8 and transports it to the polishing liquid storage device 8 through the sixth control valve 7 to perform internal circulation of the polishing liquid to maintain the uniformity of the polishing liquid.

[0063] When the first power member 10 is worn out, the above steps are repeated to switch the two liquid supply branches to supply liquid.

[0064] Due to the adoption of the above technical scheme, the automatic switching liquid supply system for the polishing machine has a first liquid supply branch and a second liquid supply branch. During the operation of the polishing machine, when one of the two liquid supply branches fails, the other liquid supply branch supplies liquid to the polishing machine without the participation of personnel, and the liquid supply branches are automatically switched, so that the faulty liquid supply branch can be repaired without stopping the machine, which does not affect the normal production of the polishing machine, improves the working efficiency of the polishing machine, reduces the processing cost, and avoids waste of working hours; each liquid supply branch has a pump (power part), and the output end of each pump (power part) is provided with a pneumatic valve, and each liquid supply branch is connected to a circulation branch, so that each pump (power part) can perform independent liquid supply and internal circulation functions. At the same time, the input end of each pump (power part) is provided with a valve, so that each pump (power part) can be individually isolated for maintenance during the processing of the polishing machine, so that maintenance can be carried out without stopping the machine, and the normal operation of the polishing machine is not affected. The degree of automation is high and the product quality is guaranteed.

[0065] The above is a detailed description of the embodiments of the utility model, but the contents are only preferred embodiments of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of application of the utility model should still fall within the scope of the patent coverage of the utility model.

Claims

1. An automatic switching liquid supply system for a polishing machine, characterized in that: It includes a first liquid supply branch and a second liquid supply branch, both ends of which are respectively connected to the polishing machine and the polishing liquid storage device and are in communication, and the first liquid supply branch and the second liquid supply branch can selectively switch the liquid supply; the first liquid supply branch is connected to a first circulation branch, and the first circulation branch is connected to the polishing liquid storage device so that the polishing liquid in the first liquid supply branch circulates internally and enters the polishing liquid storage device; the second liquid supply branch is connected to a second circulation branch, and the second circulation branch is connected to the polishing liquid storage device so that the polishing liquid in the second liquid supply branch circulates internally and enters the polishing liquid storage device.

2. The automatic switching liquid supply system for a polishing machine according to claim 1, characterized in that: The first liquid supply branch includes a first control valve, a first power member and a second control valve which are arranged in sequence along the direction of polishing liquid delivery. The first control valve controls whether the pipeline between the first power member and the polishing liquid storage device is connected, and the second control valve controls whether the pipeline between the first power member and the polishing machine is connected.

3. The automatic switching liquid supply system for a polishing machine according to claim 2, characterized in that: The first circulation branch includes a third control valve, which is arranged between the output end of the first power member and the polishing liquid storage device, so that the polishing liquid output from the first power member can enter the polishing liquid storage device.

4. The automatic switching liquid supply system for a polishing machine according to any one of claims 1 to 3, characterized in that: The second liquid supply branch includes a fourth control valve, a second power member and a fifth control valve which are arranged in sequence along the direction of polishing liquid delivery. The fourth control valve controls whether the pipeline between the second power member and the polishing liquid storage device is connected, and the fifth control valve controls whether the pipeline between the second power member and the polishing machine is connected.

5. The automatic switching liquid supply system for a polishing machine according to claim 4, characterized in that: The first circulation branch includes a sixth control valve, which is arranged between the output end of the second power member and the polishing liquid storage device, so that the polishing liquid output from the second power member can enter the polishing liquid storage device.

6. The automatic switching liquid supply system for a polishing machine according to any one of claims 1 to 3 and 5, characterized in that: It also includes a filtering device, wherein the output end of the first liquid supply branch and the output end of the second liquid supply branch are respectively connected to the input end of the filtering device, and the output end of the filtering device is connected to the polishing machine to filter the polishing liquid entering the polishing machine.

7. The automatic switching liquid supply system for a polishing machine according to claim 6, characterized in that: It also includes a discharge branch, which includes a connected conversion device and a discharge channel. The conversion device is respectively connected to the polishing machine and the polishing liquid storage device. The polishing liquid output from the polishing machine can selectively enter the polishing liquid storage device or be discharged from the discharge channel under the action of the conversion device.

8. The automatic switching liquid supply system for a polishing machine according to claim 3, characterized in that: The first control valve and the third control valve are both manual valves, the second control valve is a pneumatic valve, and the first power component is a liquid supply pump.

9. The automatic switching liquid supply system for a polishing machine according to claim 5, characterized in that: The fourth control valve and the sixth control valve are both manual valves, the fifth control valve is a pneumatic valve, and the second power component is a circulation pump.

Images